TWI570485B - Light orientation device - Google Patents

Description

Light alignment device

The present invention relates to a light alignment device that performs light alignment by irradiating polarized light to a workpiece.

Previously, there has been known a light alignment device comprising a light source and a polarizing plate, wherein the light from the light source is polarized and irradiated to the light alignment film (workpiece) to optically align the light alignment film (for example) Refer to Patent Document 1). In the optical alignment device, the light alignment film is placed on the work surface to be transported, and the large optical alignment film is optically aligned (for example, see Patent Document 1).

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2002-350858

However, in the optical alignment device, it is desirable to shorten the processing time of the processing of the workpiece. The present invention has been made in view of the above circumstances, and an object thereof is to provide a light irradiation device capable of shortening a process time for processing a workpiece.

In order to achieve the above object, a light alignment device according to the present invention is characterized in that a pair of workpiece recovery stages are provided at both end portions, and a light illuminator is provided at a central portion. A pair of workpiece mounting stages are disposed between the workpiece recovery stage and the light illuminator and at positions near both ends of the light illuminator.

In the above configuration, the transport mechanism may be configured such that the workpiece is reciprocated in the order of the workpiece mounting table on the one end side, the irradiation region of the light irradiator in the center portion, and the workpiece collecting table on the one end side. The workpiece is reciprocated in the order of the workpiece mounting table on the other end side, the irradiation region of the light irradiator at the center portion, and the workpiece collecting table on the other end side. The transfer mechanism is used when the workpiece passes through the irradiation region to make the other The workpiece is retracted from the workpiece mounting table. Conversely, in the above-described conveying mechanism, similarly, when another workpiece passes through the irradiation region, a workpiece is retracted from the workpiece mounting table.

In the above configuration, the robot apparatus may be provided in which the workpiece is mounted on the workpiece mounting table, and the robot apparatus may be configured to hold two workpieces.

In the above configuration, the conveying mechanism may be configured to change the moving speed of the workpiece before the workpiece passes through the irradiation region.

In the above configuration, after the other workpiece is irradiated, the other workpiece may be retracted from the workpiece mounting table. Conversely, in the same manner, after the one workpiece is irradiated, the one workpiece is retracted from the workpiece mounting table.

In the above configuration, the robot apparatus may be configured to hold two workpieces up and down, hold the workpiece before the irradiation in the lower layer, and hold the workpiece after the irradiation in the upper layer.

In the above configuration, the robot apparatus may be configured to hold the two workpieces horizontally on the workpiece mounting stage side and the workpiece collection stage side, and to hold the workpiece before the irradiation on the workpiece mounting stage side, and to irradiate the workpiece after irradiation. Keep it on the side of the workpiece recovery table.

Further, the optical alignment device of the present invention is characterized in that: in the central portion A light irradiator is provided, and a pair of workpiece mounting tables are provided at positions near both ends of the light irradiator, and a transport mechanism is provided. The transport mechanism is a workpiece mounting table on the one end side and a light irradiator in the center portion of the workpiece. The workpiece mounting table in the irradiation region and the one end portion is reciprocated in the order of the workpiece mounting table on the other end side, the irradiation region of the light irradiator in the center portion, and the workpiece mounting table on the other end side. The conveying mechanism is configured to retract another workpiece from the workpiece mounting table when a workpiece passes through the irradiation region. Further, the transport mechanism may retract a workpiece from the workpiece mounting table when another workpiece passes through the irradiation region.

In the above configuration, the robot apparatus for mounting the workpiece on the workpiece mounting table may be provided, and the robot apparatus may be configured to hold two workpieces.

In the above configuration, the conveying mechanism may be configured to change the moving speed of the workpiece before the workpiece passes through the irradiation region.

In the above configuration, after the other workpiece is irradiated, the other workpiece may be retracted from the workpiece mounting table.

In the above configuration, the workpiece mounting table can also serve as a workpiece recovery stage.

In the above configuration, the robot apparatus may be configured to hold two workpieces up and down, hold the workpiece before the irradiation in the lower layer, and hold the workpiece after the irradiation in the upper layer.

According to the invention, a pair of workpiece collecting stations are provided at both end portions, and a light irradiator is provided at the center portion, and a pair of workpieces are mounted between the workpiece collecting table and the light irradiator at a position near both ends of the light irradiator. The stage can shorten the processing time of the processing of the workpiece.

1‧‧‧Light alignment device

2‧‧‧Workpiece table

3‧‧‧Transport rack

4‧‧‧ illuminator setting

5‧‧‧Light illuminator

6‧‧‧Linear motion mechanism (round-trip mechanism)

7‧‧‧Shell

7A‧‧‧Light exit opening

8‧‧‧Light tube (light source)

9‧‧‧Mirror

10‧‧‧Polar plate unit

12‧‧‧Unit polarizer unit

14‧‧‧Frame

16‧‧‧Wire grid polarizer (polarizer)

18‧‧‧Measurement unit

19‧‧‧ screws (fixed means)

20‧‧‧Moving and unloading devices

21‧‧‧ body

22‧‧‧ mounting table

30‧‧‧Upstream side robot

31‧‧‧flat board

32‧‧‧ Robot

33‧‧‧Reciprocating drive mechanism

32A‧‧ mechanical arm

32B‧‧‧ Keeping Department

40‧‧‧cleaner

41‧‧‧flat board

42‧‧‧ cleaning unit

43‧‧‧Mobile agencies

50‧‧‧Rotating unit (angle adjustment device)

60‧‧‧Downstream robot

61‧‧‧flat board

62‧‧‧ Robot

62A‧‧‧ Robotic arm

62B‧‧‧ Keeping Department

62B1‧‧‧Holding rod

62C‧‧‧Support

63‧‧‧Reciprocating drive mechanism

63A‧‧‧linear orbit

63B‧‧‧linear orbit

70‧‧‧Control device (control department)

71‧‧‧Memory Department

72‧‧‧Executive Department

100, 200‧‧‧ optical alignment system

260‧‧‧Robots

C1‧‧‧ polarizing axis

D1‧‧‧1st workpiece table center movement range

D2‧‧‧2nd workpiece table center movement range

E1‧‧‧ end

E2‧‧‧The other end

R‧‧‧illuminated area

PL1, PL2‧‧‧ carrying position

PU1, PU2‧‧‧Recycling location

S1, S2‧‧‧ space

W, WA~WF‧‧‧Light matching object (workpiece)

X‧‧‧Directional direction

Fig. 1 is a plan view schematically showing an optical alignment system including an optical alignment device according to a first embodiment of the present invention.

Fig. 2 is a front view schematically showing a light alignment device.

3 is a view showing a configuration of a polarizing plate unit, wherein (A) is a plan view and (B) is a side cross-sectional view.

4 is a view showing the downstream side robot device 60, wherein (A) is a plan view, (B) is a side view, and (C) is a front view.

5 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a view showing that the light distribution target is mounted on the first and The structure of the state of the second workpiece stage.

6 is a plan view schematically showing a configuration of a light alignment irradiation system, in which (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a state in which the first and second workpiece stages are moved. The composition of the figure.

Fig. 7 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and a second workpiece stage, and (B) is a movement displayed on the second workpiece stage. A configuration diagram of the state in which the first stage recovers the light-aligning object.

8 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and the second workpiece stage, and (B) is a movement shown in the second workpiece stage. A configuration diagram in which the light alignment object is mounted on the first workpiece stage.

Fig. 9 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and the second workpiece stage, and (B) is a state in which the first workpiece stage and the second workpiece stage are moved. The composition of the figure.

Figure 10 is a plan view schematically showing the configuration of a light alignment irradiation system, (A) being (B) is a block diagram showing a state in which the first workpiece stage is moved, and (B) is a state in which the light is aligned to the object from the second workpiece stage during the movement of the first workpiece stage.

11 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and the second workpiece stage, and (B) is a movement displayed on the first workpiece stage, and A configuration diagram in which the light alignment object is mounted on the second workpiece stage.

Fig. 12 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and the second workpiece stage, and (B) is a state in which the first workpiece stage and the second workpiece stage are moved. The composition of the figure.

Fig. 13 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and a second workpiece stage, and (B) is a movement shown in the second workpiece stage. A configuration diagram of the state in which the first workpiece stage recovers the light-aligning object.

