TWI623640B - 氣體封閉組件及系統 - Google Patents

氣體封閉組件及系統 Download PDF

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Publication number
TWI623640B
TWI623640B TW105142240A TW105142240A TWI623640B TW I623640 B TWI623640 B TW I623640B TW 105142240 A TW105142240 A TW 105142240A TW 105142240 A TW105142240 A TW 105142240A TW I623640 B TWI623640 B TW I623640B
Authority
TW
Taiwan
Prior art keywords
gas
specific examples
assembly
frame
panel
Prior art date
Application number
TW105142240A
Other languages
English (en)
Chinese (zh)
Other versions
TW201716616A (zh
Inventor
賈斯汀 默克
亞歷山大 守康 高
伊莉亞 沃斯凱
珊登 歐德森
Original Assignee
凱特伊夫公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 凱特伊夫公司 filed Critical 凱特伊夫公司
Publication of TW201716616A publication Critical patent/TW201716616A/zh
Application granted granted Critical
Publication of TWI623640B publication Critical patent/TWI623640B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/811Controlling the atmosphere during processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/12Guards, shields or dust excluders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/377Cooling or ventilating arrangements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
TW105142240A 2011-12-22 2012-12-21 氣體封閉組件及系統 TWI623640B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161579233P 2011-12-22 2011-12-22
US61/579,233 2011-12-22

Publications (2)

Publication Number Publication Date
TW201716616A TW201716616A (zh) 2017-05-16
TWI623640B true TWI623640B (zh) 2018-05-11

Family

ID=48669466

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105142240A TWI623640B (zh) 2011-12-22 2012-12-21 氣體封閉組件及系統
TW101148932A TWI568874B (zh) 2011-12-22 2012-12-21 氣體封閉組件及系統

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101148932A TWI568874B (zh) 2011-12-22 2012-12-21 氣體封閉組件及系統

Country Status (4)

Country Link
JP (4) JP6153539B2 (ko)
KR (7) KR20190090064A (ko)
TW (2) TWI623640B (ko)
WO (1) WO2013096503A1 (ko)

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US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
KR101970449B1 (ko) 2013-12-26 2019-04-18 카티바, 인크. 전자 장치의 열 처리를 위한 장치 및 기술
KR101813828B1 (ko) * 2014-01-21 2017-12-29 카티바, 인크. 전자 장치 인캡슐레이션을 위한 기기 및 기술
JP6461195B2 (ja) * 2014-04-30 2019-01-30 カティーバ, インコーポレイテッド 基板コーティングのためのガスクッション装置および技法
JP2017531049A (ja) * 2014-07-25 2017-10-19 カティーバ, インコーポレイテッド 有機薄膜インク組成物および方法
US9753463B2 (en) * 2014-09-12 2017-09-05 Applied Materials, Inc. Increasing the gas efficiency for an electrostatic chuck
CN107075767B (zh) * 2014-11-26 2021-09-03 科迪华公司 环境受控的涂层系统
CN107848309B (zh) * 2015-07-31 2020-05-19 科迪华公司 墨输送系统和方法
KR102539338B1 (ko) 2017-09-14 2023-06-02 가부시키가이샤 세이부 기켄 가스 치환용 드라이룸
JP7306683B2 (ja) * 2019-05-29 2023-07-11 株式会社西部技研 ガス置換用ドライルーム
JP7344450B2 (ja) * 2020-03-05 2023-09-14 トヨタ自動車株式会社 電池作製設備および電極スタックの作製空間形成方法
KR102473786B1 (ko) 2021-01-07 2022-12-06 (주)유니젯 인클로저 시스템
KR102279864B1 (ko) * 2021-02-16 2021-07-22 (주)삼백테크놀로지 이중확산 자연대류 순환형 냉각장치 및 이를 이용한 대용량 엘이디 등기구
US11892382B2 (en) 2021-08-27 2024-02-06 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility

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US5029518A (en) * 1989-10-16 1991-07-09 Clean Air Technology, Inc. Modular clean room structure
US6089282A (en) * 1998-05-08 2000-07-18 Aeronex, Inc. Method for recovery and reuse of gas

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4581478A (en) * 1982-04-07 1986-04-08 Pugh Paul F Gas pressurized cable and conduit system
US5029518A (en) * 1989-10-16 1991-07-09 Clean Air Technology, Inc. Modular clean room structure
US6089282A (en) * 1998-05-08 2000-07-18 Aeronex, Inc. Method for recovery and reuse of gas

Also Published As

Publication number Publication date
TWI568874B (zh) 2017-02-01
KR102530263B1 (ko) 2023-05-08
JP2015510254A (ja) 2015-04-02
KR20190090064A (ko) 2019-07-31
JP6379255B2 (ja) 2018-08-22
KR20140110967A (ko) 2014-09-17
WO2013096503A1 (en) 2013-06-27
JP6153539B2 (ja) 2017-06-28
KR102005688B1 (ko) 2019-10-01
JP2018200887A (ja) 2018-12-20
KR20230069251A (ko) 2023-05-18
JP2017228770A (ja) 2017-12-28
TW201716616A (zh) 2017-05-16
JP2019220472A (ja) 2019-12-26
KR102341544B1 (ko) 2021-12-21
KR20210156856A (ko) 2021-12-27
JP6605089B2 (ja) 2019-11-13
KR20180069096A (ko) 2018-06-22
KR20240036145A (ko) 2024-03-19
TW201343948A (zh) 2013-11-01
KR101869134B1 (ko) 2018-06-19
KR20200130757A (ko) 2020-11-19

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