TWI610075B - 薄膜檢查裝置及薄膜檢查方法 - Google Patents

薄膜檢查裝置及薄膜檢查方法 Download PDF

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Publication number
TWI610075B
TWI610075B TW105128956A TW105128956A TWI610075B TW I610075 B TWI610075 B TW I610075B TW 105128956 A TW105128956 A TW 105128956A TW 105128956 A TW105128956 A TW 105128956A TW I610075 B TWI610075 B TW I610075B
Authority
TW
Taiwan
Prior art keywords
light
film
lens
convex lens
circular aperture
Prior art date
Application number
TW105128956A
Other languages
English (en)
Chinese (zh)
Other versions
TW201727219A (zh
Inventor
Yasushi Takenaka
Daiki Sawai
Original Assignee
Ayaha Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ayaha Engineering Co Ltd filed Critical Ayaha Engineering Co Ltd
Publication of TW201727219A publication Critical patent/TW201727219A/zh
Application granted granted Critical
Publication of TWI610075B publication Critical patent/TWI610075B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0087—Simple or compound lenses with index gradient
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B2003/0093—Simple or compound lenses characterised by the shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW105128956A 2016-01-29 2016-09-07 薄膜檢查裝置及薄膜檢查方法 TWI610075B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016015739A JP6241897B2 (ja) 2016-01-29 2016-01-29 フィルム検査装置及びフィルム検査方法

Publications (2)

Publication Number Publication Date
TW201727219A TW201727219A (zh) 2017-08-01
TWI610075B true TWI610075B (zh) 2018-01-01

Family

ID=59502577

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105128956A TWI610075B (zh) 2016-01-29 2016-09-07 薄膜檢查裝置及薄膜檢查方法

Country Status (3)

Country Link
JP (1) JP6241897B2 (ja)
KR (1) KR101860733B1 (ja)
TW (1) TWI610075B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111220544A (zh) * 2020-01-19 2020-06-02 河海大学 一种镜片质量检测装置及检测方法
KR20230034023A (ko) 2021-09-02 2023-03-09 박노진 광학 이미지 추출장치 및 광학 이미지 추출장치용 사선방향광학기기 그리고 광학 이미지 추출장치용 직선방향광학기기
CN114812425B (zh) * 2022-06-30 2022-09-16 江苏康辉新材料科技有限公司 一种薄膜表面微变形的观测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4188117A (en) * 1977-04-28 1980-02-12 Kuraray Co., Ltd. Method and apparatus for detecting leaks in hollow fiber membrane modules
US4812039A (en) * 1986-10-16 1989-03-14 Olympus Optical Co., Ltd. Schlieren optical device
US5619373A (en) * 1995-06-07 1997-04-08 Hasbro, Inc. Optical system for a head mounted display
TW201219772A (en) * 2010-11-05 2012-05-16 Univ Chang Gung The schlieren type ultrasonic wave observer system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2202627A (en) * 1987-03-23 1988-09-28 Sick Optik Elektronik Erwin Optical arrangement in web monitoring device
JPH02216437A (ja) * 1989-02-17 1990-08-29 Konica Corp シート状物の欠陥検出方法とその装置
JP3325095B2 (ja) * 1993-09-17 2002-09-17 株式会社ニュークリエイション 検査装置
US5428452A (en) * 1994-01-31 1995-06-27 The United States Of America As Represented By The Secretary Of The Air Force Optical fourier transform method for detecting irregularities upon two-dimensional sheet material such as film or tape
JP3583012B2 (ja) * 1999-03-29 2004-10-27 富士写真光機株式会社 フィルム傷検出装置
JP2003121385A (ja) * 2001-10-18 2003-04-23 Tosoh Corp 石英ガラス材内部の欠陥検査方法および検査装置
JP2005233695A (ja) * 2004-02-17 2005-09-02 Sumitomo Osaka Cement Co Ltd 透明板欠陥検査装置
JP2015079009A (ja) * 2014-12-25 2015-04-23 株式会社日立ハイテクノロジーズ 欠陥検査方法およびその装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4188117A (en) * 1977-04-28 1980-02-12 Kuraray Co., Ltd. Method and apparatus for detecting leaks in hollow fiber membrane modules
US4812039A (en) * 1986-10-16 1989-03-14 Olympus Optical Co., Ltd. Schlieren optical device
US5619373A (en) * 1995-06-07 1997-04-08 Hasbro, Inc. Optical system for a head mounted display
TW201219772A (en) * 2010-11-05 2012-05-16 Univ Chang Gung The schlieren type ultrasonic wave observer system

Also Published As

Publication number Publication date
JP6241897B2 (ja) 2017-12-06
KR101860733B1 (ko) 2018-05-24
KR20170090979A (ko) 2017-08-08
JP2017134004A (ja) 2017-08-03
TW201727219A (zh) 2017-08-01

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