TWI563290B - Actuator, optical scanner, and image forming apparatus - Google Patents

Actuator, optical scanner, and image forming apparatus

Info

Publication number
TWI563290B
TWI563290B TW101109563A TW101109563A TWI563290B TW I563290 B TWI563290 B TW I563290B TW 101109563 A TW101109563 A TW 101109563A TW 101109563 A TW101109563 A TW 101109563A TW I563290 B TWI563290 B TW I563290B
Authority
TW
Taiwan
Prior art keywords
actuator
image forming
forming apparatus
optical scanner
scanner
Prior art date
Application number
TW101109563A
Other languages
English (en)
Other versions
TW201239393A (en
Inventor
Makiko Hino
Yasushi Mizoguchi
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW201239393A publication Critical patent/TW201239393A/zh
Application granted granted Critical
Publication of TWI563290B publication Critical patent/TWI563290B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Facsimile Scanning Arrangements (AREA)
TW101109563A 2011-03-24 2012-03-20 Actuator, optical scanner, and image forming apparatus TWI563290B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011066803A JP5842356B2 (ja) 2011-03-24 2011-03-24 アクチュエーター、光スキャナーおよび画像形成装置

Publications (2)

Publication Number Publication Date
TW201239393A TW201239393A (en) 2012-10-01
TWI563290B true TWI563290B (en) 2016-12-21

Family

ID=46877143

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101109563A TWI563290B (en) 2011-03-24 2012-03-20 Actuator, optical scanner, and image forming apparatus

Country Status (9)

Country Link
US (1) US9293975B2 (zh)
EP (1) EP2690764A4 (zh)
JP (1) JP5842356B2 (zh)
KR (2) KR20130136548A (zh)
CN (1) CN103430434B (zh)
BR (1) BR112013028358A2 (zh)
RU (1) RU2566738C2 (zh)
TW (1) TWI563290B (zh)
WO (1) WO2012127858A1 (zh)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210132368A1 (en) 2017-07-06 2021-05-06 Hamamatsu Photonics K.K. Optical device
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
US11635613B2 (en) 2017-07-06 2023-04-25 Hamamatsu Photonics K.K. Optical device
US11693230B2 (en) 2017-11-15 2023-07-04 Hamamatsu Photonics K.K. Optical device
US11733509B2 (en) 2017-07-06 2023-08-22 Hamamatsu Photonics K.K. Optical device
US12031863B2 (en) 2017-07-06 2024-07-09 Hamamatsu Photonics K.K. Optical device including movable mirror and first light passage

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5909862B2 (ja) * 2011-04-06 2016-04-27 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP6330321B2 (ja) * 2013-12-26 2018-05-30 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP6349851B2 (ja) * 2014-03-27 2018-07-04 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
JP6565459B2 (ja) * 2015-08-06 2019-08-28 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
TWI681188B (zh) * 2018-12-26 2020-01-01 財團法人工業技術研究院 致動器及其製法與音波發射器
CN111365621B (zh) * 2018-12-26 2022-01-11 财团法人工业技术研究院 致动器及其制法与音波发射器
US11931776B2 (en) 2018-12-26 2024-03-19 Industrial Technology Research Institute Actuator, method for manufacturing the actuator, and acoustic transmitter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101533153A (zh) * 2008-03-13 2009-09-16 精工爱普生株式会社 光偏转器及其制造方法
JP2009294458A (ja) * 2008-06-05 2009-12-17 Brother Ind Ltd 光スキャナ

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ES2056580T3 (es) * 1990-05-18 1994-10-01 British Aerospace Sensores inerciales.
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP3740444B2 (ja) * 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
JP3919616B2 (ja) * 2002-07-05 2007-05-30 キヤノン株式会社 マイクロ構造体及びその製造方法
JP4641378B2 (ja) 2004-02-16 2011-03-02 キヤノン株式会社 光走査装置及びそれを有する画像表示装置
RU41220U1 (ru) * 2004-05-28 2004-10-10 Константинов Станислав Вячеславович Сканер
WO2005119309A1 (ja) 2004-06-04 2005-12-15 Brother Kogyo Kabushiki Kaisha 反射ミラー製作方法および反射ミラー
JP4645067B2 (ja) * 2004-06-04 2011-03-09 ブラザー工業株式会社 反射ミラー製作方法
JP4193817B2 (ja) 2005-06-22 2008-12-10 セイコーエプソン株式会社 アクチュエータ
JP2009069675A (ja) * 2007-09-14 2009-04-02 Ricoh Co Ltd 光スキャナ、光走査装置、画像形成装置及び光スキャナの製造方法
JP5252872B2 (ja) 2007-09-28 2013-07-31 日本信号株式会社 プレーナ型電磁アクチュエータ
JP2009148847A (ja) 2007-12-19 2009-07-09 Canon Inc 異方性エッチングによる構造体の作製方法、及びエッチングマスク付きシリコン基板
JP2011170370A (ja) 2008-03-13 2011-09-01 Seiko Epson Corp 光偏向器及びその製造方法
JP2009217193A (ja) * 2008-03-13 2009-09-24 Seiko Epson Corp 光偏向器及びその製造方法
JP5655365B2 (ja) * 2009-08-04 2015-01-21 セイコーエプソン株式会社 光偏向器、光偏向器の製造方法および画像表示装置
JP2011107675A (ja) 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
JP2012220641A (ja) * 2011-04-06 2012-11-12 Seiko Epson Corp アクチュエーター、光スキャナーおよび画像形成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101533153A (zh) * 2008-03-13 2009-09-16 精工爱普生株式会社 光偏转器及其制造方法
JP2009294458A (ja) * 2008-06-05 2009-12-17 Brother Ind Ltd 光スキャナ

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210132368A1 (en) 2017-07-06 2021-05-06 Hamamatsu Photonics K.K. Optical device
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
TWI785068B (zh) * 2017-07-06 2022-12-01 日商濱松赫德尼古斯股份有限公司 光學裝置
US11635613B2 (en) 2017-07-06 2023-04-25 Hamamatsu Photonics K.K. Optical device
US11681121B2 (en) 2017-07-06 2023-06-20 Hamamatsu Photonics K.K. Optical device
US11733509B2 (en) 2017-07-06 2023-08-22 Hamamatsu Photonics K.K. Optical device
US11740452B2 (en) 2017-07-06 2023-08-29 Hamamatsu Photonics K.K. Optical device
US12031863B2 (en) 2017-07-06 2024-07-09 Hamamatsu Photonics K.K. Optical device including movable mirror and first light passage
US11693230B2 (en) 2017-11-15 2023-07-04 Hamamatsu Photonics K.K. Optical device
US11906727B2 (en) 2017-11-15 2024-02-20 Hamamatsu Photonics K.K. Optical device production method
US11953675B2 (en) 2017-11-15 2024-04-09 Hamamatsu Photonics K.K. Optical device production method

Also Published As

Publication number Publication date
CN103430434A (zh) 2013-12-04
WO2012127858A1 (ja) 2012-09-27
US20120243066A1 (en) 2012-09-27
CN103430434B (zh) 2016-08-10
JP2012203149A (ja) 2012-10-22
EP2690764A1 (en) 2014-01-29
TW201239393A (en) 2012-10-01
KR20150091423A (ko) 2015-08-10
US9293975B2 (en) 2016-03-22
KR20130136548A (ko) 2013-12-12
EP2690764A4 (en) 2016-03-02
JP5842356B2 (ja) 2016-01-13
RU2013147403A (ru) 2015-04-27
BR112013028358A2 (pt) 2017-01-24
RU2566738C2 (ru) 2015-10-27

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