TWI507340B - A separation distance adjusting device, and a handling device using the same - Google Patents

Description

Separation distance adjusting device and conveying device using same

The present invention relates to a separation distance adjusting device, and more particularly to a leveling device structure that is suitable for transporting a transporting object to a floating transport device.

The substrate transfer device described in Patent Document 1 is known as a floating conveyance device that transports a substrate or the like used for a flat panel display (FPD) from a conveyance surface.

In the floating transport apparatus, compressed air is ejected from a transport surface of a plurality of floating blocks arranged in a row, and the substrate is transported in the transport direction while the substrate to be transported is floated. Here, in order to adjust the height and flatness of the conveying surface of each floating block, each floating block is fixed to an individual movable plate by screws, and the distance between the movable plate and the fixed plate can be adjusted at three points.

Specifically, a female thread is formed at three places on the movable plate extending from both sides of the bottom of the floating block; and on the fixed plate, at a position opposed to the female thread of each movable plate, Female threads with different pitches of the female thread. Further, the adjusting screw having the male screw portion (the female thread of the movable plate and the female screw of the fixed plate is screwed) is inserted into the spring inserted between the movable plate and the fixed plate, and is coupled to the respective groups. Female thread. The operator inserts and rotates the adjusting screw between the adjacent floating blocks, so that the distance between the movable plate and the fixed plate can be adjusted up and down by the distance corresponding to the pitch of the female threads of the two plates.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-229258

However, in the substrate transfer device described in Patent Document 1, when the movable plate is attached to the fixed plate, the operator must separately set the springs on the adjusting screws screwed to the respective female threads of the movable plate to hold the springs. In the state where it does not fall off, the front end of each adjusting screw is aligned with the corresponding female thread of the fixing plate. Therefore, its workability is not good.

In addition, since it is necessary to ensure that the operator can perform the space for locking and loosening the adjustment screw on both sides of the floating block, the interval between the adjacent floating blocks becomes narrower, or the adjacent floating blocks become incapable of being dense. Hehe. Therefore, in the gap between the adjacent floating blocks, the compressed air cannot be blown to the object to be transported in a good state, and the floating state of the object to be transported may become unstable.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a technique capable of improving the workability of a separation distance adjustment operation between two members.

In order to solve the above problems, the present invention is a structure in which a plurality of components including an elastic body and the like can be unitized in a separation distance adjusting device for adjusting a separation distance between two members, and a bolt is used. It is possible to adjust the mounting and separation distance of one member to the other member.

For example, the separation distance adjusting device of the present invention is a separation distance adjusting device for adjusting the separation distance between the two members between the two members, and is provided with an elastic body that can expand and contract in the separation distance direction; One end surface is formed with a first through hole toward the other end surface, and a tubular pressing member having a first edge portion facing the outer side is formed on one end surface side, and the other end surface is formed from one end surface toward the other end surface. a tubular guide member having a flange portion facing the outer side of the one end surface side; and a cylindrical outer casing having a second edge portion facing the inner side in one opening portion; the outer casing The other one of the two members opposite to the one of the openings is disposed between the two members, and the pressing member is the first member. The edge portion is in contact with the second edge portion, and the other end surface of the pressing member protrudes from the opening portion of the outer casing so as to be housed in the outer casing; The guide member is housed in the outer casing in which the pressing member is housed from the other end surface side of the guiding member so that the axial center of the second through hole coincides with the axial center of the first through hole. And forming a cylindrical hollow portion by using an inner surface of the outer casing, a side surface of the guiding member, the first edge portion, and the flange portion; and the elastic body is configured to face the guiding member from the outer casing In the hollow portion, the separation distance adjusting device is configured to pass through one of the two members in a direction in which the opening of the other opening is pressed and pressed against one of the two members. The bolt inserted into the second through hole and the first through hole is screwed into the other member of the two members or the member attached to the other member, thereby transmitting the separation distance The entire device fixes the two members, and the elastic body expands and contracts in the separation distance direction by adjusting the amount of screwing of the bolt to the other member or the member attached to the other member.

According to the present invention, the workability of the separation distance adjustment operation between the two members can be improved.

One embodiment of the present invention will be described below.

Fig. 1 is an external view showing a schematic configuration of a transfer table 100 of a floating transport apparatus according to an embodiment of the present invention.

