JP2003015112A - Liquid crystal display device and manufacturing method and manufacturing device therefor - Google Patents

Liquid crystal display device and manufacturing method and manufacturing device therefor

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Publication number
JP2003015112A
JP2003015112A JP2001197743A JP2001197743A JP2003015112A JP 2003015112 A JP2003015112 A JP 2003015112A JP 2001197743 A JP2001197743 A JP 2001197743A JP 2001197743 A JP2001197743 A JP 2001197743A JP 2003015112 A JP2003015112 A JP 2003015112A
Authority
JP
Japan
Prior art keywords
liquid crystal
substrate
crystal display
rubbing
alignment film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001197743A
Other languages
Japanese (ja)
Inventor
Takashi Inoue
Yasuo Koike
隆史 井上
保夫 小池
Original Assignee
Hitachi Ltd
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, 株式会社日立製作所 filed Critical Hitachi Ltd
Priority to JP2001197743A priority Critical patent/JP2003015112A/en
Publication of JP2003015112A publication Critical patent/JP2003015112A/en
Pending legal-status Critical Current

Links

Abstract

(57) [Problem] To provide a liquid crystal display element or the like to which foreign matter generated by abrasion of a rubbing cloth or an alignment film is less likely to adhere. The substrate has at least one of a liquid crystal display element substrate (11) and a color filter substrate (12) on which an alignment film (11a) for aligning liquid crystal in one direction is formed. 12b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display element substrate and a color filter substrate constituting a liquid crystal display element, particularly to a substrate relating to a rubbing process, a manufacturing method and a manufacturing apparatus.

[0002]

2. Description of the Related Art Liquid crystal display devices are widely used as display screens for portable personal computers, mobile phones and the like, and in recent years, image quality such as high definition, high contrast ratio and high viewing angle has been demanded. In particular, thin film transistors (T
A liquid crystal display element (TFT-LCD) using an FT) type active matrix has performance comparable to that of a conventional cathode ray tube in terms of image quality. In addition, liquid crystal display elements are superior to cathode ray tubes in terms of power consumption and space saving,
It is said that in the future, a monitor for a personal computer, which has been using a cathode ray tube, will be completely replaced with a liquid crystal display element.

First, transmission type amorphous silicon (a-S)
Taking the conventional manufacturing method of i) type color TFT-LCD as an example,
A method of manufacturing the liquid crystal display element will be briefly described. TF
The T-LCD manufacturing process includes a TFT process for forming a thin film transistor and metal wiring on a glass substrate, a color filter process for forming a color filter on a glass substrate, and a liquid crystal sandwiched between these two substrates facing each other. L
It consists of a CD process.

In the TFT process, a series of processes such as film formation, resist coating, exposure / development, etching, resist stripping, and cleaning are repeated several times for the gate wiring, interlayer insulating film, a-Si, pixel electrode, protective film, and the like. Be done. This makes T
The FT substrate is completed and sent to the LCD process.

In the color filter process, after forming a black matrix, film formation, resist coating, exposure / development,
A series of etching, resist stripping, and cleaning processes are repeated for the three colors of red, green, and blue. After patterning the three colors of red, green, and blue, an overcoat layer is further formed thereon in order to impart flatness to the surface. Finally, a transparent electrode film is formed and sent to the LCD process.

The TFT substrate and the color filter substrate formed as described above are sent to the LCD process and their surfaces are cleaned.

In the LCD process, as shown in FIG. 2, pre-printing cleaning S21, alignment film printing S22, alignment film baking S23,
Rubbing S24, post-rubbing cleaning S25, sealant application S26, superposition of the TFT substrate and the color filter substrate S27, liquid crystal injection S28, liquid crystal encapsulation S29, and lighting inspection S30 follow. The TFT-LCD panel that has undergone the lighting inspection is sent to a step of mounting a driving integrated circuit or the like.

Rubbing process S2 of the LCD process
In 4, the electrode substrate or the color filter substrate of the liquid crystal display element on which the alignment film is formed is subjected to a treatment of rubbing the alignment film in one direction with a cloth or the like in order to align the liquid crystals in one direction.

FIG. 2 shows a transmission type a-Si type TF.
The LCD process of T-LCD is drawn in mind,
The same applies to other transmissive liquid crystal display elements, reflective liquid crystal display elements, projection type liquid crystal display elements, and the like.

