TWI476054B - Ultrasonic cleaning device and its power control method - Google Patents

Description

Ultrasonic cleaning device and power control method thereof

The present invention relates to an ultrasonic cleaning device that ultrasonically washes a washed object, a power control method thereof, and the like.

The conventional ultrasonic cleaning device includes an ultrasonic vibrator, an oscillator, and a power supply unit that supply ultrasonic waves to the cleaning liquid for cleaning the object to be washed, and the oscillator includes an oscillation unit and a detection unit. And calculation unit. An ultrasonic oscillator is electrically connected to the ultrasonic vibrator, and a power supply unit is electrically connected to the oscillator. The electric power oscillated by the oscillating portion is output to the ultrasonic vibrator. The power outputted by the detection unit is detected by the detecting unit, and the calculation unit compares whether the detected power value is equal to the set power value (that is, the power suitable for the power applied to the ultrasonic vibrator). Value) is not consistent. Then, when the electric power value that is output to the ultrasonic vibrator does not match the set electric power value, the electric power that is controlled so as to be the set electric power value is output to the ultrasonic vibrator (see, for example, Patent Document 1).

When the electric power actually applied to the ultrasonic vibrator is set to the set electric power value, it is necessary to accurately detect the electric power applied to the ultrasonic vibrator by the detecting unit. When the ultrasonic cleaning device is manufactured at a factory or the like, the detection unit adjusts the power value by accurately adjusting the power value.

In the ultrasonic cleaning device as described above, the power value applied to the ultrasonic vibrator is detected by the detecting portion, and the power value is compared with the set power value to be applied to the ultrasonic vibrator. Power value becomes The method of setting the power value is controlled. Thereby, even if the electric power applied to the ultrasonic vibrator changes depending on environmental conditions (for example, the temperature, quality, type, or type of the laundry to be washed), the electric power value can be matched with the set electric power value. As a result, the reduction in ultrasonic cleaning efficiency can be suppressed.

However, since the detection unit inside the oscillator is not a device configured as a power meter, power management by the detection unit is simplified. Further, when the ultrasonic vibrator is replaced in the ultrasonic cleaning device, it is also considered that the power value detected by the detecting portion is shifted by the correct value.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-49619

An aspect of the present invention is to provide an ultrasonic cleaning device and a power control method thereof that can further improve power management reliability.

An aspect of the present invention is an ultrasonic cleaning device, comprising: a cleaning liquid for washing a washed object; and an ultrasonic vibrator for supplying ultrasonic waves to the cleaning liquid. An oscillator electrically connected to the aforementioned ultrasonic vibrator; and an electric meter, the measurement being applied to the aforementioned super The electric power of the acoustic vibrator includes: an oscillating unit; and a control unit that controls the first electric power oscillated by the oscillating unit to be a set electric power value, and outputs the ultrasonic power to the ultrasonic vibrator; a detection unit that detects a second electric power that is output to the ultrasonic vibrator by the control unit, a recording unit that records a first correction value and a second correction value, and a calculation unit that is coupled to the detection unit The control unit, the recording unit, and the power meter are electrically connected to each other, and the computing unit has a method of deriving the first detected power value detected by the detecting unit to be corrected by the first corrected value. The first corrected power value, and the second corrected power value obtained by correcting the measured power value measured by the power meter by the second corrected value, and the second corrected power value and the first When the first corrected power value is shifted by a predetermined value or more from the second corrected power value, the first corrected power value is set to be the second corrected power value. First correction up after the first correction value to correct the value recorded in the recording portion of the function.

