TWI569318B - Grinding apparatus and grinding method - Google Patents

Grinding apparatus and grinding method Download PDF

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Publication number
TWI569318B
TWI569318B TW102112471A TW102112471A TWI569318B TW I569318 B TWI569318 B TW I569318B TW 102112471 A TW102112471 A TW 102112471A TW 102112471 A TW102112471 A TW 102112471A TW I569318 B TWI569318 B TW I569318B
Authority
TW
Taiwan
Prior art keywords
polishing
specified
grinding
point
index value
Prior art date
Application number
TW102112471A
Other languages
English (en)
Chinese (zh)
Other versions
TW201347023A (zh
Inventor
廣尾康正
小林洋一
大野勝俊
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Publication of TW201347023A publication Critical patent/TW201347023A/zh
Application granted granted Critical
Publication of TWI569318B publication Critical patent/TWI569318B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • H10P52/00—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
TW102112471A 2012-04-10 2013-04-09 Grinding apparatus and grinding method TWI569318B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012089585A JP2013219248A (ja) 2012-04-10 2012-04-10 研磨装置および研磨方法

Publications (2)

Publication Number Publication Date
TW201347023A TW201347023A (zh) 2013-11-16
TWI569318B true TWI569318B (zh) 2017-02-01

Family

ID=49591010

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102112471A TWI569318B (zh) 2012-04-10 2013-04-09 Grinding apparatus and grinding method

Country Status (4)

Country Link
US (1) US9440327B2 (enExample)
JP (1) JP2013219248A (enExample)
KR (1) KR20130115142A (enExample)
TW (1) TWI569318B (enExample)

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JP6266493B2 (ja) * 2014-03-20 2018-01-24 株式会社荏原製作所 研磨装置及び研磨方法
JP6537992B2 (ja) * 2016-03-30 2019-07-03 東京エレクトロン株式会社 基板処理装置、基板処理装置の制御方法、及び基板処理システム
US10898986B2 (en) * 2017-09-15 2021-01-26 Applied Materials, Inc. Chattering correction for accurate sensor position determination on wafer
JP7098311B2 (ja) * 2017-12-05 2022-07-11 株式会社荏原製作所 研磨装置、及び研磨方法
KR102091419B1 (ko) * 2018-07-19 2020-03-20 주식회사 케이씨텍 광투과성 연마층을 갖는 기판 연마 시스템
CN109465739B (zh) * 2018-12-14 2021-07-13 大连理工大学 一种半导体晶片光电化学机械抛光加工装置
JP7316785B2 (ja) * 2018-12-26 2023-07-28 株式会社荏原製作所 光学式膜厚測定システムの洗浄方法
JP7374710B2 (ja) * 2019-10-25 2023-11-07 株式会社荏原製作所 研磨方法および研磨装置
JP7361637B2 (ja) * 2020-03-09 2023-10-16 株式会社荏原製作所 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体
WO2022015441A1 (en) * 2020-07-14 2022-01-20 Applied Materials, Inc. Methods of detecting non-conforming substrate processing events during chemical mechanical polishing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050142991A1 (en) * 2003-12-19 2005-06-30 Hidetaka Nakao Substrate polishing apparatus

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JP3321894B2 (ja) 1993-05-07 2002-09-09 日本電信電話株式会社 研磨終点検出装置
JP2778593B2 (ja) * 1996-05-31 1998-07-23 日本電気株式会社 研磨終点検出装置
US6623334B1 (en) * 1999-05-05 2003-09-23 Applied Materials, Inc. Chemical mechanical polishing with friction-based control
JP2001198813A (ja) 2000-01-13 2001-07-24 Toshiba Corp 研磨装置及びその研磨方法
US6257953B1 (en) * 2000-09-25 2001-07-10 Center For Tribology, Inc. Method and apparatus for controlled polishing
US6494765B2 (en) * 2000-09-25 2002-12-17 Center For Tribology, Inc. Method and apparatus for controlled polishing
WO2002096601A1 (en) * 2001-05-29 2002-12-05 Ebara Corporation Polishing apparatus and polishing method
US6602110B2 (en) * 2001-06-28 2003-08-05 3M Innovative Properties Company Automated polishing apparatus and method of polishing
US6579150B2 (en) * 2001-07-05 2003-06-17 Taiwan Semiconductor Manufacturing Co., Ltd Dual detection method for end point in chemical mechanical polishing
US7156717B2 (en) * 2001-09-20 2007-01-02 Molnar Charles J situ finishing aid control
US6741913B2 (en) * 2001-12-11 2004-05-25 International Business Machines Corporation Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system
JP4542324B2 (ja) 2002-10-17 2010-09-15 株式会社荏原製作所 研磨状態監視装置及びポリッシング装置
JP2004327561A (ja) * 2003-04-22 2004-11-18 Ebara Corp 基板処理方法及び基板処理装置
JP2005011977A (ja) 2003-06-18 2005-01-13 Ebara Corp 基板研磨装置および基板研磨方法
US7014530B2 (en) * 2003-09-29 2006-03-21 Hitachi Global Storage Technologies Netherlands B.V. Slider fabrication system for sliders with integrated electrical lapping guides
JP2005277396A (ja) * 2004-02-27 2005-10-06 Ebara Corp 基板処理方法および装置
JP5219395B2 (ja) * 2007-03-29 2013-06-26 株式会社東京精密 ウェハ研磨モニタ方法とその装置
JP2009129970A (ja) * 2007-11-20 2009-06-11 Ebara Corp 研磨装置及び研磨方法
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JP5728239B2 (ja) * 2010-03-02 2015-06-03 株式会社荏原製作所 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
US9579767B2 (en) * 2010-04-28 2017-02-28 Applied Materials, Inc. Automatic generation of reference spectra for optical monitoring of substrates
US8666665B2 (en) * 2010-06-07 2014-03-04 Applied Materials, Inc. Automatic initiation of reference spectra library generation for optical monitoring
JP2012004276A (ja) * 2010-06-16 2012-01-05 Ebara Corp 研磨方法および研磨装置

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Publication number Priority date Publication date Assignee Title
US20050142991A1 (en) * 2003-12-19 2005-06-30 Hidetaka Nakao Substrate polishing apparatus

Also Published As

Publication number Publication date
KR20130115142A (ko) 2013-10-21
JP2013219248A (ja) 2013-10-24
TW201347023A (zh) 2013-11-16
US20130344773A1 (en) 2013-12-26
US9440327B2 (en) 2016-09-13

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