CN211545123U - Substrate handling apparatus and substrate processing system - Google Patents

Abstract

A substrate processing system is suitable for processing a substrate member, the substrate member comprises a plate frame and a substrate detachably arranged on the plate frame, and the plate frame is provided with a frame body and more than two fixing parts which are arranged on two opposite sides of the frame body and used for clamping the substrate. The substrate processing system includes a substrate processing apparatus, a first substrate handling apparatus, and a second substrate handling apparatus. The substrate processing apparatus has an inlet end and an outlet end. The first substrate handling device is adjacent to the inlet end and can combine the substrate with the horizontal plate frame in a horizontal state, and then the substrate is transferred to a vertical state and conveyed to the substrate processing device. The second substrate handling equipment is adjacent to the outlet end and can separate the processed substrate from the plate frame in a horizontal state, so that the mounting time of the substrate and the plate frame can be saved, the retention time of the substrate member in the substrate processing equipment is reduced, and the production speed and the production efficiency are improved.

Description

Substrate handling apparatus and substrate processing system

Technical Field

The utility model relates to a handling equipment especially relates to a base plate handling equipment to and a base plate system of processing.

Background

In the field of processing of substrates, for example, a high temperature curing step cures a coating on the substrate or an evaporation step forms a conductive line. When the steps are executed, a substrate is clamped by a plate frame and then is sent into the corresponding processing equipment. The step of bonding the substrate to the plate frame and the step of removing the processed substrate from the plate frame have been conventionally performed by an operator, that is, the operator first bonds the substrate to the plate frame, places the substrate in the baking apparatus or the evaporation apparatus, and after completion, takes out the substrate from the baking apparatus and removes the substrate from the plate frame. However, if the pressure is accumulated for a long time, the operator is likely to be fatigued, and the production efficiency is poor. Furthermore, the equipment with high heat needs to maintain concentration for a long time to avoid the problem of work safety.

Disclosure of Invention

An object of the utility model is to provide a labour saving and time saving just promotes production efficiency's base plate handling equipment.

An object of the utility model is to provide a solve the base plate system of processing of above-mentioned problem.

The utility model discloses a base plate handling equipment is applicable to and combines or separate base plate and grillage, the grillage has the support body and locates more than two the mounting of the double-phase opposite side of support body, base plate handling equipment contains frame and base plate handling device. The substrate handling apparatus includes a positioning assembly and a lock release assembly. The positioning assembly is arranged on the frame and provided with two supporting pieces and a plurality of positioning pieces, the supporting pieces are spaced in the width direction, every two positioning pieces are respectively arranged on two adjacent surfaces of the supporting pieces in a group, and each group of the positioning pieces are spaced in the length direction. The unlocking assembly is arranged on the frame and provided with two abutting pieces which are arranged at intervals in the width direction and between the supporting pieces and a plurality of supporting pieces, the abutting pieces define accommodating spaces for accommodating the plate frame and the base plate, two groups of the supporting pieces are adjacent to two adjacent surfaces of the abutting pieces respectively and are arranged at intervals in the length direction, and the supporting pieces can move in the height direction relative to the corresponding abutting pieces. When the plate frame is located in the accommodating space, the positioning piece is respectively fixed on two opposite sides of the frame body, so that the plate frame is kept in a horizontal state, each fixing piece and the corresponding supporting piece are arranged at an interval in the height direction, the supporting pieces can be driven to be switched between a pressing state and a non-pressing state, the pressing state is realized, the supporting pieces are respectively supported on the fixing pieces, and then the substrate can be moved to the plate frame in the height direction or removed from the plate frame in the horizontal state, and the supporting pieces are respectively arranged at intervals between the fixing pieces so that the fixing pieces are closed.

The utility model discloses a base plate system of processing is applicable to the processing to the base plate component, the base plate component include grillage and detachable set up in the base plate of grillage, the grillage has support body and locates more than two the double-phase opposite side of support body just is used for the centre gripping the mounting of base plate, the base plate system of processing contains base plate processing equipment, first base plate handling equipment and second base plate handling equipment. The substrate processing apparatus has an inlet end and an outlet end on opposite sides. The first substrate handling apparatus is adjacent to the entrance end, and the first substrate handling apparatus includes a first frame and a first substrate handling device. The first substrate handler has a first positioning assembly and a first unlocking assembly. The first positioning assembly is arranged on the first frame and provided with two first supporting pieces which are spaced from each other along the width direction and a plurality of first positioning pieces, every two first positioning pieces are arranged on two adjacent surfaces of the first supporting pieces in a group, and each first positioning piece is spaced from each other along the length direction. The first unlocking assembly is arranged on the first frame and is provided with two first abutting pieces which are arranged at intervals in the width direction and are positioned between the first supporting pieces and a plurality of first supporting pieces, the first abutting pieces define a first containing space for containing the plate frame and the substrate, and every two first supporting pieces are respectively adjacent to two adjacent surfaces of the first abutting pieces in a group and are arranged at intervals in the length direction and can move along the height direction relative to the corresponding first abutting pieces, when the plate frame is positioned in the first containing space, the first positioning pieces respectively fix two opposite sides of the frame body, so that the plate frame is kept in a horizontal state, each fixing piece is separated from the corresponding first supporting piece in the height direction, and the first supporting pieces can be driven to be switched between a first pressing state and a first non-pressing state, in the first pressing state, the first supporting pieces respectively support the fixing pieces, so that the substrate can move into the plate frame along the height direction in a horizontal state, and in the first non-pressing state, the first supporting pieces are respectively spaced from the fixing pieces so that the fixing pieces are closed.