An aspect of the present invention is an ultrasonic cleaning device comprising a first ultrasonic cleaning device, a second ultrasonic cleaning device, and an ultrasonic cleaning device for a power meter, wherein the first The ultrasonic cleaning device includes: a first cleaning liquid that washes the first object to be washed; a first ultrasonic vibrator that supplies the ultrasonic wave to the first cleaning liquid; and the first oscillation The second ultrasonic cleaning device is electrically connected to the first ultrasonic vibrator, and the second ultrasonic cleaning device includes a second cleaning liquid for cleaning the second object to be washed, and a second ultrasonic vibration device. Son, which supplies the aforementioned second cleaning solution to the super And a second oscillator electrically connected to the second ultrasonic vibrator, wherein the electric power meter applies electric power applied to the first ultrasonic vibrator or to the second ultrasonic vibration When the electric power is measured, the first ultrasonic vibrator and the second ultrasonic vibrating sub-system are electrically connected to the electric power meter through the first switch, and the first oscillator and the second oscillator are transmitted through The first switch is electrically connected to the electric power meter, and the first oscillator includes a first oscillation unit, and the first control unit is configured to be a first electric power that is oscillated by the first oscillation unit. a method of controlling a power value to be output to the first ultrasonic vibrator; and a first detecting unit that detects a second electric power that is output to the first ultrasonic vibrator by the first control unit; a first recording unit that records a first correction value and a second correction value; and a first calculation unit that is configured by each of the first detection unit, the first control unit, the first recording unit, and the power meter Electrically connected to the aforementioned power meter through the second switch The first calculation unit derives a first corrected power value obtained by correcting the first detected power value detected by the first detecting unit by the first corrected value, and deriving The second corrected power value corrected by the second corrected value by the first measured power value measured by the power meter compares the second corrected power value with the first corrected power value When the first corrected power value is shifted by a predetermined value or more, the first corrected power value is corrected by the first corrected power value so that the first corrected power value is corrected by the first corrected power value. The value is recorded in the function of the first recording unit, and the second oscillator includes a second oscillation unit and a second control unit. The third electric power that is oscillated by the second oscillating unit is controlled to be the second set electric power value, and is output to the second ultrasonic vibrator. The second detecting unit detects the second control by the second control. a fourth electric power that is output to the second ultrasonic vibrator; a second recording unit that records a third correction value and a fourth correction value; and a second calculation unit that is connected to the second detection unit, The second control unit, the second recording unit, and the electric power meter are electrically connected to each other, and are electrically connected to the electric power meter through the second switch, and the second computing unit is derived from the second The fourth corrected power value corrected by the third corrected power value detected by the detecting unit is derived from the fourth corrected power value corrected by the third correction value, and the second measured power value measured by the power meter is derived by the foregoing The fifth corrected power value after the correction is performed, and the fifth corrected power value is compared with the fourth corrected power value, and the fourth corrected power value is shifted by a predetermined value or more from the fifth corrected power value. At the time of the fourth correction power value Second correction after the first correction value recording power correction value 5 of the third embodiment will be corrected in the correction value function of the second recording portion.

An aspect of the present invention is a power control method for an ultrasonic cleaning device, characterized in that: the ultrasonic cleaning device has: a cleaning liquid which is a washed object; an ultrasonic vibrator; Providing ultrasonic waves to the cleaning liquid; an oscillator electrically connected to the ultrasonic vibrator; and an electric meter electrically connected to the oscillator and the ultrasonic vibrator, the oscillation The apparatus includes: an oscillating unit; a control unit electrically connected to the oscillating unit; a detecting unit electrically connected to the control unit; and a computing unit configured to each of the detecting unit and the control unit Electrical And a recording unit electrically connected to the computing unit, wherein the power control method controls and outputs the first power that is oscillated by the oscillating unit to be a set power value by the control unit In the ultrasonic vibrator, the second electric power outputted to the ultrasonic vibrator is detected by the detecting unit, and the first detected electric power value detected by the detecting unit is recorded in the recording unit. The first correction value is corrected, and the first corrected power value is derived by the calculation unit, and the second power output to the ultrasonic vibrator is measured by the power meter, and the power meter is used by the power meter. The measured first measured electric power value is corrected by the second corrected value recorded in the recording unit, whereby the second corrected power value is derived by the computing unit, and the second calculating power is used by the computing unit When the corrected power value is compared with the first corrected power value, when the first corrected power value is shifted by a predetermined value or more from the second corrected power value, the first corrected power value is the aforementioned First correction complement corrected power value after 2 manner the first correction value to correct the value recorded in the recording portion.

According to an aspect of the present invention, an ultrasonic cleaning apparatus and a power control method thereof capable of further improving power management reliability can be provided.

Hereinafter, embodiments of the present invention will be described in detail using the drawings. However, the present invention is not limited to the following description, and does not deviate from the gist of the present invention. In the case of its scope, various changes can be made to its form and details, which can be easily understood if it is familiar to those skilled in the art. Therefore, the present invention is not limited to the description of the embodiments shown below.

(First embodiment)

Fig. 1 is a schematic view showing the configuration of an ultrasonic cleaning apparatus according to an aspect of the present invention.

