TWI606110B - Anisotropic conductive adhesive composition, film adhesive, connection structure, manufacturing method of connection structure and semiconductor device - Google Patents

Description

Anisotropic conductive adhesive composition, film-like adhesive, bonded structure, method of manufacturing the bonded structure, and semiconductor device

This invention relates to an anisotropic conductive adhesive composition.

In recent years, various bonding materials have been used in order to fix electronic components or to electrically connect them in the fields of semiconductors, liquid crystal displays, and the like. Among these applications, high density and high refinement are advancing, and high adhesion and connection reliability are required for the adhesive.

In particular, it is used as a connection between a liquid crystal display and a tape carrier package (TCP), a connection between a flexible printed circuit (FPC) and a TCP, or a circuit connection material in a connection between an FPC and a printed wiring board. An anisotropic conductive adhesive of conductive particles is dispersed in the adhesive. In addition, recently, when a semiconductor germanium wafer is mounted on a substrate, the previous wire bonding is not performed, but the semiconductor germanium wafer is directly processed. A so-called chip on glass (COG) mounted on a substrate is also used here, and an anisotropic conductive adhesive is also applied here.

Further, in recent years, in the field of precision electronic equipment, the density of circuits has been increasing, and the electrode width and electrode spacing have become extremely narrow. Therefore, under the connection conditions of the conventional epoxy-based circuit-connecting bonding material, there are problems such as dropping, peeling, and positional deviation of the wiring, and in the COG mounting, there is a difference in thermal expansion between the wafer and the substrate. The problem of warping. Further, in order to reduce the cost, it is necessary to increase the yield, thereby requiring a low temperature (for example, 100 ° C to 170 ° C), a short time (for example, within 10 seconds), in other words, an adhesive which can be hardened rapidly at a low temperature.

As a cationic polymerization initiator, for example, a polymerization initiator of a cationically polymerizable substance having a sulfonium salt compound represented by the following formula (IX) as a main component is proposed (Patent Document 1).

[In the formula (IX), R _a represents hydrogen, methyl, ethyl fluorenyl, methoxycarbonyl, ethoxycarbonyl, benzyloxycarbonyl, benzhydryl, phenoxycarbonyl, 9-fluorenylmethoxy Any one of the carbonyl groups, R _b and R _c independently represent any of hydrogen, halogen, C ₁ -C ₄ alkyl, R _d represents a C ₁ -C ₄ alkyl group, and Q represents an o-nitrobenzyl group. Any of m-nitrobenzyl, dinitrobenzyl, trinitrobenzyl, α-naphthylmethyl, and β-naphthylmethyl. X is any one of SbF ₆ , AsF ₆ , PF ₆ , and BF ₄ . ]

Further, as a polymerization initiator which can cure an epoxy resin in a short time by heating, cationic polymerization containing a phosphonium salt compound represented by the following formula (X) or the following formula (XI) is proposed. Starting agent (Patent Document 2).

[In the formula (X), R _e represents a hydrogen atom, an alkyl group, a halogen atom, a carboxyl group or an alkoxycarbonyl group, R _f represents an alkyl group, and R _g represents a phenyl group which may be substituted or a naphthyl group which may be substituted, X Indicates SbF ₆ , AsF ₆ , PF ₆ or BF ₄ . ]

[In the formula (XI), R _h represents a hydrogen atom, an alkyl group, a halogen atom, a hydroxyl group, an alkoxy group, a carboxyl group or an alkylhydrazine group, R _i represents an alkyl group, and R _j represents an alkenyl group, an α-alkylbenzyl group, α,α-dialkylbenzyl, α-phenylbenzyl or fluorenyl, and X represents SbF ₆ , AsF ₆ , PF ₆ or BF ₄ . ]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 3-237107

[Patent Document 2] Japanese Patent Laid-Open No. Hei 6-345726

However, the inventors of the present invention conducted intensive studies and found that when the cationic polymerization initiator described in Patent Document 1 or Patent Document 2 is used, the resulting anisotropic conductive adhesive easily corrodes metal and semiconductor wiring. problem. The reason for this is presumed that in the above polymerization initiator, SbF ₆ , AsF ₆ , PF ₆ or BF _{4 is} used as X, but in X, the bond between the central atom and the fluorine atom is weak, and the fluoride ion is easily removed. In addition, in order to prepare an adhesive capable of rapid hardening at a low temperature (for example, 100 ° C to 170 ° C for less than 10 seconds), as X, SbF _{6 has} the highest activity and preferably in SbF ₆ , AsF ₆ , PF ₆ and BF ₄ . However, there is a problem with SbF ₆ from the viewpoint of environmental safety.

The present invention has been made in view of the above circumstances, and it is an object of the invention to provide an anisotropic conductive adhesive composition which is excellent in connection reliability and excellent in storage stability at a low temperature for a short period of time, and which is formed into a film shape. A film-like adhesive. Further, it is an object of the invention to provide a bonded structure using the anisotropic conductive adhesive composition, a method for producing the same, and a semiconductor device.

The present invention provides the anisotropic conductive adhesive composition according to the above (1) to (10), and a film-like adhesive agent according to the following (11), which is formed into a film shape. Further, a connection structure using the anisotropic conductive adhesive composition, a method for producing the same, and a semiconductor device are provided.

(1) An anisotropic conductive adhesive composition comprising (A) an onium salt compound represented by the following formula (I), (B) a cationically polymerizable substance, and (C) Conductive particles:

Wherein R ¹ represents a substituted or unsubstituted arylmethyl group, or a substituted or unsubstituted allyl group, and R ² and R ³ each independently represent an alkyl group, or a substituted or unsubstituted group; An aryl group, Y ^- represents [P(R ⁴ ) _a (F) _6-a ] ^- (wherein R ⁴ represents an alkyl group in which at least a part of a hydrogen atom is substituted by a fluorine atom, and a represents an integer of 1 to 6; When a is an integer of 2 or more, a plurality of R ^{4 present} may be the same or different from each other), or [C((R ⁵ )SO ₂ ) ₃ ] ^- (wherein R ⁵ represents at least a part of a hydrogen atom is a fluorine atom-substituted alkyl group, a plurality of R ^{5 present} may be the same or different from each other); wherein R ² and R ³ may be bonded together to form a ring, and R ¹ is a substituted or unsubstituted aryl group; In the case of a methyl group, at least one of R ² and R ³ is a substituted or unsubstituted aryl group, and when R ¹ is a substituted or unsubstituted allyl group, R ² and R ³ are an alkyl group, or R. ² and R ³ are a ring formed by bonding R ² and R ³ together].

(2) The anisotropic conductive adhesive composition according to the above (1), which contains the onium salt compound represented by the following formula (II) as the component (A):

[wherein, Ar ¹ and Ar ² each independently represent a substituted or unsubstituted aryl group, and Y ^- is synonymous with the above].

(3) The anisotropic conductive adhesive composition according to the above (2), which contains the onium salt compound represented by the following formula (III) as the component (A):

[wherein, Y ^- is synonymous with the above].

(4) The anisotropic conductive adhesive composition according to the above (1), which contains the onium salt compound represented by the following formula (IV) as the component (A):

Wherein A ¹ and A ² each independently represent an alkyl group, and R ⁶ , R ⁷ and R ⁸ each independently represent a hydrogen atom, an alkyl group, or a substituted or unsubstituted aryl group, and Y ^- is synonymous with the above Wherein A ¹ and A ² may be bonded together to form a ring].

(5) The anisotropic conductive adhesive composition according to the above (4), wherein the component (A) contains the formula (V), the formula (VI), the formula (VII) or the formula ( The onium salt compound shown in VIII):

[wherein, Y ^- is synonymous with the above].

The anisotropic conductive adhesive composition according to any one of the above (1), wherein the component (A) is contained in a mixture with a glycidyl ether type epoxy compound. An onium salt compound having a peak temperature of 40 ° C to 150 ° C is given in the differential scanning calorimetry.

The anisotropic conductive adhesive composition according to any one of the above (1), wherein the component (B) is selected from the group consisting of an epoxy compound and an oxetane compound ( At least one of a group consisting of oxetane compound) and a vinyl ether compound.

(8) An anisotropic conductive adhesive according to any one of the above (1) to (7) The composition further contains (D) a film-forming polymer.

(9) The anisotropic conductive adhesive composition according to any one of the above (1) to (8), which is used as an adhesive for circuit connection.

(10) The anisotropic conductive adhesive composition according to any one of (1) to (9) above which is hardened by heating.

(11) A film-like adhesive comprising the anisotropic conductive adhesive composition according to any one of the above (1) to (10) in a film form.