Fig. 14 is a plan view schematically showing an optical alignment system including the optical alignment device according to the second embodiment of the present invention.

15 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a view showing that the light alignment object is mounted on the first and The structure of the state of the second workpiece stage.

Fig. 16 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a state in which the first and second workpiece stages are moved. The composition of the figure.

Fig. 17 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a state in which the first and second workpiece stages are moved. The composition of the figure.

18 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a second work shown in FIG. In the movement of the table, the configuration of the state in which the light-aligning object is collected and loaded from the first workpiece stage is shown.

19 is a plan view schematically showing a configuration of a light alignment irradiation system, in which (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a state in which the first and second workpiece stages are moved. The composition of the figure.

Fig. 20 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first workpiece stage and the second workpiece stage, and (B) is a movement displayed on the first workpiece stage. A configuration diagram of the state in which the second workpiece stage is collected and the optical alignment object is mounted.

Fig. 21 is a plan view schematically showing a configuration of a light alignment irradiation system, wherein (A) is an explanatory view showing a movement state of the first and second workpiece stages, and (B) is a state in which the first and second workpiece stages are moved. The composition of the figure.

<First embodiment>

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a plan view schematically showing an optical alignment system including the optical alignment device of the first embodiment, and Fig. 2 is a front view schematically showing the optical alignment device. As shown in FIG. 1 and FIG. 2, the optical alignment system 100 is configured to include a light alignment device 1, a loading/unloading device 20, an upstream robot device 30, a cleaner 40, a rotating unit (angle adjusting device) 50, and a downstream robot. Device 60 and control device (control unit) 70. The optical alignment system 100 is disposed, for example, in an environment in which a foreign matter such as a clean room is relatively small. The light-aligning device 1 is a light-illuminating device that performs light-alignment on a light-aligning film in which a light-aligning film of a target (work) W is formed into a rectangular plate shape or a strip shape in a plan view. The optical alignment device 1 includes a workpiece stage (transfer table, support member) 2, a table transfer frame 3, and an illuminator setting frame. 4. And the light illuminator 5.

The workpiece stage 2 is, for example, a substantially quadrangular plate-shaped work table, and is provided with a pair on the stage transfer frame 3. In the workpiece stage 2, the light-aligning object W is placed on the upper surface by the downstream robot apparatus 60 to hold the light-aligning object W. The pair of workpiece stages 2 are formed in the same shape, and each of the workpiece stages 2 is formed to be sized to arrange the light-aligning object W. The illuminator mounting frame 4 is a door body that straddles the width direction of the table transport frame 3 in a lateral direction (a direction perpendicular to the linear motion direction X of a linear motion mechanism to be described later) at a position above the predetermined distance from the table transport frame 3, The two columns are fixed to the table transfer frame 3. The illuminator mounting frame 4 is formed as a light shielding wall except for a portion where the workpiece stage 2 is taken in and out. The illuminator mounting frame 4 incorporates a light illuminator 5, and the light illuminator 5 illuminates the polarized light directly below. Further, in order to separate the vibration accompanying the movement of the workpiece stage 2 from the vibration caused by the cooling of the light irradiator 5, the illuminator mounting frame 4 may be fixed to the stage transfer frame 3 without being attached thereto. The transfer racks 3 are separately provided. The stage transfer frame 3 and the illuminator installation frame 4 may be provided with an anti-vibration structure.

A linear motion mechanism (transport mechanism) 6 is provided in the table transfer frame 3, and the feed mechanism 6 is controlled by the control device 70 to pass the workpiece stage 2 through the light illuminator 5 in a linear motion direction X. The method directly below is transferred on the surface of the table transfer frame 3. The light is aligned with the light of the object W, and the light-aligning object W placed on the workpiece stage 2 is transferred by the linear motion mechanism 6 in the linear motion direction X and directly passed through the light irradiator 5, and The photo-alignment film is aligned by exposure to polarized light during the passage. The linear motion mechanism 6 is configured to change the speed at which the workpiece stage 2 is moved. The linear motion mechanism 6 of the present embodiment is configured by, for example, a linear motor type or a belt drive type, but is not limited thereto, and various mechanisms may be used.

As shown in FIG. 2, the light irradiator 5 is provided with a housing 7 and a lower surface thereof. The light exit opening portion 7A, the lamp tube (light source) 8 and the mirror 9 are disposed in the casing, and the polarizing plate unit 10 is disposed in the light exit opening portion 7A. The casing 7 is supported by the illuminator mounting frame 4 at a position above a predetermined distance from the light-aligning object W. The tube 8 is a straight tube type (rod-shaped) ultraviolet lamp that extends at least the same length as the length of the light-aligning object W in the longitudinal direction. That is, the long axis L of the bulb 8 coincides with the direction orthogonal to the linear motion direction X. The lamp tube 8 is a discharge lamp and is lit according to the control of the control device 70. The mirror 9 is a columnar concave mirror having an elliptical cross section and extending along the longitudinal direction of the bulb 8 for condensing the light of the bulb 8 and irradiating the polarizing plate unit 10 from the light exit opening portion 7A. .

The light exit opening portion 7A is formed in an opening portion which is rectangular in plan view, directly under the bulb 8, and the longitudinal direction is provided to coincide with the longitudinal direction of the bulb 8. Further, although not shown, a wavelength selective filter for selecting a wavelength of light to be transmitted is provided inside the light emission opening portion 7A, and the light illuminator 5 is desired to be irradiated by the wavelength selection filter. The wavelength of light. In the present embodiment, although the wavelength selective filter is provided, the wavelength selective filter may be omitted when the lamp 8 itself can emit light of a desired wavelength. In the present embodiment, the casing 7 is provided close to the light-aligning object W, and the size of the light-emitting opening 7A corresponds to the size of the irradiation region R. Further, the central axis of the irradiation region R coincides with the long axis L of the bulb 8.

A rotary drive mechanism (not shown) for rotatably driving the workpiece stage 2 is provided in the work table transfer frame 3 in correspondence with each of the workpiece stages 2. The rotation drive mechanism is controlled by the control device 70 so that the light-aligning object W becomes a pair of the light-aligning object W and is aligned (parallel) with respect to the long axis L of the bulb 8, and the light-aligning object The other pair of sides of the object W are orthogonal to the long axis of the tube 8 and orthogonal thereto In this manner, the workpiece stage 2 is rotated to finely adjust the angle of the light-aligning object W. Further, when the polarization axis angle of the polarized light necessary for the irradiation of the light-aligning object W is at a predetermined angle with respect to the long axis L of the bulb 8, the rotation drive mechanism rotates the workpiece stage 2 by a predetermined angle.

3 is a view showing the configuration of the polarizing plate unit 10. FIG. 3(A) is a plan view and FIG. 3(B) is a side cross-sectional view. As shown in FIG. 3, the polarizing plate unit 10 is provided with a plurality of unit polarizing plate units 12, and a frame 14 in which the unit polarizing plate units 12 are arranged side by side in a row. The frame 14 is connected to a frame-like frame in which the unit polarizing plate units 12 are arranged. The unit polarizing plate unit 12 is provided with a wire grid polarizing plate (polarizing plate) 16 formed in a substantially rectangular plate shape. In the present embodiment, each unit polarizing plate unit 12 supports the wire grid polarizing plate 16 such that the wire grid direction A is parallel to the linear motion direction X, and polarizes the direction orthogonal to the wire grid direction A and the wire grid. The arrangement direction B of the plates 16 is identical.

The wire grid polarizing plate 16 is a type of linear polarizing plate, and a grating is formed on the surface of the substrate. As described above, since the bulb 8 has a rod shape, although light of various angles is incident on the wire grid polarizing plate 16, even if it is obliquely incident light, the wire grid polarizing plate 16 is linearly polarized and penetrates. . The wire grid polarizing plate 16 is supported by the unit polarizing plate unit 12 so that the direction of the polarization axis C1 can be finely adjusted by rotating the normal direction thereof as a rotation axis. In other words, the plurality of wire grid polarizing plates 16 are arranged with a gap therebetween so as to be finely adjusted in the direction of the polarization axis C1.

