TWI493741B - 薄層太陽能模組用的回收方法 - Google Patents

薄層太陽能模組用的回收方法 Download PDF

Info

Publication number
TWI493741B
TWI493741B TW098116367A TW98116367A TWI493741B TW I493741 B TWI493741 B TW I493741B TW 098116367 A TW098116367 A TW 098116367A TW 98116367 A TW98116367 A TW 98116367A TW I493741 B TWI493741 B TW I493741B
Authority
TW
Taiwan
Prior art keywords
layer
thin
solar module
film solar
substrate layer
Prior art date
Application number
TW098116367A
Other languages
English (en)
Other versions
TW201005982A (en
Inventor
Uwe Wagner
Frank Schmieder
Original Assignee
Jenoptik Automatisierungstech
Ctf Solar Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Automatisierungstech, Ctf Solar Gmbh filed Critical Jenoptik Automatisierungstech
Publication of TW201005982A publication Critical patent/TW201005982A/zh
Application granted granted Critical
Publication of TWI493741B publication Critical patent/TWI493741B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B09DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09BDISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B3/00Destroying solid waste or transforming solid waste into something useful or harmless
    • B09B3/40Destroying solid waste or transforming solid waste into something useful or harmless involving thermal treatment, e.g. evaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29BPREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B17/00Recovery of plastics or other constituents of waste material containing plastics
    • B29B17/02Separating plastics from other materials
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B7/00Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
    • C22B7/001Dry processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/048Encapsulation of modules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29BPREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B17/00Recovery of plastics or other constituents of waste material containing plastics
    • B29B17/02Separating plastics from other materials
    • B29B2017/0213Specific separating techniques
    • B29B2017/0255Specific separating techniques using different melting or softening temperatures of the materials to be separated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2009/00Layered products
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16Remelting metals
    • C22B9/22Remelting metals with heating by wave energy or particle radiation
    • C22B9/221Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps
    • C22B9/223Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps by laser beams
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00Technologies for solid waste management
    • Y02W30/20Waste processing or separation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00Technologies for solid waste management
    • Y02W30/50Reuse, recycling or recovery technologies
    • Y02W30/62Plastics recycling; Rubber recycling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00Technologies for solid waste management
    • Y02W30/50Reuse, recycling or recovery technologies
    • Y02W30/82Recycling of waste of electrical or electronic equipment [WEEE]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/918Delaminating processes adapted for specified product, e.g. delaminating medical specimen slide
    • Y10S156/919Delaminating in preparation for post processing recycling step
    • Y10S156/922Specified electronic component delaminating in preparation for recycling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1153Temperature change for delamination [e.g., heating during delaminating, etc.]
    • Y10T156/1158Electromagnetic radiation applied to work for delamination [e.g., microwave, uv, ir, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19Delaminating means
    • Y10T156/1911Heating or cooling delaminating means [e.g., melting means, freezing means, etc.]
    • Y10T156/1917Electromagnetic radiation delaminating means [e.g., microwave, uv, ir, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49815Disassembling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49815Disassembling
    • Y10T29/49821Disassembling by altering or destroying work part or connector

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geology (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Photovoltaic Devices (AREA)
  • Laser Beam Processing (AREA)