As shown in the figure, the floating transport apparatus of the present embodiment includes a transport platform 100 that transports a transported object such as a glass substrate used in an FPD or a solar battery panel from the transport surface 21 and transports it. The transfer table 100 includes two base frame frames that are arranged at a predetermined interval (for example, an aluminum frame 1 and a plate-shaped air floating rail 2 that is placed between the two base frames 1 for use on the base frame 1 Two (four in total) leveling devices 3 (partially not shown) are provided in each of the base frames 1 to support the air-floating rails 2. In the present embodiment, the two base frames 1 are erected as an example. In the case of one air-floating rail 2, for example, it is arranged in the longitudinal direction of the base frame 1 (Y direction of the first drawing) between two base frames 1 having a length corresponding to the transport distance. In the present embodiment, the air flotation rail 2 is supported by the four leveling devices 3, but the number of the air flotation rails 2 can be stably supported. The leveling device 3 can be used.

Further, although not shown in FIG. 1, the transport table 100 is further provided with a bolt 6 for fixing the leveling device 3 on the air floating rail 2, and for fixing the air floating rail 2 through the leveling device 3. The bolt 4 and the T-nut 5 having a hexagonal hole in the base frame 1. The bolt 6 is provided in each of the leveling devices 3. Further, the bolt 4 having the hexagonal hole and the T-nut 5 are provided in each of the leveling devices 3 in a pair (four pairs in total).

Fig. 2(A) is an external view of the base frame 1, and Fig. 2(B) is a cross-sectional view taken along line A-A of the base frame 1 shown in Fig. 2(A).

As shown in the figure, on the four outer faces of the base frame 1 (the upper surface 12A, the left side surface 12B, the lower surface 12C, and the right side surface 12D), a T-shaped nut 5 is formed at a desired position in the longitudinal direction of the base frame 1, respectively. T-slot 11. The T-shaped groove 11 includes a step 113 which changes from the groove width s1 to the groove width s2 (>s1) between the groove edge 112 and the groove bottom 111, and has a T-shaped cross-sectional shape from one end surface of the base frame 1 ( The face 13 to the other end face 14 which is perpendicular to the longitudinal direction is continuous. In the T-shaped groove 11, a T-shaped opening is formed in both end faces 13 and 14 of the base frame 1, and a groove extending from one end face 13 to the other end face 14 is formed in each of the four outer faces 12A to 12D. Wide s1 opening.

Further, in the present embodiment, as the base frame 1, a four-slot groove type in which the T-shaped grooves 11 are formed in the four outer faces 12A to 12D is used, but it is at least the upper surface 12A facing the air-floating rail 2 side. The frame in which the T-shaped groove 11 is formed may be used.

Fig. 3(A) is an external view of the air floating track 2, and Fig. 3(B) is an enlarged view of a B-B cross section of the air floating track 2 shown in Fig. 3(A).

The air floating rail 2 is a compressed air supplied from a outside to a gas supply port (not shown), and is ejected from a plurality of gas blowing holes (not shown) of the conveying surface 21 through an internal gas supply path (not shown). .

As shown in the figure, the mounting position of the air-floating rail 2 toward the base frame 1 (four in the present embodiment) is formed from the transport surface 21 toward the back surface (the side opposite to the transport surface 21) 24 . A through hole 23 having a stepped difference of the bolt 4 having a hexagonal hole is inserted. In the through hole 23 having a step, a step 25 in which the seating surface 412 (see FIG. 5) of the bolt 4 having the hexagonal hole having the hexagonal hole is inserted from the side of the conveying surface 21 is formed. The diameter r1 of the region (large diameter portion) 28 from the conveying surface 21 to the step 25 is larger than the diameter r2 of the region (small diameter portion) 27 from the step 25 to the back surface 24.

Further, on the back surface 24 of the air floating rail 2, screw holes 26 for coupling the bolts 6 are formed on both sides of the through hole 23 having a step.

Further, in the present embodiment, the through hole 23 having the step is formed at the attachment position of the air-floating rail 2 toward the base frame 1. However, in order to adjust the mounting position of the air-floating rail 2 on the base frame 1, for example, in the air-floating track In the longitudinal direction of 2, a long hole having a step shape having the same cross-sectional shape as that of the through hole 23 having a step difference may be formed in an arbitrary length.

Fig. 4(A) is an external view of the leveling device 3, and Fig. 4(B) is a C-C cross-sectional view of the leveling device 3 shown in Fig. 4(A).

The leveling device 3 is for supporting the air floating rail 2 on the base frame 1 to adjust the height of the air floating rail 2 relative to the base frame 1.

