TWI599786B - Conductor pattern inspection device - Google Patents
Conductor pattern inspection device Download PDFInfo
- Publication number
- TWI599786B TWI599786B TW105138409A TW105138409A TWI599786B TW I599786 B TWI599786 B TW I599786B TW 105138409 A TW105138409 A TW 105138409A TW 105138409 A TW105138409 A TW 105138409A TW I599786 B TWI599786 B TW I599786B
- Authority
- TW
- Taiwan
- Prior art keywords
- signal
- conductor pattern
- inspection
- detection signal
- electrode
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2839—Fault-finding or characterising using signal generators, power supplies or circuit analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/312—Contactless testing by capacitive methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015250121A JP6014950B1 (ja) | 2015-12-22 | 2015-12-22 | 導電体パターン検査装置 |
JP2015-250121 | 2015-12-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI599786B true TWI599786B (zh) | 2017-09-21 |
TW201812331A TW201812331A (zh) | 2018-04-01 |
Family
ID=57197568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105138409A TWI599786B (zh) | 2015-12-22 | 2016-11-23 | Conductor pattern inspection device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6014950B1 (ja) |
KR (1) | KR101763535B1 (ja) |
CN (1) | CN107064706B (ja) |
TW (1) | TWI599786B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018169338A (ja) * | 2017-03-30 | 2018-11-01 | 大日本印刷株式会社 | 検査装置、検査方法、および、検査装置用のプログラム |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1645609A (zh) * | 2004-01-20 | 2005-07-27 | 三星电子株式会社 | 半导体器件的测试图案及利用其的测试方法 |
JP2008026320A (ja) * | 2006-07-20 | 2008-02-07 | Microinspection Inc | 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法 |
JP2008076187A (ja) * | 2006-09-20 | 2008-04-03 | Oht Inc | 回路パターン検査装置 |
TW200819762A (en) * | 2006-10-19 | 2008-05-01 | Tokyo Cathode Lab | Pattern inspection device |
TW201132996A (en) * | 2009-08-17 | 2011-10-01 | Fcom Corp | Detecting device of conductive pattern and detecting method |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001221824A (ja) * | 2000-02-10 | 2001-08-17 | Oht Inc | 検査装置及び検査方法、検査ユニット |
CN1720458B (zh) * | 2002-11-30 | 2010-06-23 | Oht株式会社 | 电路图案检查装置及电路图案检查方法 |
JP2004184385A (ja) * | 2002-11-30 | 2004-07-02 | Oht Inc | 回路パターン検査装置及びパターン検査方法 |
JP2004264272A (ja) * | 2003-02-28 | 2004-09-24 | Oht Inc | 導電体検査装置及び導電体検査方法 |
CN1566975A (zh) * | 2003-06-23 | 2005-01-19 | Oht株式会社 | 检查装置和检查方法 |
JP4730904B2 (ja) * | 2006-04-28 | 2011-07-20 | 日本電産リード株式会社 | 基板検査装置及び基板検査方法 |
JP5387818B2 (ja) * | 2008-12-11 | 2014-01-15 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
JP4644745B2 (ja) * | 2009-08-04 | 2011-03-02 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
JP5305111B2 (ja) * | 2011-01-21 | 2013-10-02 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
JP2013210247A (ja) * | 2012-03-30 | 2013-10-10 | Nidec-Read Corp | 絶縁検査装置及び絶縁検査方法 |
JP5433876B1 (ja) | 2013-03-26 | 2014-03-05 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
-
2015
- 2015-12-22 JP JP2015250121A patent/JP6014950B1/ja not_active Expired - Fee Related
-
2016
- 2016-11-22 KR KR1020160155702A patent/KR101763535B1/ko active IP Right Grant
- 2016-11-23 TW TW105138409A patent/TWI599786B/zh not_active IP Right Cessation
- 2016-11-25 CN CN201611060604.0A patent/CN107064706B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1645609A (zh) * | 2004-01-20 | 2005-07-27 | 三星电子株式会社 | 半导体器件的测试图案及利用其的测试方法 |
JP2008026320A (ja) * | 2006-07-20 | 2008-02-07 | Microinspection Inc | 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法 |
JP2008076187A (ja) * | 2006-09-20 | 2008-04-03 | Oht Inc | 回路パターン検査装置 |
TW200819762A (en) * | 2006-10-19 | 2008-05-01 | Tokyo Cathode Lab | Pattern inspection device |
TW201132996A (en) * | 2009-08-17 | 2011-10-01 | Fcom Corp | Detecting device of conductive pattern and detecting method |
Also Published As
Publication number | Publication date |
---|---|
TW201812331A (zh) | 2018-04-01 |
CN107064706A (zh) | 2017-08-18 |
KR101763535B1 (ko) | 2017-07-31 |
JP2017116331A (ja) | 2017-06-29 |
KR20170074748A (ko) | 2017-06-30 |
CN107064706B (zh) | 2019-07-30 |
JP6014950B1 (ja) | 2016-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |