TWI562300B - A semiconductor die, a system, and a method for determining vertical spacing between a surface of a semiconductor die and a surface of the other semiconductor die - Google Patents

A semiconductor die, a system, and a method for determining vertical spacing between a surface of a semiconductor die and a surface of the other semiconductor die

Info

Publication number
TWI562300B
TWI562300B TW101136513A TW101136513A TWI562300B TW I562300 B TWI562300 B TW I562300B TW 101136513 A TW101136513 A TW 101136513A TW 101136513 A TW101136513 A TW 101136513A TW I562300 B TWI562300 B TW I562300B
Authority
TW
Taiwan
Prior art keywords
semiconductor die
vertical spacing
determining vertical
determining
die
Prior art date
Application number
TW101136513A
Other languages
English (en)
Chinese (zh)
Other versions
TW201334134A (zh
Inventor
Ivan E Sutherland
Original Assignee
Oracle Int Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oracle Int Corp filed Critical Oracle Int Corp
Publication of TW201334134A publication Critical patent/TW201334134A/zh
Application granted granted Critical
Publication of TWI562300B publication Critical patent/TWI562300B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07221—Aligning
    • H10W72/07223—Active alignment, e.g. using optical alignment using marks or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/20—Configurations of stacked chips
    • H10W90/293—Configurations of stacked chips characterised by non-galvanic coupling between the chips, e.g. capacitive coupling
TW101136513A 2011-10-05 2012-10-03 A semiconductor die, a system, and a method for determining vertical spacing between a surface of a semiconductor die and a surface of the other semiconductor die TWI562300B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/253,893 US9076663B2 (en) 2011-10-05 2011-10-05 Determining spacing using a spatially varying charge distribution

Publications (2)

Publication Number Publication Date
TW201334134A TW201334134A (zh) 2013-08-16
TWI562300B true TWI562300B (en) 2016-12-11

Family

ID=47143279

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101136513A TWI562300B (en) 2011-10-05 2012-10-03 A semiconductor die, a system, and a method for determining vertical spacing between a surface of a semiconductor die and a surface of the other semiconductor die

Country Status (6)

Country Link
US (1) US9076663B2 (https=)
EP (1) EP2764539B1 (https=)
JP (1) JP6218735B2 (https=)
CN (1) CN103918075B (https=)
TW (1) TWI562300B (https=)
WO (1) WO2013052502A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9076663B2 (en) * 2011-10-05 2015-07-07 Oracle International Corporation Determining spacing using a spatially varying charge distribution
US8918752B2 (en) * 2011-12-14 2014-12-23 Oracle International Corporation Determining alignment using a spatially varying charge distribution

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW341662B (en) * 1992-01-03 1998-10-01 Siemens Ag Passive surface-wave-sensor that can be wirelessly inquired
US20080061801A1 (en) * 2006-08-23 2008-03-13 Alex Chow Measuring chip-to-chip capacitance differentials by demodulating signals over a capacitance bridge
US20080136424A1 (en) * 2006-12-06 2008-06-12 Alex Chow Determining chip separation by comparing coupling capacitances

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2777632B2 (ja) * 1989-12-29 1998-07-23 株式会社日立製作所 記録方法及び記録装置
JP3052594B2 (ja) * 1992-08-24 2000-06-12 株式会社村田製作所 静電センサの感度調整方法および静電センサ
US6728113B1 (en) * 1993-06-24 2004-04-27 Polychip, Inc. Method and apparatus for non-conductively interconnecting integrated circuits
US6812046B2 (en) * 2002-07-29 2004-11-02 Sun Microsystems Inc. Method and apparatus for electronically aligning capacitively coupled chip pads
US6710436B1 (en) * 2002-12-12 2004-03-23 Sun Microsystems, Inc. Method and apparatus for electrostatically aligning integrated circuits
US7786427B2 (en) * 2008-05-06 2010-08-31 Oracle America, Inc. Proximity optical memory module having an electrical-to-optical and optical-to-electrical converter
US9182782B2 (en) * 2011-09-22 2015-11-10 Oracle International Corporation Synchronizing timing of communication between integrated circuits
US9076663B2 (en) * 2011-10-05 2015-07-07 Oracle International Corporation Determining spacing using a spatially varying charge distribution
US8918752B2 (en) * 2011-12-14 2014-12-23 Oracle International Corporation Determining alignment using a spatially varying charge distribution

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW341662B (en) * 1992-01-03 1998-10-01 Siemens Ag Passive surface-wave-sensor that can be wirelessly inquired
US20080061801A1 (en) * 2006-08-23 2008-03-13 Alex Chow Measuring chip-to-chip capacitance differentials by demodulating signals over a capacitance bridge
US20080136424A1 (en) * 2006-12-06 2008-06-12 Alex Chow Determining chip separation by comparing coupling capacitances

Also Published As

Publication number Publication date
US20130088212A1 (en) 2013-04-11
JP2014530365A (ja) 2014-11-17
TW201334134A (zh) 2013-08-16
US9076663B2 (en) 2015-07-07
EP2764539A1 (en) 2014-08-13
JP6218735B2 (ja) 2017-10-25
WO2013052502A1 (en) 2013-04-11
CN103918075A (zh) 2014-07-09
CN103918075B (zh) 2017-02-15
EP2764539B1 (en) 2018-02-28

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TWI562300B (en) A semiconductor die, a system, and a method for determining vertical spacing between a surface of a semiconductor die and a surface of the other semiconductor die