TWI481592B - 使用氫氟醚做為傳熱液之方法 - Google Patents
使用氫氟醚做為傳熱液之方法 Download PDFInfo
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- TWI481592B TWI481592B TW099137541A TW99137541A TWI481592B TW I481592 B TWI481592 B TW I481592B TW 099137541 A TW099137541 A TW 099137541A TW 99137541 A TW99137541 A TW 99137541A TW I481592 B TWI481592 B TW I481592B
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- 238000012546 transfer Methods 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 42
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- 239000007788 liquid Substances 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 16
- 238000012360 testing method Methods 0.000 claims description 14
- 229910052731 fluorine Inorganic materials 0.000 claims description 12
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 125000004122 cyclic group Chemical group 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 125000001153 fluoro group Chemical group F* 0.000 claims description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
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- 239000000446 fuel Substances 0.000 claims description 2
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- 238000004817 gas chromatography Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 20
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- 239000012071 phase Substances 0.000 description 18
- 150000003839 salts Chemical class 0.000 description 15
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 14
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 14
- 239000000463 material Substances 0.000 description 14
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- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 10
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- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 9
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- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 8
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- JGTNAGYHADQMCM-UHFFFAOYSA-N perfluorobutanesulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F JGTNAGYHADQMCM-UHFFFAOYSA-N 0.000 description 6
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- NBUKAOOFKZFCGD-UHFFFAOYSA-N 2,2,3,3-tetrafluoropropan-1-ol Chemical compound OCC(F)(F)C(F)F NBUKAOOFKZFCGD-UHFFFAOYSA-N 0.000 description 4
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- BHBIPLOIWQSVID-UHFFFAOYSA-N thiohypofluorous acid Chemical compound SF BHBIPLOIWQSVID-UHFFFAOYSA-N 0.000 description 3
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 3
- 238000005160 1H NMR spectroscopy Methods 0.000 description 2
- WXJFKAZDSQLPBX-UHFFFAOYSA-N 2,2,3,3,4,4,4-heptafluorobutan-1-ol Chemical compound OCC(F)(F)C(F)(F)C(F)(F)F WXJFKAZDSQLPBX-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 2
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- 239000006184 cosolvent Substances 0.000 description 2
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- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 2
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- ZQTIKDIHRRLSRV-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluorobutane Chemical compound FC(F)C(F)(F)C(F)(F)C(F)(F)F ZQTIKDIHRRLSRV-UHFFFAOYSA-N 0.000 description 1
- YLOUSLWKRLJSPV-UHFFFAOYSA-N 1,1,1,2,2,3,3-heptafluoro-4-(2,2,3,3,4,4,4-heptafluorobutoxy)butane Chemical compound FC(F)(F)C(F)(F)C(F)(F)COCC(F)(F)C(F)(F)C(F)(F)F YLOUSLWKRLJSPV-UHFFFAOYSA-N 0.000 description 1
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- DUNFVEYOBISODU-UHFFFAOYSA-N 2,2,3,4,4,4-hexafluorobutyl 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound FC(F)(F)C(F)C(F)(F)COS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F DUNFVEYOBISODU-UHFFFAOYSA-N 0.000 description 1
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- 125000005005 perfluorohexyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 1
