KR20140031816A - Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine - Google Patents

Abstract

In processing of the surface of a thin disk-shaped workpiece, provided is a carrier apparatus capable of securing high efficient and high precise processing with a simple and cheap structure. The present invention relates to a carrier apparatus (6) of a work rotation support device (5), which rotates in the state of positioning and supporting the circular outer circumference of a workpiece (W) in an apparatus grinding the surfaces (Wa, Wb) of the workpiece (W) while supporting and rotating the thin disk-shaped workpiece. The carrier apparatus integrally comprises a ring-shaped carrier main body (31) having a circular inner edge (31a) closely surrounding the whole edge of the workpiece (W); and a notch trigger (32) having a leading end engaging portion (32a) interlocked with the notch (Wn) of the workpiece (W). The carrier apparatus is equipped with a mounting structure, in which the notch trigger (32) is welded and fixed to the carrier main body (31) integrally and in a replaceable manner as an individual part, and the leading end engaging portion (32a) is projected toward the inside of the diameter direction from a part of the circular inner circumference (31a) of the carrier main body (31).

Description

Carrier device for thin disk-shaped workpieces and a method of manufacturing the same, and a double-sided grinding device TECHNICAL FIELD [0001] < RTI ID = 0.0 > CARRIER APPARATUS OF THIN DISK-SHAPED WORKPIECE, METHOD OF MANUFACTURING THE SAME

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a carrier device for a thin disk-shaped workpiece, a method for manufacturing the same, and a double-sided grinding device. More particularly, the circular outer periphery of a workpiece is used in the processing of the surface and / or the rear surface of a thin disk-shaped workpiece such as a semiconductor wafer. It relates to a workpiece rotation support technology for positioning and driving rotation in the direction.

For example, the semiconductor wafer is obtained by thinly slicing from a cylindrical semiconductor ingot made of single crystal silicon, and then the front and back surfaces thereof are subjected to finish processing by a grinding device or a polishing device to finish the smooth surface.

By the way, in the grinding or polishing of a thin disk-shaped workpiece (hereinafter referred to as a workpiece) such as a semiconductor wafer, a method of processing the surface and / or the rear surface thereof while supporting and rotating the workpiece is taken, for example, a table of a semiconductor wafer. There exists a thing of patent document 1 as a double-sided grinding apparatus which grinds a back surface.

In the double-sided grinding apparatus of patent document 1, the carrier ring b which forms the annular shape of the carrier apparatus a is rotatably arrange | positioned at the frame which is not shown in figure. A pair of fixed carrier bodies c is arranged on one inner circumference of the carrier ring b, and a pair of movable carrier bodies d are arranged on the other inner circumference in a horizontal plane about the axis e. The fixed and movable carrier main bodies c, d, ... constitute a carrier main body for positioning the workpiece (wafer) W in the radial direction and supporting rotation. And the workpiece | work W is detachably held by the inner peripheral part of this carrier main body c, d, .... Moreover, the workpiece | work W is received and supported in the carrier ring b in the state which floated by the air from the air bearing apparatus which is not shown in figure.

A spring f is hung between the two movable carrier bodies d and d, and the two movable carrier bodies d and d are rotated and biased toward the work W side by the spring f, so that the workpiece W The workpiece W is loosely held in the proximity state. In addition, an actuator (not shown) is disposed on the carrier ring b, and the movable carrier bodies d and d resist the biasing force of the spring f by this actuator at the time of carrying in and out of the work W. The work W is released from the holding state by being rotated in the outward direction of the carrier ring b.

In this connection, the workpiece W has a slight gap between the inner circumferential portion of the carrier bodies c, d, ..., that is, between the fixed carrier bodies c, c and the inner circumferential edge of the movable carrier bodies d, d. Is maintained.

A notch trigger (g) is attached and fixed to one side inner circumference of the carrier ring (b) so as to be located between the pair of fixed carrier bodies (c, c), and a tip engaging portion (h) having a sharp triangular shape in the shape of a flat triangular shape at the distal end thereof. ) Is formed. And when the workpiece | work W is hold | maintained between the fixed carrier main body c and the movable carrier main body d, the tip engaging part h of this notch trigger g will notch as a cutout part of the outer periphery of the workpiece | work W. Meshes with (Wn). In this state, the carrier ring b is rotated by a motor (not shown), whereby the work W is integrally rotated through the notch trigger g.

A pair of cup-shaped grindstones i and i and motors j and j for rotating them are disposed on the carrier device a so as to be capable of cutting movement with respect to the carrier device a.

Then, the workpiece W is rotated through the notch trigger g by the rotation of the carrier ring b while the workpiece W is held in the carrier device a, and a pair of grinding wheels i, i Is rotated and is cut and moved toward the front and back surfaces of the workpiece (W). By this cutting movement, both grindstones i and i simultaneously grind the front and back surfaces of the workpiece W. FIG.

Further, as described in Patent Literature 2, there is also a structure in which the carrier bodies c, d, ..., and the notch trigger g are formed as an integral part in a machining technique for mirror-polishing or lapping the surface of a semiconductor wafer.

Japanese Patent Publication No. 2003-71704 Japanese Patent Laid-Open No. 11-333707

However, the structure of such a conventional carrier device has the following problems, and further improvement is desired.