(12) A connection structure comprising: a first circuit member having a first circuit electrode; a second circuit member having a second circuit electrode; and being disposed between the first circuit member and the second circuit member, And a circuit connecting member electrically connecting the first circuit electrode and the second circuit electrode; wherein the circuit connecting member comprises the anisotropic conductive adhesive according to any one of (1) to (10) above Hardened matter.

(13) A method of manufacturing a connection structure comprising the steps of: (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) to (1) The anisotropic conductive adhesive composition according to any one of the preceding claims, wherein the first circuit member and the second circuit member are heated and pressurized via the anisotropic conductive adhesive composition; A circuit electrode and the second circuit electrode are electrically connected.

(14) A semiconductor device comprising: a semiconductor element; a substrate having a circuit pattern; and a semiconductor element connection structure disposed between the semiconductor element and the substrate and electrically connecting the semiconductor element and the circuit pattern The semiconductor element connecting member includes the cured product of the anisotropic conductive adhesive composition according to any one of the above (1) to (10).

The present invention further relates to an adhesive for circuit connection as the composition of the anisotropic conductive adhesive according to any one of the above (1) to (10) or the film-like adhesive according to the above (11) Application, or application of an adhesive for circuit connection for producing the anisotropic conductive adhesive composition or film-like adhesive.

According to the present invention, it is possible to provide an anisotropic conductive adhesive composition which is excellent in connection reliability and excellent in storage stability at a low temperature for a short period of time, and a film-like adhesive which is formed into a film shape by using these compositions. . Further, a connection structure using the anisotropic conductive adhesive composition, a method for producing the same, and a semiconductor device can be provided.

1‧‧‧membranous adhesive

2‧‧‧Semiconductor device

5‧‧‧Binder ingredients

7‧‧‧Conducting particles ((C) composition)

10‧‧‧Circuit connection components

11‧‧‧Insulating substances

20‧‧‧First circuit component

21‧‧‧Circuit board (first circuit board)

21a‧‧‧Main face

22‧‧‧Circuit electrode (first circuit electrode)

30‧‧‧Second circuit components

31‧‧‧Circuit board (second circuit board)

31a‧‧‧Main face

32‧‧‧Circuit electrode (second circuit electrode)

50‧‧‧Semiconductor components

60‧‧‧Substrate

60a‧‧‧ main face

61‧‧‧ circuit pattern

70‧‧‧ Sealing material

80‧‧‧Semiconductor component connecting member

A, B‧‧ arrows

Fig. 1 is a schematic cross-sectional view showing an embodiment of a film-like adhesive.

Fig. 2 is a schematic cross-sectional view showing an embodiment of a connection structure.

(a) to (c) in Fig. 3 are a series of step diagrams for manufacturing a connection structure, respectively.

4 is a partial cross-sectional view showing an embodiment of a semiconductor device.

5 is a graph showing the relationship between the curing temperature and the curing rate of the film-like adhesives of Examples 1 to 4 and Comparative Examples 1 and 4 obtained in the curing rate measurement test.

Hereinafter, preferred embodiments of the present invention will be described in detail. However, the present invention is not limited to the following embodiments.

[Anisotropic Conductive Adhesive Composition]

The anisotropic conductive adhesive composition (hereinafter also referred to simply as "adhesive composition") of the present embodiment contains: (A) an onium salt compound represented by the general formula (I) (hereinafter, referred to as "( A) component "), (B) a cationically polymerizable substance (hereinafter referred to as "(B) component"), and (C) conductive particles.

The onium salt compound is a compound represented by the following formula (I).

In the formula, R ¹ represents a substituted or unsubstituted arylmethyl group, or a substituted or unsubstituted allyl group, and R ² and R ³ each independently represent an alkyl group, or a substituted or unsubstituted one. Aryl, Y ^- represents a counter anion. Wherein R ² and R ³ may be bonded together to form a ring.

Examples of the alkyl group include an alkyl group having 1 to 6 carbon atoms. More specifically, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, and a hexyl group are mentioned. These may have a substituent, and the substitution position of the substituent is not particularly limited and may be any position.

Examples of the aryl group include an aryl group having 6 to 12 carbon atoms. More specific In addition, a phenyl group, a 1-naphthyl group, and a 2-naphthyl group are mentioned. These may have a substituent, and the substitution position of the substituent is not particularly limited and may be any position.

Examples of the arylmethyl group include those in which one of hydrogen atoms in the methyl group is substituted with the above aryl group. More specifically, a benzyl group, a 1-naphthylmethyl group, and a 2-naphthylmethyl group are mentioned. These may have a substituent, and the substitution position of the substituent is not particularly limited and may be any position.

Examples of the ring formed by bonding R ² and R ³ together include those represented by the following formula (α). These may have a substituent, and the substitution position of the substituent is not particularly limited and may be any position.

Examples of the substituent which each of the above groups may have include an alkyl group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tributyl group, a pentyl group or a hexyl group; and a phenyl group; An aryl group such as a naphthyl group; an alkoxy group such as a methoxy group, an ethoxy group, a propoxy group or a butoxy group; an ethoxy group, a propenyloxy group, a decylcarbonyloxy group or a dodecylcarbonyloxy group; An alkoxycarbonyl group; an ester group such as a methoxycarbonyl group, an ethoxycarbonyl group or a benzylideneoxy group; a halogen atom such as fluorine, chlorine, bromine or iodine; a cyano group, a nitro group and a hydroxyl group. The substitution position of these substituents is not particularly limited and may be any position.

Further, in the allyl group having a substituent, when it has a cis-trans isomer, it may be any isomer.

The counter anion represented by Y ^- is [P(R ⁴ ) _a (F) _6-a ] ^- (wherein R ⁴ represents an alkyl group in which at least a part of a hydrogen atom is substituted by a fluorine atom, and a represents an integer of 1 to 6 When a is an integer of 2 or more, a plurality of R ^{4 present} may be the same or different), or [C((R ⁵ )SO ₂ ) ₃ ] ^- (wherein R ⁵ represents at least a part of a hydrogen atom is The fluorine atom-substituted alkyl group, a plurality of R ^{5 present} may be the same or different from each other). Y ^- preferably has a low nucleophilicity.

Further, _{^{[P (R 4) a (}} F) 6-a] -, preferably is less than 80% ^R-fluoro-4 alkyl group in which the hydrogen atoms replaced by an atom, more preferably R ⁴ is an alkyl group More than 90% of the hydrogen atoms are substituted by a fluorine atom, and it is particularly preferred that R ⁴ is a linear or branched perfluoroalkyl group. Specifically, [P(CF ₃ ) ₃ (F) ₃ ] ^- , [P(C ₂ F ₅ ) ₃ (F) ₃ ] ^- and [P(nC ₃ F ₇ ) ₃ (F) ₃ ] ^- Wait. These counter anions may be used singly or in combination of two or more.

Further, as ^{[C ((R 5) SO} 2) 3] -, substituted with a fluorine atom is preferably 80% or more of the hydrogen atoms in the R ⁵ alkyl group, more preferably a hydrogen atom R is an alkyl group in the ⁵ More than 90% of the fluorine atoms are substituted by a fluorine atom, and it is particularly preferred that R ⁵ is a linear or branched perfluoroalkyl group. Specific examples thereof include [C(CF ₃ SO ₂ ) ₃ ] ^- , [C(C ₂ F ₅ SO ₂ ) ₃ ] ^- and [C(nC ₃ F ₇ SO ₂ ) ₃ ] ^- and the like. These counter anions may be used singly or in combination of two or more.

As the onium salt compound, the above formula (II) wherein R ¹ is a substituted or unsubstituted arylmethyl group, the above R ² is a substituted or unsubstituted aryl group, and R ³ is a methyl group is preferred. The guanidinium salt compound shown. The adhesive composition containing such an onium salt compound is excellent in storage stability and rapid low-temperature hardenability.

Further, it is also preferred that the above R ¹ is a substituted or unsubstituted allyl group, the above R ² and R ³ are an alkyl group, or R ² and R ³ are a ring in which R ² and R ^{3 are} bonded together. An onium salt compound represented by the formula (IV). The adhesive composition containing such an onium salt compound is excellent in storage stability and rapid low-temperature hardenability.

Specific examples of the onium salt compound include α-naphthylmethyl-4-hydroxyphenylmethylsulfonium tris(perfluoroethyl)trifluorophosphate and biphenylmethyl-4-hydroxyphenylmethyl Tris(perfluoroethyl)trifluorophosphate, phenylmethyl-4-hydroxyphenylmethyltris(perfluoroethyl)trifluorophosphate, 1-methyl-phenylmethyl-4- Hydroxyphenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate, 2-methyl-phenylmethyl-4-hydroxyphenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate, fluorenyl Methyl-4-hydroxyphenylmethyltris(perfluoroethyl)trifluorophosphate, α-naphthylmethyl-4-ethenylphenylmethyltris(perfluoroethyl)trifluorophosphate Salt, biphenylmethyl-4-ethenylphenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate, phenylmethyl-4-ethenylphenylmethyl sulfonium tris(perfluoroethyl Trifluorophosphate, 1-methyl-phenylmethyl-4-ethenylphenylmethyltris(perfluoroethyl)trifluorophosphate, 2-methyl-phenylmethyl-4- Ethyl phenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate, decylmethyl-4-ethenyl phenylmethyl hydrazine tris(perfluoroethyl)trifluorophosphate, α-naphthalene Methyl-4-methoxyphenylmethyl Tris(perfluoroethyl)trifluorophosphate, biphenylmethyl-4-methoxyphenylmethylsulfonium tris(perfluoroethyl)trifluorophosphate, phenylmethyl-4-methoxybenzene Methyl hydrazine tris(perfluoroethyl)trifluorophosphate, 1-methyl-phenylmethyl-4-methoxyphenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate, 2- Methyl-phenylmethyl-4-methoxyphenylmethylsulfonium tris(perfluoroethyl)trifluorophosphate, mercaptomethyl-4-methoxyphenylmethylhydrazine III (perfluoro Trifluorophosphate, 2-butenyl dimethyl sulfonium tris(perfluoroethyl)trifluorophosphate, 3-methyl-2-butenyl dimethyl sulfonium tris(perfluoroethyl) Fluorophosphate, cinnamyl dimethyl sulfonium tris(perfluoroethyl)trifluorophosphate, 2-butenyltetramethylene sulfonium tris(perfluoroethyl)trifluorophosphate Salt, 3-methyl-2-butenyltetramethylenesulfonium tris(perfluoroethyl)trifluorophosphate, cinnamyltetramethylenesulfonium tris(perfluoroethyl)trifluorophosphate, α- Naphthylmethyl-4-hydroxyphenylmethylsulfonium tris(trifluoromethanesulfonyl)methide, biphenylmethyl-4-hydroxyphenylmethylsulfonium tris(trifluoromethanesulfonyl)methyl Compound, phenylmethyl-4-hydroxyphenylmethyl sulfonium tris(trifluoromethanesulfonyl) methide, 1-methyl-phenylmethyl-4-hydroxyphenylmethyl sulfonium tris(trifluoro Methanesulfonyl)methylate, 2-methyl-phenylmethyl-4-hydroxyphenylmethylsulfonium tris(trifluoromethanesulfonyl)methide, mercaptomethyl-4-hydroxyphenyl Methyl sulfonium tris(trifluoromethanesulfonyl) methide, α-naphthylmethyl-4-ethenyl phenylmethyl sulfonium tris(trifluoromethanesulfonyl) methide, biphenylmethyl -4-Ethylphenylmethyl sulfonium tris(trifluoromethanesulfonyl) methide, phenylmethyl-4-ethenylphenylmethyl sulfonium tris(trifluoromethanesulfonyl)methyl , 1-methyl-phenylmethyl-4-ethenylphenylmethyl sulfonium tris(trifluoromethanesulfonyl) methide, 2-methyl-phenylmethyl-4-ethenyl Phenylmethyl hydrazine tris(trifluoromethanesulfonyl) methylation , mercaptomethyl-4-ethoxymethylphenylmethyltris(trifluoromethanesulfonyl)methide, α-naphthylmethyl-4-methoxyphenylmethylhydrazine three (three Fluoromethanesulfonyl)methide, biphenylmethyl-4-methoxyphenylmethyltris(trifluoromethanesulfonyl)methide, phenylmethyl-4-methoxyphenyl Methyl sulfonium tris(trifluoromethanesulfonyl) methide, 1-methyl-phenylmethyl-4-methoxyphenylmethyl sulfonium tris(trifluoromethanesulfonyl) methide, 2 -methyl-phenylmethyl-4-methoxyphenylmethylsulfonium tris(trifluoromethanesulfonyl)methide, mercaptomethyl-4-methoxyphenylmethylhydrazine three (three Fluoromethanesulfonyl)methide, 2-butenyldimethylsulfonium tris(trifluoromethanesulfonyl)methide, 3-methyl-2-butenyldimethylsulfonium tris(trifluoro Methanesulfonyl)methylate, cinnamyl dimethyl sulfonium tris(trifluoromethanesulfonyl) methide, 2-butenyltetramethylene sulfonium tris(trifluoromethanesulfonyl) methide 3-methyl-2-butenyl four Methylene sulfonium tris(trifluoromethanesulfonyl) methide, cinnamyltetramethylene sulfonium tris(trifluoromethanesulfonyl) methoxide, and the like. As the component (A), one of the phosphonium salt compounds may be used alone or two or more of them may be used in combination.

In particular, it contains α-naphthylmethyl-4-hydroxyphenylmethylsulfonium tris(perfluoroethyl)trifluorophosphate, 3-methyl-2-butenyldimethylsulfonium tris(perfluoroethyl) Trifluorophosphate, cinnamyl dimethyl sulfonium tris(perfluoroethyl)trifluorophosphate, 3-methyl-2-butenyltetramethylene sulfonium tris(perfluoroethyl)trifluorophosphate , cinnamyltetramethylenesulfonium tris(perfluoroethyl)trifluorophosphate, α-naphthylmethyl-4-hydroxyphenylmethylsulfonium tris(trifluoromethanesulfonyl)methide, 3- Methyl-2-butenyl dimethyl sulfonium tris(trifluoromethanesulfonyl) methide, cinnamyl dimethyl sulfonium tris(trifluoromethanesulfonyl) methide, 3-methyl-2 An adhesive composition of butenyltetramethylenesulfonium tris(trifluoromethanesulfonyl)methide and cinnamyltetramethylenesulfonium tris(trifluoromethanesulfonyl)methide It is more excellent in stability and rapid hardening at low temperatures.

From the viewpoint of the storage stability of the adhesive composition containing the component (A), the component (A) is preferably a component (A) and a glycidyl ether epoxy compound YL980 (Japanese epoxy). The differential scanning calorimetry of the mixture of resin (Japan Epoxy Resins Co., Ltd. product name, bisphenol A type epoxy resin) gives a peak of heat generation of 40 ° C to 150 ° C. In particular, it is better to give a peak of heat generation of 70 ° C ~ 130 ° C.

The content ratio of the component (A) in the adhesive composition of the present embodiment is preferably 0.5% by mass to 50% by mass, and more preferably 2% by mass to 25% based on the total amount of the component (B). quality%. If the content of the component (A) is 0.5 mass When it is 50% by mass or more, the adhesive strength tends to be further improved.

Examples of the component (B) include an epoxy compound, an oxetane compound, and a vinyl ether compound. Examples of the epoxy compound include a glycidyl ether epoxy compound and an alicyclic epoxy compound.

The glycidyl ether type epoxy compound may be a compound which has a glycidyl ether group in the molecule and which is hardened by irradiation or heating of active rays in the presence or absence of a curing agent. Among them, those having two or more epoxy groups in one molecule are preferred because the crosslinking density at the time of curing is increased. The glycidyl ether type epoxy compound is not particularly limited as long as it is a compound having a glycidyl ether group, and a known one can be used. More specifically, a bisphenol type epoxy resin derived from epichlorohydrin, bisphenol A or bisphenol F, and an alicyclic ring obtained by hydrogenating an aromatic structure of these bisphenol type epoxy resins may be mentioned. Structure of glycidyl ether type epoxy compound, cresol novolak type epoxy resin, phenol novolak type epoxy resin and other novolac type glycidyl ether compounds, glycidylamine epoxy compound, glycidyl ester epoxy compound , biphenyl diglycidyl ether, triglycidyl isocyanurate, polyglycidyl methacrylate or glycidyl methacrylate, a copolymer of a vinyl monomer copolymerizable therewith, and the like. These may be used alone or in combination of two or more.

