TWI632987B - Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine - Google Patents

Abstract

A carrier device has a simple and cheap structure, and can ensure high-efficiency and high-precision machining when machining the surface of a thin disk-shaped work piece. In a device for simultaneously supporting and rotating a thin disk-shaped work piece for grinding the surface of a work piece, the carrier device constitutes a work piece rotation support device for rotating and driving a work piece to simultaneously position and support the circular periphery of the work piece, And a ring-shaped carrier body having a circular inner peripheral edge that tightly surrounds the entire circumference of the work piece, and a notch trigger having a tip engagement portion engaged with a notch of the work piece to form an integral piece, Wherein the notch trigger is a separate component from the carrier body so as to be replaceable and connected and integrally fixed, and the tip joint has an installation projecting radially inward from a part of the circular inner periphery of the carrier body structure.

Description

Carrier device of thin disc-shaped work piece, manufacturing method thereof and bilateral grinding machine Field of invention

The present invention relates to a carrier device for thin disk-shaped work pieces, a method for manufacturing the same, and a double-sided grinding machine, and more particularly, to a work piece rotation support technology for radially positioning the circular outer circumference of the work piece, and The thin disk-shaped work piece (for example, a semiconductor wafer) is rotated and driven when the front and / or back faces are processed.

Background of the invention

For example, semiconductor wafers are manufactured with cylindrical semiconductor ingots made of single crystal silicon and cut into thin slices, and their surfaces and opposite sides are machined with a grinder or polisher, and trimmed into smooth surfaces.

In the grinding or polishing of thin disk-shaped work pieces (for example, semiconductor wafers, hereinafter referred to as work pieces), the front and / or back faces are machined when rotating and supporting the work pieces, and, for example, Japanese Laid-Open Patent No. 2003-71704 discloses a bilateral grinding machine for grinding the surface and opposite sides of semiconductor wafers.

In a bilateral grinding machine disclosed in Japanese Laid-Open Patent No. 2003-71704, an annular carrier ring b of the carrier device a It is rotatably arranged on a frame (not shown). On one inner peripheral side of the carrier ring b, a pair of fixed carriers c, and on the other inner peripheral side, a pair of movable carriers d that can rotate around the support axis e in a horizontal plane, and these pairs of fixed , Movable carriers c, d, ..., so that the work piece (wafer) W is located in the radial direction, and constitutes a carrier body for rotation and support. The work piece W is detachably held in the inner peripheral area of the carriers c, d,... The work W is accommodated and supported by the carrier ring b in a state of being lifted up by air from an air bearing device (not shown).

The spring f is hooked between the movable carriers d and d, and the spring f is used to rotatably force the movable carriers d and d to the side of the work piece W, and the work piece W is kept loosely close to the work piece W. An actuator (not shown) is arranged on the carrier ring b, and when the work piece W is brought in or out, the actuator works to rotate the movable carrier against the thrust of the spring f on the outer periphery of the carrier ring b d, d, and the work piece W are released from the holding state.

Incidentally, the work piece W is held with a slight gap between the inner circumferential positions of the carriers c, d, that is, between the fixed carriers c, c and the inner circumferential edges of the movable carriers d, d.

In order to be positioned between the pair of fixed carriers c, c, a notched trigger g is installed and fixed on an inner peripheral side of the carrier ring b, and at the front end, a tip joint constituting a plane triangular pointed edge is formed部 h. When the working member W is held between the fixed carrier c and the movable carrier d, the tip engaging portion h of the notch trigger g is engaged with the notch Wn as a cut portion on the outer periphery of the working member W. In this state, the carrier ring b is rotated by a motor (not shown), and the work piece W rotates integrally through the notch trigger g.

A pair of cup-shaped grinding is arranged on the upper and lower surfaces of the carrier device a The wheels i, i and the motors j, j that rotate them so as to be movable against the carrier device a in the feeding direction.

With the work piece W held in the carrier device a, by the rotation of the carrier ring b, the work piece W rotates through the notch trigger g, and the grinding wheels i, i rotate, and cut deep and move To the surface and the opposite side of the work W. By this feeding motion, the grinding wheels i, i simultaneously grind the surface and the opposite side of the work W.

In addition, as disclosed in Japanese Laid-Open Patent No. H11-333707, in the processing technology of smoothly polishing or polishing the surface of a semiconductor wafer, the carriers c, d, ... and the notch trigger g can be formed as one Whole.

However, in such a conventional configuration of a carrier device, the following problems are known, and some people have wanted to make further improvements.

(1) The carriers c, d, ... and the notch trigger g that are in contact with the work piece W will wear out with time, and should be replaced regularly as consumable parts, but the number of parts is large and the structure is complicated, and it is difficult to reduce costs .

In particular, since the plurality of fixed and movable carriers c, d,... Constituting the main body of the carrier have the function of radially positioning the work piece W, and in principle, these components are replaced in batches, but it is very expensive.

