TWI591008B - Electronic components inspection methods and devices - Google Patents

Description

Electronic component inspection method and device

The present invention relates to an inspection method and apparatus, and more particularly to an inspection method and apparatus for inspecting each side of an electronic component and electronic components that carry the electronic component by the carrier during the inspection.

Press, the substrate processing process in general electronic components usually requires quality inspection. These inspections have different requirements depending on the process, but usually need to be assisted by the conveying device so that the inspection process can be carried out in an automated manner; For example, a substrate having a wafer and having a heat sink over the wafer is used. Since the current packaging process is prevalent in a BGA (Ball Grid Array) package, such a packaged substrate usually has to be inspected ( At the bottom of the solder ball solder joint, the copper leakage (also known as the bottom copper), you must also check whether the heat sink on the top of the substrate (front) is scratched, the specification mark is not damaged, and the overflow of the heat sink package needs to be It is known from the inspection of the peripheral side of the substrate.

When these substrates are inspected, they are often arranged in a matrix arrangement in a plurality of positioning intervals in a carrier tray, and each substrate is placed with a heat sink facing upward in a positioning interval to facilitate the entire carrier transport and Positioning; the disk surface on the carrier plate and the lower disk surface are respectively provided with corresponding positioning sections at the same position, so that a plurality of carrier disks can be stacked and positioned on each other.

In the prior art, when inspecting, the substrate in the carrier is often taken out manually and placed under a microscope for inspection. However, in a large number of inspection requirements, automation is an inevitable trend, and how to perform inspection on a machine. It is an important subject worthy of study to effectively and properly plan the transfer of substrates and provide inspection functions to improve inspection efficiency, reduce costs, and save plant space.

Accordingly, it is an object of the present invention to provide an electronic component inspection method that can automatically perform electronic component inspection.

Another object of the present invention is to provide an electronic component inspection apparatus that can automatically perform electronic component inspection.

It is still another object of the present invention to provide an apparatus using the electronic component inspection method as described.

The method for inspecting an electronic component according to the object of the present invention comprises: providing a carrier tray for holding the component to be inspected; and performing on a table top: causing the component to be inspected on the carrier to be transported by a first conveying device and The first inspection unit performs a reverse inspection of the component to be inspected; the carrier carrying the component to be inspected is held by the inverting mechanism from the first conveying device, and then turned over to a second conveying device, and is carried by a second inspection unit. Checking the front side of the component; the component to be inspected on the carrier is extracted by a transfer mechanism from the second transfer device and transported, and the side inspection of the component to be inspected is performed by a third inspection unit.

Another method for inspecting an electronic component according to the object of the present invention comprises: providing a carrier tray for holding the component to be inspected; and performing: a reverse inspection step of first carrying the carrier carrying the reverse facing component to be inspected The device is transported to a first stage, and is inspected one by one by a first inspection unit on the opposite side of each component to be inspected in the carrier; after the inspection, the carrier is transported to the second stage; Having the inverting mechanism place an originally held empty tray on top of the tray on the second stage that has completed the reverse inspection step, and hold the two trays in the flip holder for inversion and displacement to a second transport device On the third stage; a front inspection step, the carrier is transported by the second transfer device to a fourth stage to be inspected by a second inspection unit on the front side of each component to be inspected in the carrier; The disc is transported to a fifth stage; a side inspection step, the tray is subjected to a transfer mechanism to extract the component to be inspected that has completed the front inspection from the loading tray, and the component to be inspected is moved to a third inspection unit. Surrounding side an examination.

According to another aspect of the present invention, an inspection apparatus for an electronic component includes: a first transfer device on a machine table; a transfer flow path for forming a transfer carrier; and a first inspection unit located at the first Above the conveying device, there is a lens for viewing from top to bottom; a second conveying device forms a conveying flow path for conveying the carrier; and a second inspection unit is located above the second conveying device, and is provided with a top to bottom a lens for inspection; an inverting mechanism provided with a flipping seat that can be driven to be displaced between the first conveying device and the second conveying device and turned over; a third viewing unit located on the side of the second conveying device, provided with a lower a lens for viewing upwards; a transfer mechanism having a first extraction component that can be driven to be displaced between the second transport device and the third view unit.

An inspection apparatus for an electronic component according to still another object of the present invention includes: an apparatus using an inspection method of the electronic component.

In the method and device for inspecting an electronic component according to the embodiment of the present invention, since the first transporting device, the inverting mechanism, the second transporting device, the transfer mechanism, and the third transporting device sequentially transport the carrier, the substrate can be completed in the entire transport flow path. The six sides of the reverse, positive, and four sides are inspected; and by the first holding component of the inverting mechanism E, the second holding component is offset or the clamping is reversed, the substrate is smoothly converted between the two carriers and stably transported; At the same time, with the design of the feeding mechanism of the first conveying device, the receiving mechanism of the second conveying device, the feeding mechanism of the third conveying device and the receiving mechanism, the carrier can be smoothly supplied, received, and even loaded. The supply and acceptance of the carrier plates of the specification substrate have greatly improved the productivity efficiency of the inspection and transportation benefits obtained.

Referring to FIG. 1 to FIG. 3, in the embodiment of the present invention, a carrier A is used, and the carrier A is substantially in the shape of a rectangular disk, and the periphery of the four sides is provided with a frame edge protruding upward. A1, and a two-concave buckle edge A2 is arranged at a distance from the frame edge A1 of the long sides of the two sides, and a convex buckle rib A3 is respectively arranged outside the frame edge A1 of the short side edges of the two sides. A flat disk surface A4 is disposed in the frame edge A1, and a plurality of positioning portions A5 protruding in a matrix are arranged in a matrix on the disk surface A4. Each of the positioning portions A5 respectively provides a component to be inspected for placing the substrate B and the like. The positioning interval A51, the substrates B are arranged in a matrix; the substrate B can be a BGA-type implanted wafer and a heat sink, and when placed in the carrier A, the heat sink is facing upward, and the upper surface of the heat sink is On the front side, the lower surface of the substrate B is the reverse side.