The stage transfer frame 3 is provided with a measuring unit 18 that measures the polarization direction and the extinction ratio of the polarized light by detecting the polarized light under the control of the control device 70. The direction of the polarization axis C1 of the wire grid polarizing plate 16 can be adjusted according to the polarization direction of the polarized light measured by the measuring unit 18. By making all of the unit polarizing plate units 12 such that the polarization axis C1 of the wire grid polarizing plate 16 coincides with a predetermined irradiation reference direction By adjusting, it is possible to obtain polarized light in which the polarization axis C1 is aligned with high precision over the entire length of the polarizing plate unit 10 in the long axis direction, and high-quality light alignment can be achieved. The wire grid polarizing plate 16 whose polarization axis C1 is adjusted is fixed to the frame 14 by fixing the upper end and the lower end of the unit polarizing plate unit 12 to the frame 14 by screws (fixing means) 19.

As shown in FIG. 1 , the loading/unloading device 20 includes a main body 21 that is provided in parallel with the table transfer frame 3 , and a mounting table 22 that mounts a plurality of light-aligning objects W on the main body 21 . The mounting table 22 carries the light-aligning object W from the outside, and places the light-aligned light-aligning object W on the mounting table 22, and then carries it out from the mounting table 22 to the next processing device. In the present embodiment, the number of the mounting tables 22 is not limited thereto. For example, the mounting table 22 for loading and the mounting table 22 for loading and unloading may be provided.

The upstream robot apparatus 30 is configured to include a flat plate 31 that is provided in parallel to the table transfer frame 3, a robot 32 that supports the flat plate 31, and a reciprocating drive mechanism 33 that causes the robot 32 to move in a linear direction. X moves back and forth. The robot 32 includes a robot arm 32A that is rotatable and expandable, and a holding portion 32B that holds the light alignment object W that is fixed to the robot arm 32A. The robot arm 32A is rotatably supported by the flat plate 31 on a horizontal surface. The mechanical arm 32A of the present embodiment is configured as a multi-joint robot having a plurality of rotatable joints and being expandable and contractible, but the configuration of the mechanical arm 32A is not limited thereto. Under the control of the control device 70, the robot 32 moves in the linear motion direction X and moves the robot arm 32A, and transfers the light-aligning object W between the loading/unloading device 20, the cleaner 40, and the rotating unit 50.

The cleaner 40 is configured to include a flat plate 41 that is disposed adjacent to and adjacent to the flat plate 31 of the upstream robot device 30, and a cleaning unit 42 that removes foreign matter that is directed toward the surface of the object W; and a moving mechanism 43, It aligns light with objects The object W moves toward the cleaning unit 42. The cleaning unit 42 is disposed above the plane plate 41 in a direction orthogonal to the linear motion direction X (the direction of the long axis L). The cleaning unit 42 is configured to be capable of blowing a gas such as air from below under the control of the control device 70. The moving mechanism 43 is a mechanism for moving the light-aligning object W on the upper surface of the flat plate 41 so as to pass directly under the cleaning unit 42 in the linear motion direction X under the control of the control device 70, and is configured as For example, belt type.

The light-aligning object W is transported in the linear motion direction X by the moving mechanism 43 and passes right below the cleaning unit 42, and the gas is blown at the time of passing, and the foreign matter adhering to the light-aligning object W is removed. Further, although not shown, the cleaner 40 is provided with a static eliminator for removing static electricity, and the cleaner 40 removes static electricity of the light aligning object W. Further, in the present embodiment, the cleaner 40 is provided with the moving mechanism 43, but the moving mechanism 43 may be omitted as long as the cleaning unit 42 is configured to completely blow the gas across the light alignment film of the light-aligning object W. . Further, instead of the moving mechanism 43 that moves the light to the object W, a moving mechanism (not shown) that can move the cleaning unit 42 in the linear motion direction X may be provided.

The rotating unit 50 is adjacent to the flat plate 31 of the upstream side robot device 30, and is disposed side by side with the cleaner 40. The rotation unit 50 is provided with an adjustment stage 51 that mounts the light distribution target W and adjusts the angle of the light distribution to the object W under the control of the control device 70. The rotation unit 50 is configured such that a pair of the light-aligning object W becomes a pair of the light-aligning object W with respect to the long axis L of the bulb 8 and is aligned (parallel) thereto, and the other side of the light-aligning object W is opposed to The angle of the light-aligning object W is adjusted such that the long axis L of the bulb 8 is orthogonal to the posture.

4 is a view showing the downstream side robot device 60. FIG. 4(A) is a plan view, FIG. 4(B) is a side view, and FIG. 4(C) is a front view. As shown in Figure 1 and Figure 4, the next The side robot device 60 is configured to include a flat plate 61 that is disposed parallel to the table transfer frame 3, a robot 62 that is supported by the flat plate 61, and a reciprocating drive mechanism 63 that causes the robot 62 to follow The direction of linear motion X moves back and forth. The robot 62 includes a robot arm 62A that is rotatable and retractable, and a pair of light-aligning objects W that are fixed to the robot arm 62A to the holding portion 62B. The robot arm 62A is rotatably supported by the flat plate 61 on a horizontal surface. The robot arm 62A of the present embodiment is configured as a multi-joint robot arm having a plurality of rotatable joints and being expandable and contractible, but the configuration of the robot arm 62A is not limited thereto. The holding portion 62B is configured such that a plurality of holding rods 62B1 are arranged in parallel, and the light-aligning object W is placed and held on the holding rods 62B1. In the present embodiment, the pair of holding portions 62B are provided on the upper and lower sides, and the robot 62 is configured to be vertically arranged to hold the two lights to the object W. In this case, the robot 62 is held in the lower holding portion 62B by the light before the irradiation, and the light after the irradiation is held in the upper holding portion 62B, thereby reducing the irradiation. The light is aligned with the movement of the object W. Thereby, the angle of the light-aligning object W that has been adjusted by the rotation unit 50 can be more accurately maintained, and the optical alignment accuracy can be improved. Specifically, the robot 62 is configured to include two robot arms 62A arranged vertically, and each of the robot arms 62A is supported by a support body 62C that extends upward and downward, and is provided to each of the robot arms 62A. Rod 62B1. Further, a pair of holding portions 62B may be provided side by side horizontally. In this case, the robot 62 is configured to hold the two light-aligning objects W on the side of the mounting (the mounting position PL1 to be described later) and to collect (the recovery position PU1 to be described later). On the side, the light-aligning object W before irradiation is held on the mounting side, and the light-aligned light is supplied to the object W on the recovery side. Further, for the other end E2 side of the light irradiator 5, the robot 62 is configured to be capable of aligning two lights to the object W On the side of the mounting (the mounting position PL2 to be described later) and the side of the collection (the storage position PU2 to be described later), the light distribution target W is held on the mounting side, and the light after the irradiation is held in the collection object W. side. Thereby, the movement of the light-aligning object W before irradiation can be reduced, and the angle of the light-aligning object W that has been adjusted by the rotation unit 50 can be more accurately maintained, and as a result, the optical alignment accuracy can be improved. As an example, a variety of mechanisms can be used for the shuttle drive mechanism 63. This embodiment is configured by a linear motor actuator. Specifically, the shuttle drive mechanism 63 is configured to include a magnet disk (not shown) provided on the flat plate 61, a linear track 63A, a linear motor (not shown) provided in the robot 62, and a linear track 63B. . Further, the linear track 63A is not limited to a linear track, and various tracks can be used. The robot 62 moves under the control of the control device 70, moves the robot arm 62A in the linear motion direction X, and transfers the light alignment object W between it and the pair of workpiece stages and the rotation unit 50.

The workpiece stage 2 of the optical alignment device 1 is provided with a plurality of drive pins (not shown) for transferring the light-aligning object W to and from the downstream robot apparatus 60. The drive pins are disposed at positions spaced apart between the plurality of holding levers 62B1 at intervals in which the light-aligning objects W are held, and are moved up and down by a pin driving mechanism (not shown). The drive pin protrudes from the upper surface of the workpiece stage 2, and the light-aligning object W is picked up from the downstream robot apparatus 60, and then accommodated in the workpiece stage 2, whereby the light-aligning object W is placed on the workpiece stage 2. Above the surface. Further, the drive pin is protruded from the upper surface of the workpiece stage 2, whereby the light distribution object W is separated from the workpiece stage 2, and is held by the downstream side robot apparatus 60. By the driving pins, the optical alignment object W can be transferred between the workpiece stage 2 and the downstream robot apparatus 60 while maintaining the angle of the light adjusted by the rotating unit 50 to the object W. Optical alignment device 1, loading/unloading device 20, upstream robot device 30, cleaner 40, and rotating unit 50, The downstream side robot apparatus 60 is disposed side by side in the longitudinal direction L of the bulb 8.

The control device 70 controls the entire control unit of the optical alignment system 100, and includes a storage unit 71 that stores a control program for controlling each portion of the linear motion mechanism 6 and an execution unit 72 that executes a control program. Furthermore, it is also possible to configure the control program to be readable by a computer, and the control device 70 can implement the control program by, for example, executing a personal computer. In addition, although the optical alignment system 100 includes the loading/unloading device 20 and the upstream robot device 30, the loading/unloading device 20 and the upstream robot device 30 and the optical alignment system 100 may be configured as different supply systems. In this case, the optical alignment system 100 and the control device of the supply system may be provided, or the optical alignment system 100 and the control device of the supply system may be separately provided, and the respective control devices may operate in cooperation.

Next, the mounting position and the recovery position of the optical alignment object W with respect to the pair of workpiece stages 2 will be described. Here, for convenience of explanation, one workpiece stage 2 is referred to as a first workpiece stage 2A, and the other workpiece stage 2 is referred to as a second workpiece stage 2B. As shown in Fig. 1, the light-aligning object W is placed at the mounting position (work-mounting stage) PL1 of the first workpiece stage 2A and the collection position (work-receiving stage) PU1 of the optical workpiece W from the first workpiece stage 2A. It is set to one side E1 side of the light irradiator 5, and the positions are different. More specifically, the mounting position PL1 is set between the collection position PU1 and the light irradiator 5 and at a position near one end E1 of the light irradiator 5.

In the same manner, the position (the workpiece mounting table) PL2 at which the light-aligning object W is directed toward the second workpiece stage 2B, and the collection position (work-receiving table) PU2 from the second workpiece stage 2B of the light-aligning object W are set in the light. The other end of the illuminator 5 is on the E2 side, and the positions are different. More specifically, the mounting position PL2 is set between the collection position PU2 and the light irradiator 5 and at the position near the other end E2 of the light irradiator 5. again In FIG. 1, the workpiece stage 2 on which the positions PL1 and PL2 are mounted is indicated by a solid line, and the workpiece stage 2 of the collection positions PU1 and PU2 is indicated by a two-dot chain line. In addition, in FIGS. 5-13, the mounting positions PL1 and PL2 and the collection positions PU1 and PU2 are indicated by the symbols in the center of these.

A space S1 is provided between the first workpiece stage 2A located at the mounting position PL1 and the irradiation region R, and the length of the space S1 is less than the length of the light-aligning object W on the second workpiece stage 2B passing through the irradiation region R. Similarly, a space S1 is provided between the second workpiece stage 2B located at the mounting position PL2 and the irradiation region R, and the length of the space S1 is less than the passage of the light-aligning object W on the first workpiece stage 2A through the irradiation region R. area. Further, a space S2 is provided between the first workpiece stage 2A located at the collection position PU1 and the irradiation region R, and the length of the space S2 is equal to or longer than the length of the irradiation target region W on the second workpiece stage 2B. Similarly, a space S2 is provided between the second workpiece stage 2B located at the collection position PU2 and the irradiation region R, and the length of the space S2 is longer than the length of the irradiation target region W on the first workpiece stage 2A. .

The cleaner 40 is disposed on the one end E1 side, and the rotation unit 50 is disposed on the other end E2 side so that the center of the light distribution object W on the adjustment table 51 coincides with the center of the mounting position PL2. The positions of the cleaner 40 and the rotating unit 50 may be interchanged. In this case, the rotating unit 50 may be arranged such that the center of the light-aligning object W on the adjusting table 51 coincides with the center of the mounting position PL1. The downstream robot apparatus 60 is configured to move the robot 62 from a position corresponding to the collection position PU1 of the first workpiece stage 2A (a position substantially the same in the linear motion direction X) to a recovery position PU2 of the second workpiece stage 2B. The length of the corresponding position.

Next, referring to FIG. 1 , FIG. 5 to FIG. 13 , the optical alignment system 100 The action is explained. In addition, in FIGS. 5-13, illustration of the loading/unloading apparatus 20 and the upstream side robot apparatus 30 is abbreviate|omitted. In the initial state, as shown in FIGS. 1 and 5, the first workpiece stage 2A and the second workpiece stage 2B are located at the mounting positions PL1 and PL2, respectively, and the robot 62 is located at a position corresponding to the mounting position PL2. Tube 8 is lit. In the following description, the operation of the drive pin at the time of picking up the optical alignment object W with respect to the first workpiece stage 2A and the second workpiece stage 2B and the placement of the light distribution target object W on the first workpiece are omitted. The operation of the rotation drive mechanism when the table 2A and the second workpiece stage 2B are used. Further, the light distribution target objects W are sequentially referred to as light alignment objects WA, WB, WC, WD, WE, and WF in the order in which the light alignment is performed. Further, in Fig. 5, the symbol D1 indicates the center movement range of the first workpiece stage 2A, and the symbol D2 indicates the center movement range of the second workpiece stage 2B.

First, the robot 32 picks up the light-aligning object WA from the loading/unloading device 20, and removes foreign matter and static electricity of the light-aligning object WA by the cleaner 40, and then mounts the light-aligning object WA on the adjusting table of the rotating unit 50. 51 on. At this time, the robot 32 moves between the cleaner 40 and the moving rotary unit 50. After the rotation unit 50 causes the light distribution target object WA to be in the normal posture, the robot 62 picks up the light distribution target object WA from the rotation unit 50, moves to the position corresponding to the mounting position PL1, and mounts the light distribution target object WA on the mounting position. On the first workpiece stage 2A of PL1.

On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotating unit 50, the robot 32 is attached to the next optical alignment object WB from the loading/unloading device 20, and is removed by the cleaner 40. After the light is directed to the foreign matter of the object WB and the static electricity, the light-aligning object WB is placed on the adjustment table 51 of the rotating unit 50. In addition, the robot 62 is mounted on the first workpiece stage 2A after the light distribution target object WA is moved to the position corresponding to the mounting position PL2, and the self-rotating unit 50 The next light alignment target object WB is picked up, and the light distribution target object WB is mounted on the second workpiece stage 2B at the mounting position PL2.

As shown in FIG. 6, the linear motion mechanism 6 moves the first workpiece stage 2A to the other end E2 side, and irradiates the polarized light to the light-aligning object WA. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A at a high speed until the light-aligning object WA enters the irradiation region R, and causes the first workpiece stage 2A to enter the irradiation region R as soon as the light-aligning object WA enters the irradiation region R. Move at low speed. Further, during the outward movement of the first workpiece stage 2A, the linear motion mechanism 6 retracts the second workpiece stage 2B to the recovery position PU2 at a high speed. By retracting the second workpiece stage 2B to the collection position PU2, even if the first workpiece stage 2A is moved to pass the light-aligning object WA through the irradiation region R, the light-aligning object WA can be prevented from interfering with the light-aligning object. W. Therefore, the optical alignment can be performed across the entire surface of the light-aligning object WA on the first workpiece stage 2A. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotation unit 50, the robot 32 picks up the next light alignment object WC from the loading/unloading device 20, and removes the light by the cleaner 40. After the foreign matter and the static electricity of the object WC are aligned, the light is distributed to the object WC and placed on the adjustment table 51 of the rotating unit 50. Further, after the robot 62 is mounted on the second workpiece stage 2B by the light distribution target object WB, the next optical alignment object WC is picked up from the rotation unit 50.

When the light-aligning object WA passes through the irradiation region R on the way out, as shown in FIG. 7, the linear motion mechanism 6 reverses and moves the first workpiece stage 2A to the one end E1 side, so that the polarized light can be made on the return path. It is irradiated to the light alignment object WA. Further, the linear motion mechanism 6 moves the second workpiece stage 2B to the one end E1 side following the movement of the first workpiece stage 2A on the return path, so that the polarized light can be irradiated onto the light alignment target object WB. At this time, the linear motion mechanism 6 is brought up to catch up with the first workpiece stage 2A (with the first workpiece) When the stage 2A is at a predetermined distance, the second workpiece stage 2B is moved at a high speed, and when the first workpiece stage 2A is caught, the second workpiece stage 2B is moved at a low speed. Further, the linear motion mechanism 6 moves the first workpiece stage 2A at a low speed until the light-aligning object WA completely passes through the irradiation region R, and the light-aligning object WA passes through the irradiation region R completely to the recovery position PU1. The first workpiece stage 2A is moved at a high speed. Thereby, the first workpiece stage 2A can be retracted to the collection position PU1 during the movement of the second workpiece stage 2B. Therefore, even if the second workpiece stage 2B is moved so that the light-aligning object WB completely passes through the irradiation region R, the light-aligning object WB can be prevented from interfering with the light-aligning object WA, and therefore, it can straddle the second workpiece stage 2B. The light is aligned to the entire surface of the object WB. The robot 62 is moved to a position corresponding to the collection position PU1, and the optical alignment object WA is recovered from the first workpiece stage 2A of the collection position PU1. At this time, the robot 62 holds the two light alignment objects WA and WC. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotation unit 50, the robot 32 picks up the next light alignment object WD from the loading/unloading device 20, and removes it by the cleaner 40. After the light is directed to the foreign object of the object WD and the static electricity, the light-aligning object WD is placed on the adjustment table 51 of the rotating unit 50.

When the light-aligning object WB passes through the irradiation region R in the outward direction, as shown in FIG. 8, the linear motion mechanism 6 reverses the second workpiece stage 2B and moves to the other end E2 side, and the polarization can also be made in the return path. Light is incident on the light alignment object WB. Further, the linear motion mechanism 6 moves the first workpiece stage 2A following the movement of the second workpiece stage 2B on the return stroke, and moves to the mounting position PL1. At this time, the linear motion mechanism 6 moves the second workpiece stage 2B to the light distribution region R completely at the low speed, and moves the first workpiece stage 2A to the mounting position PL1 at a high speed. The robot 62 moves to a position corresponding to the mounting position PL1 and aligns the light to the object The object WC is mounted on the first workpiece stage 2A at the mounting position PL1. At this time, the robot 62 holds the light alignment object WA. Further, the optical alignment object WD is in standby by the rotation unit 50. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotating unit 50, the robot 32 picks up the next light alignment object WE from the loading/unloading device 20, and removes the light by the cleaner 40. Foreign matter and static electricity of the object WE.

As shown in FIG. 9, the linear motion mechanism 6 moves the first workpiece stage 2A following the movement of the second workpiece stage 2B on the return stroke. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A at a high speed until the second workpiece stage 2B (a predetermined distance from the second workpiece stage 2B) is caught. Further, when the light-aligning object WB passes completely through the irradiation region R, the linear motion mechanism 6 moves the second workpiece stage 2B at a high speed. The robot 62 is moved to a position corresponding to the mounting position PL2, and the next optical alignment object WD is picked up from the rotation unit 50, and the optical alignment object WA is placed on the adjustment table 51 of the rotation unit 50. When the rotation unit 50 sets the light distribution target object WA to the normal posture, the robot 32 picks up the light distribution target object WA from the rotation unit 50, and returns the light distribution target object WA to the loading/unloading device 20. Further, the light-aligning object WE is placed in the cleaner 40 to stand by.

As shown in FIG. 10, the linear motion mechanism 6 further moves the first workpiece stage 2A so that the polarized light can be irradiated onto the light-aligning object WC. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A to the light-aligning object WC completely through the irradiation region R, and moves the second object stage when the light-aligning object WB completely passes through the irradiation region R. 2B moves to high speed up to the recovery position PU2. The robot 62 moves to a position corresponding to the collection position PU2, and recovers the light distribution target WB from the second workpiece stage 2B of the collection position PU2. At this time, the robot 62 keeps 2 lights. Targeting objects WB, WD. On the other hand, after the light-aligning object WA is taken out from the rotating unit 50, the robot 32 picks up the light-aligning object WE from the cleaner 40, and mounts the light-aligning object WE on the adjusting table 51 of the rotating unit 50. .

As shown in FIG. 11, the linear motion mechanism 6 moves the second workpiece stage 2B following the movement of the return path of the first workpiece stage 2A to the mounting position PL2. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A to the light-aligning object WC completely at the low speed by the irradiation region R. The robot 62 is moved to a position corresponding to the mounting position PL2, and the light distribution target WD is mounted on the second workpiece stage 2B at the mounting position PL2. At this time, the robot 62 holds the light alignment object WB. Further, the light-aligning object WE is placed on the rotating unit 50 to stand by. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotating unit 50, the robot 32 picks up the next light alignment object WF from the loading/unloading device 20, and removes the light by the cleaner 40. Foreign matter and static electricity of the object WF.

As shown in FIG. 12, the linear motion mechanism 6 moves the second workpiece stage 2B to follow the movement of the first workpiece stage 2A on the return path, and the polarized light can be irradiated onto the second workpiece stage 2B. . At this time, when the light-aligning object WC completely passes through the irradiation region R, the linear motion mechanism 6 moves the first workpiece stage 2A at a high speed. Further, the linear motion mechanism 6 moves at a high speed until the second workpiece stage 2B catches up with the first workpiece stage 2A. The robot 62 picks up the next optical alignment object WE from the rotation unit 50, and mounts the optical alignment object WB on the adjustment table 51 of the rotation unit 50. When the rotation unit 50 sets the light distribution target object WB to the normal posture, the robot 32 picks up the light distribution target object WB from the rotation unit 50, and returns the light distribution target object WB to the loading/unloading device 20. Further, the light-aligning object WF is in standby with the cleaner 40.

As shown in FIG. 13, the linear motion mechanism 6 moves the first workpiece stage 2A to the recovery position PU1 at a high speed when the first workpiece stage 2A moves on the return path. The linear motion mechanism 6 moves the second workpiece stage 2B to the light-aligning object WD completely through the irradiation region R at a low speed. The robot 62 is moved to a position corresponding to the collection position PU1, and the optical alignment object WC is recovered from the first workpiece stage 2A of the collection position PU1. At this time, the robot 62 holds two light alignment objects WC and WE. On the other hand, after the light-aligning object WB is taken out from the rotating unit 50, the robot 32 picks up the light-aligning object WF from the cleaner 40, and mounts the light-aligning object WF on the adjusting table 51 of the rotating unit 50. . The subsequent actions are repetitions of the actions starting from Figure 5.

As described above, according to the present embodiment, the optical alignment device 1 is configured such that the pair of recovery positions PU1 and PU2 are provided at both end portions, and the light irradiator 5 is provided at the central portion, and the PU1, PU2 and the light are collected at the recovery positions. A pair of mounting positions PL1 and PL2 are provided between the illuminators 5 and at positions near the ends E1 and E2 of the light illuminator 5. In this way, since the two workpiece stages 2 are provided, the movement of the other workpiece stage 2 can be shortened by following the movement of the workpiece stage 2, thereby shortening the processing time of the processing of the optical alignment object W (optical alignment irradiation). . Further, since the pair of mounting positions PL1 and PL2 are provided between the collection positions PU1 and PU2 and the light irradiator 5 and at the positions near the ends E1 and E2 of the light irradiator 5, the self-mounting positions PL1 and PL2 can be shortened to light irradiation. The distance between the devices 5. Thereby, the moving time of the light-aligning object W can be shortened, and as a result, the processing time of the processing of the light-aligning object W (optical alignment irradiation) can be shortened. Further, since the distance between the self-mounting positions PL1 and PL2 and the light irradiator 5 can be shortened, it is possible to suppress foreign matter from adhering to the light-aligning object W before the irradiation.

Further, according to the present embodiment, the light distribution target is provided The object W reciprocates in the order of the mounting position PL1 on the one end side, the irradiation area R of the light irradiator 5 in the center portion, and the collection position PU1 on the one end side, and the workpiece is placed on the other end side of the mounting position PL2 and the center portion. The linear motion mechanism 6 reciprocates in the order of the irradiation region R of the light irradiator 5 and the collection position PU2 on the other end side, and the linear motion mechanism 6 is configured to make another light when the light alignment object W passes through the irradiation region R. The object to be aligned W is retracted from the mounting positions PL1 and PL2. According to this configuration, even if one light-aligning object W moves completely through the irradiation region R, it is possible to prevent one light-aligning object W from interfering with another light-aligning object W, and thus it is possible to align the light-aligning object W. The entire surface is optically aligned.