As shown in the figure, the leveling device 3 includes a coil spring group 31 that can expand and contract in the height direction of the air-floating rail 2 with respect to the base frame 1 (Z direction in the first drawing), and is pressed by the coil spring group 31 to be pressed. a cylindrical pressing member 32 having an edge portion on the upper surface 12A of the base frame 1 and a cylindrical spring guide 33 having a flange portion pressed by the coil spring group 31 and pressed against the back surface 24 of the air floating rail 2, And a cylindrical outer casing 34 having a flange portion and an edge portion for accommodating the components 31 to 33.

The outer casing 34 includes a cylindrical portion 343 and a second edge portion 342 which is formed on the inner side of the cylindrical portion 343 and is formed on one end surface of the cylindrical portion 343 (the bottom surface 348 of the outer casing 34). The outer portion of the portion 343 is formed to protrude outwardly from the flange portion 349 on the other end surface (the upper surface 346 of the outer casing 34) of the cylindrical portion 343.

The outer casing 34 is in a state in which the opening portion 344 on the upper surface 346 faces the through hole 23 having a stepped portion of the air floating rail 2, and the upper surface 346 is disposed in the base frame 1 and the gas so as to contact the rear surface 24 of the air floating rail 2. Floating between the tracks 2. Further, in the flange portion 349, a third through hole 347 into which the bolt 6 is inserted is formed at a position corresponding to the screw hole 26 of the back surface 24 of the air floating rail 2.

The pressing member 32 includes a cylindrical portion 325 that protrudes from the opening portion 341 on the bottom surface 348 side of the outer casing 34 toward the base frame 1 side, and is formed on one end surface of the cylindrical portion 325 so as to protrude outward from the outer periphery of the cylindrical portion 325 (pressing The first edge portion 322 of the upper portion 321) of the piece 32. In the cylindrical portion 325, a first through hole 324 for inserting a bolt 4 having a hexagonal hole is formed from the upper surface 321 toward the other end surface (the bottom surface 323 of the pressing member 32).

The pressing member 32 is in contact with the upper surface 350 of the second edge portion 342 of the outer casing 34 by the lower surface 326 of the first edge portion 322, and the bottom surface 323 protrudes from the opening portion 341 of the bottom surface 348 side of the outer casing 34 toward the base frame 1 side. The state is housed in the outer casing 34.

The spring guide 33 includes a cylindrical portion 335 of the coil spring group 31 inserted into the outer casing 34, and is formed on one end surface of the cylindrical portion 335 (the upper surface 331 of the spring guide 33) so as to protrude from the outer circumference of the cylindrical portion 335. The flange portion 332 of the coil spring group 31 is pressed between the upper surface 321 of the pressing member 32 in the outer casing 34. In the cylindrical portion 335, a second through hole 334 for inserting a bolt 4 having a hexagonal hole is formed from the upper surface 331 toward the bottom surface 333.

When the spring guide 33 is housed in the outer casing 34 so that the axial center of the second through hole 334 coincides with the axial center of the first through hole 324 of the pressing member 32, the outer peripheral surface 339 of the cylindrical portion 335 and the flange are utilized. The lower surface 336 of the portion 332, the inner surface 345 of the outer casing 34, and the upper surface 321 of the pressing member 32 may form a cylindrical hollow portion 337.

Further, the length k1 from the bottom surface 333 of the cylindrical portion 335 of the spring guide 33 to the lower surface 336 of the flange portion 332 is set to be smaller than the free height of the coil spring group 31, and the position of the upper surface 331 of the spring guide 33 is made When the positions of the upper surfaces 346 of the outer casing 34 are identical, a gap equal to or greater than the height adjustment amount of the air floating rail 2 can be formed between the bottom surface 333 of the spring guide 33 and the upper surface 321 of the pressing member 32.

The coil spring group 31 is composed of a plurality of coil springs 311 which are stacked in the hollow portion 337 of the cylindrical shape along the height direction of the air-floating rail 2 with respect to the base frame 1. In the present embodiment, the plurality of coil springs 311 are overlapped in such a manner that the adjacent coil springs 311 are opposite in direction (so-called tandem combination), but a plurality of coil springs are formed in the same direction as the adjacent coil springs 311. The combination of 311 (so-called parallel combination) or a combination of so-called serial and parallel methods is also possible. Further, in the present embodiment, the six coil springs 311 are overlapped, but the number of the disc springs used can be appropriately changed depending on the embodiment.

