TWI568485B - Filter cleaning method, liquid treatment device and memory media - Google Patents

Filter cleaning method, liquid treatment device and memory media Download PDF

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Publication number
TWI568485B
TWI568485B TW103139780A TW103139780A TWI568485B TW I568485 B TWI568485 B TW I568485B TW 103139780 A TW103139780 A TW 103139780A TW 103139780 A TW103139780 A TW 103139780A TW I568485 B TWI568485 B TW I568485B
Authority
TW
Taiwan
Prior art keywords
liquid
filter
storage tank
circulation line
rinse liquid
Prior art date
Application number
TW103139780A
Other languages
English (en)
Chinese (zh)
Other versions
TW201534381A (zh
Inventor
溝田昌吾
藪田貴士
野中純
清瀬浩巳
西村英樹
烏野崇
中澤貴士
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW201534381A publication Critical patent/TW201534381A/zh
Application granted granted Critical
Publication of TWI568485B publication Critical patent/TWI568485B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
TW103139780A 2013-11-25 2014-11-17 Filter cleaning method, liquid treatment device and memory media TWI568485B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013243124A JP6159651B2 (ja) 2013-11-25 2013-11-25 フィルタ洗浄方法、液処理装置及び記憶媒体

Publications (2)

Publication Number Publication Date
TW201534381A TW201534381A (zh) 2015-09-16
TWI568485B true TWI568485B (zh) 2017-02-01

Family

ID=53379138

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103139780A TWI568485B (zh) 2013-11-25 2014-11-17 Filter cleaning method, liquid treatment device and memory media

Country Status (3)

Country Link
JP (1) JP6159651B2 (https=)
KR (1) KR102314052B1 (https=)
TW (1) TWI568485B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20260006700A (ko) 2020-02-05 2026-01-13 도쿄엘렉트론가부시키가이샤 필터 세정 시스템 및 필터 세정 방법
KR102583556B1 (ko) * 2021-01-07 2023-10-10 세메스 주식회사 처리액 공급 장치 및 처리액 공급 장치의 고형 제거 방법
JP7628450B2 (ja) * 2021-03-24 2025-02-10 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および配管着脱パーツ洗浄方法
KR102504552B1 (ko) 2021-09-10 2023-03-02 (주)디바이스이엔지 반도체 제조 부품의 플러싱 조건 결정 장치 및 플러싱 조건 결정 방법
JP7526237B2 (ja) 2022-09-15 2024-07-31 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および、フィルタの気泡除去方法
JP2025064258A (ja) * 2023-10-05 2025-04-17 株式会社Sumco フィルタ洗浄方法
JP7797741B1 (ja) * 2025-11-07 2026-01-13 台灣▲し▼科宏晟科技股分有限公司 化学液体供給システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1449299A (zh) * 2000-08-28 2003-10-15 亨克尔两合股份公司 分离多价金属离子用的方法
JP2006080547A (ja) * 1998-07-07 2006-03-23 Tokyo Electron Ltd 処理装置及び処理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04162627A (ja) * 1990-10-26 1992-06-08 Matsushita Electric Ind Co Ltd 薬液処理装置
JPH0516114U (ja) * 1991-08-14 1993-03-02 三菱重工業株式会社 潤滑油タンク及びラインフイルターのフラツシング回路
KR960025332U (ko) * 1994-12-26 1996-07-22 약액처리조용 여과필터
US5753135A (en) * 1995-10-23 1998-05-19 Jablonsky; Julius James Apparatus and method for recovering photoresist developers and strippers
JP2003251290A (ja) * 2002-03-05 2003-09-09 Dainippon Screen Mfg Co Ltd 洗浄装置及びこれを備えた基板処理装置
JP5503602B2 (ja) * 2011-07-29 2014-05-28 東京エレクトロン株式会社 処理液供給装置、処理液供給方法、プログラム及びコンピュータ記憶媒体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006080547A (ja) * 1998-07-07 2006-03-23 Tokyo Electron Ltd 処理装置及び処理方法
CN1449299A (zh) * 2000-08-28 2003-10-15 亨克尔两合股份公司 分离多价金属离子用的方法

Also Published As

Publication number Publication date
TW201534381A (zh) 2015-09-16
JP6159651B2 (ja) 2017-07-05
KR102314052B1 (ko) 2021-10-15
KR20150060547A (ko) 2015-06-03
JP2015103662A (ja) 2015-06-04

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