The second substrate handling apparatus is adjacent to the exit end, and the second substrate handling apparatus includes a second frame and a second substrate handling device. The second substrate handler has a second positioning assembly and a second unlocking assembly. The second positioning assembly is arranged on the second frame and provided with two second supporting pieces and a plurality of second positioning pieces, the second supporting pieces are spaced along the width direction, every two second positioning pieces are respectively arranged on two adjacent surfaces of the second supporting pieces in a group, and each second positioning piece is spaced along the length direction. The second unlocking assembly is arranged on the second frame and is provided with two second abutting pieces which are arranged at intervals in the width direction and are positioned between the second supporting pieces, and a plurality of second supporting pieces, wherein the second abutting pieces define a second containing space for containing the plate frame and the substrate, two groups of the second abutting pieces are respectively arranged on two adjacent surfaces of the second abutting pieces at intervals in the length direction and can move along the height direction relative to the corresponding second abutting pieces, when the plate frame is positioned in the second containing space, the second positioning pieces are respectively fixed on two opposite sides of the frame body, so that the plate frame is kept in a horizontal state, each fixing piece is separated from the corresponding second abutting piece in the height direction, and the second abutting pieces can be driven to be switched between a second pressing state and a second non-pressing state, in the second pressing state, the second supporting pieces respectively support the fixing pieces, so that the substrate can be horizontally removed from the plate frame along the height direction, and in the second non-pressing state, the second supporting pieces are respectively spaced from the fixing pieces so that the fixing pieces are closed.

In some embodiments, the first abutting member has a first connecting portion and a first abutting portion, the first connecting portion has a first inner side surface facing another first abutting member, the first abutting portion extends from the first inner side surface toward another first abutting member, and when the first abutting member is in the first abutting state, the first abutting portion abuts against the top side of the frame body to support the fixing member against the first abutting member; the second abutting part is provided with a second connecting part and a second abutting part, the second connecting part is provided with a second inner side face facing to the other second abutting part, the second abutting part extends from the second inner side face to the other second abutting part, and when the second abutting part is in the second abutting state, the second abutting part abuts against the top side of the frame body so as to support the fixing piece to be abutted by the second abutting part.

In some embodiments, the first substrate handling apparatus further includes a first rack bearing device disposed on the first frame and located at a bottom side of the first substrate handling apparatus, and the first rack bearing device is configured to bear the rack and move the rack to the first accommodating space along the height direction.

In some embodiments, the first substrate loading and unloading apparatus further includes a first substrate loading device disposed on the first frame and movable relative to the first substrate loading and unloading device, the first substrate loading device having a first loading portion facing upward and on which the substrate is placed, and a plurality of first adjusting members surrounding the first loading portion and movable toward a center of the first loading portion, when the substrate is placed on the first loading portion, the first adjusting members pushing the substrate to make a center of the substrate correspond to a center of the first loading portion, and the first substrate loading device is driven to move to a bottom side of the first receiving space and to make a center of the substrate correspond to a center of the rack.

In some embodiments, the first substrate handling apparatus further includes a first pick-and-place device disposed on the first frame and movable back and forth between the first substrate handling device and the substrate processing apparatus, the first pick-and-place device being configured to convert the substrate member in a horizontal state into a vertical state and move to the substrate processing apparatus.

In some embodiments, the second substrate handling apparatus further includes a second rack carrying device disposed on the second frame and located at a bottom side of the second substrate handling apparatus, and the second rack carrying device is configured to carry the rack and move the rack out of the second accommodating space along the height direction.

In some embodiments, the second substrate handler further comprises a second moving device disposed on the second frame and between the second substrate handler and the substrate processing apparatus, the second moving device having a second flipping assembly adjacent to the substrate processing apparatus, a second linkage assembly, and a second pick-and-place assembly, the second linkage assembly having a receiving end adjacent to the second flipping assembly and a buffer end opposite to the receiving end, the second flipping assembly being configured to flip the substrate member from the substrate processing apparatus in a vertical state to a horizontal state and to place the substrate member on the receiving end, the second linkage assembly moving the substrate member on the receiving end to the buffer end for the second flipping assembly to actuate a next substrate member, the second pick-and-place assembly is capable of moving the substrate member at the buffer end to the second substrate handler.