Referring to FIG. 2 and FIG. 4 to FIG. 5, the embodiment of the present invention can be illustrated by the device embodiment in the figure. The device can be applied to two types of carriers A respectively carrying two different specifications of the substrate B, and simultaneously placed in the device, in order. The first conveying device C is disposed on a table top Y, and is disposed in the X-axis direction and is biased against the side Y1 of the machine table surface Y. The first conveying device C includes the opposite sides. The first track C1 and the second track C2 are provided, and a feeding mechanism C3 is disposed at the starting point of the first track C1, and the feeding mechanism C3 is stacked with the carrier A on the reverse side facing the substrate B, and is turned from top to bottom. The first carrier C1 is supplied to the first track C1 one by one; the second track C2 is provided with a first stage C21 and a second stage C22 which are spaced apart from each other and are respectively disposed at positions but can be vertically moved up and down in the Z axis. And a belt C23 that can be driven to transport to form a conveying flow path; wherein the second stage C22 is adjacent to the second rail C2 and conveys an end point and is provided with a clamping mechanism C221; the substrate B of the component to be inspected faces upwards Placed on the carrier A and transported by the feeding mechanism C3 via the first track C1 to the second track C2; And D is disposed in parallel with the first conveying device C and spaced apart from each other on the machine table surface Y, and is disposed on the other side of the first conveying device C opposite to the side Y1 of the machine table surface Y in the X-axis direction. The second conveying device D includes a third rail D1 and a fourth rail D2 which are opposite to each other. The fourth rail D2 is provided with a receiving mechanism D3 at the end of the conveying. The receiving mechanism D3 is used for collecting and completing the inspection and carrying the front facing substrate B. The carrier A is loaded from the fourth track D2 one by one, and the carrier A is layered one by one; the third track D1 is provided with a spacing and is respectively disposed at the position but can be used as the Z axis. a third stage D11 and a fourth stage D12 that are vertically moved up and down, and a belt D13 that can be driven to transport to form a conveying flow path, and a fourth stage that can be raised and lowered in the Z-axis is provided in the fourth track D2. D22, which is located on the lower rail seat D21 of a fourth track D2, can be driven to X-axis displacement and is provided with a clamping mechanism D221; wherein the third stage D11 is adjacent to the third track D1 to convey the starting point and is provided with a The clamping mechanism D111, the substrate B of the component to be inspected is placed face up on the carrier A and is guided by the third track D1 via the fourth track D2 is transported to the receiving mechanism D3; an inverting mechanism E is disposed on the table top Y, outside the transport destination of the second rail C2 of the first transport device C, and the third track D1 of the second transport device D is transported outside the starting point The utility model is provided with a flip seat E4 which can be driven by the driving member E1 for the Z-axis up and down displacement, the Y-axis left and right displacement, and the X-axis rotation axis E2 as the axis to be driven to rotate symmetrically by the driving member E3. It is disposed on a stand E5. The stand E5 is disposed on a Y-axis rail seat E6 and is driven by the driving member E7 to be displaced in the Y-axis on the rail seat E6, so that the flip seat E4 can be repeatedly displaced. a second track C2 of the first conveying device C and a third track D1 of the second conveying device D; a first inspection mechanism F located on the machine table Y, provided with a Y-axis transversely The second rail C2 of the transport device C and the first rail mount F1 above the third rail D1 of the second transport device D, the first rail mount F1 is disposed at the opposite ends of the first transport device C and the second transport The two outer sides of the device D are arranged in parallel with the X-axis second rail seat F2 and the third rail seat F3. The first rail seat F1 can be in the second rail seat F2 and the third. The seat F3 is driven to be X-axis displacement; the first rail seat F1 is provided with a first inspection unit F11 that can be driven to be displaced by the Z-axis, which can be independently driven to the Y-axis on the first rail seat F1. Displacement, and inspecting the upper surface of the substrate B to be inspected on the first stage C21 in the second track C2 conveyed to the first conveying device C, the upper stage C21 is placed on the reverse side, the first inspection unit F11 A CCD lens is provided for viewing from top to bottom; the first rail seat F1 is further provided with a second inspection unit F12 that can be driven for Z-axis displacement, and can be independently driven on the first rail seat F1 for Y. The axial displacement, and the upper surface inspection of the component substrate B to be inspected, which is placed on the fourth stage D12 in the third track D1 of the second conveying device D, is placed on the upper surface of the object to be inspected, which is placed face up, the second inspection unit F12 is provided with a CCD lens for viewing from top to bottom; a third conveying device G, the conveying flow path is parallel to the conveying path of the first conveying device C and the second conveying device D, and is spaced apart from each other at the machine The table top Y is disposed in the X-axis direction and is located on the side Y1 of the opposite machine table Y The third side conveying device G includes a fifth rail G1 and a sixth rail G2 which are opposite to each other, and the fifth rail G1 is provided with a feeding mechanism G3. The feeding mechanism G3 is provided on the side Y2 of the other machine table surface Y. The fifth rail G1 is supplied with the empty tray A from the top to the bottom, and the sixth rail G2 is provided with a receiving mechanism G4 at the end of the conveyance. The receiving mechanism G4 is recovered from the sixth rail G2 and is detected as a defective product. The carrier A is placed on the front side of the component substrate B to be inspected; the sixth rail G2 is provided with a Z-axis up and down and is located on a lower rail G21 in a sixth rail G2 and can be driven as an X-axis. The displacement of the sixth stage G5, the sixth stage G5 corresponds to the fifth stage D22 of the fourth track D2 of the second transfer device D in the Y-axis position, and is provided with a clamping mechanism G51, and the empty tray A is The fifth track G1 is transported to the receiving mechanism G4 via the sixth track G2; a second inspection mechanism H is provided with a third viewing unit H1 and a fourth viewing unit H2, which are disposed at the machine table in the X-axis spacing. And located between the fourth track D2 of the second conveying device D and the sixth track G2 of the third conveying device G, each of which is provided from bottom to top The CCD lens for inspection is used to inspect the side surface of the component substrate B to be inspected; a transfer mechanism K is provided with a first transfer rail seat K1 and a second direction which are opposite to each other and are disposed on the machine table Y. The transfer rail base K2, the first transfer rail base K1 and the second transfer rail base K2 are respectively disposed in the Y-axis direction by the height, and the conveying flow path is combined with the first conveying device C and the second conveying device D. The conveying flow path is perpendicular to each other; the first transfer rail base K1 is provided with a first extraction component K11 that can be driven to be displaced in the Y-axis and the Z-axis, and the first extraction component K2 can be driven on the first transfer rail base. K1 is transferred between the fifth stage D22 of the fourth track D2 of the second conveying device D, the third inspection unit H1 of the second inspection mechanism H, and the sixth stage G5 of the sixth track G2 of the third transfer device G. The second transfer rail base K2 is provided with a second extraction component K21 that can be driven to be displaced in the Y-axis and the Z-axis, and the second extraction component K21 can be driven to be transferred to the fourth rail D2 of the second transport device D. The fifth stage D22, the fourth inspection unit H2 of the second inspection mechanism H, and the sixth stage G5 of the sixth track G2 of the third transfer device G.

