TWI602216B - Manufacturing method of discharge lamp electrode and discharge lamp - Google Patents

Manufacturing method of discharge lamp electrode and discharge lamp Download PDF

Info

Publication number
TWI602216B
TWI602216B TW102133334A TW102133334A TWI602216B TW I602216 B TWI602216 B TW I602216B TW 102133334 A TW102133334 A TW 102133334A TW 102133334 A TW102133334 A TW 102133334A TW I602216 B TWI602216 B TW I602216B
Authority
TW
Taiwan
Prior art keywords
electrode
joint
discharge lamp
joining
solid
Prior art date
Application number
TW102133334A
Other languages
English (en)
Chinese (zh)
Other versions
TW201415527A (zh
Inventor
Takenori Hayakawa
Kazuto TATEBAYASHI
Izumi Serizawa
Hiroshi Kodaira
Shigehiko Ishinabe
Tomohiko Honda
Hajime Furuhata
Yutaka Komatsu
Hidekazu Takizawa
Original Assignee
Orc Manufacturing Co Ltd
Nagano Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2012208372A external-priority patent/JP2014063655A/ja
Priority claimed from JP2012212807A external-priority patent/JP6092557B2/ja
Priority claimed from JP2012214630A external-priority patent/JP6140964B2/ja
Application filed by Orc Manufacturing Co Ltd, Nagano Prefecture filed Critical Orc Manufacturing Co Ltd
Publication of TW201415527A publication Critical patent/TW201415527A/zh
Application granted granted Critical
Publication of TWI602216B publication Critical patent/TWI602216B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
TW102133334A 2012-09-21 2013-09-14 Manufacturing method of discharge lamp electrode and discharge lamp TWI602216B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012208372A JP2014063655A (ja) 2012-09-21 2012-09-21 放電ランプ用電極の製造方法
JP2012212807A JP6092557B2 (ja) 2012-09-26 2012-09-26 放電ランプ用電極の製造方法
JP2012214630A JP6140964B2 (ja) 2012-09-27 2012-09-27 放電ランプ用電極およびその製造方法

Publications (2)

Publication Number Publication Date
TW201415527A TW201415527A (zh) 2014-04-16
TWI602216B true TWI602216B (zh) 2017-10-11

Family

ID=50341233

Family Applications (2)

Application Number Title Priority Date Filing Date
TW102133334A TWI602216B (zh) 2012-09-21 2013-09-14 Manufacturing method of discharge lamp electrode and discharge lamp
TW106118655A TWI638380B (zh) 2012-09-21 2013-09-14 放電燈管用電極之製造方法及放電燈管

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW106118655A TWI638380B (zh) 2012-09-21 2013-09-14 放電燈管用電極之製造方法及放電燈管

Country Status (4)

Country Link
KR (1) KR102083286B1 (ko)
CN (3) CN106887369B (ko)
TW (2) TWI602216B (ko)
WO (1) WO2014045918A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9023734B2 (en) 2012-09-18 2015-05-05 Applied Materials, Inc. Radical-component oxide etch
JP6633826B2 (ja) * 2014-09-24 2020-01-22 株式会社オーク製作所 放電ランプ
JP6564598B2 (ja) * 2015-03-31 2019-08-21 株式会社オーク製作所 放電ランプ
CN109427519A (zh) * 2017-08-28 2019-03-05 深圳凯世光研股份有限公司 一种短弧放电灯阳极电极的回收再利用方法及其阳极电极
KR102088035B1 (ko) * 2018-10-18 2020-03-11 유니램 주식회사 전극 및 이를 구비하는 제논 플래쉬 램프
CN113410121A (zh) * 2021-06-18 2021-09-17 常州玉宇电光器件有限公司 一种新型结构电极及制造工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201133543A (en) * 2009-09-24 2011-10-01 Orc Mfg Co Ltd Discharge lamp
JP2011216442A (ja) * 2010-04-02 2011-10-27 Ushio Inc ショートアーク型放電ランプ
TW201214503A (en) * 2010-07-02 2012-04-01 Ushio Electric Inc Short arc type discharge lamp
TW201218240A (en) * 2010-07-02 2012-05-01 Ushio Electric Inc in which a cathode and an anode are disposed in a light emitting tube while the cathode consists of a body part composed of tungsten and a emitter part composed of thoriated tungsten
JP2012109180A (ja) * 2010-11-19 2012-06-07 Yumex Inc ショートアーク放電灯用電極及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3337658B2 (ja) * 1999-01-26 2002-10-21 浜松ホトニクス株式会社 放電管用電極及びこれを用いた放電管
JP3994880B2 (ja) * 2002-04-26 2007-10-24 ウシオ電機株式会社 放電ランプ
JP4396747B2 (ja) * 2007-08-20 2010-01-13 ウシオ電機株式会社 放電ランプ
JP2010055781A (ja) * 2008-08-26 2010-03-11 Harison Toshiba Lighting Corp 電極、放電ランプ、電極製造方法
JP4498468B1 (ja) * 2010-03-10 2010-07-07 株式会社オーク製作所 放電ランプ用電極の製造方法
JP5472915B2 (ja) * 2010-05-24 2014-04-16 株式会社オーク製作所 放電ランプ
JP5316436B2 (ja) 2010-01-28 2013-10-16 ウシオ電機株式会社 放電ランプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201133543A (en) * 2009-09-24 2011-10-01 Orc Mfg Co Ltd Discharge lamp
JP2011216442A (ja) * 2010-04-02 2011-10-27 Ushio Inc ショートアーク型放電ランプ
TW201214503A (en) * 2010-07-02 2012-04-01 Ushio Electric Inc Short arc type discharge lamp
TW201218240A (en) * 2010-07-02 2012-05-01 Ushio Electric Inc in which a cathode and an anode are disposed in a light emitting tube while the cathode consists of a body part composed of tungsten and a emitter part composed of thoriated tungsten
JP2012109180A (ja) * 2010-11-19 2012-06-07 Yumex Inc ショートアーク放電灯用電極及びその製造方法

Also Published As

Publication number Publication date
TW201735096A (zh) 2017-10-01
WO2014045918A1 (ja) 2014-03-27
KR102083286B1 (ko) 2020-03-02
KR20150056783A (ko) 2015-05-27
CN104641445B (zh) 2017-05-10
CN104641445A (zh) 2015-05-20
TWI638380B (zh) 2018-10-11
TW201415527A (zh) 2014-04-16
CN106887369B (zh) 2019-01-15
CN107086167A (zh) 2017-08-22
CN106887369A (zh) 2017-06-23

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