TWI551026B - 介電質阻障放電電源系統及產生介電質阻障放電的方法 - Google Patents
介電質阻障放電電源系統及產生介電質阻障放電的方法 Download PDFInfo
- Publication number
- TWI551026B TWI551026B TW102108925A TW102108925A TWI551026B TW I551026 B TWI551026 B TW I551026B TW 102108925 A TW102108925 A TW 102108925A TW 102108925 A TW102108925 A TW 102108925A TW I551026 B TWI551026 B TW I551026B
- Authority
- TW
- Taiwan
- Prior art keywords
- signal
- current
- dielectric barrier
- barrier discharge
- power supply
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 title claims description 43
- 238000000034 method Methods 0.000 title claims description 22
- 230000010363 phase shift Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims 10
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 34
- 230000007246 mechanism Effects 0.000 description 33
- 238000010586 diagram Methods 0.000 description 22
- 239000003990 capacitor Substances 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004088 simulation Methods 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 230000003321 amplification Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 201000005569 Gout Diseases 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000032677 cell aging Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
- Y02B20/30—Semiconductor lamps, e.g. solid state lamps [SSL] light emitting diodes [LED] or organic LED [OLED]
Landscapes
- Inverter Devices (AREA)
- Dc-Dc Converters (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/431,521 US8680777B2 (en) | 2012-03-27 | 2012-03-27 | Versatile zero-voltage switch resonant inverter for industrial dielectric barrier discharge generator applications |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201340578A TW201340578A (zh) | 2013-10-01 |
| TWI551026B true TWI551026B (zh) | 2016-09-21 |
Family
ID=49233996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102108925A TWI551026B (zh) | 2012-03-27 | 2013-03-13 | 介電質阻障放電電源系統及產生介電質阻障放電的方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8680777B2 (enExample) |
| EP (1) | EP2834911B1 (enExample) |
| JP (1) | JP5923658B2 (enExample) |
| KR (1) | KR101665220B1 (enExample) |
| CN (1) | CN104205604B (enExample) |
| SG (1) | SG11201404303PA (enExample) |
| TW (1) | TWI551026B (enExample) |
| WO (1) | WO2013148390A1 (enExample) |
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| US20140008211A1 (en) * | 2012-07-06 | 2014-01-09 | Pacific Ozone Technology, Inc. | Ozone cell power supply apparatus and method |
| US9363862B1 (en) * | 2012-12-05 | 2016-06-07 | Universal Lighting Technologies | Automatic current and reference gain control for wide range current control |
| US9263960B2 (en) * | 2013-09-16 | 2016-02-16 | Delta Electronics, Inc. | Power converters for wide input or output voltage range and control methods thereof |
| US10455729B2 (en) | 2014-01-10 | 2019-10-22 | Reno Technologies, Inc. | Enclosure cooling system |
| US9844127B2 (en) | 2014-01-10 | 2017-12-12 | Reno Technologies, Inc. | High voltage switching circuit |
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| US10431428B2 (en) | 2014-01-10 | 2019-10-01 | Reno Technologies, Inc. | System for providing variable capacitance |
| US9755641B1 (en) | 2014-01-10 | 2017-09-05 | Reno Technologies, Inc. | High speed high voltage switching circuit |
| US9865432B1 (en) | 2014-01-10 | 2018-01-09 | Reno Technologies, Inc. | RF impedance matching network |
| US9196459B2 (en) | 2014-01-10 | 2015-11-24 | Reno Technologies, Inc. | RF impedance matching network |
| US9697991B2 (en) | 2014-01-10 | 2017-07-04 | Reno Technologies, Inc. | RF impedance matching network |
| US10958104B2 (en) * | 2014-10-08 | 2021-03-23 | Apple Inc. | Inverter for inductive power transmitter |
| US9525412B2 (en) | 2015-02-18 | 2016-12-20 | Reno Technologies, Inc. | Switching circuit |