The coil spring group 31 is biased in a direction in which the pusher 32 is pushed out from the opening portion 341 on the bottom surface 348 side of the outer casing 34, and the pressing member 32 is pressed against the upper surface 12A of the base frame 1, and the spring guide 33 is oriented. The spring guide 33 is pressed against the back surface 24 of the air floating rail 2 in a direction in which the opening portion 344 on the upper surface 346 side of the outer casing 34 is pushed out. In addition, the coil spring group 31 has an allowable load that can stably support the load (the load applied to each leveling device 3 by the object to be transported, the air floating rail 2, etc.) Spring constant. In addition to the coil spring group 31, another elastic body (such as a coil spring or a tubular rubber) that has a shape that can be disposed in the tubular hollow portion 337 may be used instead of the coil spring group 31.

Further, in the present embodiment, a cylindrical spring guide 33 having a flange portion, a cylindrical pusher 32 having an edge portion, and a cylindrical outer casing 34 having a flange portion and an edge portion are used. However, other three-dimensional spring guides 33, pressing members 32, and outer casings 34 that do not cause the axial center of the coil spring group 31 to be displaced can be used.

Fig. 5(A) is an external view of the bolt 4 having a hexagonal hole.

As shown in the figure, the bolt 4 having a hexagonal hole is a hexagonal hole 43 for forming a hexagonal wrench on the upper surface 411 of the head portion 41. The diameter r3 of the head portion 41 of the bolt 4 having the hexagonal hole is smaller than the diameter r1 of the large diameter portion 28 of the through hole 23 having a step difference from the air floating rail 2, and is larger than the diameter r2 of the small diameter portion 27. Further, the thickness k2 of the head portion 41 of the bolt 4 having the hexagonal hole is smaller than the length k3 (see the third (B) diagram) of the large diameter portion 28 of the through hole 23 having a step difference from the air floating rail 2. Therefore, when the bolt 4 having the hexagonal hole is inserted into the through hole 23 having the step from the side of the conveying surface 21 of the air floating rail 2, the head surface 41 reaches the lower side than the conveying surface 21, and the seating surface 412 and the stepped portion are penetrated. The step 23 of the hole 23 is in contact, and the head portion 41 can be completely accommodated in the large diameter portion 28 of the through hole 23 having the step.

Further, the length k4 from the seat surface 412 of the bolt 4 having the hexagonal hole to the screw portion 42 is the length k5 of the small-diameter portion 27 of the through hole 23 having a step smaller than that of the air-floating rail 2 (refer to FIG. 3(B) The sum of the height (the length from one opening 341 to the other opening 344) k6 (see FIG. 4(B)) of the outer casing 34 of the leveling device 3 is small. Further, as shown in FIG. 4(B), the first edge portion 322 of the pressing member 32 comes into contact with the second edge portion 342 of the outer casing 34, and the bottom surface 323 of the pressing member 32 protrudes from the opening portion 341 of the outer casing 34. In the state, the length k7 from the seat surface 412 of the bolt 4 having the hexagonal hole to the front end 421 of the screw portion 42 is larger than the length k8 from the bottom surface 323 of the pressing member 32 to the upper surface 346 of the outer casing 34, and the air floating rail 2 The total length k5 of the small diameter portion 27 of the through hole 23 of the step and the total value k10 (see the second (B) diagram) from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the step 113 are larger, and The total value of k8, k5 and the depth k11 from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the groove bottom 111 (see FIG. 2(B)) is small.

Fig. 5(B) is a cross-sectional view of the T-shaped nut 5.

As shown in the figure, the T-shaped nut 5 is a step 52 having a width from s3 to s4 (>s3) between one end surface (upper surface 51) and the other end surface (bottom surface 53), and has a T-shape. The cross-sectional shape is formed with a screw hole 54 through which the screw portion 42 of the bolt 4 having the hexagonal hole is screwed from the upper surface 51 to the bottom surface 53. The width s3 from the upper surface 51 to the step 52 is smaller than the groove width s1 (see the second (B) diagram) from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the step 113. The width s4 from the step 52 to the bottom surface 53 is larger than the groove width s1 from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the step 113, and is larger than the groove 113 from the T-shaped groove 11 to the groove bottom 111. The width s2 (refer to the 2nd (B) figure) is small. Further, the height k9 from the step 52 to the upper surface 51 is a size which is formed from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the depth k10 of the step 113 (see the second (B) diagram). Therefore, the T-shaped nut 5 can be disposed at a desired position in the T-shaped groove 11 of the base frame 1, and further, if the threaded portion 42 of the bolt 4 having the hexagonal hole is combined with the screw hole 54 from the T-shaped groove 11 The groove bottom 111 is biased in the direction of the groove edge 112, and the step 52 is brought into contact with the step 113 of the T-shaped groove 11 to be fixed to the base frame 1.