- 125000005007 perfluorooctyl group Chemical group FC(C(C(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)* 0.000 description 1
- 125000005008 perfluoropentyl group Chemical group FC(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)* 0.000 description 1
- 125000005009 perfluoropropyl group Chemical group FC(C(C(F)(F)F)(F)F)(F)* 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/610,765 US8261560B2 (en) | 2009-11-02 | 2009-11-02 | Methods of using hydrofluoroethers as heat transfer fluids |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201129534A TW201129534A (en) | 2011-09-01 |
| TWI481592B true TWI481592B (zh) | 2015-04-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099137541A TWI481592B (zh) | 2009-11-02 | 2010-11-01 | 使用氫氟醚做為傳熱液之方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8261560B2 (enExample) |
| EP (1) | EP2496658A4 (enExample) |
| JP (1) | JP5881608B2 (enExample) |
| KR (1) | KR20120085883A (enExample) |
| CN (1) | CN102597156B (enExample) |
| TW (1) | TWI481592B (enExample) |
| WO (1) | WO2011053628A2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8323524B2 (en) * | 2009-10-01 | 2012-12-04 | 3M Innovative Properties Company | Apparatus including hydrofluoroether with high temperature stability and uses thereof |
| ITMI20131225A1 (it) * | 2013-07-22 | 2015-01-23 | Miteni Spa | Nuovi composti organici fluorurati, procedimento per la loro preparazione e loro uso come intermedi di sintesi |
| US9540316B2 (en) | 2013-07-25 | 2017-01-10 | 3M Innovative Properties Company | Nitrogen containing hydrofluoroethers and methods of making same |
| JP6773326B2 (ja) * | 2013-12-20 | 2020-10-21 | スリーエム イノベイティブ プロパティズ カンパニー | 作動流体としてのフッ素化オレフィン及びその使用方法 |
| EP3169745B1 (en) * | 2014-07-16 | 2020-04-29 | 3M Innovative Properties Company | Hydrofluoroether olefins and methods of using same |
| US9938380B2 (en) | 2014-08-27 | 2018-04-10 | 3M Innovative Properties Company | Polyfluoroalkylated alkenes and silicone compounds prepared therefrom |
| US9938307B2 (en) | 2014-08-27 | 2018-04-10 | 3M Innovative Properties Company | Polyfluoroalkylated alkenes and silane compounds prepared therefrom |
| WO2016032739A1 (en) | 2014-08-27 | 2016-03-03 | 3M Innovative Properties Company | Novel polyfluoroalkylated alkenes and silicon compounds prepared therefrom |
| JP6621469B2 (ja) * | 2014-09-23 | 2019-12-18 | スリーエム イノベイティブ プロパティズ カンパニー | 窒素含有ハイドロフルオロエーテルを含む作動流体 |
| CN104892373A (zh) * | 2015-05-11 | 2015-09-09 | 武汉工程大学 | 一种2,2,3,3-四氟丙基-2,2,3,3,4,4,4-七氟丁基醚的制备方法 |
| CN107614560A (zh) * | 2015-06-05 | 2018-01-19 | 3M创新有限公司 | 氢氟烯烃及其使用方法 |
| JP6868623B2 (ja) * | 2015-12-02 | 2021-05-12 | スリーエム イノベイティブ プロパティズ カンパニー | アリル末端不飽和ヒドロフルオロアミン及びアリル末端不飽和ヒドロフルオロエーテル化合物並びにこれらの使用方法 |
| US10301293B2 (en) | 2016-03-11 | 2019-05-28 | 3M Innovative Properties Company | Amine-containing cyclic hydrofluoroethers and methods of using the same |
| JP6971249B2 (ja) * | 2016-03-11 | 2021-11-24 | スリーエム イノベイティブ プロパティズ カンパニー | アミン含有非環状ハイドロフルオロエーテル及びその使用方法 |
| EP3455322B1 (en) * | 2016-05-09 | 2021-03-03 | 3M Innovative Properties Company | Hydrofluoroolefins and methods of using same |
| EP3601470B1 (en) * | 2017-03-21 | 2024-04-24 | 3M Innovative Properties Company | A method for selectively making hfp-trimer |
| TWI692291B (zh) * | 2018-01-05 | 2020-04-21 | 威剛科技股份有限公司 | 動態隨機存取記憶體模組 |
| CN112752742A (zh) * | 2018-09-26 | 2021-05-04 | 3M创新有限公司 | 氢氟醚及其使用方法 |
| KR102854072B1 (ko) * | 2019-07-18 | 2025-09-03 | 사이언스코 스페셜티 폴리머스 이태리 에스.피.에이. | 낮은 gwp를 갖는 플루오린화 화합물을 이용한 열교환 방법 |
| CN113637463B (zh) * | 2020-05-11 | 2023-05-16 | 何健德 | 浸泡式介电液 |
| CN113604202B (zh) * | 2021-06-25 | 2023-07-04 | 浙江巨化技术中心有限公司 | 一种组合物、浸没式液冷剂及其应用以及浸没式液冷系统 |
| CN116063983A (zh) * | 2023-01-09 | 2023-05-05 | 浙江巨化技术中心有限公司 | 一种高热稳定性氢氟醚的应用 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001064465A (ja) * | 1999-08-26 | 2001-03-13 | Asahi Glass Co Ltd | 熱硬化性フッ素樹脂組成物 |
| TW200509453A (en) * | 2003-07-23 | 2005-03-01 | Du Pont | Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks |
| TW200804326A (en) * | 2006-05-19 | 2008-01-16 | 3M Innovative Properties Co | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| TW200838843A (en) * | 2006-12-06 | 2008-10-01 | 3M Innovative Properties Co | Hydrofluoroether compounds and processes for their preparation and use |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3739033A (en) * | 1971-03-01 | 1973-06-12 | Allied Chem | Novel fluorinated aliphatic triethers |
| NL7401510A (enExample) | 1973-02-09 | 1974-08-13 | ||
| US5925611A (en) | 1995-01-20 | 1999-07-20 | Minnesota Mining And Manufacturing Company | Cleaning process and composition |
| DE69611930T3 (de) | 1995-10-20 | 2010-05-20 | Minnesota Mining And Mfg. Co., Saint Paul | Hydrofluorether als tieftemperaturkühlmittel |
| JP2001342458A (ja) * | 2000-05-30 | 2001-12-14 | Three M Innovative Properties Co | 蒸発系熱伝達作動液 |
| US20030039919A1 (en) | 2001-06-18 | 2003-02-27 | David Bradley | Fluorine-containing compounds and polymers derived therefrom |
| JP2005023259A (ja) * | 2003-07-04 | 2005-01-27 | Central Glass Co Ltd | 不燃性組成物および合成樹脂発泡体の製造方法 |
| US7128133B2 (en) | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US6953082B2 (en) * | 2003-12-16 | 2005-10-11 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7208100B2 (en) * | 2004-01-14 | 2007-04-24 | E. I. Du Pont De Nemours And Company | 1-ethoxy-1,1,2,2,3,3,4,4,4-nonafluorobutane refrigerant compositions comprising a fluoroether and uses thereof |
| US7691282B2 (en) | 2005-09-08 | 2010-04-06 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| ITMI20060381A1 (it) * | 2006-03-02 | 2007-09-03 | Solvay Solexis Spa | Fluidi di scambio termico |
| RU2312097C1 (ru) | 2006-07-13 | 2007-12-10 | Государственное образовательное учреждение высшего профессионального образования Волгоградский государственный технический университет (ВолгГТУ) | Способ получения симметричных ди(полифторалкиловых) эфиров |
| US8003004B2 (en) | 2008-01-23 | 2011-08-23 | 3M Innovative Properties Company | Heat transfer apparatus and methods including hydrofluorocarbonates |
| US7988877B2 (en) * | 2008-11-03 | 2011-08-02 | 3M Innovative Properties Company | Methods of making fluorinated ethers, fluorinated ethers, and uses thereof |
| US20100263885A1 (en) | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
-
2009
- 2009-11-02 US US12/610,765 patent/US8261560B2/en not_active Expired - Fee Related
-
2010
- 2010-10-27 JP JP2012536988A patent/JP5881608B2/ja not_active Expired - Fee Related
- 2010-10-27 KR KR1020127014249A patent/KR20120085883A/ko not_active Ceased
- 2010-10-27 EP EP10827420.0A patent/EP2496658A4/en not_active Withdrawn
- 2010-10-27 CN CN201080049536.2A patent/CN102597156B/zh not_active Expired - Fee Related
- 2010-10-27 WO PCT/US2010/054237 patent/WO2011053628A2/en not_active Ceased
- 2010-11-01 TW TW099137541A patent/TWI481592B/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001064465A (ja) * | 1999-08-26 | 2001-03-13 | Asahi Glass Co Ltd | 熱硬化性フッ素樹脂組成物 |
| TW200509453A (en) * | 2003-07-23 | 2005-03-01 | Du Pont | Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks |
| TW200804326A (en) * | 2006-05-19 | 2008-01-16 | 3M Innovative Properties Co | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| TW200838843A (en) * | 2006-12-06 | 2008-10-01 | 3M Innovative Properties Co | Hydrofluoroether compounds and processes for their preparation and use |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2496658A4 (en) | 2017-07-19 |
| CN102597156A (zh) | 2012-07-18 |
| JP2013509487A (ja) | 2013-03-14 |
| WO2011053628A3 (en) | 2011-09-22 |
| EP2496658A2 (en) | 2012-09-12 |
| KR20120085883A (ko) | 2012-08-01 |
| CN102597156B (zh) | 2014-09-24 |
| US8261560B2 (en) | 2012-09-11 |
| TW201129534A (en) | 2011-09-01 |
| WO2011053628A2 (en) | 2011-05-05 |
| US20110100601A1 (en) | 2011-05-05 |
| JP5881608B2 (ja) | 2016-03-09 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |