TWM609015U - First-in first-out transportation device - Google Patents

Abstract

This creation is about a first-in-first-out transportation equipment for multiple substrates. This first-in-first-out transportation equipment includes a clamping and stacking device, a robotic arm and a reclaiming device. The clamping and stacking device transfers each substrate to each fixture On the above, each clamp is driven to clamp each substrate to form a substrate clamp assembly, and then a plurality of substrate clamp assemblies are stacked in order from 1 to N in a predetermined direction on the first movable carrier; the robot arm will The substrate clamp assembly is transferred to the reclaiming device; the reclaiming device transfers the plurality of substrate clamp assemblies in a predetermined direction from 1 to N to the second moving carrier in sequence, and the substrate removing mechanism is set corresponding to the second moving carrier, and the substrate removing mechanism drives it Each clamp is released on each substrate, and each substrate is transferred from each clamp to the substrate collecting table.

Description

First-in-first-out transportation equipment

This creation is about a transportation device for circuit boards, and especially about a first-in first-out transportation device.

As the demand for all kinds of printed circuit boards increases, manufacturers must also increase production to meet the demand. Therefore, in recent years, many factories have successively introduced automated equipment for production to reduce the burden of manpower, and in a relatively short time A large amount of output is obtained internally, and at the same time, because the machine is not fatigued, it can reduce a lot of defect rates compared to manual production.

However, printed circuit boards need to go through a drying process in a baking oven during the production process. Therefore, if you want to introduce an automated drying process, printed circuit boards must be stacked in batches to improve the efficiency of drying; but how to control the batch stacking The production time of each circuit board is the same, so that the finished product of each circuit board is consistent, which is the key to urgent improvement.

In view of this, the creator has focused on the above-mentioned existing technology, specially researched and cooperated with the application of academic theory, and tried his best to solve the above-mentioned problems, which became the goal of the creator's improvement.

This creation provides a first-in-first-out transportation equipment, which uses multiple substrates to proceed sequentially from 1 to N along a predetermined direction in each process, so as to facilitate follow-up tracking of the relationship between product problems and substrate process conditions.

In this creative embodiment, the creative department provides a first-in-first-out transportation equipment for multiple substrates. The first-in-first-out transportation equipment includes: a clamping and stacking device, including: a plurality of clamps; a clamp conveyor, in sequence Transfer the plurality of clamps; a substrate feeding table, which sequentially transfers the plurality of substrates; a first transfer mechanism, arranged between the clamp transfer table and the substrate feeding table, the first transfer mechanism including a first movement Carrier; and an assembly mechanism corresponding to the first mobile carrier set, the assembly mechanism is used to first move each of the fixtures out of the fixture conveying table, and then each of the substrates from the substrate feeding table to each On the clamp, each clamp is driven to clamp each of the substrates to form a substrate clamp assembly, and then a plurality of the substrate clamp assemblies are stacked in order from 1 to N along a predetermined direction in the first movement. A supporting frame; a robotic arm; and a reclaiming device, including: a placement mechanism, the robotic arm is used to move a plurality of the substrate holder assemblies stacked in sequence from 1 to N along the predetermined direction to the placement Placement mechanism; a second transfer mechanism, including a second mobile support set corresponding to the placement mechanism, the second mobile support relative to the placement mechanism is the same position relative to the first mobile support In the arrangement position of the assembly mechanism, the placement mechanism is used to sequentially move the plurality of substrate clamp components along the predetermined direction from 1 to N to the second movable carrier; a substrate collecting table; and a substrate removal The mechanism corresponds to the second movable supporting frame. The substrate taking mechanism is used to drive each fixture to release each of the substrates, and then transfer each of the substrates from each fixture to the substrate collection table.

Based on the above, the multiple substrates and multiple fixtures are assembled into multiple substrate fixture assemblies that are sequentially stacked from 1 to N along a predetermined direction by using the clamping and stacking device. The robot arm then transports the substrates into baking through the fixtures of the substrate fixture assembly. Furnace and other process stations, and finally through the picking device, the plurality of substrate clamp components are divided into a plurality of substrates and a plurality of clamps in order from 1 to N in a predetermined direction, so that the stack can be arranged. The production time of each substrate is the same and the order of entry and exit remains unchanged, so that the finished product of each substrate maintains the same order and enters the subsequent process.