| US9729122B2 (en) | 2015-02-18 | 2017-08-08 | Reno Technologies, Inc. | Switching circuit |
| US10340879B2 (en) | 2015-02-18 | 2019-07-02 | Reno Technologies, Inc. | Switching circuit |
| US11017983B2 (en) | 2015-02-18 | 2021-05-25 | Reno Technologies, Inc. | RF power amplifier |
| US9306533B1 (en) | 2015-02-20 | 2016-04-05 | Reno Technologies, Inc. | RF impedance matching network |
| US12119206B2 (en) | 2015-02-18 | 2024-10-15 | Asm America, Inc. | Switching circuit |
| US11342161B2 (en) | 2015-06-29 | 2022-05-24 | Reno Technologies, Inc. | Switching circuit with voltage bias |
| US10984986B2 (en) | 2015-06-29 | 2021-04-20 | Reno Technologies, Inc. | Impedance matching network and method |
| US10692699B2 (en) | 2015-06-29 | 2020-06-23 | Reno Technologies, Inc. | Impedance matching with restricted capacitor switching |
| US11081316B2 (en) | 2015-06-29 | 2021-08-03 | Reno Technologies, Inc. | Impedance matching network and method |
| US11342160B2 (en) | 2015-06-29 | 2022-05-24 | Reno Technologies, Inc. | Filter for impedance matching |
| US11150283B2 (en) | 2015-06-29 | 2021-10-19 | Reno Technologies, Inc. | Amplitude and phase detection circuit |
| US11335540B2 (en) | 2015-06-29 | 2022-05-17 | Reno Technologies, Inc. | Impedance matching network and method |
| US10680457B2 (en) * | 2015-07-27 | 2020-06-09 | Witricity Corporation | Systems, methods, and apparatus implementing hybrid symmetric and asymmetric control for soft switching in wireless power transfer applications |
| US9648716B2 (en) * | 2015-09-02 | 2017-05-09 | Mks Instruments, Inc. | Direct three phase parallel resonant inverter for reactive gas generator applications |
| CN106301050B (zh) * | 2016-08-30 | 2019-04-09 | 辽宁开普医疗系统有限公司 | 串并联谐振逆变器控制电路及其控制方法 |
| JP6772922B2 (ja) * | 2017-03-24 | 2020-10-21 | 株式会社デンソー | 共振インバータ |
| US11393659B2 (en) | 2017-07-10 | 2022-07-19 | Reno Technologies, Inc. | Impedance matching network and method |
| US10727029B2 (en) | 2017-07-10 | 2020-07-28 | Reno Technologies, Inc | Impedance matching using independent capacitance and frequency control |
| US12272522B2 (en) | 2017-07-10 | 2025-04-08 | Asm America, Inc. | Resonant filter for solid state RF impedance matching network |
| US11315758B2 (en) | 2017-07-10 | 2022-04-26 | Reno Technologies, Inc. | Impedance matching using electronically variable capacitance and frequency considerations |
| US11398370B2 (en) | 2017-07-10 | 2022-07-26 | Reno Technologies, Inc. | Semiconductor manufacturing using artificial intelligence |
| US11521833B2 (en) | 2017-07-10 | 2022-12-06 | Reno Technologies, Inc. | Combined RF generator and RF solid-state matching network |
| US10483090B2 (en) | 2017-07-10 | 2019-11-19 | Reno Technologies, Inc. | Restricted capacitor switching |
| US11476091B2 (en) | 2017-07-10 | 2022-10-18 | Reno Technologies, Inc. | Impedance matching network for diagnosing plasma chamber |
| US12334307B2 (en) | 2017-07-10 | 2025-06-17 | Asm Ip Holding B.V. | Power control for rf impedance matching network |
| US11289307B2 (en) | 2017-07-10 | 2022-03-29 | Reno Technologies, Inc. | Impedance matching network and method |
| US10714314B1 (en) | 2017-07-10 | 2020-07-14 | Reno Technologies, Inc. | Impedance matching network and method |
| US11114280B2 (en) | 2017-07-10 | 2021-09-07 | Reno Technologies, Inc. | Impedance matching with multi-level power setpoint |
| US11101110B2 (en) | 2017-07-10 | 2021-08-24 | Reno Technologies, Inc. | Impedance matching network and method |
| EP3518257A1 (en) * | 2018-01-26 | 2019-07-31 | FRIWO Gerätebau GmbH | Transformer unit for a resonant converter |
| CN108964438B (zh) * | 2018-07-19 | 2020-11-06 | 中山大学 | 一种臭氧发生电源启动控制装置、方法及臭氧发生装置 |
| TWI671984B (zh) | 2018-11-14 | 2019-09-11 | 群光電能科技股份有限公司 | 電源供應裝置 |
| CN109795347B (zh) * | 2019-01-08 | 2022-06-21 | 狐灵灵智能科技有限公司 | 一种电动自行车无线智能充电方法 |