The ultrasonic cleaning device includes: a cleaning liquid 12 for washing the object to be washed 11; a cleaning tank 10 in which the cleaning liquid 12 is placed; and an ultrasonic vibrator for supplying ultrasonic waves to the cleaning liquid 12 ( a load 14; an oscillator 14 electrically connected to the ultrasonic vibrator 13; a power supply unit 16 electrically connected to the oscillator 14, and a power meter 15 for measuring electric power applied to the ultrasonic vibrator 13; And a power source 9 electrically connected to the power meter 15. The object to be cleaned 11 may also be a semiconductor wafer, an optical disk, a glass substrate, a flat display, a thin-walled disk or a substrate.

The power meter 15 is preferably a calibrated person, and more preferably, for example, a calibrated person within the past one year. Further, the electric power meter 15 can be easily attached and detached by the ultrasonic cleaning device.

The analog output terminal of the power meter 15 is electrically connected to the analog input terminal of the oscillator 14. The oscillator 14 includes an oscillation unit 17, a control unit 18, a detection unit 19, a calculation unit 20, and a recording unit 21. The power meter 15 is electrically connected to the computing unit 20.

The calculation unit 20 is connected to the control unit 18, the detection unit 19, and the recording unit 21. Make an electrical connection. The detecting unit 19 is electrically connected to the control unit 18, and the control unit 18 is electrically connected to the oscillating unit 17.

The oscillation signal (first power) oscillated by the oscillation unit 17 is supplied to the control unit 18, and is controlled by the control unit 18 so that the first power becomes the set power value, and the controlled control signal ( The second electric power) is output to the ultrasonic vibrator 13 . The set electric power value herein means a power value suitable as electric power to be applied to the ultrasonic vibrator 13 depending on the temperature, quality, kind, or wash of each ultrasonic vibrator, washing liquid. The type of net goods varies.

The detecting unit 19 detects the second electric power that is output to the ultrasonic vibrator 13 by the control unit 18. The signal A corresponding to the detected first detected power value is input to the computing unit 20 by the detecting unit 19.

The calculation unit 20 corrects the first detected power value detected by the detecting unit 19 by the correction value α, and derives the first corrected power value. The first corrected power value is derived by the calculation (product) of the signal A and the correction value α, and corresponds to the power value actually output to the ultrasonic vibrator 13.

When the ultrasonic cleaning device is manufactured at a factory or the like, the correction value α is adjusted by the power corrector, and the value of the correct electric power value can be calculated inside the oscillator and recorded in the recording unit 21.

The calculation unit 20 compares the first corrected power value with the set power value, and outputs a comparison result when the first corrected power value is shifted by a predetermined value or more from the set power value, and outputs the comparison result to the control unit 18. Among them, a certain value can also contain 0.

The control unit 18 is configured to oscillate the oscillation signal oscillated by the oscillation unit 17. The electric power value becomes a set voltage value, and is controlled and output to the ultrasonic vibrator 13 while using the above comparison result. Thereby, the power value of the signal supplied to the ultrasonic vibrator 13 can be closer to the set power value.

The ultrasonic cleaning device of Fig. 1 has a function of bringing the power value of the signal supplied to the ultrasonic vibrator 13 closer to the set power value.

The electric power meter 15 measures the second electric power that is output to the ultrasonic vibrator 13 by the control unit 18. The signal B (voltage) corresponding to the measured measured power value is input to the computing unit 20 by the power meter 15.

The calculation unit 20 corrects the measured power value measured by the power meter 15 by the correction value β, and derives the second corrected power value. The second corrected power value is derived by the calculation (product) of the signal B and the correction value β, and corresponds to the power value actually output to the ultrasonic vibrator 13. However, since the electric power meter 15 has higher reliability of electric power measurement than the detecting unit 19, the electric power value measured by the electric power meter 15 is more accurate than the electric power value detected by the detecting unit 19. . Among them, the correction value β is recorded in the recording unit 21.

The calculation unit 20 compares the second corrected power value with the first corrected power value obtained by the detecting unit 19 and the computing unit 20, and when the first corrected power value is shifted by a certain value or more from the second corrected power value. The corrected correction value α' after the corrected value α is corrected so that the first corrected power value becomes the second corrected power value is recorded in the recording unit. The corrected correction value α' is a more correct correction value than the correction value α. The corrected correction value α' is obtained by correcting the correction value α such that the first corrected power value and the second corrected power value are equal to each other. Among them, a certain value can also contain 0.