(2) The notch trigger g used as the rotation driving plate of the work piece W wears more seriously than the carriers c, d, ..., and is replaced more frequently, and is generally formed as a separate component from the carrier body, and it The bottom end portion of is mounted and fixed on the carrier ring b, and protrudes radially inward between the fixed carriers c, c, and is engaged with the notch Wn of the working member W. However, in this configuration, the notched trigger g projects radially inwards from the carrier ring b as the mounting portion, and is supported Supported like a cantilever, and may notably deflect when the notch trigger g is loaded, as a result, the work piece W may deflect together with the notch trigger g, or the engagement state of the work piece W and the notch trigger g may be loose Open, and the work piece W may be broken, and a bad part may be formed, or the grinding wheels i, i may be broken, and other known problems.

In particular, when the grinding wheels i, i with larger diameters are used in order to enhance the grinding efficiency and grinding accuracy, in order to prevent the grinding wheels i, i from interfering with each other, the diameter of the carrier ring b is also increased, and the length of the notch trigger g is extended as much as possible , And these issues become more prominent.

(3) The notched trigger g is thinner than the work piece W and requires a rigid material, but at present, it is formed with a special laminated structure as disclosed in Patent Document 1, or by cutting engineering plastics (for example, PEEK (polyetheretherketone) Resin) in order to establish the necessary thickness, as well as high material and manufacturing costs, and expensive parts as consumable parts.

(4) The carrier body surrounding the outer periphery of the work piece W is a split structure composed of a plurality of fixed and movable carriers c, d, ..., and each plate body may be twisted, deflected or deformed, which is a grinding process The work piece W in has an adverse effect, and it is difficult to enhance the grinding accuracy.

(5) Or, as disclosed in Japanese Laid-Open Patent No. H11-333707, in the structure where the carriers c, d, ... and the notched trigger g are formed as an integral piece, if the notched trigger part is first worn due to wear Severe and worn, the integrally formed carrier body and the notch trigger must be replaced in batches, or in order to extend the service life of the integral part, the constituent material must be replaced with a material suitable for the notch trigger, which increases the material cost.

Summary of the invention

Therefore, the main objective of the present invention is to provide a novel carrier device for thin disk-shaped work pieces that can successfully solve these conventional problems.

Another object of the present invention is to provide a simple and inexpensive carrier device that can be processed efficiently and with high precision when machining the front and / or back of a thin disk-shaped work piece (for example, a semiconductor wafer).

Another object of the present invention is to provide a method for manufacturing a carrier device, which can manufacture the carrier device at a low cost.

Another object of the present invention is to provide a bilateral grinding machine having the carrier device as a constituent device, and capable of grinding the surface and the opposite side of a thin disk-shaped work piece (eg, semiconductor wafer) with high efficiency and precision .

The configuration of the carrier device of the thin disk-shaped work piece of the present invention relates to a device that simultaneously supports and rotates at least one side of a grinding or polishing work piece, and more particularly, a carrier device constituting a rotary support device The circular outer periphery for rotating and driving the work piece while supporting the work piece includes: an annular carrier body that tightly surrounds the entire circumference of the work piece with a circular inner periphery, and a tip joint portion that will be provided with A notch trigger joined by a cut part of the circular outer periphery of the working piece, the two are formed as an integral piece, wherein the notch trigger is a separate component from the carrier body, so as to be replaceable and connectable and fixed as a whole And, the tip joint portion has a mounting structure protruding radially inwards from a part of the circular inner periphery of the carrier body.

Several preferred embodiments include the following configurations.

(1) The thicknesses of the carrier body and the notch trigger are set to be thinner than the finishing thickness of the work piece, and an adhesive that can be fixed and separated for connecting and fixing the notch trigger and the carrier body achieve.

(2) The notch trigger mounting portion on the carrier body is cut and shaped into a shape corresponding to the outer contour shape of the joint portion of the notch trigger, and applying the adhesive to the notch trigger installation The part of the joint surface.

(3) The notch trigger is composed of a thin plate member and has a triangular outline with one vertex formed as the tip engagement portion to engage with the notch portion of the work piece, and in the notch trigger mounting portion of the carrier body , At the position corresponding to the remaining two vertices of the triangular outline of the notch trigger, a circular groove is formed to avoid stress concentration.

(4) The tip joint portion of the notch trigger has a circular arc shape, and its cross-section is set to correspond to the cross-sectional shape of the cut-out portion of the work piece.

The manufacturing method of the carrier device of the thin disk-shaped work piece of the present invention is a method suitable for manufacturing the carrier device, and includes steps (a) to (c) as follows.

(a) Cleaning step, which is cleaning and degreasing of the junction surface of the notched trigger mounting portion of the carrier body and the junction surface of the notched trigger coupling portion; (b) Connection step, which is positioning and Maintain the parallelism of the carrier body and the notch trigger, and adhere and connect when applying the adhesive The coupling surface of the notch trigger mounting portion of the carrier body and the coupling portion of the notch trigger; and (c) a trimming step, which removes the carrier body and the notch trigger to join in the connecting step Excess adhesive exposed by these joints during integration.