Next, the installation work of the air floating rail 2 toward the base frame 1 will be described.

Fig. 6(A) is a cross-sectional view for explaining the assembling work of the leveling device 3, and Fig. 6(B) is a cross-sectional view for explaining the mounting work of the leveling device 3 toward the air floating rail 2. Further, Fig. 7 is a cross-sectional view for explaining the mounting work of the air floating rail 2 toward the base frame 1.

(1) Assembly of the leveling device 3

The leveling device 3 (the four in the present embodiment) required for mounting the air floating rail 2 in the base frame 1 is assembled in advance. Specifically, it is explained below.

As shown in Fig. 6(A), the pusher 32 is inserted into the outer casing 34 from the side of the bottom surface 323, and the first edge portion 322 of the pusher 32 abuts against the second edge portion 342 of the outer casing 34. Next, a plurality of coil springs 311 are superposed on the pressing member 32 housed in the casing 34 such that the adjacent coil springs 311 are opposite in direction. Next, the spring guide 33 is inserted into the outer casing 34 from the side of the bottom surface 333, and the cylindrical portion 335 of the spring guide 33 is inserted into the coil spring group 31. Thereby, the pressing member 32, the coil spring group 31, and the spring guide 33 are sequentially housed in the casing 34, and the leveling device 3 as shown in Figs. 4(A) and (B) is completed.

(2) Installation of the air leveling device 2 by the leveling device 3

As shown in Fig. 6(B), the leveling device 3 is screwed through the third through hole 347 of the outer casing 34 to the screw hole 26 of the rear surface 24 of the air floating rail 2. Thereby, the second through hole 334 of the spring guide 33 and the axial center of the first through hole 324 of the pressing member 32 are aligned with the axial center of the through hole 23 having the step of the air floating rail 2, so that the outer casing 34 is provided. The upper surface 346 abuts against the back surface 24 of the air floating rail 2, and the leveling device 3 is attached to the back surface 24 of the air floating rail 2.

Thereby, the spring guide 33 is pushed into the outer casing 34 until the upper surface 331 of the spring guide 33 reaches the same position as the upper surface 346 of the outer casing 34, whereby a preload is applied to the coil spring group 31. At this time, the length of the pressing member 32 protruding from the bottom surface 348 of the outer casing 34 is c1, and the length from the bottom surface 333 of the spring guide 33 to the upper surface 321 of the pressing member 32 is c2.

(3) Installation and height adjustment of the air-floating track 2 toward the base frame 1

The air floating rail 2 is placed between the two base frames 1. Two T-shaped nuts 5 are inserted into the T-shaped grooves 11 on the upper surface 12A side of the base frame 1, and the T-shaped nuts 5 are placed at positions corresponding to the through holes 23 having the step of the air floating rail 2. Next, as shown in Fig. 7, the bolt 4 having the hexagonal hole is inserted into the through hole 23 having the step of the air floating rail 2 and the second through hole 334 of the spring guide 33 from the side of the conveying surface 21 of the air floating rail 2. The first through hole 324 of the pressing member 32 is screwed to the screw hole 54 of the T-shaped nut 5 by using the hexagonal wrench 7 to screw the threaded portion 42 of the bolt 4 having the hexagonal hole. In this state, the air-floating rail 2 is traversed in a state in which the bottom surface 323 of the pusher 32 projecting from the opening 341 on the bottom surface 348 side of the outer casing 34 toward the base frame 1 is in contact with the upper surface 12A of the base frame 1. The device 3 is mounted to the base frame 1.

As described above, the length k4 from the seat surface 412 of the head portion 41 of the bolt 4 having the hexagonal hole to the screw portion 42 (see FIG. 5(A)) is a through hole 23 having a step difference from the air floating rail 2 The length k5 of the small diameter portion 27 (see Fig. 3(B)) and the height of the outer casing 34 of the leveling device 3 (the length from one opening portion 341 to the other opening portion 344) k6 (refer to Fig. 4(B)) The total value of the) is smaller. Further, in a state where the first edge portion 322 of the pressing member 32 is in contact with the second edge portion 342 of the outer casing 34, and the bottom surface 323 of the pressing member 32 protrudes from the opening portion 341 of the outer casing 34, the bolt 4 having the hexagonal hole is used. The length k7 of the seat surface 412 to the front end 421 of the screw portion 42 (see Fig. 5(A)) is a length k8 from the end surface 323 of the pressing member 32 to the upper surface 346 of the outer casing 34 (refer to Fig. 4(B)). The length k5 of the small diameter portion 27 of the through hole 23 having the step of the air floating rail 2 (see FIG. 3(B)), and the depth k10 from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the step 113 (Refer to Fig. 2(B)) The total value is larger than the above k8, k5 and the depth k11 from the groove edge 112 of the T-shaped groove 11 of the base frame 1 to the groove bottom 111 (refer to Fig. 2(B) The total value of the) is smaller.