In some embodiments, the substrate processing system further comprises a rack recycling device disposed at a bottom side of the substrate processing device and having opposite ends respectively adjacent to the first substrate handler and the second substrate handler, the rack recycling device being configured to transport the rack placed on the second substrate handler to the first substrate handler.

The beneficial effects of the utility model reside in that: the substrate processing system can automatically combine the substrate with the plate frame and unload the substrate from the plate frame by the first substrate loading and unloading device and the second substrate loading and unloading device respectively, so that the production efficiency is improved. Furthermore, the substrate and the plate frame move in the horizontal state in the process of moving to the first substrate loading and unloading device, so that the substrate and the plate frame are combined in the horizontal state through the first substrate loading and unloading device and then are converted into the vertical state through the first taking and placing device, the mounting time is saved, and the production efficiency is improved. In addition, the second moving device is used for firstly turning over the substrate component into a horizontal state and then keeping away from the outlet end, and then moving the substrate component to the second substrate loading and unloading device to separate the substrate from the plate frame, so that the retention time of the substrate component in the substrate processing equipment is reduced, the substrate is kept at a better yield, the substrate and the plate frame are separated in the horizontal state, the subsequent plate frame and the substrate are respectively supported by the second plate frame bearing device and the second substrate bearing device, and the production speed is effectively improved.

Drawings

Other features and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments with reference to the accompanying drawings, in which:

figure 1 is a schematic side view of an embodiment of a substrate processing system of the present invention;

FIG. 2 is a perspective view of the base member of the embodiment;

fig. 3 is a schematic perspective view of the first substrate handling apparatus of the embodiment;

FIG. 4 is an exploded view of the first substrate handler of the embodiment;

FIG. 5 is an enlarged partial schematic view of FIG. 4;

fig. 6 is a schematic perspective view of the second substrate handling apparatus of the embodiment;

fig. 7 is an exploded schematic view of the second substrate handling apparatus of the embodiment; and

fig. 8 to 20 are schematic views of a process flow of the substrate member of the embodiment.

Detailed Description

Referring to fig. 1 and 2, an embodiment of the substrate processing system of the present invention is suitable for processing a plurality of substrate members 9, each substrate member 9 includes a frame 91 and a base plate 92 detachably disposed on the frame 91, the frame 91 has a frame body 911 and a plurality of fixing members 912 disposed on opposite sides of the frame body 911 and used for clamping the base plate 92. The substrate processing system includes a substrate processing apparatus 1, a first substrate loading and unloading apparatus 2, a second substrate loading and unloading apparatus 3, and a plate frame recovery apparatus 4. In this embodiment, the substrate processing apparatus 1 extends along a length direction D1, the first substrate handling apparatus 2 and the second substrate handling apparatus 3 are adjacent to opposite ends of the substrate processing apparatus 1, respectively, and the plate frame recovery apparatus 4 is adjacent to a bottom of the substrate processing apparatus 1 and has opposite ends adjacent to the first substrate handling apparatus 2 and the second substrate handling apparatus 3, respectively. Wherein the first substrate handling apparatus 2 is exemplified as a feeding apparatus adapted to combine the plate frame 91 with the substrate 92 to form the substrate member 9, and the second substrate handling apparatus 3 is exemplified as a discharging apparatus to separate the processed substrate 92 from the plate frame 91.

Referring to fig. 1, the substrate processing apparatus 1 is, for example, a baking oven, and has an inlet end 111 and an outlet end 112 at opposite sides, a processing passage 11 extending from the inlet end 111 to the outlet end 112, and a conveyor 12 disposed in the processing passage 11 and extending from the inlet end 111 to the outlet end 112. Wherein the conveying device 12 is configured to move the substrate member 9 from the inlet end 111 to the outlet end 112 in a manner of being maintained in a vertical state.

Referring to fig. 2, the frame 911 is rectangular, and the frame 911 has a front rod 913, a rear rod 914, a left rod 915 and a right rod 916. The fixing members 912 are exemplified by clips and four in number, wherein the fixing members 912 are fixed to the left rod 915 and the right rod 916 in a pair. And two sets of fasteners 912 fixed to the left rod 915 and the right rod 916, wherein the two fasteners 912 of each set are spaced apart along the length direction D1.

Referring to fig. 1 and 3, the first substrate handling apparatus 2 is adjacent to the entrance end 111, and the first substrate handling apparatus 2 includes a first frame 21, a first substrate handling device 22, a first plate rack carrying device 24, a first substrate carrying device 25, and a first pick-and-place device 26.