The alicyclic epoxy compound is a compound having an epoxy group containing two of the carbon atoms constituting the cyclic hydrocarbon skeleton in the molecule and in the presence or absence of the hardener. Hardened by irradiation or heating of active light Just fine. Among them, those having two or more epoxy groups in one molecule are preferred because the crosslinking density at the time of curing is increased. The alicyclic epoxy compound is not particularly limited as long as it is a compound having an alicyclic epoxy group, and a known one can be used. For example, a cyclohexene oxide-containing compound obtained by oxidizing a cyclohexene ring-containing compound and an epoxycyclopentane-containing compound obtained by oxidizing a cyclopentene ring-containing compound may be mentioned. . More specifically, 2-(3,4-epoxycyclohexyl-5,5-spiro-3,4-epoxy)cyclohexane-m-dioxane, 3,4-epoxy-1 -3,4-epoxy-1-methylcyclohexyl methyl hexanecarboxylate, 3,4-epoxy-3-methylcyclohexanecarboxylic acid 3,4-epoxy-3-methylcyclohexyl Ester, 3,4-epoxy-5-methylcyclohexanecarboxylic acid 3,4-epoxy-5-methylcyclohexylmethyl ester, 3,4-epoxy-6-methylcyclohexylformate, 3,4-epoxycyclohexanemethyl 3,4-epoxycyclohexanecarboxylate, 6-methyl-3,4-epoxycyclohexanecarboxylic acid 6-methyl-3,4-epoxycyclohexyl Ester, ethyl bis(3,4-epoxycyclohexanecarboxylate), dicyclopentadiene diepoxide, bis(3,4-epoxycyclohexylmethyl) adipate, sub Methyl bis(3,4-epoxycyclohexane) and the like. These may be used alone or in combination of two or more.

The oxetane compound can be cured by irradiation or heating with active rays in the presence or absence of a curing agent as long as it is an oxetane compound having an oxetanyl group in the molecule. . Among them, a compound having two or more oxetane rings is preferred because it has a high crosslinking density at the time of curing. Further, an aliphatic or alicyclic compound having two to six oxetane rings in the molecule and having one to six hydroxyl groups is preferred from the viewpoint of excellent curability.

The oxetane compound is a compound represented by the following formula (XII).

In the formula, R ⁹ represents a hydrogen atom, a fluorine atom or a monovalent hydrocarbon group, R ¹⁰ represents a hydrogen atom, an n-valent aliphatic hydrocarbon group or an n-valent aromatic hydrocarbon group, and n represents an integer of 1 to 6. Here, when R ¹⁰ is a hydrogen atom, n is 1. When n is an integer of 2 or more, and more oxygen atoms R ¹⁰ may be bonded to each other with the same carbon atom bonded to R ^10, and R may be bonded to different carbon atoms of ^10.

More specifically, as the oxetane compound, 1,4-bis[(3-oxetanyl-n-butoxy)methyl]benzene, 4,4'-bis[(3) -oxetanyl-n-butoxy)methyl]biphenyl, 3-ethyl-3{[(3-ethyloxetan-3-yl)methoxy]methyl}oxa Cyclobutane, 3-ethyl-3-hydroxymethyloxetane, 2-ethylhexyloxybutane, and the like.

The vinyl ether compound may be a compound which has a vinyl ether group in its molecule and which is hardened by irradiation or heating of active light in the presence or absence of a curing agent. Among them, those having two or more vinyl ether groups in one molecule are preferred because the crosslinking density at the time of curing is increased.

The vinyl ether compound is a compound represented by the following formula (XIII).

In the formula, R ¹¹ represents an m-valent aliphatic hydrocarbon group or an m-valent aromatic hydrocarbon group, and m represents an integer of 1 to 4. When m is an integer of 2 or more, and more oxygen atoms R ¹¹ may be bonded to each other with the same carbon atom bonded to R ^11, and R ¹¹ is also different carbon atoms bonded.

More specifically, examples of the vinyl ether compound include 1,4-butanediol divinyl ether, cyclohexane dimethanol divinyl ether, diethylene glycol divinyl ether, and triethylene glycol divinyl ether.

The cationically polymerizable substituent equivalent of the component (B) is preferably from 43 to 1,000, more preferably from 50 to 800, still more preferably from 73 to 600. When the cationically polymerizable substituent equivalent is from 43 to 1,000, the strength tends to increase further when the electrode is connected later. In addition, the cationically polymerizable substituent equivalent is a value obtained by dividing the average molecular weight of one molecule of the cationically polymerizable substance by the number of cationically polymerizable substituents in one molecule of the cationically polymerizable substance, that is, per unit. The average molecular weight of the cationically polymerizable substituent.

As the component (B), from the viewpoint of corrosion prevention, it is preferred to use a high-purity product in which the content of impurity ions (Na ⁺ , Cl ^{- ,} etc.) and hydrolyzable chlorine is reduced to 300 ppm or less.

The content ratio of the component (B) in the adhesive composition of the present embodiment, It is preferably 10% by mass to 90% by mass, and more preferably 25% by mass to 75% by mass based on the total amount of the adhesive composition. When the content of the component (B) is 10% by mass or more, the physical properties (elastic modulus, etc.) when the cured product is formed tend to be further improved. When the content is 90% by mass or less, the curing shrinkage is small and the adhesive force is small. The tendency to further improve.

In the adhesive composition of the present embodiment, the component (B) may be used singly or in combination of two or more.

The adhesive composition of the present embodiment further contains (C) conductive particles. Examples of the conductive particles include metal particles such as Au, Ag, Ni, Cu, and solder, and carbon. Further, a non-conductive glass, ceramic, plastic or the like may be used as a core, and the metal, metal particles or carbon may be coated on the core. When the conductive particles are made of a metal as a core and coated with the metal, the metal particles or the carbon, and the hot-melt metal particles, the conductive particles are deformed by heating and pressing, and the contact area with the electrode is increased at the time of connection. And the connection reliability is improved, so it is preferable. In addition, when the surface of the conductive particles is further coated with a polymer resin or the like, when the amount of the conductive particles is increased, short-circuiting due to contact between the particles can be suppressed, and insulation between the electrode circuits can be improved. Therefore, the fine particles obtained by coating the surface of the conductive particles with a polymer resin or the like may be used singly or in combination with the conductive particles.

The average particle diameter of the conductive particles can be determined by observation with a scanning electron microscope (SEM). The average particle diameter of the conductive particles is preferably 1 μm from the viewpoint that the dispersibility and the conductivity become good. 18 μm. The content ratio of the conductive particles in the adhesive composition of the present embodiment is not particularly limited, and is preferably 0.1% by volume to 30% by volume, and more preferably 0.1% by volume to 10% by volume based on 100% by volume of the adhesive composition. %. When the content ratio of the conductive particles is 0.1% by volume or more, the conductivity tends to be further improved, and if it is 30% by volume or less, the short circuit of the circuit can be further prevented. In addition, "vol%" is determined based on the volume of each component before hardening at 23 ° C, and the volume of each component can also be calculated by converting the mass by specific gravity. Further, the volume of each component may be obtained by adding an appropriate solvent (water, alcohol, or the like) to a measuring cylinder or the like, and the above-mentioned components are obtained in accordance with the increased volume. Further, the term "appropriate solvent" means that the above components are not sufficiently dissolved or swollen, and are sufficiently wetted.

In order to prevent corrosion of the adherend, the adhesive composition of the present embodiment may be added or mixed with an anticorrosive agent containing a metal hydroxide or a metal oxide. As the anticorrosive agent, more specifically, it is preferably selected from the group consisting of aluminum hydroxide, magnesium hydroxide, calcium hydroxide, cerium oxide, aluminum oxide, magnesium oxide, cerium oxide, tin oxide, titanium oxide, manganese oxide, and zirconium oxide. At least one or more of the group consisting of. When the anticorrosive agent is in the form of particles, the particle size is preferably 10 μm or less from the viewpoint of dispersion in the adhesive composition, high adhesion to the adherend, and corrosion resistance of the adherend. .

The content ratio of the anticorrosive agent in the adhesive composition of the present embodiment is preferably 0.1% by mass to 60% by mass, and more preferably 1% by mass to 30% by mass based on the total amount of the component (A). When the content ratio of the anticorrosive agent is 0.1% by mass or more, the anticorrosive effect can be sufficiently exhibited. When the content is 60% by mass or less, the dispersibility is improved and the connection reliability of the adhesive composition tends to be further improved.

The adhesive composition of the present embodiment may further contain a chain ether compound or a cyclic ether compound having two or more ether bonds in one molecule. In particular, when the alicyclic epoxy compound is contained as the component (B), the hardening behavior of the alicyclic epoxy compound can be controlled more easily and more reliably by further containing a chain or cyclic ether compound.