Referring to FIG. 4, FIG. 6 to FIG. 7 , the first rail C1 of the first conveying device C is disposed on a single plate C11 on the upper side frame C12 with two spaced intervals and parallel to each other, and the inner side of the two side frames C12 respectively A belt C13 is provided, the belt C13 forms a conveying flow path of the conveying tray A, and a hollow working section C111 is disposed on the lower side plate C11 between the two side frames C12; the feeding mechanism C3 and In the third conveying device G, the feeding mechanism G3 is the same on the fifth rail G1, and the feeding mechanism C3 is used for description. The feeding mechanism G3 can be similarly pushed. It is not mentioned that the feeding mechanism C3 includes a loading rack C31. And a lifting frame C32; wherein the loading frame C31 comprises a carrier C312 provided with a rectangular hollow transfer section C311 for the carrier A to move, and the transfer section C311 corresponds to the upper and lower working sections C111; The side of the lower side of the carrier C312 is respectively provided with a side seat C313 which can be disposed on both outer sides of the two side frames C12 of the first track C1, so that the carrier C312 is framed higher than a height above the first track C1 and the two side frames C12; The four corners outside the transfer section C311 are respectively provided with a corner rod C314 on the carrier C312, and the carrier C312 is mounted on the carrier C312. The first indentation component C315 is composed of four clamping members C3151 which can be driven to protrude or retract in front and rear, and the double-angled rod C314 outside the two long sides of the rectangular hollow transfer section C311 There are two clamping members C3151 respectively; and four clamping members C3121 are arranged above the carrier C312 at a distance from the carrier C312, and can be driven to protrude forward or backward. The second indentation component C316 composed of C3162 is respectively provided with two latching members C3162 between the two angled rods C314 outside the two long sides of the rectangular hollow transfer section C311; the first indentation component C315 and Between the second indentation component C316, a carrier A carrying the reverse-facing substrate B of the first specification is stacked, and the second inlay component C316 is disposed above the second-type reverse-loaded substrate B. The mounting plate C32 comprises a fixing frame C321 and a moving frame C322. The fixing frame C321 is composed of an upper fixing base C3211, a lower fixing base C3212 and a plurality of supporting rods C3213 therebetween, and the fixing base C3211 is provided. Below the seat plate C11 of the first track C1; between the upper mount C3211 and the lower mount C3212 The strip-shaped positioning member C3214 is provided with sensors C3215 respectively disposed on the upper and lower sides; the movable frame C322 is located above the upper fixing base C3211 and above the upper fixing base C3211. The driving base C3222 between the support rods C3213 and the plurality of support rods C3223 are formed; the upper support C3221 is provided with two spaced apart intervals, and each upper support C3221 is located at the upper end of the two support rods C3223; the drive base C3222 is driven by a drive The screw C3225 driven by C3224 acts as a vertical displacement and is supported by the support rod C3223 to move the upper support C3221 up and down into the transfer section C311 and the working section C111; on the side of the drive base C3222, an inductive piece C3226 can be received by the sensor C3215 induction.