Referring to fig. 1, 3-5, further, the first substrate handler 22 has a first positioning assembly 221 and a first release assembly 222. The first positioning assembly 221 is disposed on the first frame 21, and has two first supporting members 223 spaced apart from each other along a width direction D3, and a plurality of first positioning members 224, wherein two first positioning members 224 are disposed on two adjacent surfaces of the first supporting members 223 in pairs, and each first positioning member 224 is spaced apart from each other along the length direction D1. In the present embodiment, the first substrate handling apparatus 22 is spaced apart from the inlet end 111, the number of the first positioning members 224 is four, and is illustrated as a clamp, wherein two first positioning members 224 are fixed to one side of one of the first support members 223 facing the other first support member 223, are spaced apart from two ends of the side along the length direction D1, and extend toward the other first support member 223, and the remaining two first positioning members 224 are fixed to one side of the other first support member 223 facing the one first support member 223, and are also spaced apart from two ends of the side along the length direction D1 and correspond to the two first positioning members 224 (on the opposite side) fixed to the one first support member 223.

The first unlocking assembly 222 is disposed on the first frame 21, and has two first abutting pieces 225 spaced apart from each other in the width direction D3 and located between the first supporting pieces 223, and a plurality of first supporting pieces 226, where the first abutting pieces 225 define a first accommodating space 227 accommodating the board frame 91 and the substrate 92, specifically, each first abutting piece 225 is adjacent to the corresponding first supporting piece 223 and located between two first positioning pieces 224 on the same side, and the first abutting piece 225 specifically has a first connecting portion 228 and a first abutting portion 231, where the first connecting portion 228 is a rectangular parallelepiped and extends along the length direction D1, and has a first inner side surface 229 facing another first abutting piece 225. And the first abutting portion 231 extends from the top side of the first inner side surface 229 toward the other first abutting piece 225 (i.e., the width direction D3). The other first abutting part 225 is symmetrical to the first abutting part 225, and therefore, the description thereof is omitted. The first inner side surface 229 defines the first accommodating space 227 at the bottom side of the first abutting portion 231 for accommodating the substrate member 9.

In addition, the first supporting members 226 are four, for example, piston members, and two of the first supporting members 226 are adjacent to two adjacent surfaces of the first abutting member 225 respectively and spaced apart in the length direction D1, and can move along a height direction D2 relative to the corresponding first abutting member 225. Specifically, each first abutting portion 226 can extend or contract toward the bottom of the corresponding first abutting portion 231 along the height direction D2, i.e. is switched between a first abutting state and a first non-abutting state. When the plate frame 91 is located in the first accommodating space 227, the plate frame 91 can be clamped and fixed by the first positioning member 224 to be kept in a horizontal state. The fixing members 912 are respectively located opposite to the first supporting members 226, the first abutting members 225 can respectively abut against the left rod 915 and the right rod 916 by the first inner side surfaces 229, and the first abutting portions 231 respectively abut against the top side edges of the left rod 915 and the right rod 916. Subsequently, the first supporting member 226 can be driven to be converted into the first pressing state, that is, the first supporting member 226 extends upward and supports the corresponding fixing member 912, and meanwhile, the first supporting portion 231 supports the top side of the frame body 911 to support the fixing member 912, so that the fixing member 912 is better supported by the first supporting member 226 to be unfolded. When the base plate 92 enters the frame 911, the first supporting member 226 is driven to be converted into the first non-pressed state, i.e. retracted downward and spaced from the corresponding fixing member 912, so that the fixing member 912 clamps the base plate 92.

Referring to fig. 3, the first board rack carrying device 24 is disposed on the first frame 21 and located at the bottom side of the first substrate handling device 22, in this embodiment, the first board rack carrying device 24 is used for carrying the board rack 91 and moving the board rack 91 to the first accommodating space 227 along the height direction D2.

Referring to fig. 3, the first substrate carrier 25 is disposed on the first frame 21 and is movable relative to the first substrate handler 22. The first substrate supporting device 25 has a first supporting portion 251 facing upward and for the substrate 92 to be placed on, and a plurality of first adjusting members 252 respectively located at two opposite sides of the first supporting portion 251 and capable of moving toward the center of the first supporting portion 251. In this embodiment, the first substrate loading device 25 is located at a side of the first substrate handling device 22 opposite to the substrate processing apparatus 1 and adjacent to a boundary of the first frame 21, so as to place the substrate 92. The first bearing part 251 is illustrated as a rectangle and has a larger area than the substrate 92, and the first adjusting member 252 is illustrated as a push rod, when the substrate 92 is placed on the first bearing part 251, the first adjusting member 252 pushes the substrate 92 to make the center of the substrate 92 correspond to the center of the first bearing part 251, i.e. to center the substrate 92, so as to facilitate the subsequent alignment on the plate frame 91. After the substrate 92 is positioned, the first substrate carrier 25 is driven to move to the bottom side of the first accommodating space 227, and the center of the substrate 92 corresponds to the center of the plate rack 91. Subsequently, the substrate 92 is raised into the plate holder 91 by driving. After the substrate 92 is fixed by the plate holder 91, the path is returned to the original position to receive the next substrate 92.

