JP2013219248A - 研磨装置および研磨方法 - Google Patents

研磨装置および研磨方法 Download PDF

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Publication number
JP2013219248A
JP2013219248A JP2012089585A JP2012089585A JP2013219248A JP 2013219248 A JP2013219248 A JP 2013219248A JP 2012089585 A JP2012089585 A JP 2012089585A JP 2012089585 A JP2012089585 A JP 2012089585A JP 2013219248 A JP2013219248 A JP 2013219248A
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JP
Japan
Prior art keywords
polishing
wafer
time
torque current
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012089585A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013219248A5 (enExample
Inventor
Yasumasa Hiroo
康正 廣尾
Yoichi Kobayashi
洋一 小林
Katsutoshi Ono
勝俊 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2012089585A priority Critical patent/JP2013219248A/ja
Priority to KR1020130038054A priority patent/KR20130115142A/ko
Priority to TW102112471A priority patent/TWI569318B/zh
Priority to US13/859,496 priority patent/US9440327B2/en
Publication of JP2013219248A publication Critical patent/JP2013219248A/ja
Publication of JP2013219248A5 publication Critical patent/JP2013219248A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • H10P52/00—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2012089585A 2012-04-10 2012-04-10 研磨装置および研磨方法 Pending JP2013219248A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012089585A JP2013219248A (ja) 2012-04-10 2012-04-10 研磨装置および研磨方法
KR1020130038054A KR20130115142A (ko) 2012-04-10 2013-04-08 연마 장치 및 연마 방법
TW102112471A TWI569318B (zh) 2012-04-10 2013-04-09 Grinding apparatus and grinding method
US13/859,496 US9440327B2 (en) 2012-04-10 2013-04-09 Polishing apparatus and polishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012089585A JP2013219248A (ja) 2012-04-10 2012-04-10 研磨装置および研磨方法

Publications (2)

Publication Number Publication Date
JP2013219248A true JP2013219248A (ja) 2013-10-24
JP2013219248A5 JP2013219248A5 (enExample) 2015-01-22

Family

ID=49591010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012089585A Pending JP2013219248A (ja) 2012-04-10 2012-04-10 研磨装置および研磨方法

Country Status (4)

Country Link
US (1) US9440327B2 (enExample)
JP (1) JP2013219248A (enExample)
KR (1) KR20130115142A (enExample)
TW (1) TWI569318B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112706002A (zh) * 2019-10-25 2021-04-27 株式会社荏原制作所 研磨方法及研磨装置
WO2021181944A1 (ja) * 2020-03-09 2021-09-16 株式会社荏原製作所 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6266493B2 (ja) * 2014-03-20 2018-01-24 株式会社荏原製作所 研磨装置及び研磨方法
JP6537992B2 (ja) * 2016-03-30 2019-07-03 東京エレクトロン株式会社 基板処理装置、基板処理装置の制御方法、及び基板処理システム
US10898986B2 (en) * 2017-09-15 2021-01-26 Applied Materials, Inc. Chattering correction for accurate sensor position determination on wafer
JP7098311B2 (ja) * 2017-12-05 2022-07-11 株式会社荏原製作所 研磨装置、及び研磨方法
KR102091419B1 (ko) * 2018-07-19 2020-03-20 주식회사 케이씨텍 광투과성 연마층을 갖는 기판 연마 시스템
CN109465739B (zh) * 2018-12-14 2021-07-13 大连理工大学 一种半导体晶片光电化学机械抛光加工装置
JP7316785B2 (ja) * 2018-12-26 2023-07-28 株式会社荏原製作所 光学式膜厚測定システムの洗浄方法
WO2022015441A1 (en) * 2020-07-14 2022-01-20 Applied Materials, Inc. Methods of detecting non-conforming substrate processing events during chemical mechanical polishing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1044035A (ja) * 1996-05-31 1998-02-17 Nec Corp 研磨終点検出装置
JP2004327561A (ja) * 2003-04-22 2004-11-18 Ebara Corp 基板処理方法及び基板処理装置
JP2005277396A (ja) * 2004-02-27 2005-10-06 Ebara Corp 基板処理方法および装置
JP2009196002A (ja) * 2008-02-19 2009-09-03 Ebara Corp 研磨終点検出方法および研磨装置
JP2011205070A (ja) * 2010-03-02 2011-10-13 Ebara Corp 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
JP2012004276A (ja) * 2010-06-16 2012-01-05 Ebara Corp 研磨方法および研磨装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3321894B2 (ja) 1993-05-07 2002-09-09 日本電信電話株式会社 研磨終点検出装置
US6623334B1 (en) * 1999-05-05 2003-09-23 Applied Materials, Inc. Chemical mechanical polishing with friction-based control
JP2001198813A (ja) 2000-01-13 2001-07-24 Toshiba Corp 研磨装置及びその研磨方法
US6257953B1 (en) * 2000-09-25 2001-07-10 Center For Tribology, Inc. Method and apparatus for controlled polishing
US6494765B2 (en) * 2000-09-25 2002-12-17 Center For Tribology, Inc. Method and apparatus for controlled polishing
WO2002096601A1 (en) * 2001-05-29 2002-12-05 Ebara Corporation Polishing apparatus and polishing method
US6602110B2 (en) * 2001-06-28 2003-08-05 3M Innovative Properties Company Automated polishing apparatus and method of polishing
US6579150B2 (en) * 2001-07-05 2003-06-17 Taiwan Semiconductor Manufacturing Co., Ltd Dual detection method for end point in chemical mechanical polishing
US7156717B2 (en) * 2001-09-20 2007-01-02 Molnar Charles J situ finishing aid control
US6741913B2 (en) * 2001-12-11 2004-05-25 International Business Machines Corporation Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system
JP4542324B2 (ja) 2002-10-17 2010-09-15 株式会社荏原製作所 研磨状態監視装置及びポリッシング装置
JP2005011977A (ja) 2003-06-18 2005-01-13 Ebara Corp 基板研磨装置および基板研磨方法
US7014530B2 (en) * 2003-09-29 2006-03-21 Hitachi Global Storage Technologies Netherlands B.V. Slider fabrication system for sliders with integrated electrical lapping guides
JP2005203729A (ja) * 2003-12-19 2005-07-28 Ebara Corp 基板研磨装置
JP5219395B2 (ja) * 2007-03-29 2013-06-26 株式会社東京精密 ウェハ研磨モニタ方法とその装置
JP2009129970A (ja) * 2007-11-20 2009-06-11 Ebara Corp 研磨装置及び研磨方法
US7960188B2 (en) 2008-05-15 2011-06-14 Ebara Corporation Polishing method
US8388408B2 (en) * 2008-10-10 2013-03-05 Ebara Corporation Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method
US9579767B2 (en) * 2010-04-28 2017-02-28 Applied Materials, Inc. Automatic generation of reference spectra for optical monitoring of substrates
US8666665B2 (en) * 2010-06-07 2014-03-04 Applied Materials, Inc. Automatic initiation of reference spectra library generation for optical monitoring

