KR101402692B1 - Air floating stage - Google Patents

Air floating stage Download PDF

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Publication number
KR101402692B1
KR101402692B1 KR1020130058712A KR20130058712A KR101402692B1 KR 101402692 B1 KR101402692 B1 KR 101402692B1 KR 1020130058712 A KR1020130058712 A KR 1020130058712A KR 20130058712 A KR20130058712 A KR 20130058712A KR 101402692 B1 KR101402692 B1 KR 101402692B1
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KR
South Korea
Prior art keywords
air
plate
leveling unit
leveling
female screw
Prior art date
Application number
KR1020130058712A
Other languages
Korean (ko)
Inventor
강면구
김태형
Original Assignee
이성 주식회사
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Filing date
Publication date
Application filed by 이성 주식회사 filed Critical 이성 주식회사
Priority to KR1020130058712A priority Critical patent/KR101402692B1/en
Application granted granted Critical
Publication of KR101402692B1 publication Critical patent/KR101402692B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Abstract

The present invention relates to an air floating stage used to transfer substrates by floating the substrates in a flat panel display (FPD) manufacturing process. The air floating state comprises a plate having multiple air inlets and outlets penetrated in a vertical direction and four or more female screw parts penetrated in the vertical direction and four or more leveling units having a respective male screw part and coupled to the female screw part to support the plate, respectively. An air vent for connecting the upper part of the leveling unit and the outside is formed inside each leveling unit. The present invention can prevent the vortex of air supplied to the upper part of the plate by discharging the air introduced from the top of the female screw parts through the air vents which are formed on the leveling units; thereby stabilizing air flow to maintain the substrates floated on the plate at a constant horizontality.

Description

[0001] AIR FLOATING STAGE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air floating stage, and more particularly, to an air floating stage used for floating a substrate in a flat panel display (FPD) manufacturing process or the like.

As an art relating to the air floating stage, an improved float stage and a substrate floating unit and a coating apparatus having the improved float stage (hereinafter referred to as "Prior Art" in Korean Patent Registration No. 10-1179736 .

The prior art

A plate provided at a lower portion of the loading region, the coating region, and the unloading region, each plate having a plurality of first to third air ejecting openings and a plurality of first to third air inlets, respectively;

A base member to which the plate is fixedly mounted;

An air supply passage connected to the plurality of first to third air outlets;

An air supply device connected to the air supply path;

An air intake path connected to the plurality of second air intake ports; And

And a vacuum pumping device connected to the air suction path,

Wherein the air supply device is connected to the air supply path by a first fitting member and the air supply path is connected to the plurality of first to third air ejection ports by a plurality of second fitting members,

Wherein the vacuum pumping device is connected to the air intake path by a third fitting member, and the air intake path is connected to the plurality of first to third air intake ports by a plurality of fourth fitting members, respectively, , ≪ / RTI &

The vibration of the floating stage is prevented, and the height of the floating stage is not required to be adjusted.

On the other hand, the background art and drawings of the prior art disclose a structure in which a plurality of height adjustment members of a plate are provided for height adjustment of a floatation stage.

A conventional floating stage having such a height adjusting member, as shown in FIG. 1,

A plate 300 having upper and lower feed mechanisms 310 and 320, and a female threaded portion 330 formed through the upper and lower portions; And

And a leveling unit 400 having a male screw portion 410 at an upper end thereof and coupled to the female screw portion 330 to support the plate 300,

And the height of the plate 300 can be adjusted by rotating the leveling unit 400.

However, according to the floating stage having such a structure, a space 340 for lifting and lowering the male screw portion 410 must be provided at the upper end of the female screw portion 330. In the conventional floating stage, The air supplied to the upper portion of the plate 300 flows into the upper portion of the plate 300 through the upper and lower plates 310 and 310 to generate a vortex so that the flow of air becomes unstable. It is not suitable for use in a manufacturing process of a flat panel display requiring high precision.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems,

And an object of the present invention is to provide an air floating stage which can stabilize the flow of air supplied to an upper portion of a plate so that a substrate lifted from the plate can maintain a constant horizontal level.

According to an aspect of the present invention, there is provided an air floating stage,

A plate having a plurality of feed mechanisms and vents formed vertically through the body, and at least four female threaded portions formed through the upper and lower portions; And

And at least four leveling units having a male threaded portion at an upper end and being coupled to the female threaded portions to support the plate,

The leveling unit is provided with a vent hole for interconnecting the upper side and the outer side of the leveling unit.

In the air floating stage according to the present invention,

The air introduced into the upper end portion of the female screw portion is discharged through the vent hole formed in the leveling unit to prevent vortex of the air supplied to the upper portion of the plate and thereby stabilize the flow of air, It is effective.

1 is a schematic sectional view of a conventional floating stage.
2 is a perspective view of an air floating stage according to an embodiment of the present invention;
3 is a schematic cross-sectional view of an air-floating stage according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIGS. 2 and 3, the air floating stage according to the embodiment of the present invention mainly comprises a plate 100 and a leveling unit 200.