Further, according to the present embodiment, the downstream robot device 60 is provided in the workpiece stage 2 in which the light-aligning object W is mounted on the mounting positions PL1 and PL2, and the downstream robot device 6 can hold two light-aligning objects W. . With this configuration, since the next light-aligning object W can be held in advance, when the light-aligning object W is recovered from the workpiece stage 2, the light-aligning object W can be immediately mounted on the workpiece stage 2. As a result, the processing time of the processing of the light-aligning object W (optical alignment irradiation) can be shortened.

Further, according to the present embodiment, the linear motion mechanism 6 is configured to change the moving speed of the light-aligning object W before and after the light-aligning object W passes through the irradiation region R. According to this configuration, even if the light-aligning object W is mounted on the mounting positions PL1 and PL2 at the positions near the ends E1 and E2 of the light irradiator 5, the one light-aligning object W can be caught by another light-aligning object. W. As a result, it is not necessary to wait for the mounting of the light-aligning object W, and the processing time of the processing of the light-aligning object W (optical alignment irradiation) can be shortened.

Further, according to the embodiment, it is configured to illuminate another pair of light alignments After the object W, the other light-aligning object W is retracted from the mounting positions PL1 and PL2. Thereby, since the movement of the light-aligning object W before irradiation can be reduced as compared with the case of retreating before irradiation, the angle of the light-aligning object W that has been adjusted by the rotation unit 50 can be more accurately maintained. As a result, the optical alignment accuracy can be improved. In the present embodiment, only the light-aligning object WB placed on the second workpiece stage 2B is retracted before the irradiation, but the light-aligning object WB may not be retracted before the irradiation. In this case, when the first workpiece stage 2A moves in the outward movement, the light-aligning object WB is not placed on the second workpiece stage 2B, and during the movement of the first workpiece stage 2A on the way out, The second workpiece stage 2B is evacuated to the recovery position PU2 at a high speed. Then, the second workpiece stage 2B moves to the mounting position PL1 following the movement of the first workpiece stage 2A on the return stroke, and the light distribution target object WB is mounted on the second workpiece stage 2B of the mounting position PL1. Thereby, the angle of the light-aligning object WB can be maintained with higher precision, and as a result, the light alignment accuracy can be improved.

<Second embodiment>

Next, a second embodiment will be described. Fig. 14 is a plan view schematically showing an optical alignment system including the optical alignment device of the second embodiment. In the optical alignment system 100 according to the first embodiment, the mounting positions PL1 and PL2 are set between the collection positions PU1 and PU2 and the light irradiator 5. However, in the optical alignment system 200 according to the second embodiment, As shown in FIG. 14, the collection positions PU1 and PU2 and the mounting positions PL1 and PL2 are set to the same position. In other words, the workpiece mounting table (mounting positions PL1, PL2) also serves as a workpiece collecting table (recovering positions PU1, PU2). More specifically, a space S1 is provided between the first workpiece stage 2A located at the mounting position PL1 (recovering position PU1) and the irradiation area R, and the length of the space S1 is less than the optical alignment object on the second workpiece stage 2B. W passes through the length of the irradiation region R. Similarly, in the loading position A space S1 is provided between the second workpiece stage 2B of the PL2 (recovery position PU2) and the irradiation region R, and the length of the space S1 is less than the length of the light-aligning object W on the first workpiece stage 2A passing through the irradiation region R.

The robot apparatus 260 is configured to move the robot 62 from a position corresponding to the mounting position PL1 (recovering position PU1) of the first workpiece stage 2A (a position substantially the same in the linear motion direction X) to the second workpiece stage 2B. The length of the position corresponding to the position PL2 (recovery position PU2) is mounted. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted, except that the positions of the positions PU1 and PU2 and the linear motion direction X of the robot apparatus 260 are substantially the same. . Further, the robot 62 of the robot apparatus 260 is configured to hold the two light alignment objects W side by side.

Next, the operation of the optical alignment system 200 will be described with reference to Figs. 14 to 21 . In addition, in FIGS. 15-21, illustration of the loading/unloading apparatus 20 and the upstream side robot apparatus 30 is abbreviate|omitted. In the initial state, as shown in FIGS. 14 and 15 , the first workpiece stage 2A and the second workpiece stage 2B are located at the mounting positions PL1 and PL2, respectively, and the robot 62 is located at a position corresponding to the mounting position PL2, and the tube 8 is provided. Was lighted. In the following description, the operation of the drive pin at the time of picking up the optical workpiece W with respect to the first workpiece stage 2A and the second workpiece stage 2B is omitted, and the light distribution target W is placed in the first position. The operation of the rotation drive mechanism is performed between the workpiece stage 2A and the second workpiece stage 2B. Further, the light distribution target object W is referred to as a light alignment target object WA, WB, WC, WD, WE, WF in the order in which the light alignment is performed. Further, in Fig. 15, the symbol D1 indicates the center movement range of the first workpiece stage 2A, and the symbol D2 indicates the center movement range of the second workpiece stage 2B.

First, the robot 32 picks up the optical alignment pair from the loading/unloading device 20 After the foreign matter and the static electricity of the light-aligning object WA are removed by the cleaner 40, the light-aligning object WA is placed on the adjustment table 51 of the rotary unit 50. At this time, the robot 32 moves between the cleaner 40 and the moving rotary unit 50. After the rotation unit 50 causes the light distribution target object WA to be in the normal posture, the robot 62 picks up the light distribution target object WA from the rotation unit 50, moves to the position corresponding to the mounting position PL1, and mounts the light distribution target object WA on the surface. The first workpiece stage 2A of the position PL1 is placed.

On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotary unit 50, the robot 32 picks up the next light alignment object WB from the loading/unloading device 20, and removes the light by the cleaner 40. After the foreign matter and the static electricity of the object WB are aligned, the optical alignment object WB is placed on the adjustment table 51 of the rotating unit 50. In addition, the robot 62 is mounted on the first workpiece stage 2A after the light distribution target object WA is moved to the position corresponding to the mounting position PL2, and the next optical alignment object WB is picked up from the rotation unit 50, and the light is aligned. The object WB is mounted on the second workpiece stage 2B at the mounting position PL2.

As shown in FIG. 16, the linear motion mechanism 6 moves the first workpiece stage 2A to the other end E2 side, and the polarized light can be irradiated to the light alignment object WA. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A to the light-aligning object WA into the irradiation region R, and moves at a high speed. When the light-aligning object WA enters the irradiation region R, the first workpiece stage 2A is caused by the first workpiece stage 2A. Move at low speed. Further, during the movement of the first workpiece stage 2A in the outward movement, the linear motion mechanism 6 retracts the second workpiece stage 2B from the mounting position PL2 to the retracted position PT2 at a high speed. A space S2 is provided between the second workpiece stage 2B located at the retracted position PT2 and the irradiation region R, and the length of the space S2 is equal to or longer than the length of the irradiation target region R of the optical alignment object WA on the first workpiece stage 2A. As described above, even if the second workpiece stage 2B is retracted to the retracted position PT2, the first When the workpiece stage 2A is moved so that the light-aligning object WA completely passes through the irradiation region R, the light-aligning object WA can be prevented from interfering with the light-aligning object WB. Therefore, the optical alignment can be performed across the entire surface of the light-aligning object WA on the first workpiece stage 2A. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotation unit 50, the robot 32 picks up the next light alignment object WC from the loading/unloading device 20, and removes the light by the cleaner 40. After the foreign matter and the static electricity of the object WC are aligned, the light distribution target WC is placed on the adjustment table 51 of the rotary unit 50.