Referring to fig. 1 and 3, the first pick-and-place device 26 is disposed on the first frame 21 and can move back and forth between the first substrate handling device 22 and the substrate processing apparatus 1, in this embodiment, the first pick-and-place device 26 is a mechanical arm, and the substrate member 9 in a horizontal state is converted into a vertical state by the first pick-and-place device 26 and is moved to the substrate processing apparatus 1.

Referring to fig. 1, 6 and 7, the second substrate handling apparatus 3 is adjacent to the exit end 112, and the second substrate handling apparatus 3 includes a second frame 31, a second substrate handling device 32, a second moving device 34, a second plate rack carrying device 35 and a second substrate carrying device 36. In this embodiment, the second substrate handler 32 has the same structure as the first substrate handler 22, and has a second positioning assembly 321 and a second release assembly 322.

The second positioning assembly 321 is disposed on the second frame 31 and has two second supporting members 323 spaced apart along the width direction D3 and four second positioning members 324. In addition, the second unlocking assembly 322 is disposed on the second frame 31, and has two second abutting parts 325 spaced apart from each other in the width direction D3 and located between the second supporting parts 323, and a plurality of second supporting parts 326, wherein the second abutting parts 325 define a second accommodating space 327 for accommodating the plate frame 91 and the substrate 92. Each second abutting member 325 is adjacent to the corresponding second support 323 and located between the two second positioning members 324 on the same side, and the second abutting member 325 specifically has a second connecting portion 328 and a second abutting portion 331, where the second connecting portion 328 is a rectangular parallelepiped and extends along the length direction D1, and has a second inner side surface 329 facing the other second abutting member 325. The second abutting portion 331 extends from the top side of the second inner side 329 toward the other second abutting member 325 (i.e., the width direction D3). The second abutting part 325 is symmetrical to the second abutting part 325, and thus, the description thereof is omitted. The second inner side 329 defines the second accommodating space 327 at the bottom side of the second abutting portion 331, for accommodating the substrate member 9 (see fig. 2).

In addition, the second supporting members 326 are four, for example, piston members, and two of the second supporting members 326 are adjacent to two adjacent surfaces of the second abutting member 325 respectively and spaced apart in the length direction D1, and can move along the height direction D2 relative to the corresponding second abutting member 325. Specifically, each second abutting portion 326 can extend or contract toward the bottom of the corresponding second abutting portion 331 along the height direction D2, i.e., can be switched between a second pressed state and a second non-pressed state. When the plate frame 91 is located in the second accommodating space 327, the plate frame 91 can be clamped and fixed by the second positioning member 324 to be kept in a horizontal state. The fixing members 912 are respectively opposite to the second supporting members 326, the second abutting members 325 can respectively abut against the left rod 915 and the right rod 916 through the second inner side surfaces 329, and the second abutting portions 331 respectively abut against the top side edge of the left rod 915 and the top side edge of the right rod 916. Subsequently, the second supporting member 326 can be driven to be converted into the second pressing state, i.e. extended upward and supported against the corresponding fixing member 912 (see fig. 2), and meanwhile, the second supporting portion 331 is supported against the top side of the frame body 911 to support the fixing member 912, so that the fixing member 912 is better supported by the second supporting member 326 to be unfolded. When the base plate 92 enters the frame 911, the second supporting member 326 is driven to be converted into the second non-pressed state, i.e. retracted downward and spaced from the corresponding fixing member 912, so that the fixing member 912 clamps the base plate 92.

Referring to fig. 1 and 6, the second moving device 34 is disposed on the second frame 31 and located between the second substrate loading and unloading device 32 and the substrate processing apparatus 1, the second moving device 34 has a second turning assembly 341, a second linkage assembly 342, and a second pick-and-place assembly 343, wherein the second turning assembly 341 is adjacent to the outlet end 112 of the substrate processing apparatus 1, specifically, the second turning assembly 341 has a motor 344 disposed on the second frame 31 and located at the bottom side of the outlet end 112, two shafts 345 driven by the motor 344 and spaced apart along the width direction D3, and two clamping members 346 fixed at the ends of the shafts 345, respectively. Wherein the motor 344 can drive the shaft 345 in a vertical state or in a horizontal state, and in the vertical state, the clamping member 346 can clamp the front rod 913 of the substrate member 9 closest to the outlet end 112 and convert the substrate member 9 in the vertical state into the horizontal state. Furthermore, the second interlocking assembly 342 is exemplified by a conveyor belt spaced at left and right sides and extending along the length direction D1, and has a receiving end 347 adjacent to the second turnover assembly 341 and a buffer end 348 opposite to the receiving end 347, and further overlaps the receiving end 347 and is lower than the receiving end 347 when the shaft 345 of the second turnover assembly 341 is turned to the horizontal state, so that the substrate member 9 can be placed on the second interlocking assembly 342 and then transported to the buffer end 348. The second pick-and-place assembly 343, such as a robot, is capable of moving the substrate member 9 positioned at the buffer end 348 to the second substrate handler 32.