Looking at each configuration,

The plate 100 has a flat plate shape and has a plurality of feed mechanisms 110 and 120 formed vertically and vertically, and at least four female threaded portions 130 formed through the upper and lower portions.

The air supply mechanism 110 and the exhaust port 120 are arranged alternately across the entire plate of the plate 100.

The female screw 130 is for joining the leveling unit 200, and preferably, four or more are formed to include the corner portions of the plate 100 as shown in the figure.

Although not shown, a separate air compression device and an air supply manifold for spraying air to the upper side of the plate 100 are connected to the air supply mechanisms 110 on the lower side of the plate 100, 120 and a separate air intake device and an exhaust manifold for exhausting the air supplied to the upper side of the plate 100 to the lower side of the plate 100 may be installed.

The leveling unit 200 has a cylindrical shape and has a male threaded portion 210 formed at an upper end thereof.

The leveling unit 200 is provided with four or more teeth and is fastened to each female threaded portion 130 by the male threaded portions 210 to support the plate 100.

Thus, the user can adjust the height and the horizontality of the plate 100 by rotating each leveling unit 200.

A space portion 140 for lifting and lowering the male screw portion 210 is provided at the upper end of the female screw portion 130 in a state where the plate 100 and the leveling unit 200 are coupled to each other, 200 have a ventilation hole 220 for interconnecting the upper and the outer sides of the leveling unit 200.

The ventilation holes 220 allow the air introduced from the upper portion of the plate 100 to the space portion 140 to be exhausted to the lower side of the plate 100 through the air supply mechanism 110, Thereby enabling the substrate 10 to maintain a constant horizontal level.

In other words, if the air introduced into the space portion 140 can not be quickly exhausted, the air introduced into the space portion 140 generates a vortex flow to generate an unstable air flow on the upper surface of the plate 100 Since the leveling unit 200 of the present invention can quickly exhaust the air introduced into the space 140 through the ventilation hole 220, The flow of air supplied to the upper portion of the plate 100 is stabilized so that the substrate 10 lifted from the plate 100 can maintain a constant horizontal level.

A separate air suction device and an exhaust manifold may be installed in the air vent 220 in order to discharge the air introduced into the space 140 more quickly.

On the upper surface of the leveling unit 200, a tool insertion groove 230 connected to the vent hole 220 is formed.

The tool insertion groove 230 is formed in a hexagonal groove so that the user rotates the leveling unit 200 on the upper side of the plate 100 by using a wrench so that the height and horizontal It is possible to adjust the degree of the display.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, The present invention is not limited thereto.

100; plate
110; Feed mechanism
120; Exhaust
130; Female thread
140; Space portion
200; Leveling unit
210; Male threads
220; Vent
230; Tool insert groove

Claims (2)

A plate 100 having a plurality of feed mechanisms 110 and 120 formed above and below and having at least four internally threaded portions 130 formed through the upper and lower portions; And
And at least four leveling units 200 each having a male screw portion 210 at an upper end thereof and coupled to the female screw portions 130 to support the plate 100,
Wherein the leveling unit (200) is provided with a ventilation hole (220) for interconnecting the upper side and the outer side of the leveling unit (200).
The method according to claim 1,
Wherein an upper surface of the leveling unit (200) is formed with a tool insertion groove (230) connected to the vent hole (220).
KR1020130058712A 2013-05-24 2013-05-24 Air floating stage KR101402692B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020130058712A KR101402692B1 (en) 2013-05-24 2013-05-24 Air floating stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130058712A KR101402692B1 (en) 2013-05-24 2013-05-24 Air floating stage

Publications (1)

Publication Number Publication Date
KR101402692B1 true KR101402692B1 (en) 2014-06-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130058712A KR101402692B1 (en) 2013-05-24 2013-05-24 Air floating stage

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210252635A1 (en) * 2020-02-13 2021-08-19 The Japan Steel Works, Ltd. Flotation conveyance apparatus and laser processing apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006347719A (en) 2005-06-17 2006-12-28 Shinko Electric Co Ltd Gas floating unit and gas floating carrying device
KR100876337B1 (en) 2008-06-25 2008-12-29 이재성 Noncontact conveying plate having a suction
JP2012158424A (en) 2011-01-31 2012-08-23 Oiles Corp Clearance adjustment device and conveying apparatus using the same
KR20120107803A (en) * 2011-03-22 2012-10-04 박봉선 Non-contact plate transferring device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006347719A (en) 2005-06-17 2006-12-28 Shinko Electric Co Ltd Gas floating unit and gas floating carrying device
KR100876337B1 (en) 2008-06-25 2008-12-29 이재성 Noncontact conveying plate having a suction
JP2012158424A (en) 2011-01-31 2012-08-23 Oiles Corp Clearance adjustment device and conveying apparatus using the same
KR20120107803A (en) * 2011-03-22 2012-10-04 박봉선 Non-contact plate transferring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210252635A1 (en) * 2020-02-13 2021-08-19 The Japan Steel Works, Ltd. Flotation conveyance apparatus and laser processing apparatus

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