The double-sided grinding machine of the thin-disk-shaped work piece of the invention is a machine for rotating and supporting a thin-disk-shaped work piece, feeding a pair of grinding wheels rotating at high speed in the axial direction of the grinding wheel, and the grinding surfaces using the two grinding wheels Grinding the surface and the opposite side of the work piece, which includes: a pair of grinding wheels, which are configured such that the grinding surfaces can face each other, and a work piece rotation support member, which is used on the surface of the work piece And the opposite side supports and rotates the work piece in a state of facing the two grinding surfaces between the grinding surfaces of the pair of grinding wheels, wherein the work piece rotation support member has one for axial positioning and supporting the work piece An axial support member, and a radial support member for radially positioning, rotating, and supporting the work piece, and the radial support member has the carrier device.

The carrier device of the present invention is a device for supporting and rotating a thin disk-shaped work piece and grinding or polishing at least one side of the work piece, and more particularly, a carrier device constituting a work piece rotation support device, the work piece rotating The support device is used to rotate and drive the circular outer periphery of the work piece while positioning and supporting it. It includes: a circular carrier body that tightly surrounds the entire circumference of the work piece with a circular inner periphery, and a tip joint will A notch trigger engaged with a cutout portion provided on the circular outer periphery of the work piece, the two are formed as an integral piece, wherein the notch trigger is connected The knot and fixed to the carrier body are integrated into an independent component so as to be replaceable, and the tip joint portion has a mounting structure that protrudes radially inward from a part of the circular inner periphery of the carrier body, thereby obtaining the following benefits, and The carrier device that ensures high-efficiency and high-precision machining has a simple and inexpensive structure.

(i) The ring-shaped carrier body tightly surrounds the entire circumference of the working piece, and the notch trigger engaged with the cutout portion of the working piece is formed as an integral piece, so the number of parts is small and the structure is simple, and the structure Can reduce costs.

(ii) The carrier body for radially positioning the outer periphery of the work piece is formed into a continuous ring shape having a circular inner peripheral edge that tightly surrounds the entire circumference of the work piece, and thus compared to the conventional carrier body of the split structure (Refer to FIG. 8), the rigidity is high, and high-precision surface machining is achieved without adversely affecting the machining accuracy of the work piece.

(iii) Similarly, because the carrier body is ring-shaped and continuous, compared with the conventional carrier body of the split structure (refer to FIG. 8), the carrier body is manufactured with less processing distortion, and can effectively prevent the loading ring from being installed Distortion occurs, and it is difficult to further twist, deflect or deform when processing the work piece, and from this aspect, there is no adverse effect on the processing accuracy of the work piece, and high-precision surface processing is achieved.

(iv) The notch trigger is a separate component from the carrier body and can be replaced and connected and fixed as a whole, so it is the best composition material that can be used for the notch trigger and carrier body, and can reduce the material cost of the structure as a whole.

In particular, materials with high strength and excellent wear resistance can only be used as notch triggers that are severely worn and frequently replaced as rotating and driving members of working parts, so the use of expensive materials can be suppressed to the minimum limit and the overall Can reduce material costs.

(v) In addition, the notch trigger is a separate component from the carrier body and can be replaced and connected and fixed as a whole, so when the notch trigger wears early, you can only replace the notch trigger, and you can continue to use the carrier body until it The end of the service life, and in this regard, the overall cost of materials can be suppressed.

(vi) Since the notch trigger is integrally connected and fixed to the carrier body, the size of the inward radial projection from the mounting portion of the notch trigger is very small, and unlike the conventional cantilever type support structure, if the notch trigger is loaded, It will not deflect significantly. As a result, the working piece and the notch trigger will not be distorted, and the engagement state of the working piece and the notch trigger will not be loosened, and most of the knowledge that it is possible to prevent the working piece from cracking, the occurrence of bad parts or the damage of the grinding wheel or other tools problem.

For example, in the grinding process, when a large-diameter grinding wheel is used in order to enhance the grinding efficiency or grinding accuracy, since the mounting part of the notched trigger does not interfere with the grinding wheel, there is no need to extend the length of the notch of the trigger.

(vii) Similarly, the mounting structure of the notch trigger described above does not require the use of expensive materials (for example, PEEK) as a countermeasure against the rigidity reduction of the conventional cantilever structure, and the use of cheap materials can reduce costs.

(viii) In addition, since the notched trigger is connected and fixed to the carrier body, its shape can be simplified, thereby saving the processing of the notched trigger into Compared with the conventional notch trigger, it can save material consumption and reduce the cost of this aspect.

According to the manufacturing method of the carrier device of the present invention, a carrier device that effectively realizes these benefits can be manufactured easily and at low cost.

According to the double-sided grinding machine of the present invention, since such a carrier device is provided, the above-mentioned benefits can be effectively displayed, and the surface and the opposite side of the thin disk-shaped work piece can be ground simultaneously with high efficiency and high precision.

Reading the following detailed description based on the drawings and the novel facts disclosed in the scope of the patent application can make the invention clearer and understand the above and other objects and features.