The calculation unit 20 corrects the first detected power value detected by the detecting unit 19 by the correction value α, and derives the first corrected power value. Corresponding to the calculation (product) of the signal A and the correction value α, the power value actually output to the ultrasonic vibrator 13 is derived.

The calculation unit 20 detects the second electric power that is output to the ultrasonic vibrator 13 by the control unit 18, and the signal A corresponding to the detected second detected electric power value is detected by the detecting unit 19 by the detecting unit 19. The input to the calculation unit 20 derives the third corrected power value by the calculation (product) of the input signal A and the corrected correction value α', and compares the third corrected power value with the set power value. When the third corrected power value is shifted by a predetermined value or more from the set power value, the comparison result is output to the control unit 18. Among them, a certain value can also contain 0.

The control unit 18 controls and outputs the ultrasonic signal to the ultrasonic vibrator 13 by the comparison result while the electric power value of the oscillation signal oscillated by the oscillation unit 17 becomes the set voltage value. Thereby, the power value of the signal supplied to the ultrasonic vibrator 13 can be made closer to the set power value.

The operation of deriving the corrected correction value α' using the electric power meter 15 as described above may be performed automatically, and may be performed every predetermined period. By extremely shortening the predetermined period, the set power value can be approached almost instantaneously and more correctly. Further, by using the corrector corrected as the power meter 15, a more accurate power value can be output to the ultrasonic vibrator 13.

Further, when the ultrasonic vibrator 13 is replaced in the ultrasonic cleaning device, even if the electric power value detected by the detecting portion 19 is shifted by the correct value, the correction correction is derived by using the electric power meter 15 as described above. Value α', Further, the correction correction value α' is recorded in the recording unit 21, and the power value detected by the detecting unit 19 can be made a more accurate value.

Next, a power control method of the ultrasonic cleaning device will be described in detail with reference to FIG. This power control is performed in the following order (1) to (10).

(1) The first electric power oscillated by the oscillating unit 17 is controlled by the control unit 18 and output to the ultrasonic vibrator 13 so as to be the set electric power value.

(2) The detection unit 19 detects the second electric power that is output to the ultrasonic vibrator 13 by the control of the control unit 18.

(3) The signal A corresponding to the first detected power value detected by the detecting unit 19 is corrected by the correction value α recorded in the recording unit 21 as shown in the following formula (a). The first corrected power value PA is derived by the computing unit 20.

(a) PA = A × α

(4) The second electric power output to the ultrasonic vibrator 13 by the control unit 18 is measured by the electric meter 15.

(5) The second electric power output to the ultrasonic vibrator 13 is measured by the electric power meter 15, and the first measured electric power value is obtained, and the signal B corresponding to the first measured electric power value is input to the computing unit 20 by The correction value β recorded in the recording unit 21 is corrected by the following equation (b), and the second corrected power value PB is derived by the calculation unit 20.

(b) PB = B × β

(6) The second corrected power value PB and the first unit are calculated by the computing unit 20. When the corrected power value PA is compared with the second corrected power value PA by a predetermined value or more, the first corrected power value PA becomes the second corrected power as shown in the following formula (c). The correction correction value α' after the correction value α is automatically corrected by the method of the value PB is automatically recorded in the recording unit 21. Among them, a certain value can also contain 0.

(c) Automatic adjustment algorithm PB=PA=A×α’

(7) After the correction correction value α' is recorded in the recording unit 21, the third electric power oscillated by the oscillation unit 17 is set to the set electric power value, and is controlled by the control unit 18 and output to the ultrasonic vibration. Sub 13.

(8) The fourth power detected by the control unit 18 to the ultrasonic vibrator 13 is detected by the detecting unit 19, and the second detected power value detected by the detecting unit 19 is corrected by correcting the corrected value α'. The third corrected power value is derived by the computing unit 20.

(9) When the third corrected power value is compared with the set power value by the calculation unit 20, when the third corrected power value is obtained by shifting the set power value by a predetermined value or more, the comparison result is output to 18 control. unit.

(10) The control unit 18 controls and outputs the ultrasonic power to the ultrasonic vibrator 13 by the control unit 18 so that the fifth electric power oscillated by the oscillation unit 17 becomes the set electric power value. Among them, a certain value can also contain 0.

(Second embodiment)

Fig. 2 is a schematic view showing a power control method of an ultrasonic cleaning device according to an aspect of the present invention.