Referring to fig. 1 and 6, the second rack carrying device 35 has the same structure as the first rack carrying device 24 and is located at the bottom side of the second substrate handler 32 for recycling the rack 91. The second substrate carrier 36 is similar in structure to the first substrate carrier 25, and only the first adjustment member 252 is omitted, and the second substrate carrier 36 can move into the second substrate handler 32 to receive the substrate 92 separated from the rack 91 and transport the substrate 92 to the side of the second frame 31 away from the outlet 112 for easy access by the operator.

Referring to fig. 1, fig. 3 and fig. 6, the slab rack recycling device 4 is, for example, a conveyor belt, and two opposite ends of the conveyor belt are respectively connected to the first slab rack carrying device 24 and the second slab rack carrying device 35, so that the slab rack 91 located on the second slab rack carrying device 35 can be moved to the first slab rack carrying device 24 for recycling, thereby saving the production cost.

Referring to fig. 8, the first plate rack carrying device 24 carries the plate rack 91 and moves the plate rack 91 upwards to the first accommodating space 227 in a horizontal state. Subsequently, the first positioning member 224 fixes the four corners of the plate frame 91, so that the plate frame 91 is maintained in a horizontal state. And the first rack carrier 24 is returned to the rack recovery apparatus 4 ready to carry the next rack 91. Next, referring to fig. 9, the first inner side surface 229 of the first abutting member 225 moves to abut against the left rod 915 and the right rod 916, and the first abutting portion 231 abuts against an upper end edge of the left rod 915 and an upper end edge of the right rod 916 respectively. While supporting the plate frame 91, the first supporting members 226 are also driven to be converted from the first non-pressing state to the first pressing state, that is, the first supporting members 226 respectively open the fixing members 912. Meanwhile, referring to fig. 10 and 11, after the substrate 92 is supported on the first substrate supporting device 25 and the substrate 92 is centered by the first adjusting member 252, the substrate is moved to the bottom side of the first substrate handling device 22 and the substrate 92 is horizontally transferred into the plate frame 91. Then, the first supporting member 226 is driven to be converted into the first non-pressing state, so that the fixing member 912 clamps the substrate 92, and then the first substrate supporting apparatus 25 can return to the original path to prepare to support the next substrate 92. Referring to fig. 12 and 13, when the first pick-and-place device 26 clamps the front rod 913 and the rear rod 914 of the substrate member 9, drives the first positioning member 224 to release the plate frame 91, and first converts the substrate member 9 in the horizontal state into the vertical state, the substrate member 9 is moved to the conveyor 12 through the inlet end 111, and the substrate member 9 is moved and processed by the conveyor 12.

Referring to fig. 1, the conveyor 12 carries the substrate member 9 through the process tunnel 11 to the exit end 112. Referring to fig. 14, after the substrate 92 is processed, the shaft 345 of the second turning assembly 341 is maintained in a vertical state, and the clamping member 346 is driven to clamp the front rod 913 of the substrate member 9, remove the substrate member 9 from the conveyor 12 and abut the rear rod 914 of the substrate member 9 against the shaft 345. Subsequently, referring to fig. 14 and 15, the shaft 345 is driven to be horizontally moved to place the substrate member 9 on the receiving end 347 of the second linkage assembly 342, and the second linkage assembly 342 moves the substrate member 9 to the buffer end 348, so that the shaft 345 is returned to the vertical state to be ready to clamp the next substrate member 9. Referring to fig. 16 and 17, the substrate member 9 at the buffering end 348 can be gripped by the second pick-and-place assembly 343 and moved to the second receiving space 327 of the second substrate handler 32, and then, after the second positioning members 324 respectively fix the four corners of the rack 91 and the second rack carrying device 35 is lifted to carry the rack 91, the second pick-and-place assembly 343 releases the substrate member 9 and returns to the buffering end 348.

And when the second pick-and-place assembly 343 grips the substrate member 9 and moves to the second receiving space 327, referring to fig. 18, the second substrate carrier 36 also moves to the bottom side of the second receiving space 327, and once the substrate member 9 is located in the second receiving space 327, the substrate 92 abuts against the top surface of the second substrate carrier 36. Then, the second abutting member 325 is driven to abut against the side edge and the top edge of the left rod 915 and the side edge and the top edge of the right rod 916, and then the second abutting member 326 is driven to convert the second abutting member 326 from the second non-abutting state to the second abutting state, so that the fixing member 912 is unfolded to release the base plate 92. Subsequently, referring to fig. 19, the second substrate carrier 36 carries the substrate 92 and moves to a side away from the substrate processing apparatus 1 (see fig. 1). Then, the second supporting member 326 is switched from the second pressing state to the second non-pressing state, and the second positioning member 324 is driven to release the plate frame 91. Next, referring to fig. 19 and 20, the rack 91 is transported to the rack recycling apparatus 4 by the second rack carrying device 35, and is returned to the first rack carrying device 24 by the rack recycling apparatus 4 (see fig. 8) for recycling.

