TWI637164B - 透明板狀體表面檢查用攝像系統 - Google Patents

透明板狀體表面檢查用攝像系統 Download PDF

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Publication number
TWI637164B
TWI637164B TW103105529A TW103105529A TWI637164B TW I637164 B TWI637164 B TW I637164B TW 103105529 A TW103105529 A TW 103105529A TW 103105529 A TW103105529 A TW 103105529A TW I637164 B TWI637164 B TW I637164B
Authority
TW
Taiwan
Prior art keywords
line sensor
light source
sensor camera
transparent plate
glass plate
Prior art date
Application number
TW103105529A
Other languages
English (en)
Chinese (zh)
Other versions
TW201443424A (zh
Inventor
木村友紀
金子靜則
有田祐介
Original Assignee
日商Ａｇｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Ａｇｃ股份有限公司 filed Critical 日商Ａｇｃ股份有限公司
Publication of TW201443424A publication Critical patent/TW201443424A/zh
Application granted granted Critical
Publication of TWI637164B publication Critical patent/TWI637164B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW103105529A 2013-02-19 2014-02-19 透明板狀體表面檢查用攝像系統 TWI637164B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013030061A JP2016085034A (ja) 2013-02-19 2013-02-19 透明板状体表面検査用撮像システム
JP2013-030061 2013-02-19

Publications (2)

Publication Number Publication Date
TW201443424A TW201443424A (zh) 2014-11-16
TWI637164B true TWI637164B (zh) 2018-10-01

Family

ID=51391153

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103105529A TWI637164B (zh) 2013-02-19 2014-02-19 透明板狀體表面檢查用攝像系統

Country Status (5)

Country Link
JP (1) JP2016085034A (ko)
KR (1) KR102071451B1 (ko)
CN (1) CN105008854B (ko)
TW (1) TWI637164B (ko)
WO (1) WO2014129358A1 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6464021B2 (ja) * 2015-04-22 2019-02-06 新東エスプレシジョン株式会社 測定装置
JP6642223B2 (ja) * 2016-04-13 2020-02-05 Ａｇｃ株式会社 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法
JP6228695B1 (ja) * 2017-02-27 2017-11-08 株式会社ヒューテック 欠陥検査装置
CN107607549A (zh) * 2017-09-27 2018-01-19 深圳精创视觉科技有限公司 玻璃缺陷检测装置
CN110455828A (zh) * 2019-09-02 2019-11-15 蚌埠中光电科技有限公司 一种大尺寸tft基板玻璃无损微波纹度检测方法
CN110849911B (zh) * 2019-11-25 2021-10-15 厦门大学 玻璃缺陷图像采集装置、玻璃缺陷检测设备和检测方法
CN112880600A (zh) * 2021-04-29 2021-06-01 深圳博升光电科技有限公司 一种成像装置及检测玻璃的设备
CN115555290A (zh) * 2022-10-20 2023-01-03 四川大学 一种基于深度学习的玻璃盖板细微缺陷检测设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016099A (en) * 1988-05-13 1991-05-14 Saint-Gobain Vitrage Process for determining the optical quality of flat glass or flat glass products

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643018B4 (de) * 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
CN1297796C (zh) * 2003-07-02 2007-01-31 西安交通大学 线阵光电传感器层析扫描三维测量方法及其装置
US7471383B2 (en) * 2006-12-19 2008-12-30 Pilkington North America, Inc. Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging
JP5034891B2 (ja) 2007-11-21 2012-09-26 旭硝子株式会社 透明板状体の形状測定装置及び板ガラスの製造方法
EP2584306B1 (en) * 2010-06-15 2019-01-16 AGC Inc. Shape measuring device, shape measuring method, and glass plate manufacturing method
JP2012021781A (ja) 2010-07-12 2012-02-02 Asahi Glass Co Ltd 表面形状の評価方法および評価装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016099A (en) * 1988-05-13 1991-05-14 Saint-Gobain Vitrage Process for determining the optical quality of flat glass or flat glass products

Also Published As

Publication number Publication date
WO2014129358A1 (ja) 2014-08-28
KR20150116863A (ko) 2015-10-16
CN105008854B (zh) 2018-11-09
JP2016085034A (ja) 2016-05-19
TW201443424A (zh) 2014-11-16
KR102071451B1 (ko) 2020-01-30
CN105008854A (zh) 2015-10-28

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