This ultrasonic cleaning device includes first to third ultrasonic cleaning devices 31 to 33 and an electric power meter 15.

The first ultrasonic cleaning device 31 includes a first cleaning liquid 12a for washing the first object to be washed (the object 1 to be washed) 11a, and a first super device for supplying the ultrasonic wave to the first cleaning liquid 12a. The acoustic vibrator (load 1) 13a; and the first oscillator (oscillator 1) 14a electrically connected to the first ultrasonic vibrator 13a. The first oscillator 14a has the same configuration as the oscillator 14 shown in FIG.

The second ultrasonic cleaning device 32 includes a second cleaning liquid 12b for washing the second object to be washed (the object 2 to be washed) 11b, and a second super device for supplying the second cleaning liquid 12b to the ultrasonic wave. The acoustic vibrator (load 2) 13b; and the second oscillator (oscillator 2) 14b electrically connected to the second ultrasonic vibrator 13b. The second oscillator 14b has the same configuration as the oscillator 14 shown in FIG.

The third ultrasonic cleaning device 33 includes a third cleaning liquid 12c for washing the third object to be washed (the object to be washed 3) 11c, and a third super device for supplying the third cleaning liquid 12c to the ultrasonic wave. The acoustic vibrator (load 3) 13c; and a third oscillator (oscillator 3) 14c electrically connected to the third ultrasonic vibrator 13c. The third oscillator 14c has the same configuration as the oscillator 14 shown in FIG.

The electric power meter 15 has the same configuration as the electric power meter 15 shown in Fig. 1, and is electrically connected to each of the first ultrasonic vibrator 13a and the first oscillator 14a, and is also the same as Fig. 1. Further, each of the second ultrasonic vibrator 13b and the second oscillator 14b is electrically connected to the electric power meter 15, Similarly to FIG. 1, the electrical connection between each of the third ultrasonic vibrator 13c and the third oscillator 14c and the electric power meter 15 is the same as that of FIG.

For each of the first to third ultrasonic cleaning devices 31 to 33, the first to third ultrasonic cleaning devices 31 to 33 can easily mount and remove the electric power meter 15 in each of the first to third ultrasonic cleaning devices 31 to 33. .

Next, a power control method of the above ultrasonic cleaning device will be described. This power control is performed in the following order (1) to (14).

(1) Each of the first ultrasonic vibrator 13a and the first oscillator 14a is electrically connected to the electric power meter 15, and the first electric power becomes the first setting by the same method as the oscillator 14 shown in Fig. 1 . The mode of the electric power value is controlled by the control unit 18 and output to the first ultrasonic vibrator 13a.

(2) The second electric power outputted to the first ultrasonic vibrator 13a is detected by the detecting unit 19 by the same method as the oscillator 14 shown in Fig. 1, and the detected first detection is performed. The electric power value is corrected by the correction value α recorded in the recording unit 21, whereby the first corrected electric power value is derived by the arithmetic unit 20.

(3) The second electric power output to the first ultrasonic vibrator 13a is measured by the electric power meter 15 by the same method as the oscillator 14 shown in Fig. 1, and the measured first measurement is performed. The electric power value is corrected by the correction value β recorded in the recording unit 21, whereby the second corrected electric power value is derived by the arithmetic unit 20.

(4) The second corrected power value is compared with the first corrected power value by the computing unit 20 by the same method as the oscillator 14 shown in FIG. 1, and the first corrected power value is determined by the second corrected power. Value offset above a certain value In the case where the first corrected power value is the second corrected power value, the correction corrected value α' corrected by the first corrected value is recorded in the recording unit 21.

(5) The electric power meter 15 is removed from the first ultrasonic cleaning device 31, and the second ultrasonic vibration vibrator 13b and the second oscillator 14b of the second ultrasonic cleaning device 32 are electrically connected. connection.

(6) In the same manner as the oscillator 14 shown in FIG. 1, the third electric power oscillated by the oscillating unit 17 is controlled by the control unit 18 and output to the second set electric power value. The second ultrasonic vibrator 13b.

(7) The fourth power output to the second ultrasonic vibrator 13b is detected by the detecting unit 19 by the same method as the oscillator 14 shown in Fig. 1, and the detected second detection is performed. The electric power value is corrected by the correction value α recorded in the recording unit 21, whereby the third corrected electric power value is derived by the arithmetic unit 20.