1, 2‧‧‧ grinding wheel

1a, 2a

3. 4‧‧‧ grinding wheel axis

5‧‧‧Work piece rotating support equipment

6‧‧‧Carrier device

7, 8‧‧‧ drive motor

10‧‧‧Axial support member

11‧‧‧Radial support member

15, 16‧‧‧ Left and right static pressure pads

17‧‧‧Rotating equipment

20‧‧‧Support roller

21‧‧‧ring drive gear

30‧‧‧ carrier ring

30a‧‧‧Perimeter

30c‧‧‧Annular mounting groove

31‧‧‧Carrier body

31a‧‧‧Circular inner periphery

32‧‧‧Gap trigger

32a‧‧‧tip joint

32b‧‧‧Bottom side joint

33‧‧‧Carrier pressurizer

33a‧‧‧Inner tooth

35‧‧‧Notch trigger mounting part

35a‧‧‧Circular groove

a‧‧‧Carrier device

b‧‧‧ring carrier ring

c‧‧‧Fixed carrier

d‧‧‧Activity carrier

e‧‧‧Support shaft

f‧‧‧Spring

g‧‧‧Gap trigger

h‧‧‧tip joint

i‧‧‧Cup grinding wheel

j‧‧‧Motor

W‧‧‧Workpiece

Wa, Wb‧‧‧ front and back

Wn‧‧‧Notch

The cross-sectional view of FIG. 1 illustrates the configuration of the main components of a horizontal bilateral grinder according to an exemplary embodiment of the present invention.

The front view of FIG. 2 illustrates the configuration of the same bilateral grinding machine, and a partial cross-sectional view is drawn along the line II-II of FIG. 1.

The enlarged front view of FIG. 3 illustrates the configuration of the carrier body and the trigger notch, which are essential parts of the carrier device of the bilateral grinding machine.

4 is an enlarged cross-sectional view of the configuration of the carrier body and the trigger notch of the carrier device along the line IV-IV of FIG. 1.

The enlarged expanded perspective view of FIG. 5 illustrates the carrier body and trigger notch of the carrier device.

6A is an enlarged front view of the notch trigger.

6B is an enlarged plan view of the notch trigger.

Fig. 7 is a front view illustrating a work piece to be ground with a double-side grinder Semiconductor wafer.

FIG. 8A is a front view showing a partial cross-section of the main components of a conventional double-side grinding machine for grinding semiconductor wafers.

FIG. 8B is a side view illustrating a partial cross-section of the main components of the bilateral grinder.

Detailed description of the preferred embodiment

The following is a detailed description of preferred embodiments of the present invention with the accompanying drawings. In the drawings, similar components or elements are denoted by the same element symbol.

The double-side grinder of the present invention is shown in FIGS. 1 and 2, and this grinder is specifically used to simultaneously grind the surface and the opposite side of a thin disk-shaped work piece W (for example, the semiconductor wafer shown in FIG. 7). And more particularly, there is a pair of grinding wheels 1, 2 whose grinding wheel axes 3, 4 rotate and support relatively horizontally in a horizontal direction.

In this preferred embodiment, the semiconductor wafer W as an abrasive object is a thin disk-shaped sheet with a thickness of 1 mm or less, and in order to align the crystal orientation of the wafer during the manufacturing process, a notch Wn is provided in the circular outer periphery As part of the cut. In the preferred embodiment, the notch Wn is effectively used for grinding.

As shown in FIGS. 1 and 2, this grinder basically includes a pair of left and right grinding wheels 1, 2 and a work piece rotating support device 5 as the main components of the grinding part, and the work piece rotating support device 5 mainly includes Carrier device 6 of another feature of the invention.

The grinding wheels 1, 2 are specifically cup-shaped grinding wheels, and the front end of the circumference 1a and 2a are ring-shaped grinding surfaces. The grinding wheels 1, 2 are configured such that the grinding surfaces 1a, 2a can face each other in a nearly horizontal state, and at the grinding position between the two grinding surfaces 1a, 2a, as described below, the work piece W is supported by the work piece in rotation Device 5 rotates and supports.

More specifically, the grinding wheels 1, 2 are detachably mounted and fixed to the front ends of the grinding wheel axes 3, 4. The grinding wheel axes 3 and 4 are driven and coupled by drive motors 7, 8 installed inside the grinding wheel seat (not shown), and operated in the axial direction by a grinding wheel feeding device (not shown) also installed inside the grinding wheel seat , That is, move along the feeding directions X, Y.

The work piece rotation support device 5 serves as a work piece rotation support member for supporting and rotating the work piece W, and is designed to support and rotate the work piece W between the grinding surfaces 1a, 2a of the grinding wheels 1, 2 such that its The surface and the opposite sides Wa and Wb can be kept perpendicular to the polishing surfaces 1a and 2a.

In addition, the work piece rotary support device 5 includes an axial support member 10 for axial positioning and support of the work piece W, and a radial support member 11 for radial positioning of the work piece W and rotation and support, and this radial The support member 11 has a carrier device 6 as a main component.