The rubbing process causes the liquid crystal to be aligned in the rubbing direction. Therefore, the display characteristics and display quality of the liquid crystal display device largely depend on the rubbing process. A roller wound with a cloth such as nylon, rayon or cotton is used for the rubbing treatment. When rubbing the alignment film, the alignment film may be partially worn or the rubbing cloth fibers may be partially cut or worn due to mechanical friction between the alignment film and the rubbing cloth.

As a result, wear pieces and cut pieces (foreign matter) adhere to the rubbed substrate surface. A post-rubbing cleaning step is performed to remove the foreign matter to deal with the foreign matter adhesion problem, but this is not always sufficient. This is because there is a problem such as reattachment of foreign matter through the cleaning process after rubbing. Such a problem is caused by the above-mentioned transmissive a-Si type TFT-L.
The same applies to other transmissive liquid crystal display elements, reflective liquid crystal display elements, projection liquid crystal display elements, etc., as well as CDs.

[0012]

As described above, when rubbing the alignment film, foreign matter is generated due to the abrasion of the rubbing cloth and the alignment film, and the wear pieces and cut pieces (foreign matter) adhere to the rubbed substrate surface. To do. In order to remove the foreign matter, a cleaning step is performed after rubbing to deal with the foreign matter adhesion problem, but the sufficient effect is not always obtained.

For example, when the cleaning process is performed in the post-rubbing cleaning step, the foreign matter adhered to the outside of the display area surface of the liquid crystal display element moves into the display area surface and adheres to the alignment film surface again (reattachment and transfer of the foreign matter). ) Is a problem. When foreign matter adheres to the alignment film surface that has been subjected to the alignment treatment and the foreign matter covers the alignment film surface, the effect of the alignment treatment does not extend to the entire liquid crystal layer of the panel. During the lighting inspection, a partial orientation disorder is observed. That is, the uniformity within the screen of the liquid crystal display device is impaired. Therefore, by omitting the post-rubbing cleaning step, it is possible to prevent the foreign matter that has flowed in the post-rubbing cleaning step from reattaching.

However, when the cleaning process after rubbing is omitted, foreign matter adhered during rubbing remains on the alignment film surface in the display area of the liquid crystal display element, deterioration of display characteristics due to ionic contamination, and seal application in the seal agent application step. It is known that problems such as defects will occur. To avoid these numerous problems, a post-rubbing cleaning step is essential.

Further, the fact that the rubbing cloth is worn or cut means that the rubbing cloth is poor in durability in mass production of liquid crystal display elements, and as a result, the rubbing cloth is a new one during production. Frequent replacement.

An object of the present invention is to provide a liquid crystal display element to which foreign matter generated by abrasion of a rubbing cloth or an alignment film is hard to adhere, a method of manufacturing the same, and a manufacturing apparatus thereof.

[0017]

The present invention is directed to at least one of a liquid crystal display element substrate and a color filter substrate, in which an edge of a surface on which an alignment film for aligning liquid crystal in one direction is formed is tapered. Is a liquid crystal display element.

In the present invention, the taper shape is characterized in that an angle from a surface on which an alignment film for arranging liquid crystals in one direction is formed to a side surface is more than 0 degree and less than 65 degrees. Is.

According to the present invention, in the rubbing step of the liquid crystal display element manufacturing process, the surface of at least one of the liquid crystal display element substrate and the color filter substrate on which an alignment film for aligning liquid crystals in one direction is formed is described. A method of manufacturing a liquid crystal display device, characterized in that an edge of a substrate is protected in advance.

In the present invention, the protection is characterized in that the edge of the substrate on the surface on which the alignment film for aligning the liquid crystal in one direction is formed is tapered. Is the way.

In the present invention, the taper shape is such that an angle from a surface having an alignment film for orienting liquid crystal in one direction to a side surface is more than 0 degree and not more than 65 degrees. It is a manufacturing method.

In the present invention, the protection is to cover the edge of the substrate on the surface on which the alignment film for aligning the liquid crystal in one direction is covered with a film. Is.

According to the present invention, in the rubbing step of the liquid crystal display element manufacturing process, the surface of at least one of the liquid crystal display element substrate and the color filter substrate on which the alignment film for aligning the liquid crystal in one direction is formed. An apparatus for manufacturing a liquid crystal display device, comprising a mechanism for covering an edge of a substrate with a film.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an embodiment of a liquid crystal display element of the present invention. That is, FIG.
The liquid crystal display device manufactured by the LCD process of FIG. In FIG. 1, an alignment film 11a that orients the liquid crystal of the liquid crystal display element substrate 11 in one direction and an alignment film 12a that orients the liquid crystal of the color filter substrate 12 in one direction face each other via a spacer 15, and a sealing material is used. Bonded at 13. Liquid crystal 14 is injected into the space. Although not shown, by disposing a backlight on the surface of the liquid crystal display element substrate 11 opposite to the alignment film 11a, the display screen can be seen from the surface of the color filter substrate 12 opposite to the alignment film 12a.