The chain or cyclic ether compound is not particularly limited as long as it has two or more ether bonds in one molecule, and a known one can be used. Examples of the chain ether compound include polyethylene glycols such as triethylene glycol and tetraethylene glycol; and derivatives in which a terminal hydroxyl group of a polyethylene glycol is functionalized by an ether bond or an ester bond; a polymer of a monofunctional epoxy compound such as ethane, propylene oxide or cyclohexene oxide; a polymer of a polyfunctional epoxy compound; a polymer of a monofunctional or polyfunctional oxetane compound; monofunctional or poly A functional tetrahydrofuran-based polymer or the like. Further, examples of the cyclic ether compound include 12-crown-4-ether, 14-crown-4-ether, 15-crown-5-ether, 18-crown-6-ether, and 21-crown-7-ether. , 24-crown-8-ether, 30-crown-7-ether, benzo-18-crown-6-ether, dibenzo-18-crown-6-ether, tribenzo-18-crown-6- An ether, a diol of a polyethylene glycol, a cyclized product of a polymer of an epoxy compound, or the like. These may be used alone or in combination of two or more.

Among the above, from the viewpoint of reaction accommodation ability, a cyclic ether compound is preferred, and more preferred are 12-crown-4-ether, 14-crown-4-ether, 15-crown-5-ether, and 18-crown. -6-ether, 21-crown-7-ether, 24-crown-8-ether, 30-crown-7-ether, benzo-18-crown-6-ether, dibenzo-18-crown-6- Ether, triphenyl-18-crown-6-ether.

The chain in the adhesive composition of the present embodiment with respect to the component (A) The content of the cyclic or cyclic ether compound is preferably from 0.005 mol% to 10 mol%, more preferably from 0.01 mol% to 5 mol%. When the content of the chain-like or cyclic ether compound is 0.005 mol% or more, the subsequent strength is further improved, and when it is 20 mol% or less, the curing tends to be promoted and the crosslinking density tends to be further improved.

The adhesive composition of the present embodiment may contain various known additives such as an inorganic filler, a reinforcing agent, a coloring agent, a stabilizer (heat stabilizer, weather resistance), insofar as the effect of the present invention is not impaired. Modifier, etc.; extender; viscosity modifier; adhesion imparting agent represented by terpene phenol copolymer, terpene resin, rosin derivative and alicyclic hydrocarbon resin; flame retardant; ultraviolet absorber; Antioxidant; anti-tarnishing agent; antibacterial agent; anti-fungal agent; anti-aging agent; antistatic agent; plasticizer; lubricant; foaming agent;

Examples of the coloring agent include dyes such as direct dyes, acid dyes, basic dyes, and metal-salted dyes; inorganic pigments such as carbon black and mica; and azo-based, condensed azo, lanthanide, and thio-blue Organic pigments such as dioxone and phthalocyanine. Further, examples of the stabilizer include compounds such as hindered phenol, lanthanide, phosphorus, benzophenone, benzotriazole, and oxalic acid anilide. Examples of the inorganic filler include glass fiber; asbestos fiber; carbon fiber; cerium oxide fiber; alumina fiber; zirconia fiber; boron nitride fiber; cerium nitride fiber; Fiber; boron fiber; stainless steel fiber; inorganic materials such as aluminum, titanium, copper, brass and magnesium, and metal fibers containing the same; metal powders such as copper, iron, nickel, zinc, tin, lead, stainless steel, aluminum, gold and silver; Wood powder; aluminum citrate; talc; clay; carbonate; sulfate; Acid salt; borate; borosilicate; aluminosilicate; titanate; basic salt such as alkali sulfate and alkali carbonate; glass material such as glass hollow sphere and glass flake; Aluminum nitride; mullite; cordierite, etc.

In order to increase the viscosity and film formation, the adhesive composition of the present embodiment may suitably contain various polymers. The polymer to be contained is not limited as long as it does not significantly inhibit the curing of the component (B), and a known polymer can be used. As such a polymer, phenoxy resin, polymethacrylate, polyacrylate, polyester, polyvinyl butyral, SBS (styrene butadiene styrene (Styrene-Butadiene) can be used. -Styrene) block copolymers and their epoxy modified bodies, and SEBS (Styrene-Ethylene-Butylene-Styrene block copolymer) and modified bodies thereof. These polymers may be used singly or in combination of two or more. Moreover, these polymers may contain a decane or a fluorine substituent. These polymers are preferably used as an adhesive composition if the mixed resins are completely compatible with each other or are subjected to microphase separation to cause white turbidity. In particular, when it is intended for film formation, it is preferred to contain a film-forming polymer such as a phenoxy resin or a polyvinyl butyral.

When the molecular weight of the above polymer is large, film formability is easily obtained, and the melt viscosity which affects the fluidity of the adhesive composition can be set in a wide range. The weight average molecular weight of the above polymer is not particularly limited, and is preferably from 5,000 to 150,000, more preferably from 10,000 to 80,000. When the weight average molecular weight is 5,000 or more, the film formability tends to be more excellent, and the weight average molecular weight is 150,000 or less. At the time, compatibility with other components tends to be better. Here, the weight average molecular weight means a value measured by a gel permeation chromatography (GPC) using a calibration curve of standard polystyrene according to the conditions shown below.

(measurement conditions)

Device: GPC-8020 manufactured by Tosoh Co., Ltd.

Detector: RI-8020 manufactured by Tosoh Corporation

Pipe column: Gelpack GL-A-160-S+GL-A150 manufactured by Hitachi Chemical Co., Ltd.

Sample concentration: 120mg/3mL

Solvent: tetrahydrofuran

Injection volume: 60μL

Pressure: 2.9MPa (30kgf/cm ² )

Flow rate: 1.00mL/min

The content of the polymer in the adhesive composition of the present embodiment is preferably 20 parts by mass to 320 parts by mass, and more preferably 50 parts by mass to 150 parts by mass, per 100 parts by mass of the component (B). When the content ratio of the above polymer is from 20 parts by mass to 320 parts by mass, the fluidity and adhesion of the adhesive composition tend to be further improved.

When the adhesive composition of the present embodiment is liquid at normal temperature, it can be used in the form of a paste. When the adhesive composition of the present embodiment is a solid at room temperature, it may be paste-formed using a solvent in addition to heating. As a solvent that can be used, There is no particular limitation on the case of being non-reactive with the adhesive composition and the additive, and exhibiting sufficient solubility, and it is preferred that the boiling point at normal pressure is from 50 ° C to 150 ° C. A solvent having a boiling point of 50 ° C or higher is less likely to volatilize even when left at room temperature, and has less restriction when used in an open system. Further, a solvent having a boiling point of 150 ° C or less tends to volatilize the solvent, and the subsequent connection reliability tends to be further improved.

The adhesive composition of the present embodiment can be cured by heating. The heating temperature is preferably from 40 ° C to 180 ° C, more preferably from 50 ° C to 150 ° C, and the heating time is preferably from 0.1 second to 10 hours, more preferably from 1 second to 1 hour. When the heating temperature is 40° C. or more, the curing rate tends to be further improved. When the temperature is 180° C. or lower, undesired side reactions are suppressed, and the connection reliability tends to be further improved. In addition, when the heating time is 0.1 second or longer, the curing reaction tends to proceed easily. When the heating time is 10 hours or shorter, the productivity of the cured product is further improved, and undesirable side reactions are difficult to be performed, and the connection reliability is further improved. Propensity.

In the adhesive composition of the present embodiment, the adherend can be subsequently joined by heating and pressurization. The heating temperature by heating and pressurization is not particularly limited, and is preferably 50 ° C to 190 ° C. The pressure is not particularly limited as long as it does not cause damage to the bonded body. In the case of TCP and chip on TFT (COF), it is usually preferably 0.1 MPa to 30 MPa. Further, when the COG is mounted, it is preferably 10 MPa to 100 MPa. These heating and pressurization are preferably carried out in the range of 0.5 second to 120 seconds.

The adhesive composition of the present embodiment can be used as an adhesive for different types of adherends having different thermal expansion coefficients, and can be used in the form of a film. Specifically In other words, it can be used as an adhesive for connecting circuit elements between circuit members having circuit electrodes, such as silver paste and silver film, and for elastomers and CSPs for chip size packages (CSP). An underlayer for connecting a semiconductor element to a semiconductor element mounting instruction member having a circuit pattern, such as an underfill material and a lead on chip (LOC) tape.

[membrane adhesive]

Fig. 1 is a schematic cross-sectional view showing an embodiment of a film-like adhesive. The film-like adhesive 1 shown in FIG. 1 is a film containing the adhesive component 5 and the conductive particle 7, and the above-mentioned adhesive composition is formed into a film shape. According to the film-like adhesive 1, the operation is easy, and it can be easily provided on the adherend, and the joining operation can be easily performed.

Further, the film-like adhesive 1 may be a multilayer structure (not shown) including two or more layers using different types of adhesive compositions. In the above two or more layers, the Tg (glass transition temperature) of each layer can be set to, for example, a different temperature of 5 ° C or higher.