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1044035A (ja) * 1996-05-31 1998-02-17 Nec Corp 研磨終点検出装置
JP2004327561A (ja) * 2003-04-22 2004-11-18 Ebara Corp 基板処理方法及び基板処理装置
JP2005277396A (ja) * 2004-02-27 2005-10-06 Ebara Corp 基板処理方法および装置
JP2009196002A (ja) * 2008-02-19 2009-09-03 Ebara Corp 研磨終点検出方法および研磨装置
JP2011205070A (ja) * 2010-03-02 2011-10-13 Ebara Corp 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
JP2012004276A (ja) * 2010-06-16 2012-01-05 Ebara Corp 研磨方法および研磨装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112706002A (zh) * 2019-10-25 2021-04-27 株式会社荏原制作所 研磨方法及研磨装置
CN112706002B (zh) * 2019-10-25 2024-05-14 株式会社荏原制作所 研磨方法及研磨装置
WO2021181944A1 (ja) * 2020-03-09 2021-09-16 株式会社荏原製作所 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体
JP2021141282A (ja) * 2020-03-09 2021-09-16 株式会社荏原製作所 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体
CN115244656A (zh) * 2020-03-09 2022-10-25 株式会社荏原制作所 研磨方法、研磨装置及记录有程序的计算机可读取记录介质
KR20220148272A (ko) 2020-03-09 2022-11-04 가부시키가이샤 에바라 세이사꾸쇼 연마 방법, 연마 장치, 및 프로그램을 기록한 컴퓨터 판독 가능한 기록 매체
JP7361637B2 (ja) 2020-03-09 2023-10-16 株式会社荏原製作所 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体
KR102803156B1 (ko) 2020-03-09 2025-05-07 가부시키가이샤 에바라 세이사꾸쇼 연마 방법, 연마 장치, 및 프로그램을 기록한 컴퓨터 판독 가능한 기록 매체
TWI901646B (zh) * 2020-03-09 2025-10-21 日商荏原製作所股份有限公司 研磨方法、研磨裝置、及記錄有程式之電腦可讀取記錄媒體

Also Published As

Publication number Publication date
KR20130115142A (ko) 2013-10-21
TW201347023A (zh) 2013-11-16
TWI569318B (zh) 2017-02-01
US20130344773A1 (en) 2013-12-26
US9440327B2 (en) 2016-09-13

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