(1) Since the carrier bodies c, d, ... and the notch trigger g in contact with the workpiece W are worn over time, they are used interchangeably as consumables. It was a structure difficult to reduce.

In particular, since the plurality of stationary and movable carrier bodies c, d, ... constituting the carrier body have a function of positioning the workpiece W in the radial direction, the replacement is generally performed collectively, thus preventing cost reduction. It was.

(2) The notch trigger g, which functions as a rotation drive plate of the work W, is generally made of a carrier body and an individual part because of abrasion and a high frequency of exchange compared to the carrier bodies c, d, .... The base end is fixed to the carrier ring b and protrudes radially inward through the pair of fixed carrier bodies c and c to fit the notch Wn of the workpiece W. Physics is a structure. By the way, in such a structure, the notch trigger g protrudes radially inward from the carrier ring b which is an attachment part, and becomes a support structure like a cantilever, and tends to bend large when a load is applied to the notch trigger g. As a result, the work W may follow the notch trigger g and bend, or the engagement state of the work W and the notch trigger g may fall out, resulting in the occurrence of defective products due to the cracking of the work W, Problems such as breakage of the whetstones i and i have occurred.

In particular, when using grinding wheels i and i of large diameter to improve grinding efficiency and grinding accuracy, the carrier ring b is also inevitably large to prevent interference with the grinding wheels i and i. As a result of the diameter, the length dimension of the notch trigger g is also very large, which makes the problem more remarkable.

(3) Since the notch trigger g is thinner than the work W and a rigid material is required, the present state becomes a special laminated structure as described in Patent Document 1, or PEEK (polyetheretherketone). Engineering plastics such as resins need to be scraped off to the required thickness, and the material and manufacturing cost are high, and the consumables are expensive parts.

(4) Since the carrier body surrounding the outer circumference of the work W has a divided structure composed of a plurality of fixed and movable carrier bodies c, d, ..., distortion and warpage of the plate are likely to occur in the respective plates, The work W was adversely affected and the improvement of grinding precision was prevented.

(5) Moreover, in the structure in which the said carrier main bodies c, d, ..., and the notch trigger g are formed as an integrated product as described in patent document 2, when the said notch trigger part with severe abrasion wears out first, Both the carrier body and the notch trigger which are integral parts must be replaced at once, and in order to prolong the life of this unit, when the constituent material is a material suitable for a notch trigger, the material cost will become high.

SUMMARY OF THE INVENTION The present invention has been made in view of such conventional problems, and its object is to ensure high efficiency and high precision processing with a simple and inexpensive structure in the processing of the surface and / or the back side of a thin disk-shaped workpiece such as a semiconductor wafer. It is providing the carrier apparatus which can be performed.

Another object of the present invention is to provide a method for producing a carrier device which can produce the carrier device at low cost.

It is still another object of the present invention to provide a double-sided grinding device having the carrier device as a constituent device and capable of grinding the front and back surfaces of a thin disk-shaped work such as a semiconductor wafer with high efficiency and with high accuracy.

In order to achieve the above object, the carrier device of the thin disk-shaped workpiece of the present invention is a device for grinding or polishing at least one side surface of the workpiece while supporting and rotating the thin disk-shaped workpiece, and supporting and rotating the circular outer circumference of the workpiece. A carrier device constituting a work rotation support device for driving, an annular carrier body having a circular inner circumferential edge that surrounds the entire circumference of the workpiece in close proximity, and a tip engagement engaged with a cutout formed in the circular outer circumferential edge of the workpiece. A notch trigger having a portion is constituted as an integral body, wherein the notch trigger is interchangeably and integrally fixedly fixed as a separate part with respect to the carrier body, while the tip engagement portion is formed from a portion of the circular inner circumferential edge of the carrier body. Protrude radially inward It characterized in that and a complex structure.

As a suitable embodiment, the following configurations are adopted.

(1) The thickness dimension of the said carrier body and a notch trigger is set smaller than the finishing thickness dimension of the said workpiece, and the joining fixation of the notch trigger with respect to the carrier body is made with the adhesive which can be unlocked.

(2) The notch trigger mounting portion of the carrier main body is cut into a shape corresponding to the outer circumferential contour of the joining portion of the notch trigger, and the adhesive is applied to the joining surface of the notch trigger mounting portion.

(3) The notch trigger is composed of a thin plate member having a triangular contour of the tip engaging portion where one vertex engages the incision of the workpiece, and the triangular contour of the notch trigger in the notch trigger mounting portion of the carrier body. A circular groove for avoiding stress concentration is formed at a location corresponding to the remaining two vertices of.

(4) The tip engaging portion of the notch trigger has an arc-shaped contour shape and its cross section is set corresponding to the cross-sectional shape of the cutout portion of the workpiece.

The manufacturing method of the carrier apparatus of the thin disk-shaped workpiece | work of this invention is a method suitable for manufacturing the said carrier apparatus, and includes the process of the following (a)-(c).

(a) A cleaning step of cleaning and degreasing the bonding surface of the notch trigger mounting portion of the carrier body and the bonding surface of the junction of the notch trigger.