The film-like adhesive 1 can be produced, for example, by applying a binder composition in a solvent to a support (polyethylene terephthalate (PET)) using a coating device. On the film or the like, it is dried by hot air at a temperature at which the adhesive composition is not hardened for a specific period of time. Further, the thickness of the film-like adhesive 1 can be, for example, 10 μm to 50 μm.

[connection structure]

Fig. 2 is a schematic cross-sectional view showing an embodiment of a connection structure. Figure 2 As shown in the figure, the connection structure of the present embodiment includes the first circuit member 20 and the second circuit member 30 that face each other, and a circuit that connects the circuit members is provided between the first circuit member 20 and the second circuit member 30. Connecting member 10. The first circuit member 20 or the second circuit member 30 may comprise an inorganic material. Further, at least a portion of the bonded surface of the connecting member may contain an inorganic material.

The first circuit member 20 includes a circuit board (first circuit board) 21 and a circuit electrode (first circuit electrode) 22 formed on the main surface 21 a of the circuit board 21 . Further, an insulating layer (not shown) may be formed on the main surface 21a of the circuit board 21 as the case may be.

On the other hand, the second circuit member 30 includes a circuit board (second circuit board) 31 and a circuit electrode (second circuit electrode) 32 formed on the main surface 31a of the circuit board 31. Further, an insulating layer (not shown) may be formed on the main surface 31a of the circuit board 31 as the case may be.

The first circuit member 20 and the second circuit member 30 are not particularly limited as long as they are formed with electrodes that are required to be electrically connected. Specifically, a glass or plastic substrate, a printed wiring board, a ceramic wiring board, a flexible wiring board, a semiconductor germanium wafer, etc., which can be used for forming an electrode, such as an indium tin oxide (ITO), can be used for a liquid crystal display. It can be used in combination as needed. As described above, in the present embodiment, a material such as a printed wiring board or an organic material containing polyimide or the like may be used, and a metal such as copper or aluminum or ITO (Indium Tin Oxide) or tantalum nitride (SiN _x ) may be used. A circuit member having various surface states like a material of an inorganic material such as cerium oxide (SiO ₂ ).

The circuit connecting member 10 is formed of a cured product of the above-described adhesive composition, and contains an insulating material 11 and conductive particles 7. The conductive particles 7 are disposed not only between the opposing circuit electrode 22 and the circuit electrode 32 but also between the main surface 21a and the main surface 31a. In the connection structure, the circuit electrode 22 and the circuit electrode 32 are electrically connected via the conductive particles 7. That is, the conductive particles 7 are in direct contact with both the circuit electrode 22 and the circuit electrode 32.

In the connection structure, as described above, the opposing circuit electrode 22 and the circuit electrode 32 are electrically connected via the conductive particles 7. Therefore, the connection resistance between the circuit electrode 22 and the circuit electrode 32 can be sufficiently reduced. Therefore, the flow of current between the circuit electrode 22 and the circuit electrode 32 can be made smooth, and the function of the circuit can be sufficiently exhibited.

[Manufacturing method of connection structure]

Next, a method of manufacturing the above-described bonded structure will be described.

First, the first circuit member 20 and the film-like adhesive 1 are prepared (see (a) of FIG. 3).

The thickness of the film-like adhesive 1 is preferably from 10 μm to 50 μm. By setting the thickness of the film-like adhesive 1 to 10 μm or more, the circuit connecting material between the circuit electrode 22 and the circuit electrode 32 can be reliably filled. On the other hand, by setting the thickness of the film-like adhesive 1 to 50 μm or less, it is possible to further prevent the circuit connecting material between the circuit electrode 22 and the circuit electrode 32 from overflowing.

Then, the film-like adhesive 1 is placed on the surface of the first circuit member 20 on which the circuit electrode 22 is formed. In addition, the film-like adhesive 1 is attached to the support (not In the case of the above, the film-like adhesive 1 side is placed on the first circuit member 20 so as to face the first circuit member 20. At this time, the film-like adhesive 1 is in the form of a film, and the handling is easy. Therefore, the film-like adhesive 1 can be easily interposed between the first circuit member 20 and the second circuit member 30, and the connection work of the first circuit member 20 and the second circuit member 30 can be easily performed.

Then, the film-like adhesive 1 is pressurized in the direction of the arrow A and the arrow B of (a) in FIG. 3 to temporarily connect the film-like adhesive 1 to the first circuit member 20 (refer to (b) in FIG. 3 ). At this time, it can be pressurized while heating.

Then, as shown in (c) of FIG. 3, the second circuit member 30 is oriented such that the second circuit electrode 32 faces the first circuit member 20 (ie, the first circuit electrode 22 and the second circuit electrode 32). The state of the opposite arrangement is placed on the film-like adhesive 1. Further, when the film-like adhesive 1 is attached to a support (not shown), the second circuit member 30 is placed on the film-like adhesive 1 after the support is peeled off.

Then, while the film-like adhesive 1 is heated, it is pressurized via the first circuit member 20 and the second circuit member 30 in the directions of the arrow A and the arrow B in (c) of FIG. 3 . In this manner, the film-like adhesive 1 was subjected to a hardening treatment and officially joined to obtain a bonded structure as shown in FIG. 2 .

When the connection structure is manufactured as described above, in the obtained connection structure, the conductive particles 7 can be brought into contact with both the opposing circuit electrode 22 and the circuit electrode 32, and the circuit electrode 22 can be sufficiently reduced. The connection resistance between the circuit electrodes 32.

In addition, the circuit is sufficiently reduced by the heating of the film-like adhesive 1 In a state where the distance between the electrode 22 and the circuit electrode 32 is the same, the adhesive component 5 is cured to become the insulating material 11, and the first circuit member 20 and the second circuit member 30 are firmly connected via the circuit connecting member 10. That is, in the obtained connection structure, the circuit connecting member 10 includes the cured material of the circuit connecting material containing the above-described adhesive composition, and therefore the bonding strength of the circuit connecting member 10 to the first circuit member 20 or the second circuit member 30 is sufficient. The grounding is improved, especially under high temperature and high humidity conditions, and the strength is sufficiently increased. Further, in the joined structure, the state in which the strength is sufficiently high can be continued for a long period of time. Therefore, the obtained connection structure can sufficiently prevent the temporal change of the distance between the circuit electrode 22 and the circuit electrode 32, and the electrical reliability between the circuit electrode 22 and the circuit electrode 32 is excellent in long-term reliability.

Further, in the above embodiment, the bonded structure is produced using the film-like adhesive 1, but the film-like adhesive 1 may be used instead of the adhesive composition which is not formed into a film. In this case, if the adhesive composition is dissolved in a solvent and the solution is applied to any of the first circuit member 20 or the second circuit member 30 to be dried, the adhesive composition can be interposed. Between the first circuit member 20 and the second circuit member 30.

[semiconductor device]

Next, an embodiment of the semiconductor device of the present invention will be described. Fig. 4 is a schematic cross-sectional view showing an embodiment of a semiconductor device of the present invention. As shown in FIG. 4, the semiconductor device 2 of the present embodiment includes a semiconductor element 50 and a substrate 60 serving as a supporting member of the semiconductor element. The semiconductor element 50 and the substrate 60 can be electrically connected to each other. The semiconductor element connection member 80. another Further, the semiconductor element connecting member 80 is laminated on the main surface 60a of the substrate 60, and the semiconductor element 50 is further laminated on the semiconductor element connecting member 80.

The substrate 60 is provided with a circuit pattern 61 that is electrically connected to the semiconductor element 50 via the semiconductor element connection member 80 on the main surface 60a of the substrate 60. Then, these are sealed by the sealing material 70 to form the semiconductor device 2.

The material of the semiconductor element 50 is not particularly limited, and a semiconductor device of four groups of germanium or germanium may be used, and GaAs, InP, GaP, InGaAs, InGaAsP, AlGaAs, InAs, GaInP, AlInP, AlGaInP, GaNAs, GaNP, GaInNAs. Group III-V compound semiconductor device such as GaInNP, GaSb, InSb, GaN, AlN, InGaN, InNAsP, etc., II-VI compound semiconductor device such as HgTe, HgCdTe, CdMnTe, CdS, CdSe, MgSe, MgS, ZnSe, ZeTe, etc. And various people such as CuInSe (CIS).

The semiconductor element connecting member 80 is formed of the cured product of the adhesive composition of the present invention described above, and contains the insulating material 11 and the conductive particles 7. The conductive particles 7 are disposed not only between the semiconductor element 50 and the circuit pattern 61 but also between the semiconductor element 50 and the main surface 60a. In the semiconductor device 2 of the present embodiment, the semiconductor element 50 and the circuit pattern 61 are electrically connected via the conductive particles 7. Therefore, the connection resistance between the semiconductor element 50 and the circuit pattern 61 can be sufficiently reduced. Therefore, the flow of current between the semiconductor element 50 and the circuit pattern 61 can be made smooth, and the function of the semiconductor can be sufficiently exhibited. Further, by setting the conductive particles 7 to the above-described blending ratio, the anisotropy of the electrical connection can also be exhibited.