Based on the above, each clamp includes a top positioning structure, and any two adjacent substrate clamp components are separated by the top positioning structure to avoid stacking of the clamps or causing the substrate to be crushed by the clamps above.

100: Clamping stacking device

200: Robotic arm

300: Reclaimer

400: Substrate fixture assembly

10: Fixture

11: Carrier plate

12: Clamping structure

121: fixed piece

122: clamping shrapnel

1221: Clamping part

1222: pressing part

13: Counterpoint structure

131: piercing parts

1311: pad body

1312: latch

132: Receiving parts

1321: cylinder

1322: jack

14: limit piece

20: Fixture conveyor

30: substrate feeding table

40: The first transfer mechanism

41: The first mobile carrier

411: Stacking Rack

412: pylon

4121: card slot

50: Assembly mechanism

51: Fixture transfer structure

511: Gripper

52: substrate fixture assembly structure

521: Nozzle

522: collapsible putter

53: Drive structure

60: Placement mechanism

61: The first pair of claw hooks

62: The second pair of claw hooks

70: The second transfer mechanism

71: The second mobile carrier

80: Substrate collection table

90: Take the substrate mechanism

91: Take the substrate structure

911: Nozzle

912: collapsible putter

92: mobile structure

A: Substrate

B: Baking oven

d: predetermined direction

a~f: steps

Figure 1 is a flow chart of the steps in the method of using the first-in, first-out transportation equipment in this creation.

Figure 2 is a three-dimensional schematic diagram of the first-in, first-out transportation equipment of this creation.

Fig. 3 is a three-dimensional schematic diagram of the first embodiment of the authoring fixture.

Fig. 4 is another three-dimensional schematic diagram of the first embodiment of the authoring fixture.

Fig. 5 is a side sectional view of the first embodiment of the authoring fixture.

Fig. 6 is a three-dimensional schematic diagram of the first embodiment of the authoring fixture before being stacked.

Fig. 7 is a side cross-sectional view of the first embodiment of the authoring fixture when superimposed.

Fig. 8 is a three-dimensional schematic diagram of the first embodiment of the authoring fixture when it is superimposed.

Figure 9 is a three-dimensional schematic diagram of the creative clamping and stacking device.

Figure 10 is another three-dimensional schematic diagram of the creative clamping and stacking device.

Figure 11~Figure 18 are diagrams (1)~(8) of the use state of this creative clamping and stacking device.

Figure 19~Figure 21 are diagrams (1)~(3) of the state of use of the creative robotic arm.

Figure 22 is a three-dimensional schematic diagram of the creative reclaiming device.

Figure 23 is another three-dimensional schematic diagram of the creative reclaiming device.

Figure 24~Figure 34 are the use state diagrams of the creative reclaiming device (1)~(10).

The detailed description and technical content of this creation will be explained as follows with the drawings. However, the attached drawings are only for illustrative purposes and are not used to limit this creation.

Please refer to Figures 1 to 34. This creative department provides a first-in-first-out transportation equipment. This first-in first-out transportation equipment mainly includes a gripping and stacking device 100, a robotic arm 200 and a reclaiming device 300, and advanced The first-out transport equipment is used for multiple substrates A.

As shown in Figure 1, it is the steps of the method of using the first-in-first-out transportation equipment in this creation. First, as shown in FIG. 2, the mechanical arm 200 of the first-in-first-out transportation equipment of the present invention moves between the clamping and stacking device 100, the multiple baking furnace B, and the material taking device 300.

In addition, as shown in Figs. 3 to 8, it is the first embodiment of the authoring fixture 10. The fixture 10 is used to clamp and fix a substrate A. The fixture 10 includes a carrier plate 11, a plurality of clamping structures 12, and a top pair The positioning structure 13, a plurality of clamping structures 12 are installed on the carrier plate 11 and used to clamp the substrate A, and the abutting alignment structure 13 is connected to the carrier plate 11 and formed on the outside of the substrate A.

Further description is as follows, a plurality of limiters 14 are protrudingly provided on the carrier plate 11, and each limiter 14 is used to jointly limit the substrate A in the area enclosed by each limiter 14, and the substrate A is a printed circuit board. Each clamping structure 12 includes a fixing piece 121 and a clamping elastic piece 122. The fixing piece 121 is connected with the carrier plate 11 so that each clamping structure 12 is fixed on the carrier plate 11, and the clamping elastic plate 122 is provided with a clamping portion 1221 And a pressing portion 1222. The clamping portion 1221 is a strip-shaped block and is located at the front end of the clamping elastic piece 122, and can clamp the substrate A together with the carrier plate 11 when closed through its own elastic force. The pressing portion 1223 is located in the clamping The tail end of the elastic piece 122, when the pressing portion 1223 is pushed downward by an external force, will drive the clamping portion 1221 to open for the substrate A to be placed in.

Wherein, the abutting and positioning structure 13 includes a plurality of through components 131 and a plurality of receiving components 132, each of the receiving components 132 is respectively corresponding to the respective through components 131, and each of the through components 131 includes A cushion body 1311 and a pin 1312 passing through the cushion body 1311. Each receiving member 132 includes a column 1321 and a socket 1322 provided on the column 1321. Please refer to FIGS. 4 to 6 for each column. The 1321 series correspond to the pads 1311 to be attached, and the pins 1312 correspond to the insertion holes 1322, so that the clamps 10 will not be too skewed or slipped after being stacked, and the clamps 10 can be attached. The separation prevents the substrate A from being directly contacted by the upper clamp 10 and pressure loss.

After that, the steps to use the first-in-first-out transportation equipment in this creation are as follows. First, as shown in step a of Figure 1, Figure 2 and Figures 9 to 11, a gripping and stacking device 100 is provided. The gripping and stacking device 100 includes the above-mentioned plural fixtures 10 and a fixture conveying table 20. The conveying table 20 sequentially transfers the plural clamps 10.

Among them, the first-in-first-out transportation equipment of this embodiment is used to transport a plurality of clamps 10 arranged in a horizontal stack, and the clamp conveying table 20 is a loading platform that can be raised and lowered and used for stacking the plurality of clamps 10.

Second, as shown in step b of FIG. 1, FIG. 2 and FIG. 9 to FIG. 11, a plurality of substrates A are provided, and the gripping and stacking device 100 further includes a substrate feeding table 30, and the substrate feeding table 30 sequentially transfers the plurality of substrates A .

Third, as shown in step c of Figure 1, Figure 2 and Figures 12 to 18, the gripping and stacking device 100 further includes a first transfer mechanism 40 and an assembly mechanism 50. The first transfer mechanism 40 includes a For the first moving rack 41, the assembling mechanism 50 first moves each clamp 10 out of the clamp conveying table 20, and then transfers each substrate A from the substrate feeding table 30 to each clamp 10, and drives each clamp 10 to be clamped to each clamp 10 A substrate A constitutes a substrate clamp assembly 400, and then a plurality of substrate clamp assemblies 400 are stacked and arranged on the first movable carrier 41 in order from 1 to N along a predetermined direction d, and in any two adjacent substrate clamp assemblies The space between 400 is separated by the top counter-positioning structure 13.

The detailed description is as follows. The clamp conveying table 20 and the substrate feeding table 30 are respectively arranged on the left and right sides of the first mobile support frame 41. The first mobile support frame 41 includes a stacking frame 411 that can be raised and lowered up and down and is used to stack a plurality of substrate fixture components. 400.

In addition, the assembly mechanism 50 includes a clamp transfer structure 51, a substrate clamp assembly structure 52, and a driving structure 53. The clamp transfer structure 51 and the substrate clamp assembly structure 52 are arranged on the driving structure 53 and simultaneously move laterally through the driving structure 53 .

Furthermore, as shown in FIG. 12, the clamp transfer structure 51 transfers each clamp 10 from the clamp conveying table 20 to the first movable support 41. The clamp transfer structure 51 includes a plurality of clamping jaws 511, and the plurality of clamping jaws 511 are used to clamp together Each substrate A is fixed for transfer.

In addition, as shown in FIGS. 13-15, the substrate clamp assembly structure 52 transfers each substrate A from the substrate feeding table 30 to each clamp 10, and then drives each clamp 10 to clamp each substrate A to form a substrate Clamp assembly 400.

Among them, the substrate clamp assembly structure 52 includes a plurality of suction nozzles 521 and a plurality of collapsible push rods 522. Each suction nozzle 521 is used to suck the substrate A together, and each collapsible push rod 522 is used to jointly push each clamping elastic piece. Each pressing portion 1222 of 122 opens each clamping structure 12 to place the substrate A.

The operation process of the clamping and stacking device 100 of this embodiment is as follows. As shown in FIG. 11, the clamp transfer structure 51 first clamps and transfers the clamp 10 at the top of the clamp conveying table 20 to the first transfer mechanism 40 through the drive structure 53 At the same time, the substrate clamp assembly structure 52 is also moved to the top of the substrate feeding table 30 through the driving structure 53, and the clamp conveying table 20 will rise up by a distance of the clamp 10 for the next clamping; as shown in Fig. 12, the clamp is transferred The structure 51 places the clamp 10 downward on the first movable support 41, and the substrate clamp assembly structure 52 sucks the substrate A on the substrate feeding table 30 downward; as shown in FIG. 13, the clamp transfer structure 51 and the substrate clamp assembly structure 52 At the same time, it rises upward at the same time, and moves to the top of the clamp conveying table 20 and the first movable support frame 41 through the driving structure 53.

As shown in Fig. 14, the clamp transfer structure 51 is then clamped down for the second time to clamp the clamp 10 at the top of the clamp transfer table 20, and the substrate clamp assembly structure 52 downwardly places the adsorbed substrate A on the first When the substrate clamp assembly structure 52 moves downwards on the fixture 10 on the movable support frame 41, each collapsible push rod 522 will first push the pressing portion 1222 of each clamping elastic piece 122 downward to make each clamping portion 1221 Open to insert the substrate A; as shown in FIG. 15, the substrate clamp assembly structure 52 then places the substrate A on the clamp 10. At this time, the collapsible push rods 522 will collapse upward and continue to push the pressing parts 1222.

As shown in FIG. 16, the clamp transfer structure 51 clamps the clamped clamp 10 upward, and the substrate clamp assembly structure 52 is separated upward from the clamp 10 on the first movable carrier 41; as shown in FIG. 17, the clamp transfer table 20 will The distance of the fixture 10 is raised up by one grid for the next clamping, and the first movable support 41 will be lowered by the distance of the fixture 10 by one grid for the next placement; as shown in Figure 18, the process can be repeated by repeating the cycle. The substrates A are put into the jig 10 respectively, and the assembled substrate jig assembly 400 is stacked on the first transfer mechanism 40.

Fourth, as shown in step d of Figure 1, Figures 20 to 21 and Figures 22 to 24, a robotic arm 200 and a reclaiming device 300 are provided. The reclaiming device 300 includes a placing mechanism 60 and a robotic arm 200 The plurality of substrate holder assemblies 400 stacked in sequence from 1 to N along the predetermined direction d are transferred to the placement mechanism 60.

Wherein, the robot arm 200 first transfers the plurality of substrate clamp assemblies 400 stacked in sequence from 1 to N along the predetermined direction d from the first movable support 41 to the baking furnace B for baking, and then moves along the predetermined direction. The plurality of substrate clamp assemblies 400 with d stacked in sequence from 1 to N are transferred from the baking furnace B to the placement mechanism 60.

Fifth, as shown in step e of FIG. 1, FIG. 20 to FIG. 21, and FIG. 25 to FIG. 26, the reclaiming device 300 further includes a second transfer mechanism 70, and the second transfer mechanism 70 includes a second movable bearing The arrangement position of the second mobile support frame 71 relative to the placement mechanism 60 is the same as the arrangement position of the first mobile support frame 41 relative to the assembly mechanism 50. The placement mechanism 60 moves the plurality of substrate clamp assemblies 400 along a predetermined direction d From 1 to N, they are sequentially transferred to the second movable carrier 71.

Wherein, the placement mechanism 60 of this embodiment is arranged above the second movable support frame 71, and the placement mechanism 60 includes a first pair of claw hooks 61 and a second pair of claw hooks 62, the first pair of claw hooks 61 and the second pair of claw hooks 61 and 62. The claw hook 62 clamps the plurality of substrate clamp assemblies 400 in turn.

In addition, the arrangement position of the second movable frame 71 relative to the placement mechanism 60 is the same as the arrangement position of the first movable frame 41 relative to the assembly mechanism 50, that is, when the first movable frame 41 is arranged below the assembly mechanism 50, The second movable rack 71 is also arranged under the placement mechanism 60, so that the plurality of substrate clamp assemblies 400 can be transferred from the first movable rack 41 to the second movable rack in a state where the plurality of substrate clamp assemblies 400 are arranged in a stack from 1 to N along the predetermined direction d. 71.