(b) Bonding step of positioning and maintaining the parallelism between the carrier body and the notch trigger, and closely bonding the joining surface of the notch trigger mounting portion of the carrier body and the junction of the notch trigger while applying an adhesive.

(c) The finishing process of removing the excess adhesive which protruded to the outside from the junction part of the carrier main body and notch-trigger which were integrally bonded by the said bonding process.

The double-sided grinding device of the thin disk-shaped workpiece of the present invention rotates and supports a thin disk-shaped workpiece, and cuts a pair of wagon wheels that rotate at high speed in the wagon wheel axial direction, and by the grinding surface of both end wheels An apparatus for simultaneously grinding the front and back surfaces of the workpiece, wherein the front and rear surfaces of the workpiece are disposed between a pair of grindstones arranged so that the grinding surfaces of the end faces face each other, and the workpiece is ground between the grinding surfaces of the pair of grindstones. It is provided with the workpiece | work rotation support means which carries out support rotation in the state which opposes both these grinding surfaces, This workpiece rotation support means consists of axial support means which positions and supports the said workpiece | work in the axial direction, and a workpiece | work in radial direction. A radial support means for positioning and rotating support is provided, and the radial support means comprises the carrier device. .

[Effects of the Invention]

According to the carrier device of the present invention, in a device for grinding or polishing at least one side surface of the work while supporting and rotating a thin disk-shaped work, a work rotation support device for positioning and supporting and rotating the circular outer periphery of the work is driven. A carrier device comprising: an annular carrier body having a circular inner circumferential edge surrounding the entire circumference of the workpiece in close proximity, and a notch trigger having a tip engaging portion engaged with a cutout formed at the circular outer circumferential edge of the workpiece. And the notch trigger is interchangeably and integrally fixed to the carrier body as a separate part and the tip engagement portion projects radially inwardly from a portion of the circular inner circumferential edge of the carrier body. When we are equipped with structure The effects listed below are obtained in which can be simple and also provides a carrier device which can ensure a high efficiency and high precision processing with inexpensive structure.

(1) Since the annular carrier body that surrounds the entire circumference of the work in close proximity and the notch trigger engaged with the cutout of the work are formed as an integrated body, the number of parts is reduced and the structure is simple and structurally expensive. Can be reduced.

(2) Since the carrier main body for positioning the outer circumference of the work in the radial direction is formed in a continuous annular shape having a circular inner circumferential edge surrounding the entire circumference of the work in close proximity, the carrier main body of the conventional divided structure (Fig. 8). Compared to the reference), the rigidity is high, and it does not adversely affect the machining accuracy of the workpiece during machining, and thus high precision surface machining is realized.

(3) Similarly, since the carrier body is continuously connected in an annular manner, compared with the carrier main body (see Fig. 8) of the conventional split structure, the processing distortion at the time of carrier body production is small, and the distortion occurrence at the time of attachment to the carrier ring is also achieved. It is possible to effectively prevent the warpage and warpage deformation during workpiece machining, and from this point of view, it does not adversely affect the machining precision of the workpiece during machining, and thus high-precision surface machining is realized.

(4) Since the notch trigger is a structure that is interchangeably and integrally bonded and fixed to the carrier body as individual parts, it is possible to obtain an optimal constituent material for each of the notch trigger and the carrier body so that the material cost of the entire apparatus can be reduced. Reduction can be aimed at.

In particular, it is possible to use a high-strength and wear-resistant material only for notch triggers that function as a rotation drive member of the work and have a high wear rate, so that the use of expensive materials can be reduced to a small extent, thereby reducing the material cost of the entire apparatus. It can be suppressed low.

(5) In addition, since the notch trigger is interchangeably and integrally fixedly fixed to the carrier body as a separate part, it is sufficient to replace only the notch trigger when the notch trigger is worn out first. The carrier body can continue to be used until its end of life, and in this respect, the material cost of the whole apparatus can be kept low.

(6) Since the notch trigger is integrally bonded and fixed to the carrier body, the dimension projecting radially inward from the attachment portion of the notch trigger is very small, and thus notch unlike the supporting structure such as a conventional cantilever. It does not bend much when the trigger is loaded. As a result, the work follows the notch trigger and the engagement state of the work and the notch trigger does not fall out, and problems such as the generation of defective products due to the cracking of the work and the damage of the machining tool such as the grinding wheel are unlikely to occur.

For example, it is necessary to increase the length dimension of the notch trigger because there is no interference between the attachment part of the notch trigger and the wheel difference even when a large diameter wheel is used in order to improve the grinding efficiency and grinding accuracy in the grinding process. There is no.

(7) Similarly, with the notch trigger attachment structure described above, it is unnecessary to use expensive materials (e.g. PEEK) as a countermeasure against stiffness deterioration due to the conventional cantilever structure. Reduction is possible.

(8) Since the notch trigger is joined and fixed to the carrier body, the shape thereof can be simplified, thereby reducing the processing cost of the notch trigger and reducing the amount of material used as compared with the conventional notch trigger. In this respect, the cost can be reduced.

Moreover, according to the manufacturing method of the carrier apparatus of this invention, the carrier apparatus by which the effects enumerated above are effectively exhibited can be manufactured easily and inexpensively.

