TWI491081B - 可表面安裝之光電組件及可表面安裝之光電組件之製造方法 - Google Patents
可表面安裝之光電組件及可表面安裝之光電組件之製造方法 Download PDFInfo
- Publication number
- TWI491081B TWI491081B TW100120522A TW100120522A TWI491081B TW I491081 B TWI491081 B TW I491081B TW 100120522 A TW100120522 A TW 100120522A TW 100120522 A TW100120522 A TW 100120522A TW I491081 B TWI491081 B TW I491081B
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- Prior art keywords
- wafer carrier
- wafer
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- semiconductor wafer
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/8506—Containers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/853—Encapsulations characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/855—Optical field-shaping means, e.g. lenses
- H10H20/856—Reflecting means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/858—Means for heat extraction or cooling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0362—Manufacture or treatment of packages of encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0364—Manufacture or treatment of packages of interconnections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/127—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed characterised by arrangements for sealing or adhesion
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
- H10W76/12—Containers or parts thereof characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Led Device Packages (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010023815A DE102010023815A1 (de) | 2010-06-15 | 2010-06-15 | Oberflächenmontierbares optoelektronisches Bauelement und Verfahren zur Herstellung eines oberflächenmontierbaren optoelektronischen Bauelements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201208152A TW201208152A (en) | 2012-02-16 |
| TWI491081B true TWI491081B (zh) | 2015-07-01 |
Family
ID=44246372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100120522A TWI491081B (zh) | 2010-06-15 | 2011-06-13 | 可表面安裝之光電組件及可表面安裝之光電組件之製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9240536B2 (enExample) |
| EP (1) | EP2583318B1 (enExample) |
| JP (1) | JP5819414B2 (enExample) |
| KR (1) | KR101843402B1 (enExample) |
| CN (1) | CN102939669B (enExample) |
| DE (1) | DE102010023815A1 (enExample) |
| TW (1) | TWI491081B (enExample) |
| WO (1) | WO2011157522A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010023815A1 (de) | 2010-06-15 | 2011-12-15 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares optoelektronisches Bauelement und Verfahren zur Herstellung eines oberflächenmontierbaren optoelektronischen Bauelements |
| DE102011114641B4 (de) * | 2011-09-30 | 2021-08-12 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Halbleiterbauelement und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauelements |
| JP5991575B2 (ja) * | 2012-05-02 | 2016-09-14 | 大日本印刷株式会社 | 樹脂付リードフレーム、多面付ledパッケージ、樹脂付リードフレームの製造方法およびledパッケージの製造方法 |
| DE102012211220A1 (de) | 2012-06-28 | 2014-01-02 | Osram Opto Semiconductors Gmbh | Elektrisches Bauteil und Verfahren zum Herstellen von elektrischen Bauteilen |
| DE102012109905B4 (de) * | 2012-10-17 | 2021-11-11 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Halbleiterbauteilen |
| DE102013100711B4 (de) * | 2013-01-24 | 2021-07-01 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung einer Vielzahl optoelektronischer Bauelemente |
| DE102013207111B4 (de) | 2013-04-19 | 2021-07-01 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Bauelement |
| US9335034B2 (en) * | 2013-09-27 | 2016-05-10 | Osram Sylvania Inc | Flexible circuit board for electronic applications, light source containing same, and method of making |
| DE102013225552A1 (de) * | 2013-12-11 | 2015-06-11 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
| DE102014103034A1 (de) * | 2014-03-07 | 2015-09-10 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu seiner Herstellung |
| JP6592902B2 (ja) * | 2014-03-28 | 2019-10-23 | 日亜化学工業株式会社 | 発光装置 |
| DE102016101942B4 (de) * | 2016-02-04 | 2022-07-21 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zum Herstellen einer optoelektronischen Leuchtvorrichtung |
| DE102017105017A1 (de) | 2017-03-09 | 2018-09-13 | Osram Opto Semiconductors Gmbh | Herstellung von strahlungsemittierenden bauelementen |
| US11562947B2 (en) * | 2020-07-06 | 2023-01-24 | Panjit International Inc. | Semiconductor package having a conductive pad with an anchor flange |
| US11955466B2 (en) | 2020-08-25 | 2024-04-09 | Nichia Corporation | Light emitting device |
| US12002909B2 (en) | 2020-08-25 | 2024-06-04 | Nichia Corporation | Surface-mounted multi-colored light emitting device |
| US12176220B2 (en) | 2020-12-15 | 2024-12-24 | Stmicroelectronics Pte Ltd | Optical sensor package and method of making an optical sensor package |
| DE102020133755A1 (de) * | 2020-12-16 | 2022-06-23 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Bauelement mit strukturiertem leiterrahmen und verfahren zur herstellung eines bauelements |
| DE102021113592A1 (de) | 2021-05-26 | 2022-12-01 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches halbleiterbauteil und paneel |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6459130B1 (en) * | 1995-09-29 | 2002-10-01 | Siemens Aktiengesellschaft | Optoelectronic semiconductor component |
| WO2010017790A1 (de) * | 2008-08-12 | 2010-02-18 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares, optoelektronisches halbleiterbauteil |
| DE102008051928A1 (de) * | 2008-10-16 | 2010-04-22 | Osram Opto Semiconductors Gmbh | Elektrischer Anschlussleiter für ein Halbleiterbauelement, Halbleiterbauelement und Verfahren zur Herstellung eines elektrischen Anschlussleiters |
| DE102008053489A1 (de) * | 2008-10-28 | 2010-04-29 | Osram Opto Semiconductors Gmbh | Trägerkörper für ein Halbleiterbauelement, Halbleiterbauelement und Verfahren zur Herstellung eines Trägerkörpers |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2556821Y2 (ja) | 1991-12-09 | 1997-12-08 | シャープ株式会社 | 発光装置 |
| TW466720B (en) * | 2000-05-22 | 2001-12-01 | Siliconware Precision Industries Co Ltd | Semiconductor package with flash-prevention structure and manufacture method |
| JP3733114B2 (ja) * | 2000-07-25 | 2006-01-11 | 株式会社メヂアナ電子 | プラスチックパッケージベース及びエアキャビティ型パッケージ |
| US6949771B2 (en) | 2001-04-25 | 2005-09-27 | Agilent Technologies, Inc. | Light source |
| JP4009097B2 (ja) | 2001-12-07 | 2007-11-14 | 日立電線株式会社 | 発光装置及びその製造方法、ならびに発光装置の製造に用いるリードフレーム |
| CN100338786C (zh) * | 2002-06-19 | 2007-09-19 | 三垦电气株式会社 | 半导体发光装置及其制法和半导体发光装置用反射器 |
| DE10229067B4 (de) | 2002-06-28 | 2007-08-16 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
| US6830496B2 (en) * | 2003-01-22 | 2004-12-14 | Kaylu Industrial Corporation | Method of fabricating light emitting diode device with multiple encapsulants |
| US6803607B1 (en) * | 2003-06-13 | 2004-10-12 | Cotco Holdings Limited | Surface mountable light emitting device |
| US6953891B2 (en) * | 2003-09-16 | 2005-10-11 | Micron Technology, Inc. | Moisture-resistant electronic device package and methods of assembly |
| US7183588B2 (en) * | 2004-01-08 | 2007-02-27 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Light emission device |
| TWI239655B (en) * | 2004-02-23 | 2005-09-11 | Siliconware Precision Industries Co Ltd | Photosensitive semiconductor package with support member and method for fabricating the same |
| KR100631903B1 (ko) * | 2005-02-17 | 2006-10-11 | 삼성전기주식회사 | 고출력 led 하우징 및 그 제조 방법 |
| JP4711715B2 (ja) | 2005-03-30 | 2011-06-29 | 株式会社東芝 | 半導体発光装置及び半導体発光ユニット |
| DE102005041064B4 (de) | 2005-08-30 | 2023-01-19 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Oberflächenmontierbares optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
| US20070069418A1 (en) | 2005-09-28 | 2007-03-29 | Chih-Yuan Liao | In mold manufacturing of an object comprising a functional element |
| TW200718478A (en) * | 2005-09-28 | 2007-05-16 | Sipix Imaging Inc | In mold manufacturing of an object comprising a functional element |
| JP2007109887A (ja) | 2005-10-13 | 2007-04-26 | Toshiba Corp | 半導体発光装置 |
| DE102006046678A1 (de) * | 2006-09-29 | 2008-04-03 | Osram Opto Semiconductors Gmbh | Gehäuse für ein optoelektronisches Bauelement, optoelektronisches Bauelement und Verfahren zum Herstellen eines Gehäuses für ein optoelektronisches Bauelement |
| KR100998233B1 (ko) * | 2007-12-03 | 2010-12-07 | 서울반도체 주식회사 | 슬림형 led 패키지 |
| DE102008024704A1 (de) | 2008-04-17 | 2009-10-29 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauteil und Verfahren zur Herstellung eines optoelektronischen Bauteils |
| JP2010003877A (ja) | 2008-06-20 | 2010-01-07 | Panasonic Corp | リードフレームおよび光半導体パッケージおよび光半導体装置および光半導体パッケージの製造方法 |
| US8258526B2 (en) * | 2008-07-03 | 2012-09-04 | Samsung Led Co., Ltd. | Light emitting diode package including a lead frame with a cavity |
| DE102010023815A1 (de) * | 2010-06-15 | 2011-12-15 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares optoelektronisches Bauelement und Verfahren zur Herstellung eines oberflächenmontierbaren optoelektronischen Bauelements |
-
2010
- 2010-06-15 DE DE102010023815A patent/DE102010023815A1/de not_active Withdrawn
-
2011
- 2011-05-25 US US13/702,000 patent/US9240536B2/en not_active Expired - Fee Related
- 2011-05-25 WO PCT/EP2011/058583 patent/WO2011157522A1/de not_active Ceased
- 2011-05-25 CN CN201180029834.XA patent/CN102939669B/zh not_active Expired - Fee Related
- 2011-05-25 KR KR1020137000931A patent/KR101843402B1/ko not_active Expired - Fee Related
- 2011-05-25 JP JP2013514619A patent/JP5819414B2/ja not_active Expired - Fee Related
- 2011-05-25 EP EP11723032.6A patent/EP2583318B1/de not_active Not-in-force
- 2011-06-13 TW TW100120522A patent/TWI491081B/zh not_active IP Right Cessation
-
2015
- 2015-12-03 US US14/958,740 patent/US10020434B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6459130B1 (en) * | 1995-09-29 | 2002-10-01 | Siemens Aktiengesellschaft | Optoelectronic semiconductor component |
| WO2010017790A1 (de) * | 2008-08-12 | 2010-02-18 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares, optoelektronisches halbleiterbauteil |
| DE102008051928A1 (de) * | 2008-10-16 | 2010-04-22 | Osram Opto Semiconductors Gmbh | Elektrischer Anschlussleiter für ein Halbleiterbauelement, Halbleiterbauelement und Verfahren zur Herstellung eines elektrischen Anschlussleiters |
| DE102008053489A1 (de) * | 2008-10-28 | 2010-04-29 | Osram Opto Semiconductors Gmbh | Trägerkörper für ein Halbleiterbauelement, Halbleiterbauelement und Verfahren zur Herstellung eines Trägerkörpers |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201208152A (en) | 2012-02-16 |
| JP5819414B2 (ja) | 2015-11-24 |
| US20130126935A1 (en) | 2013-05-23 |
| CN102939669A (zh) | 2013-02-20 |
| JP2013534719A (ja) | 2013-09-05 |
| US20160087182A1 (en) | 2016-03-24 |
| KR20130058721A (ko) | 2013-06-04 |
| EP2583318B1 (de) | 2017-11-01 |
| DE102010023815A1 (de) | 2011-12-15 |
| WO2011157522A1 (de) | 2011-12-22 |
| US9240536B2 (en) | 2016-01-19 |
| EP2583318A1 (de) | 2013-04-24 |
| US10020434B2 (en) | 2018-07-10 |
| KR101843402B1 (ko) | 2018-03-29 |
| CN102939669B (zh) | 2016-08-03 |
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