The axial support member 10 is formed as a static pressure support device for positioning and supporting the surface and opposite sides Wa, Wb of the work piece W without being contacted by static pressure fluid, and its main components are a pair of left , Right static pressure pad 15, 16. Both the static pressure pads 15 and 16 are connected to a fluid supply source (not shown), and the pressure fluid (for example, water) supplied from the fluid supply source is ejected from the static pressure groove (not shown), and the surface of the work piece W and The opposite sides Wa, Wb are between the grinding surfaces 1a, 2a of the grinding wheels 1, 2 In the axial center position of the statically maintained non-contact state.

The radial support member 11 is formed as a rotary drive device for radially positioning the work piece W and rotating and driving, and its main components include a carrier device 6 for fitting and supporting the work piece W, and a rotary device 17 as a Rotation drive unit supporting and rotating this carrier device 6

The rotating device 17 is configured as shown in FIG. 1, in which a plurality (four in the preferred embodiment) support rollers 20, 20,... Rotatably support the outer periphery 30 a of the carrier ring 30 of the carrier device 6, And the ring-shaped drive gear 21 is engaged with the internal teeth 33a of the carrier presser 33 integrally fitted and fixed to the carrier ring 30, and the ring-shaped drive gear 21 is driven and coupled to a rotational drive source (not shown).

Here, by using this rotary drive source to drive and rotate the ring-shaped drive gear 21, the carrier device 6 for fitting and supporting the work piece W will go around the rotation center defined by the support rollers 20, 20, ... The rotation and operation, and the work W are supported and rotated to be in a state of being located in the radial direction.

The carrier device 6 is to fit and support the work piece W, and as shown in FIGS. 1 and 2, it is mainly composed of a carrier ring 30, a carrier body 31, a notch trigger 32 and a carrier presser 33.

The carrier ring 30 is the position of the main body ring of the carrier device 6, and is formed by the ring-shaped ring member as shown in FIG. 1, and as shown in FIGS. 2 and 4, the outer ring surface 30a is formed on the cylindrical surface. The carrier ring 30 has an outer ring surface 30a that is rotatably positioned and supported by four supporting rollers 20, 20,.

On the inner diameter side of the carrier ring 30, an annular mounting groove 30c continuously around the entire circumference is installed, and the position of the outer peripheral edge of the carrier body 31 is fitted into the mounting recess The groove 30c and the annular carrier presser 33 are installed and fixed on both sides so as to be replaceable. Any conventional fixing member can be used to correctly fix the carrier presser 33 on the carrier ring 30, and the illustrated preferred embodiment uses mounting bolts (not shown).

The carrier presser 33 is formed like an internal gear made of an annular ring member of FIG. 1, and internal teeth 33a are formed in the inner periphery. Therefore, when the carrier presser 33 is integrally fitted and fixed in the mounting groove 30c of the carrier ring 30, as described above, the outer periphery 30a of the carrier ring 30 uses four support rollers 20 as rotary drive units in the rotating device 17 20.... Rotatably supported, and the ring-shaped drive gear 21 of the rotary device 17 is engaged with the internal teeth 33a of the carrier presser 33.

The carrier body 31 is a position for cooperatively cooperating with and supporting the notch trigger 32 and supporting the work piece W, and more particularly, as shown in FIG. 1, it is formed of an annular sheet material, and its circular inner periphery 31a A circular outer periphery (the entire circumference) that can tightly surround the work W is formed. That is, the circular inner peripheral edge 31a has an inner diameter slightly smaller than the outer diameter of the work piece W to be polished, and forms a predetermined gap with the outer circumference of the work piece W, so that the work piece W loosely fits and is supported on the carrier body 31.

The notch trigger 32 has a tip engaging portion 32a to engage with the notch Wn to form a cutout portion provided on the circular outer periphery of the work piece W, and is formed as a unitary piece with the carrier body 31.

More specifically, the notch trigger 32 is integrally connected and fixed to the carrier body 31 as a replaceable independent member, and the tip engagement portion 32a has a portion of the circular inner periphery 31a of the carrier body 31 that is circumferentially radially inward Outstanding installation structure. The circular inner peripheral edge 31a of the carrier body 31 is loosely engaged and With the work piece W supported, the tip engagement portion 32 a of the notch trigger 32 and the notch Wn of the work piece W are engaged in the rotation direction of the carrier device 6.

The carrier body 31 and the notch trigger 32 are designed to rotate integrally in the direction of rotation while radially locating the work piece W when loosely engaged and supported, and during the grinding process, they forcefully contact the work piece W and the work piece The gap of W may be too large due to wear, or uneven wear may adversely affect the grinding accuracy.

Therefore, the carrier body 31 and the notch trigger 32 are formed as consumable parts that can be replaced regularly or irregularly, and have the following characteristic structures.

The thicknesses of the carrier body 31 and the notch trigger 32 are set to be smaller than the trimming thickness of the work piece W, and the notch trigger 32 is connected and fixed to the carrier body 31 with a fixable and separable adhesive.

The notched trigger mounting portion 35 of the carrier body 31 is cut and shaped into a shape corresponding to the outer peripheral outline shape of the bottom end side coupling portion 32b of the notched trigger 32, and the combination of applying the adhesive to the notched trigger mounting portion 35 surface.

