TWI562873B - - Google Patents

Info

Publication number
TWI562873B
TWI562873B TW103120380A TW103120380A TWI562873B TW I562873 B TWI562873 B TW I562873B TW 103120380 A TW103120380 A TW 103120380A TW 103120380 A TW103120380 A TW 103120380A TW I562873 B TWI562873 B TW I562873B
Authority
TW
Taiwan
Application number
TW103120380A
Other languages
Chinese (zh)
Other versions
TW201515787A (zh
Inventor
Takayuki Yazawa
Hiroshi Arakawa
Masashi Fujiwara
Yosuke Takase
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW201515787A publication Critical patent/TW201515787A/zh
Application granted granted Critical
Publication of TWI562873B publication Critical patent/TWI562873B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
TW103120380A 2013-10-22 2014-06-12 產業用機器人 TW201515787A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013219102A JP6190692B2 (ja) 2013-10-22 2013-10-22 産業用ロボット

Publications (2)

Publication Number Publication Date
TW201515787A TW201515787A (zh) 2015-05-01
TWI562873B true TWI562873B (enrdf_load_stackoverflow) 2016-12-21

Family

ID=53011723

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103120380A TW201515787A (zh) 2013-10-22 2014-06-12 產業用機器人

Country Status (4)

Country Link
JP (1) JP6190692B2 (enrdf_load_stackoverflow)
KR (1) KR101642573B1 (enrdf_load_stackoverflow)
CN (1) CN104552301B (enrdf_load_stackoverflow)
TW (1) TW201515787A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6869136B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1483651A (zh) * 2002-09-18 2004-03-24 三星电子株式会社 板状物搬运机器人
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
US7665950B2 (en) * 2007-04-26 2010-02-23 Daihen Corporation Transfer apparatus
CN102163571A (zh) * 2010-02-04 2011-08-24 东京毅力科创株式会社 基板输送装置和基板输送方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04323115A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd ワーク搬送機構
JP3484067B2 (ja) * 1998-02-20 2004-01-06 平田機工株式会社 ロボット装置
JP2000298186A (ja) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd 位置決めステージ
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
JP4694436B2 (ja) * 2006-07-28 2011-06-08 株式会社ダイヘン 搬送ロボット
JP2008074550A (ja) * 2006-09-21 2008-04-03 Murata Mach Ltd スカラーアーム
JPWO2008120294A1 (ja) * 2007-03-02 2010-07-15 株式会社ダイヘン 搬送装置
WO2009072199A1 (ja) * 2007-12-05 2009-06-11 Hirata Corporation 基板搬送装置及び基板搬送装置の制御方法
KR101291811B1 (ko) * 2011-06-08 2013-07-31 주식회사 나온테크 하이브리드 진공 로봇 이송장치
JP2013184237A (ja) * 2012-03-06 2013-09-19 Sumitomo Heavy Ind Ltd 平面研削盤

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1483651A (zh) * 2002-09-18 2004-03-24 三星电子株式会社 板状物搬运机器人
JP2004106105A (ja) * 2002-09-18 2004-04-08 Seiko Instruments Inc 搬送ロボット
US7665950B2 (en) * 2007-04-26 2010-02-23 Daihen Corporation Transfer apparatus
CN102163571A (zh) * 2010-02-04 2011-08-24 东京毅力科创株式会社 基板输送装置和基板输送方法

Also Published As

Publication number Publication date
CN104552301B (zh) 2017-04-12
TW201515787A (zh) 2015-05-01
CN104552301A (zh) 2015-04-29
JP6190692B2 (ja) 2017-08-30
KR101642573B1 (ko) 2016-07-25
KR20150046715A (ko) 2015-04-30
JP2015080828A (ja) 2015-04-27

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