Moreover, according to the double-sided grinding apparatus of this invention, the effect enumerated above is exhibited effectively by providing the said carrier apparatus, and the front and back surfaces of a thin disk-shaped workpiece can be simultaneously ground with high efficiency and high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS It is a side view which shows the structure of the principal part of the horizontal double-head flat grinding board which is one Embodiment of this invention.
FIG. 2 is a front view which shows the structure of the principal part of the coplanar grinding board by partial cross section along the II-II line of FIG.
It is a front view which expands and shows the structure of the carrier main body which is a principal part of the carrier apparatus of a coplanar grinding board, and a notch trigger.
4 is a cross-sectional view taken along the line IV-IV of FIG. 1 in an enlarged manner similarly to the structure of the carrier body and the notch trigger of the same carrier device.
FIG. 5 is an enlarged perspective view in which the carrier main body and the notch trigger of the same carrier device are disassembled.
6 is an enlarged view of the same notch trigger, FIG. 6A is a front view, and FIG. 6B is a plan view.
It is a front view which shows the semiconductor wafer which is the workpiece | work to be ground of the coplanar grinder.
FIG. 8: shows the principal part of the conventional double-sided planar grinder which grinds the same semiconductor wafer, FIG. 8 (a) is a front view shown by a partial cross section, and FIG. 8 (b) is a side view.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail based on drawing. In addition, the same code | symbol has shown the same structural member or element throughout the drawings.

The double-sided grinding apparatus by this invention is shown in FIG. 1 and FIG. 2, This grinding apparatus grinds the front and back surfaces of the semiconductor wafer as shown in FIG. 7 which is a thin disk-shaped workpiece | work W specifically, simultaneously. The grinding wheel shafts 3 and 4 of the pair of grinding wheels 1 and 2 face horizontally and are supported by a horizontal double head planar grinding disc.

The semiconductor wafer W, which is the processing target of the present embodiment, has a thin disk shape having a thickness of 1 mm or less, and a notch Wn as a cutout portion is formed at the circular outer circumferential edge thereof so as to match the crystal orientation of the wafer in the manufacturing process. have. In this embodiment, it is set as the structure which grinds using this notch Wn effectively.

As shown in FIG. 1 and FIG. 2, this grinding board is provided with basic structures, such as a pair of left and right wheels 1 and 2 and the workpiece | work rotation support apparatus 5 which are main components of a grinding-processing part, and a workpiece | work rotation is carried out. As a main component of the support device 5, a carrier device 6 which is a feature configuration of the present invention is included.

The grindstone wheels 1 and 2 are cup-shaped grindstone wheels specifically, and the peripheral edge front end surfaces 1a and 2a become an annular grinding surface. These grinding wheels 1 and 2 are arranged so that the grinding surfaces 1a and 2a face each other in a substantially parallel state, and the workpiece (as described later in the grinding position between these grinding surfaces 1a and 2a) will be described later. W) is configured to be rotatably supported by the workpiece rotation support device 5.

Specifically, the whetstone wheels 1 and 2 are detachably attached and fixed to the distal end of the whetstone shafts 3 and 4. These grindstone shafts 3 and 4 are driven and connected to the drive motors 7 and 8 installed inside the grindstone not shown, and the shafts thereof are similarly driven by a grindstone cutting device (not shown) mounted inside the grindstone. It has a structure in which cutting operation | movement is carried out to a direction, ie, cutting direction X and Y, respectively.

The workpiece rotation support device 5 functions as a workpiece rotation support means for supporting and rotating the workpiece W, and the workpiece W is disposed between the grinding surfaces 1a and 2a of the pair of grinding wheels 1 and 2. The front and back surfaces Wa and Wb are configured to support and rotate in the vertical state opposite to the two grinding surfaces 1a and 2a.

The work rotation support device 5 includes an axial support means 10 for positioning and supporting the work W in the axial direction, and a radial support for rotating and supporting the work W in the radial direction. It comprises a means (11), the radial support means (11) comprising the carrier device (6) as a main component.

The axial support means 10 is in the form of a constant pressure support device for positioning and supporting the front and back surfaces Wa and Wb of the workpiece W in a non-contact state with a constant pressure fluid, and as an main component thereof, opposing shapes. And a pair of left and right positive pressure pads 15 and 16 provided in this manner. These static pressure pads 15 and 16 are connected to a fluid supply source (not shown), and pressure fluid such as water supplied from the fluid supply source is ejected from the constant pressure groove (not shown), and the front and rear surfaces Wa of the work W, Wb) is configured to maintain a constant pressure in a non-contact state at a substantially axial center position between the grinding surfaces 1a and 2a of the two wheels 1 and 2.

The radial support means 11 is in the form of a rotation drive device for rotating and driving the workpiece W in the radial direction, and the carrier device 6 fitting and supporting the workpiece W as its main component. ) And a rotating device 17 as a rotation driving unit for supporting and rotating the carrier device 6.

As shown in FIG. 1, as for the rotating apparatus 17, the support roller 20, 20, ... of several (four in embodiment shown) is made into the outer peripheral surface 30a of the carrier ring 30 of the said carrier apparatus 6 And rotatably support the ring drive gear 21 to the inner tooth 33a of the carrier presser 33 which is integrally fitted and fixed to the carrier ring 30, The ring drive gear 21 is drive-connected to a rotational drive source (not shown).

And the carrier apparatus 6 fitting-supporting the workpiece | work W by the drive rotation of the ring drive gear 21 by this rotation drive source rotates around the rotation center defined by the support rollers 20, 20, ... It is operated so that the work W is supported and rotated in the radially positioned state.

The carrier device 6 fits and supports the workpiece W, and as shown in FIGS. 1 and 2, the carrier ring 30, the carrier body 31, the notch trigger 32, and the carrier presser 33. ) As the main part.

The carrier ring 30 is a site functioning as a main body ring of the carrier device 6, and is in the form of an annular ring member as shown in FIG. 1, and as shown in FIGS. 2 and 4, the outer peripheral surface 30a is It is formed in a cylindrical surface. And as mentioned above, the outer peripheral surface 30a is rotatably positioned and supported by the four support rollers 20, 20, ... of the rotating apparatus 17 which is a rotation drive part as mentioned above.

In addition, an annular attachment groove 30c is continuously formed on the inner diameter side of the carrier ring 30 over its entire circumference, and the outer peripheral edge portion of the carrier body 31 is fitted into the attachment groove 30c. The annular carrier presser 33 has a structure in which the annular carrier presser 33 is fixed in a sandwiched form so as to be separated and exchanged. As the fixing of the carrier presser 33 to the carrier ring 30, conventionally known fixing means is appropriately selectively employed, and in the illustrated embodiment, an attachment bolt (not shown) is used.

Moreover, the carrier presser 33 becomes the form of the inner tooth which consists of an annular ring member as shown in FIG. 1, and the said inner tooth 33a is formed in the inner periphery. Then, in the state where the carrier presser 33 is integrally fixed and fixed to the attachment groove 30c of the carrier ring 30, as described above, the four support rollers of the rotating device 17 which is the rotation drive unit ( The outer circumferential surface 30a of the carrier ring 30 is rotatably supported by 20, 20,... And the ring drive gear 21 of the rotating device 17 on the inner tooth 33a of the carrier presser 33. Has an interlocking configuration.

The carrier main body 31 is a site | part which fits and supports the workpiece | work W in cooperation with the notch trigger 32, Specifically, it becomes a form of the thin circular ring-shaped board | plate material as shown in FIG. 1, The circular inner peripheral edge 31a ) Closes the entire circular outer circumference (total circumference) of the work W. That is, the said circular inner peripheral edge 31a has an inner diameter dimension slightly larger than the outer diameter dimension of the workpiece | work W to grind, and is comprised so that a predetermined clearance gap may be formed between the outer peripheral edge of the workpiece | work W, The workpiece W is fitted and supported in a form in which the workpiece W is loosely fitted to the carrier main body 31.

The notch trigger 32 has the tip engaging part 32a which engages in the notch Wn which is the cutout part formed in the circular outer peripheral edge of the workpiece | work W, and is comprised as said body with the said carrier main body 31. As shown in FIG.

Specifically, the notch trigger 32 is interchangeably and integrally fixedly fixed to the carrier body 31 as an individual component, and the tip engagement portion 32a has a circular inner circumferential edge () of the carrier body 31. The mounting structure which protrudes radially inward from a part of circumferential direction of 31a) is provided. The tip engaging portion 32a of the notch trigger 32 has the notch Wn of the workpiece W in a state where the workpiece W is fitted and supported in a loosely fitted form in the circular inner circumferential edge 31a of the carrier body 31. ) Is engaged in the rotational direction of the carrier device 6.

The carrier body 31 and the notch trigger 32 have a structure in which the workpiece W is loosely fitted and supported in such a manner that the carrier body 31 is integrally rotated in the rotational direction while positioning in the radial direction. Because of the sharp contact with, the gap between the workpiece and the workpiece W becomes excessively large or unevenly worn due to wear, thereby affecting the grinding precision.

For this reason, the carrier main body 31 and the notch trigger 32 are the consumable parts exchanged regularly or irregularly, and have a characteristic structure as described below.

The thickness dimension of the carrier main body 31 and the notch trigger 32 is set smaller than the finishing thickness dimension of the workpiece W, and the joint fixing of the notch trigger 32 to the carrier main body 31 is possible with the adhesive which can be unlocked. It is made of a structure.

In addition, the notch trigger mounting portion 35 of the carrier body 31 is formed to be cut in a shape corresponding to the outer circumferential shape of the proximal end junction 32b of the notch trigger 32, and the notch trigger mounting portion 35 The adhesive is apply | coated to the bonding surface of ().

In the illustrated embodiment, the notch trigger 32 is specifically referred to as the tip engaging portion 32a in which one vertex is engaged with the notch Wn of the workpiece W, as shown in FIGS. 5 and 6. A thin plate member having a triangular contour to be formed, wherein the notch trigger mounting portion 35 of the carrier body 31 corresponds to the remaining two vertices of the triangular contour of the notch trigger 32 (corner portion). The circular grooves 35a and 35a for avoiding stress concentration are formed in the grooves. These circular grooves 35a and 35a have a secondary effect of facilitating the manufacture of the notch trigger mounting portion 35.