In the preferred embodiment shown in the drawings, the notch trigger 32 is specifically formed as shown in FIGS. 5 and 6 and is made of a thin sheet material with a triangular outline, and has an apex formed as a tip engaging portion 32a to be connected with the work piece W The notch Wn is engaged, and in the notch trigger mounting portion 35 of the carrier body 31, circular grooves 35a, 35a to avoid stress concentration are formed at positions corresponding to the remaining two vertices of the triangular outline of the notch trigger 32 ( Corner position). The circular grooves 35a, 35a reduce the side effects of the manufacturing of the auxiliary notch trigger mounting portion 35.

In the preferred embodiment shown in the figures, the tip engagement portion 32a of the notched trigger 32 is trimmed into an R shape as shown in FIGS. 5 and 6A, which has an arc-shaped profile, and the corner in the axial direction is trimmed into a right angle shape, And the cross section is formed into a rectangular cross section as shown in FIG. 6B. The specific shape or structure of the tip joint 32a may be appropriately related to the shape and structure of the notch Wn Wn of the working member W having a joint relationship with it.

That is, the tip engaging portion 32a is trimmed into an R shape as shown in FIG. 6A so as not to bite into the notch Wn of the work W.

The cross section of the tip joint portion 32a is trimmed into a rectangular cross section as shown in FIG. 6B. Since the outer periphery of the work piece W (including the portion of the notch Wn) can be chamfered to avoid breakage, and in this case, when the notch trigger When the chamfering of 32 is made to be similar to the work piece W, the notch Wn of the work piece W may not be hooked (engaged) on the notch trigger 32, in order to avoid such inconvenience.

Therefore, contrary to the above case, when the outer periphery including the notch Wn portion of the work piece W is trimmed into a rectangular cross section without chamfering, accordingly, when the cross-sectional configuration and illustration of the tip engagement portion 32a of the notch trigger 32 When the preferred embodiment is reversed, although not specifically shown in the drawings, instead of the rectangular cross-section shown in FIG. 6B, chamfering or similar trimming is completed.

The carrier body 31 and the notch trigger 32 are made of a suitable material considering the material of the work piece W to be ground, and there is no special provision. They can be made of the same material or different materials as appropriate, but it is desirable to select them with consideration of the degree of wear or others.

For example, if the work piece W is a silicon wafer, as in this preferred embodiment, considering the metal contamination or other problems, the material of the notch trigger 32 It is not expected to be a metallic material.

In the preferred embodiment shown in the drawings, the carrier body 31 is made of inexpensive GFRP (glass fiber reinforced plastic), and the notch trigger 32 made of engineering plastic that is stronger than the GFRP used for the carrier body 31, for example , FRP based on PEEK (polyetheretherketone) resin or the like, whereby material cost can be suppressed.

As described above, the carrier body 31 and the notch trigger 32 are consumable parts, but the notch trigger 32 wears faster and is replaced more frequently, and only the notch trigger 32 can be made of a material with higher strength and higher wear resistance.

The notch trigger 32 can be replaced and is a separate component from the carrier body 31, as described above, it is integrally connected and fixed with it, and the notch trigger 32 is connected and fixed to the carrier body 31 to form a unitary piece (process) The following steps (a) to (c) can be used.

(a) Cleaning steps of the joint surface

Steps of cleaning and degreasing carrier body 31 of the joint surface of the notched trigger mounting portion 35 and the joint surface of the notched trigger 32

This step is to remove pollution, moisture, oil, or the like, because the adhesive used as the connecting member in the subsequent connecting step should be free of these things, whereby the fixing ability of the adhesive can be fully exhibited.

(b) Connection steps

Position and maintain the parallelism of the carrier body 31 and the notch trigger 32 when applying the adhesive, and the coupling surface of the notch trigger mounting portion 35 of the carrier body 31 and the coupling portion of the notch trigger 32 step.

The application position of the adhesive in FIG. 5 is the flat portion of the entire surface notch trigger mounting portion 35, and the adhesive is generally a commercially available instant adhesive. The selection conditions of the instant adhesive include sufficient strength, single component type, high viscosity, and high working efficiency as the connecting and fixing member of the preferred embodiment.

When connecting the carrier body 31 and the notch trigger 32, sufficient care needs to be taken so that the notch trigger 32 and the carrier body 31 can be parallel to each other, and the use of a flat plate or the like that ensures parallelism can relatively easily realize the two components 31, 32 parallelism.

(c) Dressing steps

The step of completely removing the excess adhesive that is exposed from the coupling portion when the carrier body 31 and the notch trigger 32 are integrated in the joining step is cleanly completed.

If the integrated notched trigger 32 and the carrier body 31 are directly used without removing the adhesive oozing from the joint, the grinding wheels 1, 2 may be contacted during the grinding process, resulting in the grinding surface 1a of the grinding wheels 1, 2 , 2a is blocked, or the work piece W is damaged.