To sum up, the utility model discloses base plate processing system borrows by first base plate handling equipment 2 with second base plate handling equipment 3 reaches respectively can be automatically with base plate 92 combine in grillage 91, and will base plate 92 from the efficiency that grillage 91 was detached, in order to promote production efficiency. Furthermore, since the substrate 92 and the board frame 91 are both moved in the horizontal state during the process of moving to the first substrate handling apparatus 22, the substrate 92 and the board frame 91 are firstly combined in the horizontal state by the first substrate handling apparatus 22 and then are converted into the vertical state by the first pick-and-place apparatus 26, thereby saving the installation time and further improving the production efficiency. In addition, the second moving device 34 first turns over the substrate member 9 to be in a horizontal state, then leaves away from the outlet end 112, and then moves to the second substrate handling device 32 to separate the substrate 92 from the board frame 91, thereby reducing the retention time of the substrate member 9 in the substrate processing apparatus 1, so that the substrate 92 can be maintained at a better yield, and separating the board frame 91 from the substrate 92 in a horizontal state facilitates the subsequent processes of the board frame 91 and the substrate 92 being respectively carried by the second board frame carrying device 35 and the second substrate carrying device 36, so as to effectively increase the production speed, and thus the purpose of the present invention can be achieved.

The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the claims and the description of the present invention are still within the scope of the present invention.

Claims (9)

1. The utility model provides a base plate handling equipment, is applicable to and combines or separate base plate and grillage, the grillage has the support body and locates more than two the mounting of the double-phase opposite side of support body, its characterized in that: the substrate handling apparatus includes:

a frame; and

the substrate loading and unloading device comprises

A positioning assembly arranged on the frame and provided with two supporting pieces spaced apart along the width direction and a plurality of positioning pieces, wherein every two positioning pieces are arranged on two adjacent surfaces of the supporting pieces respectively in a group, and each group of positioning pieces are spaced apart along the length direction,

the unlocking assembly is arranged on the frame and is provided with two abutting pieces which are arranged at intervals in the width direction and between the supporting pieces and a plurality of supporting pieces, the abutting pieces define a containing space for containing the plate frame and the base plate, the supporting pieces are arranged in pairs and are respectively adjacent to two adjacent surfaces of the abutting pieces and are at intervals in the length direction, and the unlocking assembly can move along the height direction relative to the corresponding abutting pieces,

when the plate frame is located in the accommodating space, the positioning piece is respectively fixed on two opposite sides of the frame body, so that the plate frame is kept in a horizontal state, each fixing piece and the corresponding supporting piece are arranged at an interval in the height direction, the supporting pieces can be driven to be switched between a pressing state and a non-pressing state, the pressing state is realized, the supporting pieces are respectively supported on the fixing pieces, and then the substrate can be moved to the plate frame in the height direction or removed from the plate frame in the horizontal state, and the supporting pieces are respectively arranged at intervals between the fixing pieces so that the fixing pieces are closed.

2. The utility model provides a base plate system of processing, is applicable to the processing to the base plate component, the base plate component include the grillage and detachable set up in the base plate of grillage, the grillage has the support body and locates more than two the double-phase opposite side of support body just is used for the centre gripping the mounting of base plate, its characterized in that: the substrate processing system includes:

a substrate processing apparatus having an inlet end and an outlet end at opposite sides;

a first substrate handling device adjacent to the entry end, the first substrate handling device comprising

A first frame, a second frame, a third frame,

a first substrate loading/unloading device having

The first positioning assembly is arranged on the first frame and is provided with two first supporting pieces which are spaced in the width direction and a plurality of first positioning pieces, every two first positioning pieces are arranged on two adjacent surfaces of the first supporting pieces respectively, and each first positioning piece is spaced in the length direction,

a first unlocking assembly arranged on the first frame and having two first abutting pieces spaced apart in the width direction and located between the first supporting pieces, and a plurality of first supporting pieces, the first abutting pieces defining a first accommodating space for accommodating the panel frame and the substrate, and two sets of the first supporting pieces being adjacent to two adjacent surfaces of the first abutting pieces respectively and spaced apart in the length direction, and being movable in the height direction relative to the corresponding first abutting pieces, wherein when the panel frame is located in the first accommodating space, the first positioning pieces respectively fix two opposite sides of the frame body to keep the panel frame in a horizontal state, and each fixing piece is spaced apart from the corresponding first supporting piece in the height direction, and the first supporting pieces can be driven to switch between a first pressed state and a first non-pressed state, in the first pressing state, the first supporting pieces respectively support the fixing pieces, so that the substrate can move into the plate frame along the height direction in a horizontal state, and in the first non-pressing state, the first supporting pieces respectively separate the fixing pieces to close the fixing pieces; and

a second substrate handling device adjacent to the exit end, the second substrate handling device comprising