Further, in the illustrated embodiment, the tip engaging portion 32a of the notch trigger 32 is finished in an R shape as shown in Figs. 5 and 6 (a), and has an arc-shaped contour shape, and in the axial direction. The corner portion of is finished in a rectangular shape, and its cross section is a rectangular cross section as shown in Fig. 6B. The specific shape structure of this tip engaging part 32a is set to the thing suitable for the relationship with the shape structure of the notch Wn of the workpiece | work W used as the mating partner.

That is, the tip engaging portion 32a is finished in an R shape as shown in Fig. 6 (a) so as not to penetrate into the notch Wn of the workpiece W.

The end surface of the tip engaging portion 32a is finished in a rectangular cross section as shown in Fig. 6 (b) so that the outer circumference (including the notch Wn portion) of the work W is less likely to be damaged. In some cases, chamfering or the like is performed, and in such a case, when the chamfer similar to that of the workpiece W is also applied to the notch trigger 32, the notch Wn of the workpiece W is not caught by the notch trigger 32 ( This is to prevent such a situation because it may not be engaged.

Therefore, when the outer periphery including the notch Wn part of the workpiece | work W is finished by the rectangular cross section rather than the chamfer opposite to the above, the tip engaging part 32a of the said notch trigger 32 respond | corresponds to this. Although the cross section of the structure is opposite to the embodiment shown, that is, although not specifically shown, it is not a rectangular cross section as shown in FIG.6 (b), but finishing processing, such as chamfering, is performed.

The carrier main body 31 and the notch trigger 32 consider the material of the workpiece | work W which is a grinding | polishing object, and the constituent material is set, and is not specifically limited. In addition, although the material of both mutually is also made the same or different, it selects suitably, but it is preferable to set in consideration of the wear degree.

For example, the material of the notch trigger 32, in particular, in the case where the silicon wafer is the object W as the work W, as in the present embodiment, has a problem such as metal contamination, and therefore, metals are not preferable.

In the illustrated embodiment, the carrier body 31 uses an inexpensive glass fiber reinforced plastics (GFRP), and the notch trigger 32 is an engineering plastic having a higher strength than the GFRP used for the carrier body 31. Production cost can be suppressed by using FRP based on (Engi neering plastic), for example, PEEK (polyetheretherketone).

As mentioned above, although both the carrier main body 31 and the notch trigger 32 are consumables, it is preferable to use only the notch trigger 32 with high strength and high wear resistance because the notch trigger 32 has a high replacement frequency.

As described above, the notch trigger 32 is integrally joined to and fixed to the carrier main body 31 as a separate component, but the notch trigger 32 is integrally joined to the carrier main body 31 and fixed. The work (manufacturing method) made with water is performed by the process of the following (a)-(c).

(a) Cleaning process of joining surface :

The joint surface of the notch trigger mounting part 35 of the said carrier main body 31 and the joint surface of the junction part of the notch trigger 32 are fully cleaned, and a degreasing process is carried out.

This step is performed in order that the adhesive as the means for joining in the next joining step is extremely reluctant to contamination, water, oil, etc., so that the adhesive is removed to sufficiently exhibit the fixing ability of the adhesive.

(b) Bonding process:

While maintaining and maintaining the parallelism between the carrier body 31 and the notch trigger 32, an adhesive is applied to the bonding surface of the notch trigger mounting portion 35 and the notch trigger 32 of the carrier body 31. Bond closely while intervening.

The application point of the said adhesive agent is the whole flat part surface of the notch-trigger mounting part 35 in FIG. 5, and the commercially available instant adhesive agent is used suitably as an adhesive agent. As the selection conditions for the instant adhesive, it is considered that the bonding fixing means of the present embodiment has sufficient strength, one-liquidity, high viscosity, and good workability.

In addition, when joining the carrier main body 31 and the notch trigger 32, sufficient care must be taken so that the notch trigger 32 and the carrier main body 31 are parallel, and using a surface plate having a flatness plan and the like is relatively easy. Parallelism of both 31 and 32 is obtained.

(c) finishing process:

The excess adhesive which protruded to the outside from the junction part of the carrier main body 31 and the notch trigger 32 which were integrally bonded by the said bonding process is removed completely, and it finishes.

When the notch trigger 32 and the carrier main body 31 which are integrally bonded together without removing the adhesive protruding from the joining portion are used as they are, the grinding wheels 1 and 2 come into contact with the grinding wheels 1 and 2 during grinding. This may cause blockage of the grinding surfaces 1a and 2a and damage to the work W. FIG.

In this way, the notch trigger 32 integrally bonded to the carrier main body 31 is engaged with the notch Wn of the workpiece W to rotate integrally as shown in FIG. The notch trigger 32 of one embodiment is hard to be peeled off from the carrier main body 31 by the joining fixing structure (including the notch trigger 32 which has a triangular outline) as shown in FIG. On the other hand, since the bonding area of both 31 and 32 is small, the coupling force in the rotation axis direction is weak, and therefore the separation and replacement of the notch trigger 32 from the carrier main body 31 can be performed very easily.