Referring to FIGS. 2 and 8 to 10, the first type of overlap between the first indentation component C315 and the second indentation component C316 carries the carrier A of the reverse-facing substrate B, and the lower portion thereof is protruded. An intrusion component C315 is resisted and positioned above the latching C3151 of the first indentation component C3152 (Fig. 8); when it is intended to be fed to the first rail C1, the lifting frame C32 is driven up to the upper bracket C3221 is pressed under the carrier A carrying the reverse-facing substrate B, and the clamping member C3151 of the first fitting component C315 is driven to be retracted, so that the guiding members of the carrier A are respectively arranged on the lower sides of the carrier C312. The restriction interval between C317 falls on the upper support C3221 (Fig. 9); the latch C3151 of the first intrusion component C315 is driven to protrude to restrict the upper carrier A from falling, and the crane C32 is driven. Moving the upper support C3221 to lower the carrier A to the inner side belt C13 of the two side frames C12, so that the carrier A is transported by the conveying flow path formed by the belt C13 of the first track C1 (Fig. 10); When the first type of carrier A carrying the reverse-facing substrate B is to be fed to the first track C1, it is performed in the same manner; in this embodiment, the first specification There tails disc substrate B are set to A is executed after completion of the second specification takes precedence containing tails of the substrate carrier plate B A feeding and inspection work.

Referring to FIGS. 11 to 12, the fourth rail D2 and the receiving mechanism D3 of the second conveying device D are the same as the sixth rail G2 and the receiving mechanism G4 of the third conveying device G, and the second conveying device D is The four-track D2 and the receiving mechanism D3 are described. The sixth track G2 and the receiving mechanism G4 can be similarly pushed, and the description is omitted. The fourth track D2 of the second conveying device D includes two spaced-aparts on a board D23. The elevated side frame D24 spaced apart from each other and the inner side of the two side frames D24 are respectively provided with a driven belt D25, the belt D25 forms a conveying flow path of the conveying carrier A, and one end between the two side frames D24 The lower seat plate D23 is provided with a hollow working section D231; the fifth stage D22 which is provided with the clamping mechanism D221 and is located on the rail seat D21 for lifting up and down in the Z-axis is located between the two side frames D24, and is The side frame D24 corresponding to the fifth stage D22 is provided with an urging mechanism D26 for forcedly shifting to the side of the carrier A of the fifth stage D22 toward the one side of the side frame D24; the receiving mechanism D3 includes a loading rack D31 and a lifting frame D32; wherein the loading rack D31 comprises a rectangular frame provided for the carrier A to move through The carrier D312 of the transfer section D311, the transfer section D311 corresponds to the upper and lower sections of the working section D231; the lower sides of the carrier D312 are respectively provided with side seats which can be disposed on both outer sides of the two side frames D24 of the fourth track D2. D313, the carrier D312 is arranged higher than a height above the second rail D2 of the fourth rail D2; the four corners outside the shifting section D311 are respectively provided with a corner rod D314 on the carrier D312, in the carrier The upper surface of the D312 is provided with a first inlaying component D315 composed of four latching members D3151 which can be rotated from bottom to top or horizontally positioned by elasticity (or gravity), and is in the rectangular hollow transfer section D311. Two latching members D3151 are respectively disposed between the two long side rails D314; and a top spacer D3151 is disposed above and below the first indented component D315. The second indented component D316 consisting of four latching members D3162 which can be rotated from bottom to top or horizontally positioned by elastic (or gravity), and which are long in the rectangular hollow transfer section D311 Two latching members D3162 are respectively disposed between the two side frame rods D314 of the side edges; wherein The second inlay component D316 is disposed above the first type of the carrier A carrying the substrate B which is inspected as a good product facing up, and the second indentation component D315 and the second indentation component D316 are stacked second. The type of the carrier A carrying the substrate B which is inspected as a good product facing up; the lifting frame D32 comprises a fixing frame D321 and a moving frame D322; the fixing frame D321 is composed of an upper fixing base D3211 and a lower fixing base The D3212 is composed of a plurality of support rods D3213, and the upper fixed seat D3211 is disposed under the seat plate D23 of the fourth track D2; and an elongated positioning member D3214 is disposed between the upper fixed seat C3211 and the lower fixed seat C3212. The sensors D3215 are respectively disposed on the upper and lower sides; the movable frame D322 is composed of an upper support D3221 located above the upper mount D3211, a drive seat D3222 located below the upper mount D3211 and located between the support rods D3213, and a plurality thereof The support rod D3223 is composed of the screw D3225 driven by a driving member D3224, and can be displaced up and down, and the upper rod D3221 is moved up and down by the support rod D3223 to move in and out of the transfer interval D311 and the working interval D111; the driving seat D3222 One side A sensor D3226 is provided to be sensed by the sensor D3215.

Referring to FIGS. 2, 13 to 15, when the second type of carrier A carrying the substrate B which is inspected as good as the front side is transported by the transport path formed by the belt D25 of the fourth track D2, the receiving mechanism is transferred to the receiving mechanism. When D3 is below the loading rack D31 (Fig. 13), the lifting frame D32 is driven up to move the upper bracket D3221 below the carrier A carrying the front facing substrate B and supported to move up to the first inset The latching member D3151 of the component D315 causes the latching member D3151 to be rotated from the bottom to the top (Fig. 14), and after the loading tray A is moved up through the latching member D3151 on both sides, the latching member D3151 is subjected to elasticity (or gravity) The return is horizontally positioned, and the lifting frame D32 is driven downward to move the carrier A down to the latching member D3151 of the first intrusion component D315 (Fig. 15); if the first specification is loaded with a front facing The carrier A of the substrate B, which is inspected as good, is transported to the lower side of the carrier D31 of the receiving mechanism D3 by the transport path formed by the belt D25 of the fourth track D2, and is similarly transferred to the second embedded Above the cartridge D3162 of the component D316; in the present embodiment, the carrier A of the first type of the substrate B carrying the face up as being checked as a good product will be preferentially executed. A transfer platen so that the top of the second insert is set off against the engaging member assembly D316 D3162 will be executed first.