A second frame which is provided with a plurality of second frames,

a second substrate loading/unloading device having

A second positioning assembly arranged on the second frame and having two second supporting members spaced apart from each other along the width direction and a plurality of second positioning members, wherein two second positioning members are arranged on two adjacent surfaces of the second supporting members in pairs respectively, and each second positioning member is spaced apart from each other along the length direction,

a second unlocking assembly arranged on the second frame and having two second abutting parts spaced apart in the width direction and located between the second supporting parts, and a plurality of second supporting parts defining a second accommodating space for accommodating the panel frame and the substrate, wherein two groups of the second abutting parts are adjacent to two adjacent surfaces of the second abutting parts respectively and spaced apart in the length direction, and can move in the height direction relative to the corresponding second abutting parts, when the panel frame is located in the second accommodating space, the second positioning parts respectively fix two opposite sides of the frame body to keep the panel frame in a horizontal state, and each fixing part is spaced apart from the corresponding second abutting part in the height direction, and the second abutting parts can be driven to switch between a second pressed state and a second non-pressed state, in the second pressing state, the second supporting pieces respectively support the fixing pieces, so that the substrate can be horizontally removed from the plate frame along the height direction, and in the second non-pressing state, the second supporting pieces are respectively spaced from the fixing pieces so that the fixing pieces are closed.

3. The substrate processing system of claim 2, wherein: the first abutting part is provided with a first connecting part and a first abutting part, the first connecting part is provided with a first inner side surface facing to the other first abutting part, the first abutting part extends from the first inner side surface to the other first abutting part, and when the first abutting part is in the first abutting state, the first abutting part abuts against the top side of the frame body so as to support the fixing part to be abutted by the first abutting part; the second abutting part is provided with a second connecting part and a second abutting part, the second connecting part is provided with a second inner side face facing to the other second abutting part, the second abutting part extends from the second inner side face to the other second abutting part, and when the second abutting part is in the second abutting state, the second abutting part abuts against the top side of the frame body so as to support the fixing piece to be abutted by the second abutting part.

4. The substrate processing system of claim 2, wherein: the first substrate loading and unloading equipment further comprises a first plate frame bearing device arranged on the first frame and located at the bottom side of the first substrate loading and unloading device, and the first plate frame bearing device is used for bearing the plate frame and enabling the plate frame to move to the first accommodating space along the height direction.

5. The substrate processing system of claim 2, wherein: the first substrate loading and unloading equipment further comprises a first substrate bearing device which is arranged on the first frame and can move relative to the first substrate loading and unloading device, the first substrate bearing device is provided with a first bearing part which faces upwards and is used for placing the substrate, and a plurality of first adjusting pieces which surround the first bearing part and can move towards the center of the first bearing part, when the substrate is placed on the first bearing part, the first adjusting pieces push the substrate to enable the center of the substrate to correspond to the center of the first bearing part, and then the first substrate bearing device is driven to move to the bottom side of the first containing space and enable the center of the substrate to correspond to the center of the plate frame.

6. The substrate processing system of claim 2, wherein: the first substrate handling apparatus further includes a first pick-and-place device that is provided to the first frame and is movable back and forth between the first substrate handling device and the substrate processing apparatus, the first pick-and-place device being configured to convert the substrate member in a horizontal state into a vertical state and move to the substrate processing apparatus.

7. The substrate processing system of claim 2, wherein: the second substrate handling equipment further comprises a second plate rack bearing device arranged on the second frame and located on the bottom side of the second substrate handling device, and the second plate rack bearing device is used for bearing the plate rack and enabling the plate rack to move out of the second accommodating space along the height direction.

8. The substrate processing system of claim 2, wherein: the second substrate handling equipment further comprises a second moving device which is arranged on the second frame and is positioned between the second substrate handling device and the substrate processing equipment, the second moving device is provided with a second overturning assembly, a second linkage assembly and a second picking and placing assembly, the second overturning assembly is adjacent to the substrate processing equipment, the second linkage assembly is provided with a receiving end adjacent to the second overturning assembly and a buffering end opposite to the receiving end, the second overturning assembly is used for overturning the substrate member which is vertically from the substrate processing equipment into a horizontal state and placing the substrate member on the receiving end, the second linkage assembly moves the substrate member on the receiving end to the buffering end so that the second overturning assembly can actuate the next substrate member, and the second picking and placing assembly can move the substrate member on the buffering end to the second substrate handling device.

9. The substrate processing system of claim 2, wherein: the substrate processing system further comprises a plate frame recovery device arranged at the bottom side of the substrate processing device, wherein two opposite ends of the plate frame recovery device are respectively adjacent to the first substrate loading and unloading device and the second substrate loading and unloading device, and the plate frame recovery device is used for conveying the plate frame placed on the second substrate loading and unloading device to the first substrate loading and unloading device.

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