When the light-aligning object WA completely passes through the irradiation region R on the way out, as shown in FIG. 17, the linear motion mechanism 6 reverses and moves the first workpiece stage 2A to the one end E1 side, and can also be made on the return path. The polarized light is incident on the light alignment object WA. In addition, the linear motion mechanism 6 moves the second workpiece stage 2B to the one end E1 side following the movement of the first workpiece stage 2A on the return stroke, and irradiates the polarized light to the optical alignment object WB. At this time, the linear motion mechanism 6 moves the second workpiece stage 2B up to the first workpiece stage 2A (a predetermined distance from the first workpiece stage 2A), and catches up with the first workpiece stage 2A. The second workpiece stage 2B moves at a low speed. Further, the linear motion mechanism 6 moves the first workpiece stage 2A to the light-aligning object WA completely at a low speed through the irradiation region R, and when the light-aligning object WA completely passes through the irradiation region R, the first workpiece stage 2A is caused by the first workpiece stage 2A. Move to the retracted position PT1 at high speed. A space S2 is provided between the first workpiece stage 2A located at the retracted position PT1 and the irradiation region R, and the length of the space S2 is equal to or longer than the length of the irradiation target region WB on the second workpiece stage 2B. Thereby, the first workpiece stage 2A can be retracted to the retracted position PT1 during the movement of the second workpiece stage 2B. Therefore, even if the second workpiece stage 2B is moved so that the light-aligning object WB completely passes through the irradiation region R, the light-aligning object WB can be prevented from interfering with the light-aligning object WA, and can be traversed on the second workpiece stage 2B. The light distribution is optically aligned to the entire surface of the object WB. On the other hand, after the robot 62 is mounted on the second workpiece stage 2B with the light distribution target WB, the next optical alignment object WC is picked up from the rotation unit 50. Then, the robot 62 is moved to a position corresponding to the mounting position PL1. Further, after the robot 32 is placed on the adjustment table 51 of the rotation unit 50, the robot 32 picks up the next light alignment object WD from the loading/unloading device 20, and removes the light alignment object by the cleaner 40. After the foreign matter of the object WD and the static electricity, the light-aligning object WC is placed on the adjustment table 51 of the rotating unit 50.

When the light-aligning object WB completely passes through the irradiation region R on the way out, as shown in FIG. 18, the linear motion mechanism 6 reverses the second workpiece stage 2B and moves to the other end E2 side, and can also be made on the return path. The polarized light is incident on the light alignment object WB. Further, the linear motion mechanism 6 moves the first workpiece stage 2A to the mounting position PL1 following the movement of the second workpiece stage 2B on the return stroke. At this time, the linear motion mechanism 6 moves the second workpiece stage 2B to the light-aligning object WB completely at the low speed, and moves the first workpiece stage 2A to the mounting position PL1 at a high speed. The robot 62 collects the light distribution target WA from the first workpiece stage 2A at the mounting position PL1, and mounts the light distribution target object WC on the first workpiece stage 2A at the mounting position PL1. At this time, the robot 62 holds the light alignment object WA. Further, the optical alignment object WD is in standby by the rotation unit 50. On the other hand, after the robot 32 is placed on the adjustment table 51 of the rotating unit 50, the robot 32 picks up the next light alignment object WE from the loading/unloading device 20, and removes the light by the cleaner 40. Foreign matter and static electricity of the object WE.

As shown in FIG. 19, the linear motion mechanism 6 moves the first workpiece stage 2A following the movement of the second workpiece stage 2B on the return path, and the object can be aligned with the light. The WC illuminates the polarized light. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A up to the second workpiece stage 2B (the predetermined distance from the second workpiece stage 2B), and moves the first workpiece stage 2A to the light alignment target. The object WC moves at a low speed completely through the irradiation region R. Further, when the light-aligning object WB completely passes through the irradiation region R, the linear motion mechanism 6 moves the second workpiece stage 2B to the retracted position PT2 at a high speed. The robot 62 is moved to a position corresponding to the mounting position PL2, and the next optical alignment object WD is picked up from the rotation unit 50, and the optical alignment object WA is placed on the adjustment table 51 of the rotation unit 50. After the rotation unit 50 sets the light distribution target object WA to the normal posture, the robot 32 picks up the light distribution target object WA from the rotation unit 50, and returns the light distribution target object WA to the loading/unloading device 20. Further, the light-aligning object WE is placed in the cleaner 40 to stand by.

As shown in FIG. 20, the linear motion mechanism 6 moves the second workpiece stage 2B to the mounting position PL2 following the movement of the first workpiece stage 2A on the return stroke. At this time, the linear motion mechanism 6 moves the first workpiece stage 2A to the light distribution target object WC at a low speed completely through the irradiation region R, and moves the second workpiece stage 2B to the mounting position PL2 at a high speed. The robot 62 collects the light-aligning object WB from the second workpiece stage 2B at the mounting position PL2, and mounts the light-aligning object WD on the second workpiece stage 2B at the mounting position PL2. At this time, the robot 62 holds the light alignment object WB. Further, the light-aligning object WE is placed on the rotating unit 50 to stand by. On the other hand, after the light-aligning object WA is taken out from the rotating unit 50, the robot 32 picks up the light-aligning object WE from the cleaner 40, and mounts the light-aligning object WE on the adjusting table 51 of the rotating unit 50. . Further, after the robot 32 is placed on the adjustment table 51 of the rotating unit 50, the robot 32 is attached to the next optical alignment object WF from the loading/unloading device 20, and the optical alignment object is removed by the cleaner 40. Foreign matter of WF and Static electricity.

As shown in FIG. 21, the linear motion mechanism 6 moves the second workpiece stage 2B following the movement of the first workpiece stage 2A on the return path, and can irradiate the light-aligning object WD on the second workpiece stage 2B with polarized light. At this time, the linear motion mechanism 6 moves at a high speed until the second workpiece stage 2B moves up to the first workpiece stage 2A, and moves the second workpiece stage 2B to the light-aligning object WD completely through the irradiation region R. Further, when the light-aligning object WC passes completely through the irradiation region R, the linear motion mechanism 6 moves the first workpiece stage 2A to the retracted position PT1 at a high speed. The robot 62 picks up the next light alignment object WE from the rotation unit 50, and mounts the light alignment object WB on the adjustment table 51 of the rotation unit 50. When the rotation unit 50 sets the light distribution target object WB to the normal posture, the robot 32 picks up the light distribution target object WB from the rotation unit 50, and returns the light distribution target object WB to the loading/unloading device 20. Further, the light-aligning object WF is in standby with the cleaner 40. The subsequent actions are repetitions of the actions starting from FIG.

As described above, according to the present embodiment, the optical alignment device 1 is configured such that the light irradiator 5 is provided at the center portion, and the pair of mounting positions PL1 and PL2 are provided at positions near the both ends E1 and E2 of the light irradiator 5, In addition, the optical alignment object W is reciprocated in the order of the mounting position PL1 on the one end side, the irradiation region R of the light irradiator 5 in the center portion, and the mounting position PL1 on the one end side, and the light is aligned to the object W. The linearly moving mechanism 6 is reciprocated in the order of the mounting position PL2 on the other end side, the irradiation area R of the light irradiator 5 in the center portion, and the mounting position PL2 on the other end side, and the linear motion mechanism 6 is used to align one light. When the object W passes through the irradiation region R, the other light alignment object W is retracted from the mounting positions PL1 and PL2. Thus, since two workpiece stages 2 are provided, they can be moved by following the movement of a workpiece stage 2. The other workpiece stage 2 is moved, and the processing time of the processing of the light-aligning object W (light alignment irradiation) is shortened.

Further, since the pair of mounting positions PL1 and PL2 are provided at positions near the both ends E1 and E2 of the light irradiator 5, the distance between the mounting positions PL1 and PL2 and the light irradiator 5 can be shortened, and the light alignment object can be shortened. W's moving time. As a result, the processing time of the processing of the light-aligning object W (optical alignment irradiation) can be shortened. Further, since the distance between the self-mounting positions PL1 and PL2 and the light irradiator 5 can be shortened, it is possible to suppress foreign matter from adhering to the light-aligning object W before the irradiation. Further, since a pair of recovery positions PU1 and PU2 are provided at positions near the both ends E1 and E2 of the light irradiator 5, the distance from the light irradiator 5 to the recovery positions PU1 and PU2 can be shortened, thereby shortening the light alignment object. W's moving time. As a result, the processing time of the processing of the light-aligning object W (optical alignment irradiation) can be shortened. Further, since the distance from the light irradiator 5 to the collection positions PU1 and PU2 can be shortened, it is possible to suppress foreign matter from adhering to the light-aligning object W after the irradiation. In addition, since the pair of mounting positions PL1 and PL2 and the pair of recovery positions PU1 and PU2 are provided at positions near the both ends E1 and E2 of the light irradiator 5, the moving distance of the robot 62 of the robot apparatus 260 can be shortened. Thereby, the dedicated space of the robot device 260 is reduced.