Referring to FIGS. 16-19, the inverting seat E4 of the inverting mechanism E has a rectangular frame E41 having a rectangular hollow operation section E411 larger than the carrier A, and the frame E41 side is received by the frame E5. The sensor E8 is inductively positioned to keep the frame E41 in a horizontal state every time; the corresponding short side of the frame E41 is provided with a set of first holding components E42, and the corresponding long sides of the frame E41 Two sets of second holding assemblies E43 spaced apart from each other are disposed on the side; the flipping E4 is provided with an oscillator E44 and an inductor E45 for detecting whether there is a carrier A toward the operating section E411; the first holding component E42 of the group includes the adjacent a first opposing member E421 on the short side of the frame E41 of the rotating shaft E2 and a second opposing member E422 on the other short side of the frame E41 of the rotating shaft E2; wherein the first opposing member E421 has two pivots E4211 (not shown) is pivoted to the frame E41, and is acted upon by a driving member E423 under the frame E41, and the driving rod E4231 of the driving member E423 is protruded in the direction of the force, and is forwarded to the front in the operating section E411. The second pair of E422 is pivoted to the frame E41 by two pivots E4221 and is framed. A driving member E424 is operated under the E41, the driving rod E4241 of the driving member E424 is coupled with a linking member E4242 to the frame E41, and the linking member E4242 is coupled with the two pivot rods E4221, so that the driving rod E4241 of the driving member E424 protrudes in the direction of the protruding force. In the operation section E411, the biasing force is applied to the front side; each of the second holding units E43 includes the first pair of clips E431 located on one long side of the frame E41 and the other long side of the frame E41. The second pair of clips E432 on the side; wherein the first pair of clips E431 and the second pair of clips E432 are respectively pivoted to the frame E41 by two pivots E433, and acted by a driving member E434 below the frame E41. The driving rod E435 of the driving member E434 is coupled with a linking member E436 to the outer frame E41, and the linking member E436 is coupled with the two pivot rods E433, and the driving rod E435 of the driving member E435 is protruded in the opposite direction of the direction of the force, as the operating interval E411. The first pair of clips E431 and the second pair of clips E432 are respectively provided to be driven to slide on a Z-axis slide rail E437 for opening or closing up or down. Two jaws E438, two jaws E438 side and a positioning member E439, wherein the two clips The front end of the claw E438 extends forward from the front end of the positioning member E439 toward the operation section E411.

Referring to FIGS. 20-21, the first pair of members E421 and the second pair of members E42 of the first holding assembly E42 are respectively configured to be convex outwardly on the outer side edges A1 of the two sides of the offset tray A. The rib A3; referring to FIGS. 22-23, the first pair of clips E431 and the second pair of clips E432 of the two sets of second holding assemblies E43 are respectively disposed on the long sides of the two sides of the carrier A by the two jaws E437 The two edges of the frame edge A1 are spaced apart from each other by a flange A2 (see FIG. 3), and in the embodiment, the first pair of clips E431 of the two sets of second holding components E43 are The second pair of clips E432 is based on the principle that the two pairs of trays A are simultaneously clamped and closed.