However, in the double-sided grinding device comprised as mentioned above, while the workpiece | work rotation support apparatus 5 supports the workpiece | work W to a grinding position, the pair of grinding wheels 1 and 2 which rotate at high speed are the grinding wheel shafts. The cutting surface Wa and Wb of the said workpiece | work W are simultaneously ground by the grinding surfaces 1a and 2a of these grinding wheels 1 and 2, respectively cutting by predetermined cutting amount to (3, 4) direction. do.

In the said workpiece | work rotation support apparatus 5, the front and back surfaces Wa and Wb of the workpiece | work W supported by the carrier apparatus 6 of the radial direction support means 11 are the positive pressure of the axial support means 10. The carrier device 6 is held at a constant pressure in a non-contact state by the pads 15 and 16 and is positioned and supported at an almost axial center position between the grinding surfaces 1a and 2a of the grinding wheels 1 and 2. Rotation operation is performed around the rotation center defined by the support rollers 20, 20, ..., and the support W is rotated in the state positioned in the radial direction.

As mentioned above, according to the carrier apparatus 6 of this embodiment, the effects as listed below are acquired.

(1) Since the annular carrier main body 31 which encloses the whole periphery of the workpiece | work W closely and the notch trigger 32 which engages with the notch Wn of the workpiece | work W are comprised as one body, As the number of parts is small, the structure is simple and structural cost can be reduced.

(2) The carrier main body 31 which positions the outer periphery of the workpiece | work W in the radial direction is formed in the continuous annular shape which has the circular inner peripheral edge 31a which encloses the whole perimeter of the workpiece | work W closely. Therefore, rigidity is high compared with the carrier main bodies c, d, ... of the conventional divided structure as shown in FIG. 8, and does not adversely affect the processing precision of the workpiece | work W during grinding, and high-precision surface processing is implement | achieved.

(3) Similarly, since the carrier main body 31 is continuously connected in an annular manner, processing at the time of manufacturing the carrier main body 31 as compared with the carrier main bodies c, d, ... of the conventional divided structure as shown in FIG. There is little distortion, and the distortion at the time of attachment to the carrier ring 30 can also be effectively prevented, and the distortion and the deformation | transformation at the time of grinding the workpiece | work W are hard to generate | occur | produce, also in this respect, It does not adversely affect the machining precision, and high precision surface machining is realized.

(4) Since the notch trigger 32 is a structure in which the notch trigger 32 is interchangeably and integrally fixed to the carrier body 31 as a separate component, each of the notch trigger 32 and the carrier body 31 is optimally constituted. The material cost of the whole carrier apparatus 6 can be reduced.

In particular, it is possible to use a material having a high strength and high wear resistance only for the notch trigger 32 which functions as a rotation drive member of the work W and has a high wear rate, thereby reducing the amount of expensive materials used. The material cost as the whole carrier apparatus 6 can be kept low.

(5) In addition, since the notch trigger 32 is a structure in which the notch trigger 32 is interchangeably and integrally fixedly fixed to the carrier body 31 as a separate part, the notch trigger 32 that is severely worn is worn out first. Only the notch trigger 32 needs to be replaced, and the carrier main body 31 can continue to be used as it is until the end of its life, and in this respect, the material cost of the entire apparatus can be kept low.

(6) Since the notch trigger 32 has a structure in which the notch trigger 32 is integrally bonded and fixed to the carrier main body 31, the dimension projecting inward in the radial direction from the attachment portion of the notch trigger 32 is very small, and therefore, conventionally Unlike a support structure such as a cantilever, the load is applied to the notch trigger 32 but does not bend much. As a result, the work W does not follow the notch trigger 32 and bends, or the engagement state of the work W and the notch trigger 32 does not come out, and the occurrence of defective products or grindstones due to the cracking of the work W as in the prior art Problems such as car breakdown are unlikely to occur.

For example, even when the grinding wheels 1 and 2 of large diameter are used to improve the grinding efficiency and the grinding accuracy, there is no interference between the attachment part of the notch trigger 32 and the grinding wheels 1 and 2. It is not necessary to increase the length dimension of the notch trigger 32.

(7) Similarly, due to the attachment structure of the notch trigger 32 as described above, it is unnecessary to use expensive materials (e.g. PEEK) as a countermeasure against stiffness deterioration due to the conventional cantilever structure. The cost can be reduced.

(8) Since the notch trigger 32 is structured to be bonded to the carrier main body 31, the shape thereof can be simplified, thereby reducing the processing cost of the notch trigger 32, and the conventional notch. Compared with the trigger 32, the amount of material used can be reduced, and the cost can be reduced.

Moreover, according to the manufacturing method of the carrier apparatus 6 of this invention, the carrier apparatus 6 which can exhibit the effect enumerated above effectively can be manufactured easily and inexpensively.

Moreover, according to the double-sided grinding apparatus of this invention, the effect enumerated above is exhibited effectively by providing the said carrier apparatus 6, and the front and back surfaces Wa and Wb of the thin disk shaped workpiece W are simultaneously carried out with high efficiency with high accuracy. Grinding is possible.

In addition, embodiment mentioned above shows the suitable embodiment of this invention to the last, and this invention is not limited to this, Various design changes are possible in the range.