The feature of this embodiment is that the end of the surface of the liquid crystal display element substrate 11 on which the alignment film 11a is present is tapered 1.
1b, and the alignment film 1 of the color filter substrate 12
The end of the surface with 2a is a taper 12b. In addition, 11c is a drive electrode.

The liquid crystal display device has two substrates, the liquid crystal display device substrate 11 and the color filter substrate 12, both of which are substrates, and the end of the surface having the alignment film is tapered in both substrates. Since it is common in that
In the following description, the substrate is simply referred to, the reference numeral is 10, the alignment film is 10a, and the taper is 10b.

3A and 3B are views showing a state of rubbing the alignment film 10a of the substrate 10, where FIG. 3A is a front view and FIG.
Is a plan view. The substrate 10 is fixed to a stage (not shown) by a method such as vacuum adsorption, with the surface having the taper 10b at the end of the surface having the alignment film 10a facing upward, and then the stage is moved to move the substrate. 10
Is a rubbing roller 20 to which a rubbing cloth 20a is attached.
And the alignment film 10a is rubbed (rubbed) with the rubbing cloth 20a.

In this embodiment, the edge of the substrate is tapered by single-wafer wet polishing using a cup-type diamond wheel. Cup type diamond wheel is a # 50 made by Osaka Diamond Industry Co., Ltd.
0, diameter φ150mm, rotation speed 3600r
Processing was performed under the conditions of pm and a substrate transport speed of 33.3 mm / s. The substrate 10 used this time has a thickness of 0.7 mm, and when the taper 10b is applied, a = 0.3 m in FIG.
m. In order to overview the relationship between the angle θ of the taper 10b and the amount of foreign matter attached on the substrate 10, substrates with θ = 25 degrees, 45 degrees, and 65 degrees were manufactured. Therefore, in FIG. 3, b = 0.86 mm, 0.40 mm and 0.19 m, respectively.
m. The rubbing condition is that the rubbing cloth 20a is attached to the stainless roller 20 having a diameter of 50 mm with a double-sided tape, the roller rotation speed is 1500 rpm, and the cutting depth is 0.
The stage moving speed was 4 mm and the stage moving speed was 30 mm / s. The rubbing cloth 20a is usually a cloth in which fibers such as nylon, cotton, rayon and polyester are napped, but this time, it is made by Yohara Textile Co., Ltd.
A-19-R rayon cloth was used.

FIG. 4 shows the result of measuring the adhered foreign matter on the SiN substrate which is thus rubbed with the taper 10b provided at the end of the substrate 10. In FIG. 4, measurement was performed at 9 points along an imaginary line parallel to the upper end of the taper 10b of the substrate 10 shown in FIG. As is clear from FIG. 4, an increasing tendency of the amount of foreign matter adhering to the substrate 10 was recognized as the taper angle θ increased.

According to this result, it is desirable to reduce the taper angle θ in order to reduce the amount of foreign matter attached on the substrate 10 which is the object of the present invention. Now, when a in FIG. 3 is kept constant, as the taper angle θ decreases, b in FIG. 3, that is, the region polished to give the taper 10b increases.

However, since the region polished to provide the taper 10b is an unnecessary part in the liquid crystal display device product itself, it is desirable that b in FIG. 3 is narrow, and preferably 3 mm or less. Also, FIG.
When the value of a is reduced, the mechanical strength of the substrate at the edge of the substrate 10 is reduced and the probability of chipping is increased. Therefore, it is desirable that a in FIG.

On the other hand, the cut amount of the rubbing roller 20 at the time of rubbing is set so as to cancel out the variation in the height of the fibers of the napped cloth in order to make the effect of the rubbing within the surface of the substrate 10 uniform. There must be. Since the height variation of the napped fibers is about ± 0.1 mm, the cut amount of the rubbing roller 20 must be 0.2 mm or more.

In order for the taper 10b to be effective, it is desirable that the thickness to be polished (ta) at the edge of the substrate in FIG. 3 be equal to or larger than the cut amount of the rubbing roller 20. For example, as in this embodiment, the substrate 10 having a plate thickness t = 0.7 mm
When a is used, a = 0.35 mm or more is desirable, but a = 0.3 mm is selected with priority given to making the rubbing effect uniform in the surface of the substrate 10 rather than avoiding chipping of the substrate 10 at the edge of the substrate 10. did. In this case, θ is preferably 7 degrees or more so that b in FIG. 4 becomes 3 mm or less. It is possible to determine the lower limit of θ by performing similar calculation for other plate thicknesses such as plate thickness t = 0.5 mm.