The method for inspecting an electronic component according to an embodiment of the present invention includes: an empty tray step, such that an empty carrier A is first placed by the feeding mechanism C3 or directly on the belt of the first rail C1 of the first conveying device C. The C13 is conveyed to the second stage C22 of the second track C2, and is clamped and positioned by the clamping mechanism C221, and is raised by the second stage C22 to rise to a predetermined height to make the flipping seat E4 of the turning mechanism E Move to the upper tray A of the second stage C22, and move down to the first holding unit E42 to hold the empty tray A in the flip seat E4, and the flip seat E4 to move up again; a reverse inspection step to enable The carrier A having the reverse facing element substrate B to be inspected is transported by the feeding mechanism C3 via the first rail C1 of the first conveying device C to the first stage C21 of the second rail C2, and is subjected to the first stage C21 is abutted to a predetermined height position, and is subjected to a leaky copper inspection on the opposite side of each of the substrates B to be inspected in the carrier A by the first inspection unit F11 of the first inspection mechanism F; after the inspection, the first stage C21 linkage carrier A moves down to return to the original position, and carrier A is transported by belt C13 to second track C2. The second stage C22 is clamped and positioned by the clamping mechanism C221; in a turning step, the loading tray A which completes the reverse inspection step is raised by the second loading stage C22 to a predetermined height position; the turning seat of the turning mechanism E is turned E4 is moved to the upper side of the second stage C22, and is moved down to the empty tray A originally held in the flip holder E4 of the first holding unit E42 to be placed above the carrier A on the second stage C22 which has completed the reverse inspection step. And after the first holding component E42 is released, the first pair of clips E431 and the second pair of clips E432 of the two sets of second holding components E43 are simultaneously subjected to the upper and lower clips of the two carriers A. Holding the second carrier A in the flip seat E4, flipping the seat E4 and performing the flipping of the one-eighty-eight degrees and shifting to the third stage D11 of the third track D1 of the second conveying device D that has risen to a predetermined height. Above, at this time, the substrate B with the original reverse side facing up in the carrier A has been flipped to face up and placed on the original empty turntable A, and the oscillator E44 is activated to cause the flip seat E4 to be vibrated to interlock the carrier A. The middle substrate B is fully placed and reloaded, and the flipping seat E4 is moved down to carry the face up to be inspected. The turntable A of the substrate B and located below is placed on the third stage D11 and clamped by the clamping mechanism D111, and the seat E4 is turned over and replaced with the first pair of the first member E421 and the second pair of the first member E42. Retaining the empty tray A that has been reloaded above, flipping the seat E4 and moving up and repeating the above-mentioned turning operation between the first conveying device C and the second conveying device D; a front inspection step, the loading tray A completing the turning step is After the third stage D11 is lowered back, it is transported to the fourth stage D12 by the third track D1 of the second conveying device D, and the carrier A is raised by the fourth stage D12 to the predetermined height to be positioned. The second inspection unit F12 of the inspection mechanism F performs the surface inspection of the fins one by one on the front side of each of the substrates B to be inspected in the carrier A; after the inspection, the fourth stage D12 moves the carrier A down to return to the original position, and the carrier A is again transported by the belt D25 to the fifth stage D22 of the fourth track D2, and is clamped by the clamping mechanism D221; a side inspection step, the carrier A that completes the front inspection step is offset by the fifth stage D22 The first extraction group of the transfer mechanism K is moved up to a predetermined height position K11, the second extraction component K21 extracts the substrate B that has been subjected to the front inspection from the carrier A, and if the substrate B has been determined to be defective after the front and back inspections, the first extraction component K11 and the second extraction component K21 The substrate B defective product is directly moved to the empty carrier A on the sixth stage G5 in the sixth track G2 of the third transfer device G via the first transfer rail base K1 and the second transfer rail base K2, respectively. If the substrate B has been determined to be good after being inspected by the front and back sides, the first extraction component K11 and the second extraction component K21 will be respectively passed through the first transfer rail base K1 and the second transfer rail base K2. The substrate B is moved to the third inspection unit H1 and the fourth inspection unit H2 of the second inspection mechanism H to perform the overflow inspection on the four sides, and if the substrate B is in good condition after inspection, the carrier is returned to the fifth carrier D22. In A, if the substrate B is defective after inspection, it is moved to the empty tray A of the sixth stage G5 in the sixth track G2 of the third conveying device G; a good product collecting step, the fifth step of the side inspection step is completed. The carrier A carrying the substrate B on the stage D22 is moved down to the original position, and the clamping mechanism D221 is solved. In addition to the pinch-in position, the carrier A is transported by the belt D25 to the receiving mechanism D3 for collection; a defective product collecting step, the feeding mechanism G3 of the third rail G1 of the third conveying device G supplies the empty tray A. The rail G1 is transported to the sixth stage G5 of the sixth track G2, and is clamped and positioned by the clamping mechanism G51, and is raised by the sixth stage G5 to the predetermined height, and the sixth stage of the side inspection step is completed. The carrier A carrying the defective material of the substrate B on the G5 is moved back to the original position with the sixth stage G5, and is transported to the receiving mechanism G4 by the sixth track G2.

In the method and apparatus for inspecting an electronic component according to the embodiment of the present invention, since the first transporting device C, the inverting mechanism E, the second transporting device D, the transfer mechanism K, and the third transporting device G sequentially transport the carrier A, the entire method can be The six-sided inspection of the reverse, positive, and four sides of the substrate B is completed in the transport flow path; and the substrate B is smoothly converted by the first or second holding component E42 and the second holding component E43 of the inverting mechanism E. Between the two trays A and stably transported; at the same time, the feeding mechanism C3 of the first conveying device C, the receiving mechanism D3 of the second conveying device D, the feeding mechanism G3 of the third conveying device G, and the receiving mechanism G4 The design enables the carrier A to be smoothly supplied and received, and even for the supply and receiving of the carrier A carrying the different specifications of the substrate B. The inspection and transportation benefits obtained by the carrier plate have greatly improved the productivity efficiency.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

A‧‧‧ Carrier
A1‧‧‧ frame
A2‧‧‧ buckle
A3‧‧‧ ribbing
A4‧‧‧ disk
A5‧‧‧ Positioning Department
A51‧‧‧ Positioning interval
B‧‧‧Substrate
C‧‧‧First conveyor
C1‧‧‧ first track
C11‧‧‧ seat board
C111‧‧‧Working interval
C12‧‧‧ side frame
C13‧‧‧Land
C2‧‧‧second track
C21‧‧‧First stage
C22‧‧‧Second stage
C221‧‧‧Clamping mechanism
C23‧‧‧Belt
C3‧‧‧Feeding agency
C31‧‧‧Loading rack
C311‧‧‧Transfer interval
C312‧‧‧ Carrier
C313‧‧‧ side seat
C314‧‧‧ angle pole
C315‧‧‧First embedded component
C3151‧‧‧Cardware
C316‧‧‧Second inset component
C3161‧‧‧ Stand
C3162‧‧‧ Card Condition
C317‧‧‧Guide
C32‧‧‧lifting frame
C321‧‧‧ fixing frame
C3211‧‧‧上固定座
C3212‧‧‧ lower mount
C3213‧‧‧ support
C3214‧‧‧ positioning parts
C3215‧‧‧ sensor
C322‧‧‧Mobile rack
C3221‧‧‧Upper support
C3222‧‧‧ drive seat
C3223‧‧‧Support rod
C3224‧‧‧ drive parts
C3225‧‧‧ screw
C3226‧‧‧Sensor
D‧‧‧Second transport device
D1‧‧‧ third track
D11‧‧‧ third stage
D111‧‧‧Clamping mechanism
D12‧‧‧ fourth stage
D13‧‧‧Land
D2‧‧‧ fourth track
D21‧‧‧ rail seat
D22‧‧‧ fifth stage
D221‧‧‧Clamping mechanism
D23‧‧‧ seat board
D231‧‧‧Working area
D24‧‧‧Side frame
D25‧‧‧Belt
D26‧‧‧ Pushing mechanism
D3‧‧‧ receiving agency
D31‧‧‧Loading mechanism
D311‧‧‧Transfer interval
D312‧‧‧ Carrier
D313‧‧‧ side seat
D314‧‧‧ angle pole
D315‧‧‧First embedded component
D3151‧‧‧ Card Condition
D316‧‧‧Second inset component
D3161‧‧‧ seats
D32‧‧‧ lifting frame
D321‧‧‧ Fixing frame
D3211‧‧‧上固定座
D3212‧‧‧ lower mount
D3213‧‧‧Support rod
D3214‧‧‧ positioning parts
D3215‧‧‧ sensor
D322‧‧‧Mobile rack
D3221‧‧‧Upper support
D3222‧‧‧ drive seat
D3223‧‧‧ support
D3224‧‧‧ drive parts
D3225‧‧‧ screw
D3226‧‧‧Sensor
E‧‧‧ flip mechanism
E1‧‧‧ drive parts
E2‧‧‧ shaft
E3‧‧‧ drive parts
E4‧‧‧Flip box
E41‧‧‧ frame
E411‧‧‧Operation interval
E42‧‧‧First holding component
E421‧‧‧ first pair of parts
E4211‧‧‧ pivot
E422‧‧‧Second pair of parts
E4221‧‧‧ pivot
E423‧‧‧ drive parts
E4231‧‧‧ drive rod
E424‧‧‧ Drives
E4241‧‧‧ drive rod
E4242‧‧‧ linkages
E43‧‧‧Second holding assembly
E431‧‧‧ first pair of clips
E432‧‧‧Second pair of clips
E433‧‧‧ pivot
E434‧‧‧ Drive parts
E435‧‧‧ drive rod
E436‧‧‧ linkages
E437‧‧‧rails
E438‧‧‧claw
E439‧‧‧ positioning parts
E44‧‧‧ oscillator
E45‧‧‧ sensor
E5‧‧‧ machine base
E6‧‧‧ rail seat
E7‧‧‧ drive parts
E8‧‧‧ sensor
F‧‧‧First inspection agency
F1‧‧‧First rail seat
F11‧‧‧First inspection unit
F2‧‧‧Second rail seat
F12‧‧‧Second inspection unit
F3‧‧‧ third rail seat
G‧‧‧ third moving device
G1‧‧‧ fifth track
G2‧‧‧ sixth track
G3‧‧‧Feeding agency
G4‧‧‧ receiving agency
G5‧‧‧ sixth stage
G51‧‧‧Clamping mechanism
H‧‧‧Second inspection agency
H1‧‧‧ Third inspection unit
H2‧‧‧Fourth Viewing Unit
K‧‧‧Transportation mechanism
K1‧‧‧First transfer rail seat
K11‧‧‧First extraction component
K2‧‧‧Second transfer rail seat
K21‧‧‧Second extraction component
Y‧‧‧ machine table
Y1‧‧‧ side
Y2‧‧‧ side

1 is a schematic perspective view of a carrier in an embodiment of the present invention. 2 is a schematic perspective view of a substrate carried on a carrier in the embodiment of the present invention. Figure 3 is a side elevational view of the carrier in the embodiment of the present invention. 4 is a top plan view showing the arrangement of each mechanism on a machine table in the embodiment of the present invention. FIG. 5 is a schematic perspective view showing the arrangement of each mechanism on a machine table in the embodiment of the present invention. 6 is a perspective view of the first rail and the feeding mechanism of the first conveying device in the embodiment of the present invention. 7 is a perspective exploded view of the first rail and the feeding mechanism of the first conveying device in the embodiment of the present invention. Figure 8 is a schematic view (1) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. Figure 9 is a schematic view (2) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. Figure 10 is a schematic view (3) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. Figure 11 is a perspective view showing the fourth track and the receiving mechanism of the second conveying device in the embodiment of the present invention. Figure 12 is a perspective exploded view of the fourth track and the receiving mechanism of the second conveying device in the embodiment of the present invention. Figure 13 is a schematic view (1) of the receiving operation of the receiving mechanism in the second conveying device in the embodiment of the present invention. Figure 14 is a schematic view (2) of the receiving operation of the receiving mechanism in the second conveying device in the embodiment of the present invention. Figure 15 is a schematic view (3) of the receiving operation of the receiving mechanism in the second conveying device in the embodiment of the present invention. Figure 16 is a perspective view of the inverting mechanism in the embodiment of the present invention. Figure 17 is a perspective view showing the back side of the flip frame in the embodiment of the present invention. FIG. 18 is a perspective view showing the second pair of the first holding component of the flip frame in the embodiment of the present invention. 19 is a perspective view of the first and second pairs of clips of the second holding assembly of the flip frame in the embodiment of the present invention. FIG. 20 is a schematic view (1) of the first and second opposing members of the first holding component of the flip frame according to the embodiment of the present invention. Figure 21 is a schematic view (2) of the first and second opposing members of the first holding assembly of the flip frame in the embodiment of the present invention. Figure 22 is a schematic view (1) of holding the first and second pairs of clips of the second holding assembly of the flip frame in the embodiment of the present invention. FIG. 23 is a schematic view (2) of holding the first and second pairs of the second holding components of the flip frame of the embodiment of the present invention. FIG.