Further, the linear motion mechanism 6 is configured to evacuate the other light distribution target object W from the mounting positions PL1 and PL2 when the one light-aligning object W passes through the irradiation region R. According to this configuration, even if one light-aligning object W is moved to completely pass through the irradiation region R, it is possible to prevent one light-aligning object W from interfering with another light-aligning object W, and thus it is possible to straddle the light-aligning object. The entire surface of W is optically aligned.

Further, according to the present embodiment, after the other light-aligning object W is irradiated, the other light-aligning object W is retracted from the mounting positions PL1 and PL2. With this configuration, the movement of the light-aligning object W before the irradiation can be reduced as compared with the case of the retraction before the irradiation. Therefore, the angle of the light-aligning object W that has been adjusted by the rotation unit 50 can be more accurately maintained. As a result, the optical alignment accuracy can be improved. In the present embodiment, only the light-aligning object WB placed on the second workpiece stage 2B is retracted before the irradiation, but the light-aligning object WB may not be retracted before the irradiation. In this case, when the first workpiece stage 2A moves in the outward movement, the light-aligning object WB is not placed on the second workpiece stage 2B, and during the movement of the first workpiece stage 2A on the way out, The second workpiece stage 2B is evacuated to the recovery position PU2 at a high speed. Then, the second workpiece stage 2B moves to the mounting position PL1 following the movement of the first workpiece stage 2A on the return path, and the light distribution target object WB is mounted on the second workpiece stage 2B of the mounting position PL1. Thereby, the angle of the light-aligning object WB can be maintained with higher precision, and as a result, the light alignment accuracy can be improved.

In the present embodiment, the retracted positions PT1 and PT2 are disposed outside the linear motion direction X of the mounting positions PL1 and PL2, but the retracted positions PT1 and PT2 are located at positions that do not interfere with the mounting positions PL1 and PL2, that is, Limited to this. The retracted positions PT1 and PT2 may be provided, for example, above, below, or on the side of the mounting positions PL1 and PL2 (for example, on the side of the paper on FIG. 14).

However, the above-described embodiments are an aspect of the present invention, and may be appropriately changed as long as they do not depart from the gist of the present invention. For example, in the above-described embodiment, the workpiece stage 2 that supports the light-aligning object W is provided, but the supporting member that supports the light-aligning object W is not limited to the workpiece stage 2, and may be, for example, a supporting light-aligning object. A pin or the like on the surface or the side below the object W.

Further, in the above embodiment, the light alignment irradiation is performed on both the forward and the return paths, but the light alignment irradiation may be performed only in one of the forward or the return.

Further, in the above embodiment, the lamp tube 8 has been described as a light source. However, the present invention is not limited thereto, and the light source may be a light-emitting element such as an LED or an organic EL. In this case, the long axis (axis) L may be formed by arranging a plurality of light-emitting elements on a straight line. Further, the light emitted by the light source is not limited to ultraviolet rays.

Further, in the above-described embodiment, the polarizing plate unit 10 is constituted by a plurality of wire grid polarizing plates 16, but the number of the wire grid polarizing plates 16 may be one. Further, in the above embodiment, the wire grid polarizing plate 16 is used as the polarizing plate, but the polarizing plate may be, for example, a polarizing plate using a vapor deposition film.

Further, in the above-described embodiment, one downstream robot apparatus 60 and 260 is provided for each of the mounting positions PL1 and PL2, but the downstream robot devices 60 and 260 may be provided at the mounting positions PL1 and PL2, respectively.

1‧‧‧Light alignment device

2‧‧‧Workpiece table

2A‧‧‧1st workpiece stage

2B‧‧‧2nd workpiece stage

3‧‧‧Transport rack

4‧‧‧ illuminator setting

5‧‧‧Light illuminator

6‧‧‧Linear motion mechanism (round-trip mechanism)

8‧‧‧Light tube (light source)

18‧‧‧Measurement unit

20‧‧‧Moving and unloading devices

21‧‧‧ body

22‧‧‧ mounting table

30‧‧‧Upstream side robot

31‧‧‧flat board

32‧‧‧ Robot

32A‧‧ mechanical arm

32B‧‧‧ Keeping Department

32B1

33‧‧‧Reciprocating drive mechanism

40‧‧‧cleaner

41‧‧‧flat board

42‧‧‧ cleaning unit

43‧‧‧Mobile agencies

50‧‧‧Rotating unit (angle adjustment device)

51‧‧‧ adjustment station

60‧‧‧Downstream robot

61‧‧‧flat board

62‧‧‧ Robot

62A‧‧‧ Robotic arm

62B‧‧‧ Keeping Department

62B1‧‧‧Holding rod

63‧‧‧Reciprocating drive mechanism

70‧‧‧Control device (control department)

71‧‧‧Memory Department

72‧‧‧Executive Department

100‧‧‧Light Alignment System

E1‧‧‧ end

E2‧‧‧The other end

L‧‧‧ long axis

PL1‧‧‧ carrying position

PL2‧‧‧ carrying position

PU1‧‧‧Recycling location

PU2‧‧‧Recycling location

R‧‧‧illuminated area

S1‧‧‧ space

S2‧‧‧ space

W‧‧‧Light alignment object (workpiece)

WA‧‧‧Light alignment object (workpiece)

WB‧‧‧Light alignment object (workpiece)

WC‧‧‧Light alignment object (workpiece)

WD‧‧‧Light alignment object (workpiece)

X‧‧‧Directional direction

Claims (10)

A light alignment device, characterized in that: two supporting members are provided, each supporting member respectively supports a workpiece, and one of the self-supporting members is collected and the recovery position is set at both ends, and a light illuminator is disposed at the central portion, and Between the collection position and the light illuminator and at a position near the both ends of the light illuminator, one of the support member-mounted workpieces is mounted on the mounting position, and is moved in accordance with the movement of the workpiece mounted on one of the mounting positions. Another workpiece with another position. The optical alignment device of claim 1, further comprising: a transport mechanism that sequentially performs a workpiece at a mounting position on one end side, an irradiation region in a central portion of the light irradiator, and a storage position on one end side The workpiece is reciprocated in the order of the mounting position on the other end side, the irradiation area of the light irradiator in the center portion, and the collection position on the other end side. The transport mechanism is used when the workpiece passes through the irradiation area. A workpiece is retracted from the mounting position. The optical alignment device according to claim 1 or 2, further comprising: a robot apparatus for mounting the workpiece on the mounting position, wherein the robot apparatus is configured to hold two workpieces. The optical alignment device of claim 2, wherein the transport mechanism is configured to change a moving speed of the workpiece before the workpiece passes through the irradiation region. The optical alignment device of claim 2, wherein the another workpiece is retracted from the mounting position after the other workpiece is irradiated. A light alignment device, characterized in that: two support members are provided, and each support member supports a workpiece, A light illuminator is provided at a central portion, and one of the support member-mounted workpieces is mounted at a position near the both ends of the light illuminator, and a transport mechanism is provided. The transport mechanism is a mounting position on the one end side of the workpiece. The irradiation area of the light irradiator in the center and the mounting position on the one end side are reciprocated, and the workpiece is mounted on the other end side, the irradiation area of the light irradiator in the center, and the other end side. The position of the position is reciprocated, and the transport mechanism moves another workpiece mounted on the other mounting position so as to follow the movement of the workpiece mounted on one of the mounting positions, and causes another workpiece when the workpiece passes through the irradiation region. Retreat from the mounting position. The optical alignment device of claim 6, further comprising: a robot apparatus for mounting the workpiece on the mounting position, wherein the robot apparatus is configured to hold two workpieces. The optical alignment device of claim 6, wherein the transport mechanism is configured to change a moving speed of the workpiece before the workpiece passes through the irradiation region. The optical alignment device according to any one of claims 6 to 8, wherein the another workpiece is retracted from the mounting position after the other workpiece is irradiated. The optical alignment device according to any one of claims 6 to 8, wherein the mounting position also serves as a recovery position for recovering the workpiece from the self-supporting member.