Therefore, by adjusting the degree of locking of the T-nut 5 by the bolt 4 having the hexagonal hole, among the height adjustment amount (the c1, c2, and the maximum contraction amount of the coil spring group 31 shown in Fig. 6(B)) Within the minimum length, the height of the air-floating track relative to the base frame 1 can be adjusted. The height adjustment operation is performed on each of the four leveling devices 3 for attaching the air floating rail 2 to the base frame 1, so that the leveling of the conveying surface 21 of the air floating rail 2 can be performed.

The above is an embodiment of the present invention.

In the leveling device 3 of the present embodiment, the coil spring group 31, the pressing member 32, and the spring guide 33 are housed in the outer casing 34, and the coil spring group 31, the pressing member 32, the spring guide 33, and the outer casing 34 are included. Since a plurality of constituent parts are unitized, they can be assembled in advance according to the required number before the air-floating rail 2 is mounted on the base frame 1. Therefore, the operator can easily attach the leveling device 3 to the air floating rail 2 without paying special attention to problems such as a part of the parts may fall, so that work efficiency can be improved.

Further, by attaching the leveling device 3 to the air floating rail 2, since a preload can be applied to the coil spring group 31 of the leveling device 3, less is applied than when the preload is not applied to the coil spring group 31. The number of times the bolts 4 having the hexagonal holes are locked to the T-shaped nut 5, and the air floating rail 2 can be attached to the base frame 1.

Further, by attaching the leveling device 3 to the air flotation rail 2, since the upper surface 331 of the spring guide 33 is pushed into the same position as the upper surface 346 of the outer casing 34, a preload is applied to the coil spring group 31, so The four leveling devices 3 used for the mounting work of the floating rail 2 toward the base frame 1 can apply an equal preload without performing troublesome preload adjustment.

Further, by inserting the bolt 4 having the hexagonal hole into the through hole 23 having the step from the side of the conveying surface 21 of the air floating rail 2 and screwing it to the T-shaped nut 5, the air floating rail 2 can be attached to the base frame 1. Further, by adjusting the degree of locking of the bolt 4 having the hexagonal hole, the height of the air floating rail 2 with respect to the base frame 1 can be adjusted. Therefore, unlike the substrate conveying device described in Patent Document 1, it is not necessary to be in the air floating rail 2 The gap for height adjustment is ensured on both sides in the longitudinal direction (X direction in Fig. 1). Therefore, when a plurality of air-floating rails 2 are arranged in a row, in order to make the adjacent air-floating rails 2 close to each other, the interval between the plurality of air-floating rails 2 can be elastically set in consideration of the floating stability of the transporting object or the like. size. Therefore, the object to be transported can be transported more stably and upwardly.

Further, the bolt 6 is screwed to the screw hole 26 formed in the back surface 24 of the air floating rail 2 through the third through hole 347 formed in the outer casing 34 of the leveling device 3, thereby applying to the coil spring group 31. In the state of the preload, the leveling device 3 is attached to the air floating rail 2, so that the required number of leveling devices 3 can be advanced to the air floating rail 2 before the installation operation of the air floating rail 2 toward the base frame 1. Installation and preloading operations. This can further improve work efficiency.

Further, in the present embodiment, the air-floating rail 2 is attached to the base frame 1 through the leveling device 3 by using the bolt 4 having the hexagonal hole and the T-shaped nut 5, but the present invention is not limited thereto. At a position corresponding to the through hole 23 of the upper surface 12A of the base frame 1 having a stepped portion of the air floating rail 2, a screw hole for screwing with the threaded portion 42 of the bolt 4 having the hexagonal hole is formed, so that the T-shaped screw is not used. It is also possible to attach the air floating rail 2 to the base frame 1 with the cap 5.