Further description is as follows, as shown in FIGS. 24 to 34, the first pair of claw hooks 61 clamp the substrate clamp assembly 400 in the first order, the second pair of claw hooks 62 clamp the substrate clamp assembly 400 in the second order, and the first pair The substrate clamp assembly 400 with the first release sequence of the claws 61 is transferred to the second movable carrier 71, and then the first pair of claw hooks 61 clamps the substrate clamp assembly 400 of the third sequence, and the second pair of claws 62 release sequence The second substrate clamp assembly 400 is transferred to the second movable carrier 71, so that each substrate clamp assembly 400 can be sequentially transferred to the second movable carrier 71 from 1 to N along the predetermined direction d.

Sixth, as shown in step f of Figure 1, Figures 20 to 21, and Figures 27 to 34, the material removal device 300 further includes a substrate collecting table 80 and a substrate removal mechanism 90. The substrate removal mechanism 90 drives each The clamp 10 is released on each substrate A, and then each substrate A is transferred from each clamp 10 to the substrate collecting table 80.

Among them, the second mobile support frame 71 and the substrate collection table 80 of this embodiment are aligned left and right with each other, and the second mobile support frame 71 can be lifted up and down and used to stack a plurality of fixtures 10.

The detailed description is as follows. The substrate taking mechanism 90 includes a substrate taking structure 91 and a moving structure 92 that drives the substrate taking structure 91 to move between the second moving carrier 71 and the substrate collecting table 80. The substrate taking structure 91 is used to drive each A jig 10 is released on each substrate A, and each substrate A is transferred from each jig 10 to the substrate collecting table 80.

In addition, the substrate-taking structure 91 includes a plurality of suction nozzles 911 and a plurality of collapsible push rods 912. Each suction nozzle 911 is used to suck the substrate A together, and each collapsible push rod 912 is used to jointly push each clamping elastic piece 122. Each pressing portion 1222 of each of the clamping structures 12 opens to place the substrate A.

Therefore, the first-in-first-out transportation equipment of the present invention uses the clamping and stacking device 100 to first assemble the plurality of substrates A and the plurality of clamps 10 into a plurality of substrate clamp assemblies 400 that are sequentially stacked from 1 to N along the predetermined direction d , The robot arm 200 then transports the substrate A into the baking furnace B and other processing stations through the fixture 10 of the substrate fixture assembly 400, and finally splits the plurality of substrate fixture assemblies 400 along the predetermined direction d from 1 to N through the picking device 300. Multiple substrates A and multiple fixtures 10 can make the production time of the stacked substrates A the same and the order of entry and exit remains the same, so that the finished products of each substrate A can be kept in the same order and enter the subsequent process processing, so as to facilitate the follow-up tracking of product problems and The relationship between the substrate process conditions.

In addition, when the clamps 10 are stacked and arranged, they are separated by the top positioning structure 13 to avoid stacking of the clamps 10 skewed or causing the substrate A to be compressed by the clamp 10 above.

Furthermore, each clamping structure 12 can clamp the substrate A on the carrier plate 11, and the substrate A can be restricted in each limiting member 14 through each limiting member 14 to avoid sliding, and the pin 1312 on the component 131 can be penetrated. And the socket 1322 on the receiving part 131 can prevent the clamp 10 from being skewed or slipped too much when it is stacked.

In summary, the first-in-first-out transportation equipment of this creation can indeed achieve the intended purpose of use, and solve the deficiencies of conventional knowledge, and is industrially usable, novel and progressive, and fully meets the requirements for patent application and is in accordance with the patent law. To apply, please check carefully and grant the patent for this case to protect the rights of the creator.

100: Clamping stacking device

200: Robotic arm

300: Reclaimer

B: Baking oven

Claims (10)