C‧‧‧First conveyor

C1‧‧‧ first track

C2‧‧‧second track

C21‧‧‧First stage

C22‧‧‧Second stage

C221‧‧‧Clamping mechanism

C3‧‧‧Feeding agency

D‧‧‧Second transport device

D1‧‧‧ third track

D11‧‧‧ third stage

D111‧‧‧Clamping mechanism

D12‧‧‧fourth stage

D2‧‧‧ fourth track

D21‧‧‧ rail seat

D22‧‧‧ fifth stage

D221‧‧‧Clamping mechanism

D3‧‧‧ receiving agency

E‧‧‧ flip mechanism

E1‧‧‧ drive parts

E2‧‧‧ shaft

E3‧‧‧ drive parts

E4‧‧‧Flip box

E5‧‧‧ machine base

E6‧‧‧ rail seat

E7‧‧‧ drive parts

F‧‧‧First inspection agency

G‧‧‧ third moving device

G1‧‧‧ fifth track

G2‧‧‧ sixth track

G3‧‧‧Feeding agency

G4‧‧‧ receiving agency

G5‧‧‧ sixth stage

G51‧‧‧Clamping mechanism

H‧‧‧Second inspection agency

K‧‧‧Transportation mechanism

Y‧‧‧ machine table

Y1‧‧‧ side

Y2‧‧‧ side

Claims (13)

A method for inspecting an electronic component, comprising: providing a carrier tray for carrying the component to be inspected; and performing on a machine table: causing the component to be inspected on the carrier to be transported by a first conveying device and using a first viewing unit Performing a reverse inspection of the component to be inspected; the carrier carrying the component to be inspected is held by the inverting mechanism from the first conveying device, and then turned over to a second conveying device, and the front inspection of the component to be inspected is performed by a second inspection unit. The component to be inspected on the carrier is extracted by a transfer mechanism from the second transfer device and transported, and the side inspection of the component to be inspected is performed by a third inspection unit. A method for inspecting an electronic component, comprising: providing a carrier tray for holding the component to be inspected; and performing: a reverse inspection step of causing the carrier carrying the reverse facing component to be inspected to be transported to the first through the first conveying device a loading station, and is inspected one by one by a first inspection unit on the opposite side of each component to be inspected in the carrier; after the inspection, the carrier is transported to the second stage; a flipping step causes the turning mechanism to The originally held empty tray is placed above the carrier on the second stage that has completed the reverse inspection step, and the two trays are held in the flip holder for flipping and displacement to the third stage of a second transfer device. a front inspection step, the carrier is transported by the second transport device to a fourth stage to be inspected by a second inspection unit on the front side of each component to be inspected in the carrier; after the inspection, the carrier is transported to a first a five-station stage; a side inspection step, the carrier is extracted by a transfer mechanism from the loading tray to the component to be inspected that has completed the front inspection, and the component to be inspected is moved to a third inspection unit for inspection of the side surfaces . The method for inspecting an electronic component according to claim 1 or 2, wherein, when the third inspection unit is a good product after inspection, the transfer mechanism causes the component to be inspected to be transferred back to the second conveying device to be transported and collected; If it is a defective product, it moves to a third conveying device and is transported and collected. The method for inspecting an electronic component according to claim 1 or 2, wherein the component to be inspected is determined to be a defective product after being inspected by the front and back sides, and the defective product is directly moved to a third by the transfer mechanism. The transport device is transported and collected. An inspection device for an electronic component, comprising: a first conveying device: a first conveying device forming a conveying flow path for conveying the carrier; a first inspection unit located above the first conveying device; a lens for viewing from top to bottom; a second conveying device forming a conveying flow path for conveying the carrier; a second inspection unit located above the second conveying device, providing a lens for viewing from top to bottom; The mechanism is provided with a flipping seat that can be driven to be displaced between the first conveying device and the second conveying device and turned over; a third viewing unit is located on the side of the second conveying device, and is provided with a lens for viewing from bottom to top; A transfer mechanism is provided with a first extraction component that can be driven to be displaced between the second transfer device and the third view unit. The apparatus for inspecting an electronic component according to claim 5, wherein the first conveying device comprises a first rail and a second rail disposed opposite to each other, the first rail is provided with a feeding mechanism, and the second rail is provided with The first stage and the second stage. The apparatus for inspecting an electronic component according to claim 5, wherein the second conveying device comprises a third rail and a fourth rail disposed opposite to each other, and the third rail and the fourth loading rack are disposed in the third rail A fifth stage and a receiving mechanism are arranged in the fourth track. The apparatus for inspecting an electronic component according to claim 5, wherein the first extraction component of the transfer mechanism is driven to be displaced between the second transfer device, the third view unit, and the third transfer device. The third conveying device forms a conveying flow path of the conveying tray. The inspection device for an electronic component according to claim 5, wherein the transfer mechanism is provided with a first transfer rail base and a second transfer rail mount, and the first transfer component is disposed on the first transfer rail mount A second extraction assembly is disposed on the second transfer rail seat, and the second extraction assembly is driven to be transferred between the second transfer device, the fourth view unit, and the third transfer device. An inspection apparatus for an electronic component according to the above-mentioned item 8, wherein the first, second, and third conveying devices are carried by a carrier by a belt. The apparatus for inspecting an electronic component according to claim 8 or 9, wherein the third conveying device comprises: a fifth rail and a sixth rail which are opposite to each other, and a feeding mechanism is provided on the fifth rail, sixth The track is provided with a receiving mechanism. The apparatus for inspecting an electronic component according to claim 5, wherein the inverting seat of the inverting mechanism has a frame body, the frame body has a hollow operation section, and the first short side of the frame body is provided with a first hold. The component, the corresponding long side of the frame body is provided with a second holding component. An apparatus for inspecting an electronic component, comprising: an apparatus using an inspection method of an electronic component according to any one of claims 1 to 4.