Next, using the substrate processed simultaneously with FIG.
An experiment was performed when the material of the rubbing cloth was changed. This time at Myonaka Pile Weaving Co., Ltd. Hiroki Co., Ltd. Product number: HC-
25 cotton cloths were used. FIG. 5 shows the result of measuring the adhered foreign matter on the SiN substrate which was rubbed and provided with the taper 10b at the end of the substrate 10. Measurement conditions are shown in Figure 4.
It is similar to the case of. According to FIG. 5, unlike the case of the rayon cloth in the case of the cotton cloth, a simple increasing tendency of the amount of foreign matter adhering to the substrate with the increase of the taper angle θ was not recognized. It can be seen that the amount of adhered foreign matter has a substantially constant value when the taper angle is 25 ° <θ <45 °, and tends to increase when 45 ° <θ. According to these results, the taper angle θ is set to be more than 0 degree and not more than 65 degrees, more preferably more than 0 degree and not more than 45 degrees in order to reduce the amount of foreign matter attached on the substrate, which is the object of the present invention. You can see that it is good to set.

FIG. 6 is a diagram of another embodiment showing how the alignment film 10a of the substrate 10 is rubbed.
After the substrate 10 is fixed to the stage 30 by a method such as vacuum suction, the end of the substrate 10 is covered with the film 40, and the stage 30 is moved so that the substrate 10 is oriented in the direction of the rubbing roller 20 to which the rubbing cloth 20a is attached. Then, the alignment film 10a is rubbed (rubbed) with the rubbing cloth 20a.

As the film 40, a polyimide film (Upilex-S manufactured by Ube Industries, Ltd., thickness 50 μm) was used. This was cut into strips, and as shown in FIG. 6, a film 40 was covered from the edge of the substrate 10 up to about 3 mm. The film used this time was made of polyimide, but a film made of another material may be used, and an organic material film is preferable.

The rubbing condition of this time is a diameter of 50 m.
The rubbing cloth 20a is attached to the stainless steel roller 20 of m with double-sided tape, and the roller rotation speed is 1500 rpm,
The cutting depth was 0.4 mm and the stage moving speed was 30 mm / s. Nylon, cotton, rayon, polyester, etc. are usually used as the rubbing cloth, but this time, it is made by Yohara Textile Co., Ltd. and is manufactured by Yoshikawa Kako Co., Ltd. Product No .: YA-19-R
Of rayon cloth was used.

FIG. 6 is a diagram in which only the edge of the substrate parallel to the rotation axis of the rubbing roller 20 is covered with a film, but the rubbing direction, that is, the angle formed by the axis of the rubbing roller and the edge of the substrate is 0 degree or 90 degrees. Not just degrees, but for example 45
There can be degrees. In this case, the film is cut into a "square" shape or the like so that at least the display area of the liquid crystal display element is exposed, and then the film is placed on the substrate 10 to cover the four edges of the substrate 10 with the film. The substrate 10 used this time was a glass substrate having a SiN film formed by plasma CVD on its surface.

FIG. 7 shows the result of measuring the foreign matter adhering to the SiN substrate rubbed with the film 40 covering the edge of the substrate 10 in this way. For comparison, FIG. 7 shows the Si rubbed without covering the edge of the substrate with a film.
The measurement results of the adhered foreign matter on the N substrate are also shown. It can be seen from FIG. 7 that the amount of foreign matter adhered onto the substrate 10 is obviously smaller when the edge of the substrate 10 is covered with the film 40 and subjected to the rubbing treatment. Therefore, by covering the edge of the substrate with a film and subjecting it to a rubbing treatment, foreign substances originating from the rubbing cloth are significantly reduced. This means that the damage at the edge of the substrate of the rubbing cloth was alleviated, and at the same time, the durability of the rubbing cloth in manufacturing the liquid crystal display element was reinforced.

As described above, according to the embodiment of the present invention, the amount of foreign matter generated from the rubbing cloth at the time of rubbing can be greatly reduced as compared with the conventional manufacturing method.
Inevitably, the amount of foreign matter adhered to the substrate during rubbing is significantly reduced as compared with the conventional method. As a result, the incidence of defects due to foreign matter is significantly reduced. Therefore, it is possible to reduce the factors of occurrence of defects in the manufacturing process of a liquid crystal display element, and to provide a method of manufacturing a liquid crystal display element having a high manufacturing yield. At the same time, since the amount of abrasion of the rubbing cloth is greatly reduced, the durability of the rubbing cloth in mass production of liquid crystal display devices is improved.