The semiconductor element connecting member 80 includes a cured product of a circuit connecting material containing the above-described adhesive composition of the present invention. Therefore, the bonding strength of the semiconductor element connecting member 40 to the semiconductor element 50 and the substrate 60 is sufficiently improved, and the connection resistance between the semiconductor element 50 and the circuit pattern 61 can be sufficiently reduced. Also, this state can be continued for a long time. Further, since the semiconductor element connecting member can be formed by heating at a low temperature for a short period of time, the influence on the semiconductor element or the like can be reduced. Therefore, the long-term reliability of the electrical characteristics between the semiconductor element 50 and the substrate 60 can be sufficiently improved.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the above embodiments.

Hereinafter, the present invention will be more specifically described based on examples and comparative examples, but the present invention is not limited by the examples.

(Example 1)

TA-60 (San-Apro Co., Ltd. product name, α-naphthylmethyl-4-hydroxyphenylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate) was used as the component (A) A glycidyl ether type epoxy compound YL980 (product name of Japan Epoxy Resin Co., Ltd., bisphenol A type epoxy resin) is used as the component (B). A phenoxy resin (YP-70, trade name, manufactured by Tohto Kasei Co., Ltd.) was used as the film-forming polymer. Further, conductive particles having an average particle diameter of 3 μm and a specific gravity of 2.5 were used, and the conductive particles were provided with a nickel layer having a thickness of 0.2 μm on the surface of particles having polystyrene as a core, and were disposed outside the nickel layer. It is made of a gold layer with a thickness of 0.02 μm. In addition, aluminum hydroxide powder is used as an anticorrosive agent.

The component (A), the component (B), and the film-forming polymer were blended at a mixing ratio shown in Table 1, and then 8 vol% of conductive particles were dispersed and applied to a PET resin film having a thickness of 40 μm using a coating device. On the other hand, a film-like adhesive having a thickness of the adhesive layer of 20 μm was obtained by hot air drying at 70 ° C for 5 minutes.

(Example 2)

The same method as in Example 1 except that α-naphthylmethyl-4-hydroxyphenylmethyltris(trifluoromethanesulfonyl)methide (PMNS TFSM) was used as the component (A). A film-like adhesive was obtained. Table 1 shows the mixing ratio of each component.

(Example 3)

The same procedure as in Example 1 was carried out except that 3-methyl-2-butenyltetramethylenesulfonium tris(perfluoroethyl)trifluorophosphate (MBTS TFEP) was used as the component (A). Film-like adhesive. Table 1 shows the mixing ratio of each component.

(Example 4)

A film-like adhesive agent was obtained in the same manner as in Example 1 except that cinnamyltetramethylenesulfonium tris(perfluoroethyl)trifluorophosphate (CMS TFEP) was used as the component (A). Table 1 shows the mixing ratio of each component.

(Comparative Example 1)

The SI-60 (product name of Sanshin Chemical Industry Co., Ltd., α-naphthylmethyl-4-hydroxyphenylmethyl hexafluoroantimonate) was used as the component (A), and the examples were A film-like adhesive was obtained in the same manner. Table 1 shows the mixing ratio of each component.

(Comparative Example 2)

A film was obtained in the same manner as in Example 1 except that CPI-100A (product name of Sanya Pro Co., Ltd., 4-phenylphenylthiodiphenylphosphonium hexafluoroantimonate) was used as the component (A). Binder. Table 1 shows the mixing ratio of each component.

(Comparative Example 3)

CPI-200K (product name of Sanya Pro Co., Ltd., 4-phenylphenylthiodiphenylphosphonium tris(perfluoroethyl)trifluorophosphate) was used as the component (A), and the examples were A film-like adhesive was obtained in the same manner. Table 1 shows the mixing ratio of each component.

(Comparative Example 4)

A film-like adhesive agent was obtained in the same manner as in Example 1 except that tetramethylene α-naphthylmethyl sulfonium tris(perfluoroethyl)trifluorophosphate (MPS TFEP) was used as the component (A). . Table 1 shows the mixing ratio of each component.

(Comparative Example 5)

A film-like adhesive agent was obtained in the same manner as in Example 1 except that 4-hydroxyphenylmethylcinnamyltris(perfluoroethyl)trifluorophosphate (PMCS TFEP) was used as the component (A). Table 1 shows the mixing ratio of each component. In addition, the mixing ratio in Table 1 is represented by parts by mass.

The onium salt compounds of the component (A) used in the examples and the comparative examples are shown in Table 2.

[Differential scanning calorimetry]

The differential scanning calorimetry of the film-like adhesive obtained in the examples and the comparative examples was carried out. Determine whether to investigate the presence or absence of fever peaks.

In the film-like adhesive obtained in Comparative Example 2 and Comparative Example 3, the onset heat peak was not recognized. Further, the film-like adhesive obtained in Comparative Example 5 was hardened before the measurement. The film-like adhesives obtained in Examples 1 to 4 and Comparative Examples 1 and 4 gave heat generation peaks. The temperature at this time is shown in Table 3.

In the differential scanning calorimetry, the component (A) is TA-60 (Y ^- = [P(C ₂ F ₅ ) ₃ F ₃ ] ^- having α-naphthylmethyl-4-hydroxyphenylmethylhydrazine In the case of Example 1) and PMNS TFSM (Y ^- = [C(CF ₃ SO ₂ ) ₃ ] ^- , and Example 2), similarly to SI-60 (Y ^- = [SbF ₆ ] ^- , Comparative Example 1) A peak of heat generation was observed at about 110 ° C, and the same low-temperature hardenability was recognized.

Further, in the differential scanning calorimetry, when the component (A) is a sulfonium salt compound having three aryl groups (Comparative Example 2 and Comparative Example 3), the starting heat peak is not recognized, but the component (A) has a When the substituted arylmethyl group and the substituted aryl group sulfonium salt compound (Example 1 and Example 2 and Comparative Example 1) are at about 110 ° C There is a peak of heat generation, and when the component (A) is an onium salt compound having an allyl group and an alkyl group substituted by a methyl group or a phenyl group (Examples 3 and 4), there is a peak of heat generation at about 120 ° C, and respectively The same low temperature hardenability is recognized. On the other hand, when the component (A) is a phosphonium salt compound having a substituted arylmethyl group and an alkyl group (Comparative Example 4), there is a peak of heat generation at about 150 ° C, which is comparable to the component (A) of the example. , the hardenability is recognized at high temperatures. When the component (A) is an onium salt compound having a substituted allyl group and a substituted aryl group (Comparative Example 5), it was confirmed that the component was hardened before the measurement, and the storage stability was poor.

[hardening rate measurement test]

The film-like adhesives of Examples 1 to 4 and Comparative Examples 1 and 4 were each heated on a hot plate at 100 ° C to 160 ° C for 10 seconds to be cured. From the infrared absorption spectrum, the difference between the area value of the signal intensity of the epoxy group before and after heating was divided by the area value of the signal intensity before heating, and the curing rate was obtained. The results are shown in Fig. 5.

Example 1 using TA-60 (Y ^- = [P(C ₂ F ₅ ) ₃ F ₃ ] ^- ) as α-naphthylmethyl-4-hydroxyphenylmethyl phosphonium salt compound and using PMNS TFSM ( Example 2 of Y ^- = [C(CF ₃ SO ₂ ) ₃ ] ^- ), in the same manner as Comparative Example 1 using SI-60 (Y ^- = [SbF ₆ ] ^- ), exhibited in a short time of 10 seconds The high hardening rate is obtained, and the same low temperature rapid hardening property is recognized.

Examples 3 and 4 using an onium salt compound having an allyl group and an alkyl group substituted with a methyl group or a phenyl group exhibited the same low-temperature rapid hardenability as in Example 1 and Example 2 and Comparative Example 1. On the other hand, use a substituted aromatic In Comparative Example 4, a sulfonium salt compound of a methyl group and an alkyl group, hardening was hardly performed.

[storage stability test]

The film-like adhesives of Examples 1 to 4 and Comparative Examples 1 to 5 were allowed to stand in a thermostat at 40 ° C for 5 days. The hardening rate after standing was determined by the infrared absorption spectrum. The results are shown in Table 3.