Further, in the present embodiment, in order to adjust the mounting of the air floating rail 2 to the base frame 1 and the leveling of the conveying surface 21 from the side of the conveying surface 21 of the air floating rail 2 by using the hexagonal wrench 7, a bolt 4 having a hexagonal hole is used. However, the invention is not limited thereto. As long as the tool to be used is used, for example, a cross hole or a slotted bolt is formed on the upper surface of the head.

Further, in the present embodiment, the air floating rail 2 is attached to the base frame 1 so as to be mounted on the corner column-shaped base frame 1 which is arranged at a predetermined interval. However, the present invention is not limited thereto. For example, the air floating rail 2 may be attached to the base frame 1 so as to be mounted on a single plate-shaped base frame.

Further, in the present embodiment, the description has been applied to an example in which the floating conveyance device is provided on the conveyance table 100. However, the present invention is also applicable to another device in which the stage having the leveling target surface is fixed to the base member.

Further, in the present embodiment, the leveling device 3 for supporting the air floating rail 2 on the base frame 1 and adjusting the height of the air floating rail with respect to the base frame 1 is described, but the present invention is widely applicable to A separation distance adjusting device for adjusting the separation distance between two members.

1. . . Base frame

2. . . Air floating track

3. . . Leveling device

4. . . Bolt with hexagonal holes

5. . . T-nut

6. . . bolt

7. . . hexagonal wrench

11. . . T-slot

12A~12D. . . Outside the base frame 1

13,14. . . End face of base frame 1

twenty one. . . Transport surface

twenty three. . . Through hole with step

twenty four. . . The back of the air flotation track 2

25. . . Step difference

26. . . Screw hole

27. . . Small diameter portion of the through hole 23 having a step

28. . . Large diameter portion of the through hole 23 having a step

31. . . Spring coil group

32. . . Pressing member

33. . . Spring guide

34. . . shell

41. . . head

42. . . Thread part

43. . . Hexagonal hole

51,53. . . End face of T-nut 5

52. . . Step difference

54. . . Screw hole

100. . . Pallet

111. . . Slot bottom of T-slot 11

112. . . The groove edge of the T-shaped groove 11

113. . . Step difference

311. . . Coil spring

321. . . Above the pressing member 32

322. . . First edge

323‧‧‧Bottom of the pressing member 32

324‧‧‧ first through hole

325‧‧‧Cylinder

326‧‧‧ below the first edge 322

331‧‧‧Top of the spring guide 33

332‧‧‧Flange portion of spring guide 33

333‧‧‧Bottom of spring guide 33

334‧‧‧Second through hole

335‧‧ ‧ cylindrical part of the spring guide 33

336‧‧‧ below the second edge 332

337‧‧‧Cylindrical hollow

339‧‧‧The outer circumference of the cylindrical portion 335

341,344‧‧‧ openings in the outer casing 34

342‧‧‧Second edge of the outer casing 34

343‧‧‧The cylindrical part of the outer casing 34

345‧‧‧ inside the outer casing 34

346‧‧‧Top of the outer casing 34

347‧‧‧ third through hole

348‧‧‧Bottom of the outer casing 34

349‧‧‧Flange of the outer casing 34

350‧‧‧Top of the second edge 342

411‧‧‧Top of the head 41 of the bolt 4 with hexagonal holes

412‧‧‧Seat surface of bolt 4 with hexagonal holes

421‧‧‧ front end of threaded portion 42

Fig. 1 is an external view showing a schematic configuration of a transfer table 100 of a floating transport apparatus according to an embodiment of the present invention.

Fig. 2(A) is an external view of the base frame 1, and Fig. 2(B) is a cross-sectional view taken along line A-A of the base frame 1 shown in Fig. 2(A).

Fig. 3(A) is an external view of the air-floating track 2, and Fig. 3(B) is an enlarged view of a B-B cross section of the air-floating track 2 shown in Fig. 3(A).

Fig. 4(A) is an external view of the leveling device 3, and Fig. 4(B) is a C-C cross-sectional view of the leveling device 3 shown in Fig. 4(A).

Fig. 5(A) is an external view of the bolt 4 having a hexagonal hole, and Fig. 5(B) is a cross-sectional view of the T-shaped nut 5.

6(A) is a cross-sectional view for explaining the assembly work of the leveling device 3, and FIG. 6(B) is a cross-sectional view for explaining the mounting work of the leveling device 3 to the air-floating track 2.

Fig. 7 is a cross-sectional view for explaining the mounting work of the air floating rail 2 toward the base frame 1.

3. . . Leveling device

31. . . Spring coil group

32. . . Pressing member

33. . . Spring guide

34. . . shell

311. . . Coil spring

321. . . Above the pressing member 32

322. . . First edge

323. . . The bottom surface of the pressing member 32

324. . . First through hole

325. . . Cylindrical part

326. . . Below the first edge portion 322

331. . . Upper surface of the spring guide 33

332. . . Flange portion of spring guide 33

333. . . Bottom of spring guide 33

334. . . Second through hole

335. . . The cylindrical portion of the spring guide 33

336. . . Below the second edge portion 332

337. . . Cylindrical hollow

339. . . The outer peripheral surface of the cylindrical portion 335

341,344. . . Opening of the outer casing 34

342. . . The second edge of the outer casing 34

343. . . The cylindrical portion of the outer casing 34

345. . . Inner surface of the outer casing 34

346. . . Upper surface of the outer casing 34

347. . . Third through hole

348. . . Bottom of the outer casing 34

349. . . Flange portion of the outer casing 34

350. . . The top of the second edge portion 342

Claims (6)

A separation distance adjusting device is a separation distance adjusting device between two members for adjusting a separation distance between the two members, and is characterized in that: an elastic body capable of stretching and contracting in the separation distance direction; One end surface is formed with a first through hole toward the other end surface, and a tubular pressing member having a first edge portion facing the outer side is formed on one end surface side, and the other end surface is formed from one end surface toward the other end surface. a tubular guide member having a flange portion facing the outer side of the one end surface side; and a cylindrical outer casing having a second edge portion facing the inner side in one opening portion; the outer casing The other one of the two members opposite to the one of the openings is disposed between the two members, and the pressing member is the first member. The edge portion is in contact with the second edge portion, and the other end surface of the pressing member protrudes from the opening of one of the outer casings; The guide member is housed in the outer casing accommodating the pressing member from the other end surface side of the guiding member so that the axial center of the second through hole coincides with the axial center of the first through hole. Internally, the inner surface of the outer casing, the side surface of the guiding member, the first edge portion and the front portion The flange portion is formed into a tubular hollow portion, and the elastic member is a member that is pressed against a direction in which the guide member is pushed out from the other opening of the outer casing and is pressed against one of the two members. In the above-described hollow portion, the separation distance adjusting device is a bolt that is inserted into the second through hole and the first through hole through a through hole provided in one of the two members, and is screwed to the aforementioned a member of the other of the two members or a member mounted on the other member, whereby the two members are fixed by the separation distance adjusting device, and the other member or the other member is adjusted by adjusting the bolt The amount of screwing of the member mounted thereon causes the elastic body to expand and contract in the separation distance direction. The separation distance adjusting device according to claim 1, wherein one of the two members is a support object, and the other of the two members is a base; and the separation distance adjusting device is A leveling device that supports the support object on the base to adjust the height of the support object relative to the base. The separation distance adjusting device according to claim 2, wherein the support object forms a through hole having a step; the separation distance adjusting device further includes the bolt, and the bolt is a conveying surface from the support object (and The separation distance adjusting device side is the opposite side) side, and the through hole having the step difference and the second portion are inserted The through hole and the first through hole are screwed to the base or a nut attached to the base, whereby the support object is fixed to the base and the height of the support object is adjusted. The separation distance adjusting device according to claim 3, wherein the outer casing is formed with a third through hole for screwing the separation distance adjusting device to the back surface of the support object ( The separation distance adjusting device is screwed to the back surface of the support object, and the guide member is pushed into the outer casing to apply a preload to the elastic body. The separation distance adjusting device according to the fourth aspect of the invention, wherein the height adjustment amount of the support target by the bolt is an opening portion of the outer casing from a state in which a preload is applied to the elastic body. a length from the other end surface of the pressing member, a length from the other end surface of the guiding member to the one end surface of the pressing member, and a maximum shrinkage amount of the elastic body in the state Among the three, the minimum length is within the range. A floating transporting device is a floating transporting device that floats a transporting object from a conveying surface, and is characterized in that it has a base, an air-floating rail, and a separation distance as described in any one of claims 2 to 5. Adjustment device The air floating rail includes a through hole having a step formed on the conveying surface, and the through hole is for inserting a bolt from the conveying surface toward one side opposite to the conveying surface, and fixing the head of the bolt to a position between the conveying surface and a surface opposite to the conveying surface; the separation distance adjusting device is for supporting the air floating rail as a support target on the base.