[0041]

According to the present invention, it is possible to obtain a liquid crystal display element to which foreign matter generated by abrasion of a rubbing cloth or an alignment film does not easily adhere, and a method and apparatus for manufacturing the same.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of a liquid crystal display element of the present invention.

FIG. 2 is a diagram showing an LCD process of a transmissive a-Si TFT-LCD.

FIG. 3 is a diagram showing how a rubbing process is performed.

FIG. 4 is a diagram showing a result of measurement of foreign matter adhering to a substrate when rubbing with a rayon cloth according to the present embodiment.

FIG. 5 is a diagram showing a result of measuring foreign matters adhering to a substrate when rubbing with a cotton cloth according to the manufacturing method of the present invention.

FIG. 6 is a diagram of another embodiment showing how a rubbing process is performed.

FIG. 7 is a diagram showing a result of measurement of foreign matter adhering to a substrate when rubbing by the manufacturing method of FIG.

[Explanation of symbols]

10 ... Substrate, 10a ... Alignment film, 10b ... Taper, 11
... liquid crystal display element substrate, 11a ... alignment film, 11b ... taper, 12 ... color filter substrate, 12a ... alignment film, 12
b ... taper, 13 ... sealant, 14 ... liquid crystal, 15 ... spacer, 20 ... rubbing roller with rubbing cloth 20a attached, 30 ... stage, 40 ... film.

Claims (7)

[Claims]
1. At least one of a liquid crystal display element substrate and a color filter substrate, wherein an end of the substrate on which an alignment film for aligning liquid crystal in one direction is formed is tapered. Liquid crystal display device.
2. The liquid crystal display device according to claim 1, wherein the taper shape has an angle of more than 0 degree from a surface on which an alignment film for aligning liquid crystal is formed to a side surface and is 6 degrees or less.
A liquid crystal display device characterized by being 5 degrees or less.
3. In a rubbing step of a liquid crystal display element manufacturing process, at least one of a liquid crystal display element substrate and a color filter substrate, which has a surface on which an alignment film for aligning liquid crystals in one direction is formed, A method for manufacturing a liquid crystal display element, characterized in that an edge is protected in advance.
4. The method for manufacturing a liquid crystal display device according to claim 3, wherein the protection is performed by tapering an end of the substrate on a surface on which an alignment film for aligning the liquid crystal in one direction is formed. A method for manufacturing a liquid crystal display device, characterized by being present.
5. The method for manufacturing a liquid crystal display element according to claim 4, wherein the taper shape has an angle of more than 0 degree and 65 degrees from a surface having an alignment film that aligns liquid crystal in one direction to a side surface. A method for manufacturing a liquid crystal display element, comprising:
6. The method for manufacturing a liquid crystal display element according to claim 3, wherein the protection is to cover an end of the substrate on a surface on which an alignment film for aligning the liquid crystal in one direction is formed with a film. A method for manufacturing a liquid crystal display element, comprising:
7. A rubbing step in a liquid crystal display element manufacturing process, wherein at least one of a liquid crystal display element substrate and a color filter substrate is provided with an alignment film for aligning liquid crystals in one direction. An apparatus for manufacturing a liquid crystal display device, which is equipped with a mechanism for covering an edge with a film.
JP2001197743A 2001-06-29 2001-06-29 Liquid crystal display device and manufacturing method and manufacturing device therefor Pending JP2003015112A (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001197743A JP2003015112A (en) 2001-06-29 2001-06-29 Liquid crystal display device and manufacturing method and manufacturing device therefor

Publications (1)

Publication Number Publication Date
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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015072360A1 (en) * 2013-11-15 2015-05-21 日本電気硝子株式会社 Glass film laminate and liquid crystal panel manufacturing method
WO2019130461A1 (en) * 2017-12-27 2019-07-04 堺ディスプレイプロダクト株式会社 Liquid crystal panel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015072360A1 (en) * 2013-11-15 2015-05-21 日本電気硝子株式会社 Glass film laminate and liquid crystal panel manufacturing method
CN105722676A (en) * 2013-11-15 2016-06-29 日本电气硝子株式会社 Glass film laminate and liquid crystal panel manufacturing method
WO2019130461A1 (en) * 2017-12-27 2019-07-04 堺ディスプレイプロダクト株式会社 Liquid crystal panel

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