TWI588090B - Coated graphite member - Google Patents

Coated graphite member Download PDF

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Publication number
TWI588090B
TWI588090B TW105109314A TW105109314A TWI588090B TW I588090 B TWI588090 B TW I588090B TW 105109314 A TW105109314 A TW 105109314A TW 105109314 A TW105109314 A TW 105109314A TW I588090 B TWI588090 B TW I588090B
Authority
TW
Taiwan
Prior art keywords
graphite
coated
substrate
pbn
graphite substrate
Prior art date
Application number
TW105109314A
Other languages
English (en)
Chinese (zh)
Other versions
TW201641419A (zh
Inventor
狩野正樹
Original Assignee
信越化學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越化學工業股份有限公司 filed Critical 信越化學工業股份有限公司
Publication of TW201641419A publication Critical patent/TW201641419A/zh
Application granted granted Critical
Publication of TWI588090B publication Critical patent/TWI588090B/zh

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  • Chemical Vapour Deposition (AREA)
TW105109314A 2015-04-09 2016-03-25 Coated graphite member TWI588090B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015079769A JP6478364B2 (ja) 2015-04-09 2015-04-09 被覆グラファイト部材及びこれと保持手段とのアセンブリ

Publications (2)

Publication Number Publication Date
TW201641419A TW201641419A (zh) 2016-12-01
TWI588090B true TWI588090B (zh) 2017-06-21

Family

ID=57423823

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105109314A TWI588090B (zh) 2015-04-09 2016-03-25 Coated graphite member

Country Status (2)

Country Link
JP (1) JP6478364B2 (ja)
TW (1) TWI588090B (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1788107A (zh) * 2003-05-22 2006-06-14 艾克斯特朗股份公司 Cvd涂敷装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113807A (en) * 1977-03-16 1978-10-04 Tokai Carbon Kk Material for sliding surface of machine and method of its manufacture
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
JPS6465085A (en) * 1987-09-03 1989-03-10 Hitachi Chemical Co Ltd Jig comprising sic-graphite compound material
JP2607409B2 (ja) * 1991-11-11 1997-05-07 東海カーボン株式会社 炭素繊維強化炭素複合材の耐酸化処理法
JP2741164B2 (ja) * 1994-03-16 1998-04-15 住友シチックス株式会社 半導体単結晶引上げ装置用黒鉛部材および半導体単結晶引上げ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1788107A (zh) * 2003-05-22 2006-06-14 艾克斯特朗股份公司 Cvd涂敷装置

Also Published As

Publication number Publication date
JP2016199419A (ja) 2016-12-01
JP6478364B2 (ja) 2019-03-06
TW201641419A (zh) 2016-12-01

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