KR20150142442A

KR20150142442A - Air floating stage

Info

Publication number: KR20150142442A
Application number: KR1020140071299A
Authority: KR
Inventors: 김태형
Original assignee: 이성 주식회사
Priority date: 2014-06-12
Filing date: 2014-06-12
Publication date: 2015-12-22

Abstract

The present invention relates to an air floating stage which is used to return a substrate by floating the substrate during a flat panel display (FPD) manufacturing process or the like. The air floating stage comprises: a plate (100) on which the substrate (10) is placed; multiple air supply lines (110) which are formed to vertically penetrate the top surface of the plate (100) and are arranged to be separated from each other in the horizontal direction of the plate (100); and multiple air exhaust lines (120) which are formed to vertically penetrate the top surface of the plate (100), are arranged to be separated from each other in the horizontal direction of the plate (100), and are arranged alternately with the air supply lines (110), respectively. Therefore, the air floating stage prevents both ends of the floating substrate from bending downward by increasing the amount of air supplied from the air supply lines.

Description

[0001] AIR FLOATING STAGE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air floating stage, and more particularly, to an air floating stage used for floating a substrate in a flat panel display (FPD) manufacturing process or the like.

As an art relating to the air floating stage, an improved float stage and a substrate floating unit and a coating apparatus having the improved float stage (hereinafter referred to as "Prior Art" in Korean Patent Registration No. 10-1179736 .

The prior art

A plate provided at a lower portion of the loading region, the coating region, and the unloading region, each plate having a plurality of first to third air ejecting openings and a plurality of first to third air inlets, respectively;

A base member to which the plate is fixedly mounted;

An air supply passage connected to the plurality of first to third air outlets;

An air supply device connected to the air supply path;

An air intake path connected to the plurality of second air intake ports; And

And a vacuum pumping device connected to the air suction path,

Wherein the air supply device is connected to the air supply path by a first fitting member and the air supply path is connected to the plurality of first to third air ejection ports by a plurality of second fitting members,

Wherein the vacuum pumping device is connected to the air intake path by a third fitting member, and the air intake path is connected to the plurality of first to third air intake ports by a plurality of fourth fitting members, respectively, , &Lt; / RTI &

The vibration of the floating stage is prevented, and the height of the floating stage is not required to be adjusted.

In the conventional air floating stage including the prior art, when the air introduced into the space S between the substrate 10 and the plate 100 can not be quickly exhausted, The inflow air generates eddy currents, which causes unstable airflow on the upper surface of the plate 100, which makes it difficult to maintain the horizontalness of the substrate 10.

1 and 2, a plurality of air supply devices 311 through which air is blown and a plurality of air exhaust ports 321 through which air is exhausted are provided in the first half of the plate 100, (Alternate) over the other.

A plurality of air supply units 311 are arranged along the longitudinal direction of the plate to form respective air supply lines 310. The air supply lines 310 are arranged such that a plurality of air outlets 321 are arranged along the longitudinal direction of the plate, Line 320 as shown in FIG.

That is, a certain amount of air is blown and discharged through the air supply mechanism 311 and the air outlet 321 to raise the substrate 10 to a certain height.

However, the above-described configuration has a configuration in which both sides of the plate are opened.

1, unlike the remaining non-end side air supply lines 310, the air supply lines 310a disposed at both ends of the plate 300 are arranged such that the ejected air is directed to the side of the plate 300 There is a problem of mass loss.

In other words, since both side ends of the substrate 10 are less in amount of air supplied than the remaining portions except for the both side ends of the substrate 10, the lifting force is eventually decreased and both ends of the substrate 10 are bent downward A problem occurs.

On the other hand, the background art and drawings of the prior art disclose a structure in which a plurality of height adjustment members of a plate are provided for height adjustment of a floatation stage.

A conventional floating stage having such a height adjusting member, as shown in FIG. 1,

A plate 300 having upper and lower feed mechanisms 311 and 321, and a female threaded portion 330 formed through the upper and lower ends; And

And a leveling unit 400 having a male screw portion 410 at an upper end thereof and coupled to the female screw portion 330 to support the plate 300,

And the height of the plate 300 can be adjusted by rotating the leveling unit 400.

However, according to the floating stage having such a structure, a space 340 for lifting and lowering the male screw portion 410 must be provided at the upper end of the female screw portion 330. In the conventional floating stage, The air supplied to the upper portion of the plate 300 flows into the upper portion of the plate 300 through the upper and lower plates 310 and 310 to generate a vortex so that the flow of air becomes unstable. It is not suitable for use in a manufacturing process of a flat panel display requiring high precision.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems,

It is an object of the present invention to provide an air floating stage in which both side ends of a floating substrate are prevented from being bent downward by increasing the amount of supply of both end feed lines of the plate.

It is another object of the present invention to provide an air floating stage in which a substrate floated on a plate can maintain a constant horizontal level by stabilizing the flow of air supplied to an upper portion of the plate.

According to an aspect of the present invention, there is provided an air floating stage,

A plate on which the substrate is raised;

A plurality of supply lines vertically arranged on an upper surface of the plate and spaced apart from each other in the transverse direction of the plate; And

A plurality of exhaust lines arranged vertically through the upper surface of the plate and arranged to be alternately arranged in the transverse direction of the plates and alternately with the respective supply lines;

, &Lt; / RTI >

Wherein each of the air supply lines comprises a plurality of air supply holes arranged along a longitudinal direction of the plate, each of the air supply lines is composed of a plurality of air discharge holes arranged along the longitudinal direction of the plate,

And the air supply line located at both ends of the plate among the air supply lines is made to have a larger air supply amount than the non-end side air supply line.

At least four internally threaded portions formed vertically through the plate are formed,

At least four leveling units are formed at the lower portion of the plate to have a male screw portion at an upper end to be fastened to the female screw portion and support the plate,

Inside the leveling unit, a vent hole for interconnecting the upper side and the outer side of the leveling unit is formed.

In the air floating stage according to the present invention,

By increasing the supply amount of the both-end-side supply line of the plate, it is possible to prevent both side ends of the floated substrate from being bent downward.

Further, since the air introduced into the upper end of the female screw portion is discharged through the vent hole formed in the leveling unit, the vortex of the air supplied to the upper portion of the plate is prevented, so that the flow of air is stabilized, There is an effect that can be.

1 is a schematic cross-sectional view of a conventional floating stage;
2 is a schematic view of a conventional floating stage,
3 is a perspective view of an air floating stage according to an embodiment of the present invention;
4 is a schematic cross-sectional view of an air-floating stage according to an embodiment of the present invention.
5 is another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 and 4, the air floating stage according to the embodiment of the present invention mainly comprises a plate 100 and a leveling unit 200.

Looking at each configuration,

The plate (100)

As shown in FIGS. 3 and 4, the upper surface of the substrate 100 is formed in a flat plate shape, and the substrate 10 is lifted and vertically passed through the upper surface of the substrate 10 and spaced apart from each other in the transverse direction of the plate 100 A plurality of exhaust lines 110 and a plurality of exhaust lines 110 arranged vertically through the upper surface of the plate 100 and spaced from each other in the transverse direction of the plate 100 and arranged alternately with the respective supply lines 110, 120).

Each of the air supply lines 110 is composed of a plurality of air supply holes 111 arranged along the longitudinal direction of the plate 100, And a plurality of exhaust holes 121 arranged along the exhaust port.

Although not shown, separate air compressing devices and an air supply manifold for blowing air to the upper side of the plate 100 are connected to the air supply holes 111 at the lower side of the plate 100, A separate air suction device and an exhaust manifold for exhausting the air supplied to the upper side of the plate 100 to the lower side of the plate 100 may be installed.

3, the distance D between the air supply holes 111a arranged in the air supply line 110a located at the both ends of the plate 100 is set to be shorter than the distance D between the air supply lines 110 on the non- Are formed so as to be narrower than the interval (D1) of the arrayed feed pores (111).

The number of the supply holes 111a arranged in the supply line 110a at both ends of the plate 100 is larger than the number of the supply holes 111 arranged in the supply line 110 at the non-end side.

At this time, the number of the supply holes 111a arranged in the supply line 110a located at both ends of the plate 100 is determined to such an extent that the supply amount lost to the side of the plate 100 can be further discharged desirable.

According to the above configuration,

As shown in FIG. 4, air ejected from the air supply line 110a located at both ends of the plate 100 is largely lost to the side of the plate 100. As shown in FIG.

However, since the number of the supply holes 111a arranged in the supply line 110a located at both ends of the plate 100 is larger than the number of the supply holes 111 arranged in the non-supply side supply line 110, It is possible to further eject air toward the substrate 10 as much as the amount of air supplied to the side of the air conditioner 100 is lost.

Therefore, the substrate 10 lifted from the upper surface of the plate 100 is supplied with a predetermined amount of air to all the portions including both side ends thereof, thereby preventing both side ends of the substrate 10 from being bent downward.

5, the air holes 111a arranged in the air supply line 110a at both ends of the plate 100 may have various shapes.

In other words, the shape of the air supply holes 111a arranged at both ends of the plate 100 can be changed in the range in which the amount of air supplied to the side of the plate 100 can be further ejected toward the substrate 10, Like a long hole 112a, as shown in FIG.

Also, as shown in FIG. 5B, the shape of the feed holes 111a arranged at both ends of the plate 100 may be various shapes such as a structure in which the feed holes 111a are arranged in two rows.

As shown in FIG. 3 and FIG. 4, it is preferable that at least four or more internal threaded portions 130 are formed on the plate 100 so as to include the corner portions of the plate 100 .

The leveling unit (200)

As shown in Figure 4,

And has a male threaded portion 210 formed at an upper end thereof. The male threaded portion 210 is formed in a cylindrical shape and is fastened to the female threaded portion 130.

The leveling unit 200 is provided with four or more teeth, and each male screw part 130 is fastened to the female screw part 130 to support the plate 100.

Thus, the user can adjust the height and the horizontality of the plate 100 by rotating each leveling unit 200.

A space portion 140 for lifting and lowering the male screw portion 210 is provided at the upper end of the female screw portion 130 in a state where the plate 100 and the leveling unit 200 are coupled to each other, 200 have a ventilation hole 220 for interconnecting the upper and the outer sides of the leveling unit 200.

The ventilation holes 220 allow the air introduced from the upper portion of the plate 100 to the space portion 140 to be exhausted to the lower side of the plate 100 through the air supply mechanism 110, Thereby enabling the substrate 10 to maintain a constant horizontal level.

In other words, if the air introduced into the space portion 140 can not be quickly exhausted, the air introduced into the space portion 140 generates a vortex flow to generate an unstable air flow on the upper surface of the plate 100 And it becomes difficult to maintain the horizontal position of the substrate 10.

According to the leveling unit 200 of the present invention, since the air introduced into the space 140 can be quickly exhausted through the air vent 220, the flow of air supplied to the upper portion of the plate 100 The substrate 10 which has been stabilized and floated on the plate 100 can maintain a constant horizontal level.

A separate air suction device and an exhaust manifold may be installed in the air vent 220 in order to discharge the air introduced into the space 140 more quickly.

On the upper surface of the leveling unit 200, a tool insertion groove 230 connected to the vent hole 220 is formed.

The tool insertion groove 230 is formed in a hexagonal groove so that the user rotates the leveling unit 200 on the upper side of the plate 100 by using a wrench so that the height and horizontal It is possible to adjust the degree of the display.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, The present invention is not limited thereto.

10; Board
100; plate
110, 110a; Supply line
111, 111a; Grade
112a; Long hole
120; 120a; Exhaust line
121, 121a; Grade
130; Female thread
140; Space portion
200; Leveling unit
210; Male threads
220; Vent
230; Tool insert groove

Claims

A plate 100 on which the substrate 10 is lifted;
A plurality of supply lines 110 formed vertically through the upper surface of the plate 100 and spaced apart from each other in the transverse direction of the plate 100; And
A plurality of exhaust lines 120 vertically arranged on the upper surface of the plate 100 and arranged to be spaced apart from each other in the transverse direction of the plate 100 and arranged alternately with the respective supply lines 110;
, &Lt; / RTI >

Each of the air supply lines 110 includes a plurality of air supply holes 111 arranged along the longitudinal direction of the plate 100 and each of the air discharge lines 120 is arranged along the longitudinal direction of the plate 100 And a plurality of exhaust holes 121,

Wherein the air supply line (110a) located at both ends of the plate (100) of the air supply line (110) has a larger air supply amount than the non-end side air supply line (110).

The method according to claim 1,
Each of the air supply holes 111a arranged in the air supply line 110a located at both ends of the plate 100 is narrower than each of the air supply holes 111 arranged in the air supply line 110 on the non- And the air-floating stage.

The method according to claim 1,
Four or more internally threaded portions 130 are formed in the plate 100 and a male screw portion 140 is formed at an upper end of the plate 100 to be fastened to the female threaded portion 130, 0.0 > 200 < / RTI >
Is formed on the surface of the air-floating stage.

The method of claim 3,
Wherein the leveling unit (200) is provided with a ventilation hole (220) for interconnecting the upper side and the outer side of the leveling unit (200).

5. The method of claim 4,
Wherein an upper surface of the leveling unit (200) is formed with a tool insertion groove (230) connected to the vent hole (220).