In this way, the notch trigger 32 integrally connected to the carrier body 31, as shown in FIG. 1, engages with the notch Wn of the work piece W, rotates integrally, and applies force in the direction of rotation. In a preferred embodiment, the notch trigger 32 is designed as a combined fixing structure (including the triangular outline of the notch trigger 32) as shown in FIG. 3, so that it is difficult to separate from the carrier body 31 in the rotation direction. On the other hand, since the adhesion area of the parts 31 and 32 is small, and the adhesion force in the direction of the rotation axis is weak, the notch trigger 32 can be The carrier body 31 can be easily removed and replaced.

Therefore, in the bilateral grinding machine with this configuration, the work piece rotation support device 5 rotates and supports the work piece W at the grinding position, and the high-speed rotating grinding wheels 1, 2 are specified along the directions of the grinding wheel axes 3, 4 The feeding method is used to feed, and the grinding surfaces 1a, 2a of the grinding wheels 1, 2 are used to simultaneously grind the surface of the work W and the opposite sides Wa, Wb.

In this work piece rotary support device 5, the surface and the opposite sides Wa, Wb of the work piece W that are fitted and supported by the carrier device 6 of the radial support member 11 are held at a static pressure pad with the axial support member 10 by static pressure 15, 16 is not in contact, and the grinding surfaces 1a, 2a of the grinding wheels 1, 2 are positioned and supported almost in the axial center position, and the carrier device 6 rotates around the rotation defined by the support rollers 20, 20 ... The center rotates and operates, thereby supporting and rotating the work W in a state located in the radial direction.

As specifically described above, the carrier device 6 of this preferred embodiment achieves the following effects.

(1) Since the ring-shaped carrier body 31 tightly surrounds the entire circumference of the work piece W, and the notch trigger 32 to be engaged with the notch Wn of the work piece W is formed as an integral piece, the number of parts is saved, the structure is simple, and the structure can be structured Can reduce costs.

(2) Since the carrier body 31 for radially positioning the outer periphery of the work piece W is formed into a continuous ring shape having a circular inner peripheral edge 31a that tightly surrounds the entire circumference of the work piece W, compared to the division shown in FIG. 8 The conventional carriers c, d, ... of the body structure can achieve high rigidity and high-precision surface machining, and there is no adverse effect on the machining accuracy of the work piece W in the grinding process ring.

(3) Similarly, since the carrier body 31 is ring-shaped and continuous, compared with the conventional carriers c, d, ... of the split structure as shown in FIG. 8, there is almost no mechanical distortion during the manufacture of the carrier body 31, And it can effectively prevent twisting when loading ring 30 is installed, and there is almost no twisting, deflection or deformation in the grinding process of work piece W, and from this aspect, high-precision surface machining is also achieved in the grinding process Has no adverse effect on the machining accuracy of the work piece W.

(4) Since the notch trigger 32 can be replaced and is a separate component from the carrier body 31 and connected and fixed into one body, the best material can be used for both the notch trigger 32 and the carrier body 31, and the carrier device can be lowered as a whole 6 Material cost.

In particular, an excellent material with high strength and high wear resistance can be used only for the notch trigger 32 which is used as a rotary drive member of the work piece W and is subject to severe wear and high replacement frequency, and can suppress the consumption of expensive materials, and Overall, the material cost of the carrier device 6 can be suppressed.

(5) In addition, since the notch trigger 32 is replaceable and is a separate component from the carrier body 31 and is connected and fixed as a whole, if the notch trigger 32 is first worn out because it is easier to wear, only the notch trigger 32 can be replaced, And the carrier body 31 can continue to be used until the end of its service life, and in this respect, the overall material cost of the carrier device 6 can also be suppressed.

(6) Since the notch trigger 32 is integrally connected and fixed to the carrier body 31, the size of the notch trigger 32 that projects radially inwards is small, and is different from the conventional cantilever type support structure. load, The notch trigger 32 is generally not skewed. As a result, the work piece W does not follow the notch trigger 32 to cut off the engagement state of the work piece W and the notch trigger 32, and unlike the prior art, it is hardly caused by breakage of the work piece W, breakage of the grinding wheel and other problems Bad parts.

For example, when using large-diameter grinding wheels 1, 2 in order to enhance the grinding efficiency or grinding accuracy, there is no interference between the mounting portion of the notch trigger 32 and the grinding wheels 1, 2, so there is no need to extend the notch trigger 32 length.

(7) Similarly, since the notch trigger 32 has this mounting structure, it is not necessary to use expensive materials (for example, PEEK) as a means to counter the rigidity reduction of the conventional cantilever structure, and the use of cheap materials can reduce costs.

(8) Structurally, since the notch trigger 32 is connected and fixed to the carrier body 31, the shape can be simplified, and the processing cost of the notch trigger 32 can be saved, and compared with the conventional notch trigger 32, material consumption can be saved The amount, and in this regard can also reduce costs.

In addition, according to the manufacturing method of the carrier device 6 of the present invention, the carrier device 6 that effectively exhibits these effects can be easily and inexpensively manufactured.

In addition, according to the double-side grinding machine of the present invention, since the carrier device 6 that effectively exhibits these effects is provided, and the surface and the opposite sides Wa, Wb of the thin disk-shaped work piece W can be simultaneously ground with high efficiency and high precision.