In Examples 1 to 4 and Comparative Examples 1 to 4, hardening was hardly performed and storage stability was good. On the other hand, Comparative Example 5 was hardened before the test and the storage stability was low.

[Measurement of fluoride ion concentration]

The film-like adhesives of Examples 1 to 4 and Comparative Examples 1 to 5 were diluted to 100 times with pure water, and then heated in an environment of 121 ° C / 100% RH for 15 hours and extracted. The filtered water was filtered, and the fluoride ion concentration was measured by an anion chromatograph (IC-20 manufactured by DIONEX). The results are shown in Table 3.

Examples 1 to 4 and Comparative Examples 3 to Comparative Examples using an onium salt compound having [P(C ₂ F ₅ ) ₃ F ₃ ] ^- or [C(CF ₃ SO ₂ ) ₃ ] ^- as Y ^- 5, the fluoride ion concentration of less than 100ppm low, but having [SbF _6] ^- Comparative Example 1 and the sulfonium salt compound in Comparative Example 2, it was confirmed that the fluoride ion concentration is 10500ppm, 6800ppm and high.

[Production of connection structure]

On a glass substrate (Corning #1737, shape 38 mm × 28 mm, thickness 0.5 mm, surface ITO (indium tin oxide) wiring pattern (pattern width 50 μm, pitch 50 μm), 2 mm × 20 mm Size, from Each of the film-like adhesives of Examples 1 to 4 and Comparative Examples 1 to 5 was transferred to the PET resin film. Under the mounting conditions (temperature and time) shown in Table 4, the IC wafer (outer shape 1.7 mm × 17.2 mm, thickness 0.55 mm, bump size 50 μm × 50 μm, bump pitch 50 μm) Then, a load of 80 MPa (contrast area conversion) was applied and heated and pressurized to be mounted. Further, the film-like adhesive after the storage stability test was also mounted in the same manner.

[Evaluation of connection resistance]

The resistance value (the maximum value among the 14 terminal measurements) between the adjacent circuits of the bonded structure produced as described above was measured. The results obtained are shown in Table 4.

When the film-like adhesives of Examples 1 to 4 and Comparative Example 1 were used, they were all less than 5 Ω before and after the storage stability test, and showed good values. When the film-like adhesives of Comparative Example 2 and Comparative Example 3 were used, they were not cured and could not be joined. Further, when the film-like adhesive of Comparative Example 4 was used, it became a high resistance value. In Comparative Example 5, the connection structure was hardened before the production of the bonded structure.

[Observation of wiring corrosion of connected structures]

The appearance of the ITO wiring after the treatment of the bonded structure (the film-form adhesive which was not subjected to the storage stability test) prepared in the above manner was treated in an environment of 85 ° C and 85% RH for 24 hours. The results obtained are shown in Table 4.

In Comparative Example 1 and Comparative Example 2 using a sulfonium salt compound having [SbF ₆ ] ^- as Y ^- , significant occurrence of corrosion of wiring was recognized, but using [P(C ₂ F ₅ ) ₃ F ₃ ] ^- or [C(CF ₃ SO ₂ ) ₃ ] ^- In Examples 1 to 4 and Comparative Examples 3 to 5 as Y ^- onium salt compounds, corrosion was not recognized.

According to the above, it is found that Y ^{- is} represented by [P(R ⁴ ) _a (F) _6-a ] ^- or [C((R ⁵ )SO ₂ ) ₃ ] ^- , especially [P(C ₂ F _{5 )} An adhesive composition of ₃ F ₃ ] ^- or [C(CF ₃ SO ₂ ) ₃ ] ^- an onium salt compound represented by the above formula (I), and a composition containing [SbF ₆ ] ^- The same low-temperature rapid hardenability and storage stability, and the fluorine ions are hard to be detached, so that the occurrence of corrosion can be suppressed and the connection reliability is excellent. Further it was found, sulfonium salt compound of the formula (I) is represented by the R ¹ is a substituted or unsubstituted arylmethyl group, R ² is a substituted or unsubstituted aryl group, R ³ is methyl Or when R ¹ is a substituted or unsubstituted allyl group, R ² and R ³ are alkyl groups, or R ² and R ³ are a ring formed by bonding R ² and R ³ together, A polymerization initiator which can be attached to the adhesive composition at a low temperature for a short time.

1‧‧‧membranous adhesive

5‧‧‧Binder ingredients

7‧‧‧Electrical particles

Claims (14)

An anisotropic conductive adhesive composition comprising (A) an onium salt compound represented by the following formula (I), (B) a cationically polymerizable substance, and (C) a conductive particle: Wherein R ¹ represents a substituted or unsubstituted arylmethyl group, or a substituted or unsubstituted allyl group, and R ² and R ³ each independently represent an alkyl group, or a substituted or unsubstituted group; An aryl group, Y ^- represents [P(R ⁴ ) _a (F) _6-a ] ^- (wherein R ⁴ represents an alkyl group in which at least a part of a hydrogen atom is substituted by a fluorine atom, and a represents an integer of 1 to 6; When a is an integer of 2 or more, a plurality of R ^{4 present} may be the same or different), or [C((R ⁵ )SO ₂ ) ₃ ] ^- (wherein R ⁵ represents at least a part of a hydrogen atom is fluorine The atom-substituted alkyl group, the plurality of R ^{5 present} may be the same or different from each other); wherein R ² and R ³ may be bonded together to form a ring, and R ¹ is a substituted or unsubstituted aryl group. When at least one of R ² and R ³ is a substituted or unsubstituted aryl group, when R ¹ is a substituted or unsubstituted allyl group, R ² and R ³ are an alkyl group, or R ² And R ³ is a ring formed by bonding R ² and R ³ together]. The anisotropic conductive adhesive composition according to claim 1, wherein the (A) component contains a phosphonium salt compound represented by the following formula (II): [wherein, Ar ¹ and Ar ² each independently represent a substituted or unsubstituted aryl group, and Y ^- is synonymous with the above]. The anisotropic conductive adhesive composition according to claim 2, wherein the (A) component contains a phosphonium salt compound represented by the following formula (III): [wherein, Y ^- is synonymous with the above]. The anisotropic conductive adhesive composition according to claim 1, wherein the (A) component contains a phosphonium salt compound represented by the following formula (IV): Wherein A ¹ and A ² each independently represent an alkyl group, and R ⁶ , R ⁷ and R ⁸ each independently represent a hydrogen atom, an alkyl group, or a substituted or unsubstituted aryl group, and Y ^- is synonymous with the above Wherein A ¹ and A ² may be bonded together to form a ring]. The anisotropic conductive adhesive composition according to claim 4, wherein the component (A) contains the formula (V), the formula (VI), the formula (VII) or the formula (VIII) ) the guanidinium salt compound shown: [wherein, Y ^- is synonymous with the above]. The anisotropic conductive adhesive composition according to any one of the items 1 to 5, wherein the component (A) contains a difference in a mixture with a glycidyl ether type epoxy compound. The cesium salt compound having a peak temperature of 40 ° C to 150 ° C is given in the scanning calorimetry. The anisotropic conductive adhesive composition according to any one of the items 1 to 5, wherein the component (B) is selected from the group consisting of epoxidation At least one of a group consisting of a substance, an oxetane compound, and a vinyl ether compound. The anisotropic conductive adhesive composition according to any one of claims 1 to 5, further comprising (D) a film-forming polymer. The anisotropic conductive adhesive composition according to any one of claims 1 to 5, which is used as an adhesive for circuit connection. The anisotropic conductive adhesive composition according to any one of claims 1 to 5, which is hardened by heating. A film-like adhesive agent obtained by forming an anisotropic conductive adhesive composition according to any one of claims 1 to 10 in a film form. A connection structure comprising: a first circuit member having a first circuit electrode; a second circuit member having a second circuit electrode; and being disposed between the first circuit member and the second circuit member, and a circuit connecting member electrically connected to the second circuit electrode, wherein the circuit connecting member comprises the anisotropic conductive adhesive composition according to any one of claims 1 to 10 Hardened matter. A manufacturing method of a connection structure, comprising: arranging between a first circuit member having a first circuit electrode and a second circuit member having a second circuit electrode, as in claim 1 to 10 The one of the anisotropic conductive adhesive composition, wherein the first circuit member and the second circuit member are heated and pressurized via the anisotropic conductive adhesive composition. And the step of electrically connecting the first circuit electrode and the second circuit electrode. A semiconductor device comprising: a semiconductor element; a substrate having a circuit pattern; and a semiconductor element connection member disposed between the semiconductor element and the substrate and electrically connecting the semiconductor element and the circuit pattern, the semiconductor element The connecting member comprises a cured product of the anisotropic conductive adhesive composition according to any one of claims 1 to 10.