A first-in-first-out transportation equipment for multiple substrates. The first-in first-out transportation equipment includes: a clamping and stacking device, including: a plurality of clamps; a clamp conveying table, which sequentially transfers the plurality of clamps; and a substrate feeding table, according to The plurality of substrates are sequentially transferred; a first transfer mechanism is arranged between the clamp conveying table and the substrate feeding table; the first transfer mechanism includes a first movable carrier; and an assembly mechanism corresponding to the first A movable rack is provided, and the assembly mechanism is used to first move each of the fixtures out of the fixture conveying table, and then transfer each of the substrates from the substrate feeding table to each of the fixtures, and drive each of the fixture clamps Fixed to each of the substrates to form a substrate clamp assembly, and then a plurality of the substrate clamp assemblies are stacked and arranged in sequence from 1 to N along a predetermined direction on the first movable carrier; a robot arm; and a pick-up The material device includes: a placement mechanism, the robotic arm is used to transfer a plurality of the substrate clamp assemblies stacked in sequence from 1 to N along the predetermined direction to the placement mechanism; a second transfer mechanism, including There is a second mobile support set corresponding to the placement mechanism, and the configuration position of the second mobile support relative to the placement mechanism is the same as the configuration position of the first mobile support relative to the assembling mechanism. The mechanism is used to sequentially move the plurality of substrate clamp assemblies along the predetermined direction from 1 to N to the second movable carrier; a substrate collecting table; and A substrate taking mechanism is set corresponding to the second movable carrier. The substrate taking mechanism is used to drive each fixture to release each of the substrates, and then transfer each of the substrates from each fixture to the substrate set. Material table. The first-in-first-out transportation equipment according to claim 1, wherein each of the clamps includes a top positioning structure, and any two adjacent substrate clamp components are separated by the top positioning structure, and each The clamp further includes a supporting plate and a plurality of clamping structures installed on the supporting plate, and each of the abutting and positioning structures is connected to each supporting plate and formed on the outer side of each of the substrates. The first-in-first-out transportation equipment according to claim 2, wherein the clamp conveying table and the substrate feeding table are respectively arranged on the left and right sides of the first movable carrier, and the clamp conveying table is a carrier table that can be lifted up and down. To stack the plurality of fixtures, the first movable support frame includes a stacking frame that can be raised and lowered and used for stacking the plurality of substrate fixture components. The first-in-first-out transportation equipment according to claim 3, wherein the assembly mechanism includes a fixture transfer structure and a substrate fixture assembly structure, and the fixture transfer structure transfers each fixture from the fixture delivery table to the first moving bearing The substrate clamp assembly structure transfers each of the substrates from the substrate feeding table to each of the clamps, and then drives each of the clamps to be clamped to each of the substrates to form the substrate clamp assembly. The first-in-first-out transportation equipment according to claim 4, wherein each of the clamping structures includes a fixing piece and a clamping elastic piece, the fixing piece is connected to the carrier plate, and the clamping elastic piece can pass through its own elastic clamp To fix the substrate, the clamping elastic piece is provided with a clamping portion and a pressing portion. The clamping portion is a strip-shaped block and is located at one end of the clamping elastic piece. The pressing portion is located at the other end of the clamping elastic piece. The clamp transfer structure includes a plurality of clamping jaws for jointly clamping each of the substrates for transfer, and the substrate clamp assembly structure includes a plurality of suction nozzles and a plurality of collapsible push rods, and each of the suction nozzles is used in common The substrate is adsorbed, and each of the collapsible push rods is used to jointly push each of the pressing parts of each of the clamping elastic pieces to open each of the clamping structures to place the substrate. The first-in-first-out transportation equipment according to claim 5, wherein the assembly mechanism further includes a driving structure, the clamp transfer structure and the substrate clamp assembly structure are arranged on the driving structure, and the driving structure is used for lateral mobile. The first-in-first-out transportation equipment according to claim 5, wherein the second mobile support frame and the substrate collecting table are left and right side by side with each other, and the second mobile support frame can be raised and lowered and used to stack the plurality of clamps. The first-in-first-out transportation equipment according to claim 7, wherein the placement mechanism is arranged above the second movable support, the placement mechanism includes a first pair of claw hooks and a second pair of claw hooks, the first The claw hooks and the second pair of claw hooks clamp a plurality of substrate clamp components in turn, and sequentially transfer the substrate clamp components from 1 to N along the predetermined direction to the second movable carrier. The first-in-first-out transportation equipment according to claim 8, wherein the substrate taking mechanism includes a substrate taking structure and a moving structure for driving the substrate taking structure to move between the second moving carrier and the substrate collecting table, The substrate fetching structure is used to drive each of the clamps to release each of the substrates, and then transfer each of the substrates from each of the clamps to the substrate collecting table. The first-in-first-out transportation equipment according to claim 9, wherein the substrate-taking structure includes a plurality of suction nozzles and a plurality of collapsible push rods, each of the suction nozzles is used to adsorb the substrate together, and each of the collapsible push rods is The pressing parts used to jointly push the clamping elastic pieces to open the clamping structures to place the substrate.

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