| US11521831B2 (en) | 2019-05-21 | 2022-12-06 | Reno Technologies, Inc. | Impedance matching network and method with reduced memory requirements |
| CN110880857A (zh) * | 2019-10-29 | 2020-03-13 | 南宁市跃龙科技有限公司 | 医用x射线高压发生器大功率变频逆变系统 |
| KR102774650B1 (ko) * | 2020-11-11 | 2025-02-27 | 한국전기연구원 | 공진형 인버터 및 그 제어 시스템 |
| GB202018200D0 (en) * | 2020-11-19 | 2021-01-06 | Daphne Tech Sa | Circuit |
| CN112410801A (zh) * | 2021-01-22 | 2021-02-26 | 四川大学 | 一种电流源型pwm整流器电解水制氢系统及控制方法 |
| CN113435041B (zh) * | 2021-06-24 | 2023-09-22 | 平顶山学院 | 介质阻挡放电负载电气模型参数辨识方法、装置及设备 |
| GB2605212B (en) * | 2021-07-16 | 2024-05-22 | Daphne Tech Sa | Apparatus and method for electron irradiation scrubbing |
| TWI783819B (zh) * | 2021-12-13 | 2022-11-11 | 新唐科技股份有限公司 | 電感電流感測器、固定峰值電流電路與直流-直流轉換裝置 |
| CN114337316A (zh) * | 2022-01-14 | 2022-04-12 | 张全星 | 一种自适应多相输出高压电源 |
| TWI837806B (zh) * | 2022-09-05 | 2024-04-01 | 飛宏科技股份有限公司 | 具有可變諧振槽設計之llc諧振電源轉換器 |
| TWI837809B (zh) * | 2022-09-05 | 2024-04-01 | 飛宏科技股份有限公司 | 具有可變匝數比之llc諧振電源轉換器 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6445137B1 (en) * | 1998-02-13 | 2002-09-03 | Ushiodenki Kabushiki Kaisha | Dielectric barrier discharge lamp apparatus |
| US20070108040A1 (en) * | 2005-08-16 | 2007-05-17 | Mks Instruments, Inc. | Power supply including transformer-less high voltage power oscillators for ozone generation |
| US7956547B2 (en) * | 2007-12-25 | 2011-06-07 | Harison Toshiba Lighting Corp. | Dielectric barrier discharge lamp lighting device |
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| JP2003230280A (ja) * | 2002-01-30 | 2003-08-15 | Toshiba Corp | 電力変換装置 |
| JP2005123008A (ja) * | 2003-10-16 | 2005-05-12 | Harison Toshiba Lighting Corp | 誘電体バリア型低圧放電ランプの駆動装置 |
| CN100589675C (zh) * | 2004-03-29 | 2010-02-10 | 三菱电机株式会社 | 等离子体发生用电源装置 |
| JP2005333726A (ja) | 2004-05-20 | 2005-12-02 | Toshiba Corp | Ｄｃ−ｄｃコンバータの周波数制御方法及びスイッチング電源 |
| JP4667836B2 (ja) * | 2004-11-26 | 2011-04-13 | 株式会社リコー | スイッチングレギュレータ及びスイッチングレギュレータの出力電圧切換方法 |
| KR100806624B1 (ko) * | 2007-02-21 | 2008-02-25 | (주) 이이시스 | 용량성 부하특성을 갖는 공진형 고전압 제어 장치 |
| JP5193086B2 (ja) * | 2008-07-04 | 2013-05-08 | 株式会社荏原製作所 | 放電セル放電回路及び放電セル放電回路制御システム |
| KR100891506B1 (ko) * | 2009-01-30 | 2009-04-06 | (주)인텍에프에이 | 오존 발생기용 전력 변환 장치 및 그 제어 방법 |
-
2012
- 2012-03-27 US US13/431,521 patent/US8680777B2/en active Active
-
2013
- 2013-03-13 TW TW102108925A patent/TWI551026B/zh active
- 2013-03-18 EP EP13768401.5A patent/EP2834911B1/en active Active
- 2013-03-18 WO PCT/US2013/032772 patent/WO2013148390A1/en not_active Ceased
- 2013-03-18 JP JP2015503359A patent/JP5923658B2/ja active Active
- 2013-03-18 SG SG11201404303PA patent/SG11201404303PA/en unknown
- 2013-03-18 CN CN201380014703.3A patent/CN104205604B/zh active Active
- 2013-03-18 KR KR1020147029941A patent/KR101665220B1/ko active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6445137B1 (en) * | 1998-02-13 | 2002-09-03 | Ushiodenki Kabushiki Kaisha | Dielectric barrier discharge lamp apparatus |
| US20070108040A1 (en) * | 2005-08-16 | 2007-05-17 | Mks Instruments, Inc. | Power supply including transformer-less high voltage power oscillators for ozone generation |
| US7956547B2 (en) * | 2007-12-25 | 2011-06-07 | Harison Toshiba Lighting Corp. | Dielectric barrier discharge lamp lighting device |
Also Published As
| Publication number | Publication date |
|---|---|
| SG11201404303PA (en) | 2014-09-26 |
| EP2834911A4 (en) | 2016-03-30 |
| WO2013148390A1 (en) | 2013-10-03 |
| JP2015514385A (ja) | 2015-05-18 |
| US20130257311A1 (en) | 2013-10-03 |
| CN104205604B (zh) | 2017-11-14 |
| US8680777B2 (en) | 2014-03-25 |
| JP5923658B2 (ja) | 2016-05-24 |
| EP2834911B1 (en) | 2019-01-09 |
| KR20140148443A (ko) | 2014-12-31 |
| CN104205604A (zh) | 2014-12-10 |
| KR101665220B1 (ko) | 2016-10-11 |
| TW201340578A (zh) | 2013-10-01 |
| EP2834911A1 (en) | 2015-02-11 |
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