Incidentally, the preferred embodiments of the present invention described herein may have different design changes and modifications, as described below.

For example, the illustrated preferred embodiment shows that the present invention is applied to The carrier device 6 of the horizontal double-side grinder, however, it can also be applied to the carrier device of the vertical double-side grinder as disclosed in Japanese Laid-Open Patent No. 2003-71704, or can be used as the carrier device of the grinder for single-side grinding . In addition, the present invention can be used as a carrier device for other machining tools for machining thin disk-shaped work pieces, for example, a carrier device of a grinder disclosed in Japanese Laid-open Patent No. H11-333707.

The work piece W to be polished is not limited to the semiconductor wafer shown in FIG. 7, but may include other thin disk-shaped work pieces.

In terms of obtaining the same or similar effects, the specific structure of the carrier device 6 is not limited to the structure shown in the drawings, and the configuration of the carrier body 31 and the notch trigger 32 can be appropriately selected according to the material of the work piece W to be processed, for example The materials, as well as the preferred embodiments that are not limited to the illustrated illustrations. For example, as for the work W made of iron material, it is preferable to use iron material in terms of rigidity and cost.

The specific exemplary embodiments disclosed in the above detailed description are intended to reveal the technical details of the present invention. However, it should be noted that the present invention does not explain the limited narrow scope of the specific embodiment, but should understand that in a wider scope, it is still in the present invention There are still various changes and modifications within the spirit of the patent application and the scope of the following patent applications.

Claims (7)

A carrier device for a thin disc-shaped work piece is used to grind or polish at least one side of the work piece to simultaneously support and rotate the thin disc-shaped work piece. A work piece rotating support device that drives and simultaneously positions and supports the round outer circumference of the work piece, which includes: a ring-shaped carrier body with a circular inner peripheral edge that closely surrounds the entire circumference of the work piece, and a notch trigger , Which has a tip joint to be engaged with a cutout portion provided on the circular outer periphery of the working piece to form an integral piece, wherein the notch trigger is composed of a material with higher strength than the carrier body , And the notch trigger is a separate component from the carrier body, so as to be replaceable and connected and integrally fixed, and the tip joint portion has a portion protruding radially inward from a part of the circular inner periphery of the carrier body Installation structure. The carrier device of the thin disk-shaped work piece according to claim 1, wherein the thicknesses of the carrier body and the notch trigger are set to be thinner than the final thickness of the work piece, and the gap between the notch trigger and the carrier body The connection and fixing are realized by an adhesive that can be fixed and released. The carrier device of the thin disk-shaped work piece according to claim 2, wherein the notch trigger mounting portion on the carrier body is cut and shaped to correspond to the outer contour shape of the joint portion of the notch trigger A shape, and the adhesive is applied to the joint surface of the notch trigger mounting portion. The carrier device of a thin disk-shaped work piece according to claim 3, wherein the notch trigger is constituted by a thin plate member having a triangular outline having an apex formed with the cutout of the work piece The tip joint part that is partially joined, and in the notch trigger mounting part of the carrier body, a circle to avoid stress concentration is formed at positions corresponding to the remaining two vertices of the triangular contour of the notch trigger形 槽。 Shaped groove. The carrier device of a thin disk-shaped work piece according to any one of claims 1 to 4, wherein the tip joint portion of the notch trigger has a circular arc profile shape, and its cross section is set to correspond to the work piece The cross-sectional shape of the cut part. A method of manufacturing a carrier device for a thin disk-shaped work piece according to any one of claims 1 to 5, which supports and rotates the thin disk-shaped work piece while grinding or polishing at least one side of the work piece In an apparatus, the carrier device is used to form a work piece rotating support device for rotating and driving and simultaneously positioning and supporting the circular outer periphery of the work piece. The method includes the following steps (1) to (3): (1) The cleaning step is to clean and degrease the joint surface of the notched trigger mounting portion of the carrier body and the joint surface of the notched trigger coupling portion; (2) The coupling step is to locate and maintain the carrier body and the notch The parallelism of the trigger, and when applying the adhesive, the bonding surface of the notched trigger mounting portion of the carrier body and the bonding surface of the notched trigger coupling portion; and (3) the finishing step, which is Remove the excess adhesive exposed by the joints when the carrier body and the notch trigger are integrally joined in the joining step. A bilateral grinding machine for thin disk-shaped work pieces, which is used to rotate and support a thin disk-shaped work piece, feed a pair of grinding wheels rotating at a high speed in the axial direction of the grinding wheel, and simultaneously grind using the two grinding wheels The surface and the opposite side of the work piece include: a pair of grinding wheels, which are configured such that the grinding faces can face each other, and a work piece rotation support member, which is used for the work piece The surface and the opposite side support and rotate the working member with respect to the two grinding surfaces between the grinding surfaces of the pair of grinding wheels, wherein the working member rotation support member has a position for positioning in an axial direction And an axial support member supporting the work piece, and a radial support member for positioning, rotating, and supporting the work piece in a radial direction, and the radial support member has any one of claims 1 to 5 The said carrier device.