For example, although embodiment shown is what applied this invention to the carrier apparatus 6 in a horizontal double head planar grinding disk, it is applicable also to the carrier apparatus of a vertical double head planar grinding disk as described in patent document 1, Moreover, it is applicable also as a carrier apparatus of the grinding apparatus which performs single side grinding. Moreover, this invention is applicable also as a carrier apparatus of the other machine tool which processes a thin disk shaped workpiece | work, for example, the grinding apparatus of patent document 2.

In addition, the workpiece | work W used as grinding object is not limited to the semiconductor wafer as shown in FIG. 7, The other thin disk shaped workpiece | work is also included.

In addition, as long as the specific structure of the carrier apparatus 6 can exhibit the same effect, other structures other than the figure can be employ | adopted, and as an example, the constituent material of the carrier main body 31 and the notch trigger 32 can be processed. It selects according to the material of the workpiece | work W to become, and is not limited to the thing of embodiment shown. For example, if the workpiece | work W which can use an iron type material, there exists an advantage that using an iron type material will also be high in rigidity and inexpensive.

W: Work (semiconductor wafer) Wn: Notch of work (incision)
Wa: surface of workpiece Wb: back surface of workpiece
1, 2: grinding wheel 1a, 2a: grinding surface of grinding wheel
5: workpiece rotation support device (work rotation support means)
6 carrier device 10 axial support means
11 radial support means 30 carrier ring
31 carrier body
31a: circular inner circumferential edge of the carrier body
32: notch trigger
32a: Advanced engagement of the notch trigger
33: carrier press
35: notch trigger mounting portion of the carrier body

Claims (7)

An apparatus for grinding or polishing at least one side surface of a workpiece while supporting and rotating a thin disk-shaped workpiece, the carrier apparatus comprising a workpiece rotation support apparatus for positioning and supporting and rotating a circular outer periphery of the workpiece.
An annular carrier body having a circular inner circumferential edge surrounding the entire circumference of the workpiece in close proximity, and a notch trigger having a tip engaging portion engaged with a cutout formed in the circular outer circumferential edge of the workpiece, being formed as an integral body,
The notch trigger has a mounting structure in which the tip engagement portion is radially inwardly projected from a portion of the circular inner circumference of the carrier body while being interchangeably and integrally fixedly fixed as an individual component to the carrier body. A carrier device of a thin disk-shaped workpiece, characterized in that. The method of claim 1,
A thickness device of the carrier body and the notch trigger is set smaller than the finishing thickness dimension of the workpiece, and the carrier device of the thin disk-shaped workpiece is characterized in that the fixing of the notch trigger to the carrier body is made by an adhesive which can be released. . 3. The method of claim 2,
The notch trigger mounting portion in the carrier main body is cut and formed in a shape corresponding to the outer circumferential contour shape of the junction of the notch trigger,
The carrier device of a thin disk-shaped workpiece, characterized in that the adhesive is applied to the joining surface of the notch trigger mounting portion. The method of claim 3, wherein
The notch trigger is composed of a thin plate member having a triangular contour of the tip engaging portion where one vertex engages the incision of the workpiece,
A carrier device for a thin disk-shaped workpiece, wherein a circular groove for preventing stress concentration is formed at a location corresponding to the remaining two vertices of the triangular contour of the notch trigger in the notch trigger mounting portion of the carrier body. 5. The method according to any one of claims 1 to 4,
A carrier device of a thin disk-shaped workpiece, characterized in that the tip engaging portion of the notch trigger has an arcuate contour shape and its cross section is set corresponding to the cross-sectional shape of the cutout portion of the workpiece. The manufacturing method of the carrier apparatus of a thin disk-shaped workpiece | work including the process of the following (1)-(3) as a method of manufacturing the carrier apparatus in any one of Claims 1-5.
(1) The cleaning process of cleaning and degreasing | bonding the joining surface of the notch trigger mounting part of the said carrier main body, and the joining surface of the junction of a notch trigger.
(2) A joining step of positioning and maintaining the parallelism between the carrier body and the notch trigger, and closely joining the joining surfaces of the notch trigger mounting portion of the carrier body and the junction of the notch trigger with an adhesive applied thereto.
(3) The finishing process of removing the excess adhesive which protruded to the outside from the junction part of the carrier main body and the notch trigger which were integrally bonded by the said bonding process. An apparatus for cutting and supporting a pair of whetstone wheels that rotate at high speed while rotating a thin disk-shaped workpiece in the direction of the whetstone axis, and simultaneously grinding the front and back surfaces of the workpiece by the grinding surfaces of the end faces of both wagon wheels.
A pair of grinding wheels arranged so that the grinding surfaces of the end faces face each other,
It is provided with the workpiece | work rotation support means which supports and rotates the said workpiece between the grinding surfaces of the said pair of grinding wheels, in the state which the front and back surfaces of the workpiece oppose each of these grinding surfaces,
The work rotation support means includes axial support means for positioning and supporting the workpiece in the axial direction, and radial support means for positioning and rotationally supporting the workpiece in the radial direction,
This radial support means is provided with the carrier apparatus as described in any one of Claims 1-7, The double-sided grinding apparatus of the thin disk-shaped workpiece | work characterized by the above-mentioned.

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