Description

薄層太陽能模組用的回收方法
該方法係用於對基板層由玻璃或其他雷射透明材料構成的薄層太陽能模組進行回收。
薄層太陽能模組係由基板層及覆蓋層構成,該基板層上依次覆有第一電極層、半導體層、第二電極層及用於封閉上述功能層的塑性層。該塑性層在一環行邊緣區域內直接覆在該基板層上。
不論該等功能層係由何種材料構成,只要基板層可被所用雷射輻射穿透,第一電極層可將所用雷射輻射吸收,即可使用該方法。
先前技術中存在用雷射輻射對單個或多個功能層進行建構及為邊緣徹底除去塗層的習知方法,此類方法係使被待移除層吸收的雷射輻射相對於雷射透明基板層之敞露表面定位,並將該雷射輻射對準該基板層。
本發明之方法必須使用可被第一電極層吸收的雷射輻射。此意為,需用雷射器為邊緣除去塗層及/或至少對該第一電極層進行建構的太陽能模組製造商亦可藉由該雷射器實施該回收方法。具有有利於邊緣除層之射束擴展及射束整形效果的裝置亦適用於本發明之方法的實施。
建構及邊緣除層之重點在於沿寬度處於20μm至90μm或10mm至60mm範圍內的軌跡徹底移除塗層,但不得使基板載體受損,然對於該回收方法而言,基板載體是否受損並不重要。
相對而言,本發明僅需使功能層之層結構與基板層分離,而非將一或多個塗層徹底移除,其中,僅第一電極層至少部分蒸發,緊接該第一電極層塗覆的半導體層儘可能不受影響。
同時亦須保證能量之施加所引起的局部熱負荷不會使塑性層熔化,藉此使該塑性層及保持原樣的功能層儘可能成一體地附著在覆蓋層上。
下文將藉由實施例對本發明進行詳細說明。
實施該方法時,所有實施例均須自薄層太陽能模組之基板層的敞露表面用處理用雷射輻射對該基板層進行掃描。
根據第一實施例,先對邊緣區域所包圍之內部區域進行完整掃描,藉此避免在材料蒸發過程中產生的氣體逸出。所產生之該封閉氣體容積可防止第一電極層之材料熔化所形成的熔液在基板層上凝固,從而使功能層之部分層結構再度與該基板層相連。
該掃描過程有利地沿在矩形薄層太陽能模組上縱向或橫向延伸的軌跡進行。藉由直接緊密相接地對該等軌跡進行掃描,可形成一封閉面,第一電極層藉由該封閉面與基板層分離,從而使在此過程中所形成的間隙內產生氣體容積。
然此種掃描方式會產生較高之熱負荷,該熱負荷主要會使塑性層非期望地變軟。
若以等於軌跡寬度或多倍軌跡寬度的間距對該等軌跡進行掃描,則可減小該熱負荷。
藉由沿彼此間隔一定距離之軌跡為該表面施加處理用雷射輻射,隨後再為間隔區內以相同軌跡間距錯開布置的軌跡施加處理用雷射輻射,可在空間及時間上實現比對軌跡進行相接掃描更均勻的能量施加。
藉此可在以縮短處理時間為目的之製程參數保持不變的情況下減小塑性層所受到的熱負荷。
實施軌跡掃描之有利方式係為,將處理用雷射輻射集中成一條垂直於軌跡方向的線,並沿軌跡方向移動該處理用雷射輻射。抑或使掃描器沿軌跡方向進行相對於薄層太陽能模組的移動,雷射束則沿軌跡寬度之方向對軌跡進行掃描。藉由此兩種運動的疊加可依次為該等軌跡所包圍的整個表面施加雷射輻射,其中,軌跡寬度可藉由掃描角之規定而發生變化。
在掃描過程中可有利地自覆蓋層一側對塑性層進行冷卻,其實現方式係使薄層太陽能模組的覆蓋層整面與散熱片接觸。
對內部區域進行完整掃描,從而使功能層之層結構與基板層分離後,僅邊緣區域內之塑性層仍附著在基板層上。
此連接亦可藉由雷射輻射加以解除。自基板層在邊緣區域內僅藉由熱輻射或熱傳導將塑性層有利地均勻加熱至軟化溫度,以便將仍附著在覆蓋層上的塑性層隨覆蓋層及仍附著在塑性層上之功能層一起自基板上移除。僅邊緣區域被加熱的塑性層在其內部區域仍與覆蓋層相連。
實施過此處理步驟後,基板層與薄層太陽能模組之其餘部分分離。
隨後可藉由與使塑性層之邊緣區域與基板層分離之方式相同的方式,使仍帶有功能層之層結構的塑性層與覆蓋層分離。
上述處理的結果是一方面得到須接受進一步分離處理的基板層及覆蓋層,此二者通常由相同材料(特別是玻璃)構成,另一方面得到須接受進一步分離處理的塑性層,該塑性層與第二電極層及半導體層相連。
實驗結果表明,使所產生之氣體容積保持被封閉狀態,此措施並非在任何情況下均為有利舉措。亦即,將所產生之氣體容積保持在基板層及第一電極層之間以及藉由附加供氣增大該氣體容積或藉由排氣減小該氣體容積之舉措是否有利於製程,此點特定言之係取決於該第一電極層之材料的特性。
因此,第二實施例係先藉由邊緣區域(在該邊緣區域內,塑性層直接附著在基板層上)構建至少一開口,隨後再根據第一實施例對內部區域進行掃描。該開口可藉由在該邊緣區域內進行局部加熱(例如用熱空氣)而形成,並藉由楔狀物或管件之插入而保持暢通。在此情況下,所產生之氣體容積即可透過該開口逸出。亦可藉由該開口輸入外部氣體,以便產生有利於該分離過程的輕微過壓。

Claims (9)

  1. 一種薄層太陽能模組回收方法,其中,該等薄層太陽能模組係由基板層、塑性層及覆蓋層構成,該基板層具有由第一電極層、半導體層及第二電極層構成的功能層的結構,該塑性層用於封裝該些功能層,該些功能層且在一環行邊緣區域內且包含一內區域且直接覆在該基板層上,其中,該基板層可被處理用雷射輻射穿透,該第一電極層可將該處理用雷射輻射吸收,其特徵在於,用該處理用雷射輻射對該基板層之敞露表面透過該內區域進行掃描,使該第一電極層藉由對該處理用雷射輻射的吸收至少部分蒸發,從而使該等功能層之層結構與該基板層分離,且產生封入的氣泡體積以避免該層結構再與該基材層接合,藉此使該從功能層(其與該塑膠層和覆蓋層相連)分離的基板層可進一步分別處理。
  2. 如申請專利範圍第1項之薄層太陽能模組回收方法,其中:透過該覆蓋層將該塑性層加熱至軟化溫度,自該塑性層上移除該覆蓋層,藉此使該從功能層(其與該塑膠層連接)分離的覆蓋層可進一步分別處理。
  3. 如申請專利範圍第1項之薄層太陽能模組回收方法,其中:對該基板層進行完整掃描,隨後對該邊緣區域進行加熱。
  4. 如申請專利範圍第3項之薄層太陽能模組回收方 法,其中:沿彼此鄰接之軌跡對該內部區域進行掃描,從而形成一封閉面,該第一電極層藉由該封閉面與該基板層分離,從而形成一封閉間隙,所產生之氣體容積封閉在該間隙內。
  5. 如申請專利範圍第1項之薄層太陽能模組回收方法,其中:以等於軌跡寬度或多倍軌跡寬度的間距沿彼此間隔一定距離之軌跡對該內部區域進行掃描,藉此減小熱負荷。
  6. 如申請專利範圍第1項之薄層太陽能模組回收方法,其中:在該掃描過程中自該覆蓋層一側對該塑性層進行冷卻。
  7. 如申請專利範圍第4項之薄層太陽能模組回收方法,其中:在對該內部區域進行掃描之前,先在該環行邊緣區域內構建至少一開口。
  8. 如申請專利範圍第7項之薄層太陽能模組回收方法,其中:藉由該至少一開口自該間隙內排出所產生的氣體。
  9. 如申請專利範圍第7項之薄層太陽能模組回收方法,其中:藉由該至少一開口向該間隙內輸入外部氣體。
TW098116367A 2008-06-13 2009-05-18 薄層太陽能模組用的回收方法 TWI493741B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008028425 2008-06-13
DE102008047675.7A DE102008047675B4 (de) 2008-06-13 2008-09-15 Recycling-Verfahren für Dünnschichtsolarzellenmodule

Publications (2)

Publication Number Publication Date
TW201005982A TW201005982A (en) 2010-02-01
TWI493741B true TWI493741B (zh) 2015-07-21

Family

ID=41130175

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098116367A TWI493741B (zh) 2008-06-13 2009-05-18 薄層太陽能模組用的回收方法

Country Status (6)

Country Link
US (1) US7972473B2 (zh)
EP (1) EP2133923B1 (zh)
JP (1) JP5409127B2 (zh)
KR (1) KR101607706B1 (zh)
DE (1) DE102008047675B4 (zh)
TW (1) TWI493741B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8288680B1 (en) * 2010-02-24 2012-10-16 Vinyl Technologies, Inc. Thin film remediation and edge deletion process
DE102011103589A1 (de) * 2011-05-30 2012-12-06 Boraident Gmbh Verfahren zum Entfernen einer Schicht auf einem Trägersubstrat
TWI449486B (zh) * 2012-01-11 2014-08-11 E Ink Holdings Inc 基板剝離製程
DE102012010904B3 (de) * 2012-06-01 2013-05-29 Eugen Rold GmbH Verfahren und Vorrichtung zum Recyclen der Bodenplatten von Photovoltaik-Anlagen
WO2015051977A1 (de) * 2013-10-10 2015-04-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum separierenden trennen von schichten eines aus mindestens zwei schichten gebildeten verbundbauteils
HUE051753T2 (hu) 2017-01-26 2021-03-29 Gross Leander Kilian Eljárás és berendezés kompozit komponens különbözõ anyagrétegeinek szétválasztására
US10688535B1 (en) 2018-01-10 2020-06-23 Owens-Brockway Glass Container Inc. Obtaining cullet from thin film solar modules
CN108807602A (zh) * 2018-07-23 2018-11-13 北京铂阳顶荣光伏科技有限公司 一种薄膜太阳能基板电池材料的回收装置和回收方法
KR20200086390A (ko) 2019-01-08 2020-07-17 주식회사 에스엠케미칼 폴리실리콘의 폐기물을 이용한 레진 제조방법
DE102021109591B4 (de) 2021-04-16 2023-01-19 Wolfram Palitzsch Verfahren und Vorrichtung zum Trennen von Multischichtverbundmaterialien
WO2023147803A1 (de) * 2022-02-07 2023-08-10 FLAXTEC GmbH Verfahren zur trennung von wertstoffen in einem verbundbauteil
DE102022109249A1 (de) 2022-04-14 2023-10-19 Wolfram Palitzsch Verfahren und Vorrichtung zum Trennen von Multischichtverbundmaterialien

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002540950A (ja) * 1999-04-07 2002-12-03 シーメンス ソーラー ゲゼルシャフト ミット ベシュレンクテル ハフツング 担体材料上の薄層の剥離のための装置及び方法
JP2004186547A (ja) * 2002-12-05 2004-07-02 Showa Shell Sekiyu Kk Cis系薄膜太陽電池モジュールの構成部材回収方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19703104A1 (de) * 1997-01-29 1998-07-30 Walter Schlutius Verfahren und Vorrichtungen zum Recykeln von Datenträgerplatten
DE19731160C2 (de) * 1997-07-21 1999-05-27 Pilkington Solar Int Gmbh Verfahren zum Trennen der Komponenten einer Verbundglasscheibe
JP2000269535A (ja) * 1999-01-14 2000-09-29 Canon Inc 太陽電池モジュール、発電装置、太陽電池モジュールの分離方法及び太陽電池モジュールの再生方法
JP4329183B2 (ja) * 1999-10-14 2009-09-09 ソニー株式会社 単一セル型薄膜単結晶シリコン太陽電池の製造方法、バックコンタクト型薄膜単結晶シリコン太陽電池の製造方法および集積型薄膜単結晶シリコン太陽電池の製造方法
US20030116185A1 (en) * 2001-11-05 2003-06-26 Oswald Robert S. Sealed thin film photovoltaic modules
JP2006179626A (ja) * 2004-12-22 2006-07-06 Showa Shell Sekiyu Kk Cis系薄膜太陽電池モジュール、該太陽電池モジュールの製造方法及び分離方法
JP2008042017A (ja) 2006-08-08 2008-02-21 Tomozumi Kamimura レジストを回収可能なレジスト剥離除去方法及びそれを用いる半導体製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002540950A (ja) * 1999-04-07 2002-12-03 シーメンス ソーラー ゲゼルシャフト ミット ベシュレンクテル ハフツング 担体材料上の薄層の剥離のための装置及び方法
JP2004186547A (ja) * 2002-12-05 2004-07-02 Showa Shell Sekiyu Kk Cis系薄膜太陽電池モジュールの構成部材回収方法

Also Published As

Publication number Publication date
TW201005982A (en) 2010-02-01
DE102008047675B4 (de) 2014-05-15
US7972473B2 (en) 2011-07-05
US20090308535A1 (en) 2009-12-17
DE102008047675A1 (de) 2009-12-24
EP2133923B1 (de) 2017-04-19
JP2009302533A (ja) 2009-12-24
KR101607706B1 (ko) 2016-03-30
JP5409127B2 (ja) 2014-02-05
EP2133923A3 (de) 2012-12-19
KR20090129944A (ko) 2009-12-17
EP2133923A2 (de) 2009-12-16

Similar Documents

Publication Publication Date Title
TWI493741B (zh) 薄層太陽能模組用的回收方法
EP1737048B1 (en) Method for manufacturing solar cell
TWI555194B (zh) 封裝電子組件之裝置
TWI417954B (zh) Wafer Segmentation Method
JP2009135448A5 (zh)
KR20090122211A (ko) 레이저를 이용한 접합 방법, 이 방법으로 접합된 기판 및 그 이용
CN103476555A (zh) 在衬底中生成高质量的孔或凹进或井的方法
TW200924895A (en) Surface crack sealing method
JP2009187823A (ja) 気密容器の製造方法
US9530981B2 (en) Sealing method for flat panel display device
TW202032647A (zh) 雷射加工方法、及半導體構件製造方法
JP6776801B2 (ja) 電子装置及びその製造方法
JP2012170955A (ja) パターン形成方法
JP2010098003A (ja) レーザー結晶化法
CN105185694A (zh) 多晶硅薄膜形成方法、掩膜版、多晶硅薄膜和薄膜晶体管
CN108405487A (zh) 一种无损激光清洗方法
JP2008130590A (ja) 複合処理装置、及び、複合処理方法
JP2011067823A (ja) レーザ加工方法およびレーザ加工装置
CA3026614C (en) Method for performing delamination of a polymer film
WO2012147200A1 (ja) レーザ加工装置及び方法
JP2006196749A (ja) 太陽電池の製造方法及び装置
JP3852176B2 (ja) レーザープラズマ加工された多層フィルム及びそのレーザープラズマ加工方法
JP2008188661A (ja) レーザ加工方法
JPS6114727A (ja) 半導体装置の製造方法
KR20140006812A (ko) 레이저 빔을 이용한 마이크로전자 필름의 에칭 방법