TWI476054B - Ultrasonic cleaning device and its power control method - Google Patents

Ultrasonic cleaning device and its power control method Download PDF

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Publication number
TWI476054B
TWI476054B TW101146613A TW101146613A TWI476054B TW I476054 B TWI476054 B TW I476054B TW 101146613 A TW101146613 A TW 101146613A TW 101146613 A TW101146613 A TW 101146613A TW I476054 B TWI476054 B TW I476054B
Authority
TW
Taiwan
Prior art keywords
corrected
value
power value
unit
power
Prior art date
Application number
TW101146613A
Other languages
English (en)
Chinese (zh)
Other versions
TW201341072A (zh
Inventor
Susumu Sugiyama
Kouji Ichikawa
Original Assignee
Kaijo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Kk filed Critical Kaijo Kk
Publication of TW201341072A publication Critical patent/TW201341072A/zh
Application granted granted Critical
Publication of TWI476054B publication Critical patent/TWI476054B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/71—Cleaning in a tank

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW101146613A 2012-01-30 2012-12-11 Ultrasonic cleaning device and its power control method TWI476054B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012016484A JP5226141B1 (ja) 2012-01-30 2012-01-30 超音波洗浄装置及びその電力制御方法

Publications (2)

Publication Number Publication Date
TW201341072A TW201341072A (zh) 2013-10-16
TWI476054B true TWI476054B (zh) 2015-03-11

Family

ID=48904797

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101146613A TWI476054B (zh) 2012-01-30 2012-12-11 Ultrasonic cleaning device and its power control method

Country Status (4)

Country Link
JP (1) JP5226141B1 (fr)
CN (1) CN103874550B (fr)
TW (1) TWI476054B (fr)
WO (1) WO2013114738A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4813961B1 (fr) * 1967-12-13 1973-05-02
JP2004113846A (ja) * 2002-09-24 2004-04-15 Honda Electronic Co Ltd 超音波洗浄装置用発振器
JP3998589B2 (ja) * 2003-02-21 2007-10-31 株式会社東芝 音圧測定装置及び圧測定方法
TW200815116A (en) * 2006-09-22 2008-04-01 Kaijo Kk Ultrasonic cleaning apparatus
JP2008219420A (ja) * 2007-03-02 2008-09-18 Shimada Phys & Chem Ind Co Ltd 超音波発振器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4813961B2 (ja) * 2006-04-26 2011-11-09 株式会社日立国際電気エンジニアリング 超音波音圧測定装置
CN1986086A (zh) * 2006-12-22 2007-06-27 上海集成电路研发中心有限公司 半导体硅片的清洗装置及清洗方法
CN201579230U (zh) * 2009-10-23 2010-09-15 河北先河环保科技股份有限公司 水下光学测量分析仪的微型超声波清洗装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4813961B1 (fr) * 1967-12-13 1973-05-02
JP2004113846A (ja) * 2002-09-24 2004-04-15 Honda Electronic Co Ltd 超音波洗浄装置用発振器
JP3998589B2 (ja) * 2003-02-21 2007-10-31 株式会社東芝 音圧測定装置及び圧測定方法
TW200815116A (en) * 2006-09-22 2008-04-01 Kaijo Kk Ultrasonic cleaning apparatus
JP2008219420A (ja) * 2007-03-02 2008-09-18 Shimada Phys & Chem Ind Co Ltd 超音波発振器

Also Published As

Publication number Publication date
WO2013114738A1 (fr) 2013-08-08
CN103874550B (zh) 2015-10-14
JP2013154291A (ja) 2013-08-15
JP5226141B1 (ja) 2013-07-03
TW201341072A (zh) 2013-10-16
CN103874550A (zh) 2014-06-18

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