(8) The fourth power output to the second ultrasonic vibrator 13b is measured by the electric power meter 15 by the same method as the oscillator 14 shown in Fig. 1, and the measured second measurement is performed. The electric power value is corrected by the correction value β recorded in the recording unit 21, whereby the fourth corrected electric power value is derived by the arithmetic unit 20.

(9) By the same method as the oscillator 14 shown in FIG. 1, the calculation unit 20 compares the fourth corrected power value with the third corrected power value, and the third corrected power value is corrected by the fourth corrected power. When the value is shifted by a predetermined value or more, the corrected correction value α' after the third corrected value is corrected so that the third corrected power value becomes the fourth corrected power value is recorded in the recording unit 21.

(10) The electric power meter 15 is detached from the second ultrasonic cleaning device 32, and the electric power amplifier 15 and the third ultrasonic vibrator 13c and the third oscillator 14c of the third ultrasonic cleaning device 33 are electrically operated. connection.

(11) The control unit 18 controls and outputs the fifth power that is oscillated by the oscillating unit 17 to the third set power value by the same method as the oscillator 14 shown in FIG. 3 ultrasonic vibrator 13c.

(12) The sixth power output to the third ultrasonic vibrator 13c is detected by the detecting unit 19 by the same method as the oscillator 14 shown in Fig. 1, and the detected third detection is performed. The electric power value is corrected by the correction value α recorded in the recording unit 21, whereby the fifth corrected electric power value is derived by the arithmetic unit 20.

(13) The sixth electric power output to the third ultrasonic vibrator 13c is measured by the electric power meter 15 by the same method as the oscillator 14 shown in Fig. 1, and the measured third measurement is performed. The electric power value is corrected by the correction value β recorded in the recording unit 21, whereby the sixth corrected electric power value is derived by the arithmetic unit 20.

(14) The sixth corrected power value is compared with the fifth corrected power value by the calculation unit 20 in the same manner as the oscillator 14 shown in FIG. 1, and the fifth corrected power value is corrected by the sixth corrected power. When the value is shifted by a predetermined value or more, the corrected correction value α' after the fifth corrected value is corrected so that the fifth corrected power value becomes the sixth corrected power value is recorded in the recording unit 21.

According to this embodiment, the same effects as those of the first embodiment can be obtained.

In addition, with this embodiment, a power meter can be replaced by 15 In the operation, the electric power control of each of the first to third ultrasonic cleaning devices 31 to 33 is performed by one electric power meter 15. As a result, the electric power control of the first to third ultrasonic cleaning devices 31 to 33 can be automatically adjusted on the same basis.

In the present embodiment, the power control method of the ultrasonic cleaning device including the first to third ultrasonic cleaning devices 31 to 33 is applied to one aspect of the present invention, but it may have two or An electric power control method of the ultrasonic cleaning device of four or more ultrasonic cleaning devices is applied to one aspect of the present invention.

Further, before performing the above-described power control, it is preferable to correct the power meter 15 first, for example, it is preferable to correct the power meter 15 within the past one year.

(Third embodiment)

Fig. 3 is a schematic view showing the configuration of an ultrasonic cleaning apparatus according to an aspect of the present invention.

This ultrasonic cleaning device includes first to third ultrasonic cleaning devices 31 to 33 and an automatic switching power meter 34. The automatic switching power meter 34 includes a power meter 15, a first switch 35, and a second switch 36. The electric power meter 15 has the same configuration as the electric power meter 15 shown in Fig. 1 .

Each of the first to third ultrasonic cleaning devices 31 to 33 has the same configuration as each of the first to third ultrasonic cleaning devices 31 to 33 shown in Fig. 2 . That is, the first to third objects to be washed 11a to 11c, the first to third cleaning liquids 12a to 12c, the first to third ultrasonic vibrators 13a to 13c, and the first to third oscillators 14a to 14a. The 14c system is the same as that shown in Fig. 2.

The electric meter 15 system is applied to the first ultrasonic vibrator (load 1) The electric power of 13a, the electric power applied to the second ultrasonic vibrator (load 2) 13b, or the third ultrasonic vibrator (load 3) 13c.

The first to third ultrasonic vibrators 13a to 13c are electrically connected to the electric power meter 15 through the first switch 35. The first to third oscillators (oscillator 1, oscillator 2, and oscillator 3) 14a to 14c are electrically connected to the power meter 15 through the second switch 36.

The computing unit 20 of the first oscillator 14a is electrically connected to the detecting unit 19, the control unit 18, and the recording unit 21 of the first oscillator 14a, and is electrically connected to the power meter 15 through the second switch 36.

The calculation unit 20 of the first oscillator 14a has a first corrected power value obtained by correcting the first detected power value detected by the detecting unit 19 by the correction value α, and is derived by using the power meter. The second corrected power value corrected by the correction value β is measured, and the second corrected power value is compared with the first corrected power value, and the first corrected power value is determined by the second When the correction power value is shifted by a predetermined value or more, the corrected correction value α' obtained by correcting the correction value α so that the first corrected power value becomes the second corrected power value is recorded in the recording unit 21.

The signal A corresponding to the first detected power value detected by the detecting unit 19 of the first oscillator 14a is input to the computing unit 20, and the first corrected power value is obtained by the signal A and the correction value. The operation (product) of α is derived.

Further, the signal B corresponding to the first measured power value measured by the power meter 15 is input to the computing unit 20, and the second corrected power value is calculated by the signal B and the corrected value β. Export it.

Further, the corrected correction value α' is corrected such that the corrected value α is corrected so that the first corrected power value is equal to the second corrected power value.

The computing unit 20 of the second oscillator 14b is electrically connected to the detecting unit 19, the control unit 18, and the recording unit 21 of the second oscillator 14b, and is electrically connected to the power meter 15 through the second switch 36.

The calculation unit 20 of the second oscillator 14b has a fourth corrected power value obtained by correcting the third detected power value detected by the detecting unit 19 by the correction value α, and is derived by using the power meter. The fifth corrected power value that has been measured by the corrected power value β is compared with the fourth corrected power value, and the fifth corrected power value is compared with the fourth corrected power value, and the fourth corrected power value is obtained by the fifth When the corrected electric power value is shifted by a predetermined value or more, the correction correction value α' corrected by the correction value α is recorded in the recording unit 21 so that the fourth corrected electric power value becomes the fifth corrected electric power value.

The signal A corresponding to the third detected power value detected by the detecting unit 19 of the second oscillator 14b is input to the computing unit 20, and the fourth corrected power value is obtained by the signal A and the correction value. The operation (product) of α is derived.

Further, the signal B corresponding to the second measured power value measured by the power meter 15 is input to the computing unit 20, and the fifth corrected power value is calculated by the signal B and the corrected value β. Export it.

Further, the corrected correction value α' is corrected by correcting the value α such that the fourth corrected power value is equal to the fifth corrected power value.

The computing unit 20 of the third oscillator 14c is electrically connected to each of the detecting unit 19, the control unit 18, and the recording unit 21 of the third oscillator 14c. The electric meter 15 is electrically connected to the second switch 36.

The calculation unit 20 of the third oscillator 14c has a seventh corrected power value obtained by correcting the fifth detected power value detected by the detecting unit 19 by the correction value α, and is derived by using the power meter. The eighth corrected power value that has been measured by the corrected power value β is compared with the eighth corrected power value, and the eighth corrected power value is compared with the seventh corrected power value, and the seventh corrected power value is determined by the eighth When the correction power value is shifted by a predetermined value or more, the corrected correction value α' corrected by the correction value α is recorded in the recording unit 21 so that the seventh corrected power value becomes the eighth corrected power value.

The signal A corresponding to the fifth detected power value detected by the detecting unit 19 of the third oscillator 14c is input to the computing unit 20, and the seventh corrected power value is obtained by the signal A and the correction value. The operation (product) of α is derived.

Further, the signal B corresponding to the third measured power value measured by the power meter 15 is input to the computing unit 20, and the eighth corrected power value is calculated by the signal B and the corrected value β. Export it.

Further, the corrected correction value α' is obtained by correcting the correction value α such that the seventh corrected power value is equal to the eighth corrected power value.

The computing unit 20 of the first oscillator 14a has a third corrected power value obtained by correcting the second detected power value detected by the detecting unit 19 of the first oscillator 14a by the corrected corrected value α'. When the third corrected power value is compared with the first set power value, and the first comparison result is obtained by shifting the first set power value by a predetermined value or more, the first comparison result is output to the control. The function of the department 18. among them, The signal A corresponding to the second detected power value detected by the detecting unit 19 of the first oscillator 14a is input to the computing unit 20, and the third corrected power value is obtained by the signal A and the corrected correction value α'. The operation (product) is derived.

The control unit 18 of the first oscillator 14a is controlled to be outputted by the first comparison result while the first electric power oscillated by the oscillation unit 17 of the first oscillator 14a is set to the first set voltage value. The first ultrasonic vibrator 13a.

The computing unit 20 of the second oscillator 14b has a sixth corrected power value obtained by correcting the fourth detected power value detected by the detecting unit 19 of the second oscillator 14b by the corrected corrected value α'. When the sixth corrected power value is compared with the second set power value, and the second comparison result is obtained by shifting the second set power value by a predetermined value or more, the second comparison result is output to the control unit. 18 features. The signal A corresponding to the fourth detected power value detected by the detecting unit 19 of the second oscillator 14b is input to the computing unit 20, and the sixth corrected power value is corrected by the signal A and the correction. The operation (product) of the value α' is derived.

In the control unit 18 of the second oscillator 14b, the third electric power that is oscillated by the oscillating unit 17 of the second oscillator 14b is controlled to be the second set voltage value, and is controlled by the second comparison result. 2 ultrasonic vibrator 13b.

The computing unit 20 of the third oscillator 14c has a sixth detected power value that is detected by the detecting unit 19 of the third oscillator 14c. The ninth corrected power value corrected by the corrected correction value α' is compared with the third set power value, and the ninth corrected power value is shifted by a predetermined value or more from the third set power value. In the case of the third comparison result, the third comparison result is output to the function of the control unit 18. The signal A corresponding to the sixth detected power value detected by the detecting unit 19 of the third oscillator 14c is input to the computing unit 20, and the ninth corrected power value is corrected by the signal A and the correction. The operation (product) of the value α' is derived.

In the control unit 18 of the third oscillator 14c, the third electric power that is oscillated by the oscillating unit 17 of the third oscillator 14c is controlled to be the third set voltage value, and is controlled by the third comparison result. 3 ultrasonic vibrator 13c.

Next, a description will be given of a power control method of the above-described ultrasonic cleaning device, but only a portion different from the power control method in the order of (1) to (14) according to the second embodiment will be described.

(1) The first and second switches 35 and 36 are switched such that the first ultrasonic vibrator 13a and the first oscillator 14a of the first ultrasonic cleaning device 31 are electrically connected to the electric power meter 15. In other words, the first ultrasonic vibration vibrator 13a is electrically connected to the electric power meter 15 by the first switch 35, and the electric power meter 15 and the first oscillator 14a are electrically connected by the second switch 36.

(5) The first and second switches 35 and 36 are switched such that the second ultrasonic vibrator 13b and the second oscillator 14b of the second ultrasonic cleaning device 32 are electrically connected to the electric power meter 15. In other words, with the first switch 35, the second ultrasonic vibrator 13b is electrically connected to the electric meter 15, and the electric meter 15 and the second oscillator 14b are electrically connected by the second switch 36.

(10) The first and second switches 35 and 36 are switched such that the third ultrasonic vibrator 13c and the third oscillator 14c of the third ultrasonic cleaning device 33 are electrically connected to the electric power meter 15. In other words, the third ultrasonic vibrator 13c is electrically connected to the electric meter 15 by the first switch 35, and the electric meter 15 and the third oscillator 14c are electrically connected by the second switch 36.

According to this embodiment, the same effects as those of the second embodiment can be obtained.

Further, in the present embodiment, the connection to the electric power meter 15 can be automatically switched in the order of the first ultrasonic cleaning device 31 to the third ultrasonic cleaning device 33.

In the present embodiment, the ultrasonic cleaning device having the first to third ultrasonic cleaning devices 31 to 33 is applied to one aspect of the present invention, but it may have two or four or more. The ultrasonic cleaning device of the ultrasonic cleaning device is applied to one aspect of the present invention.

Further, before performing the above-described power control, it is preferable to correct the power meter 15 first, for example, it is preferable to correct the power meter 15 within the past one year.

9‧‧‧Power supply

10‧‧‧cleaning trough

11‧‧‧Processed objects

11a‧‧‧1st object to be processed (object 1)

11b‧‧‧Second processed object (object 2)

11c‧‧‧3rd object to be treated (object 3)

12‧‧‧ Cleaning solution

12a‧‧‧1st cleaning solution

12b‧‧‧2nd cleaning solution

12c‧‧‧3rd cleaning solution

13‧‧‧Load (ultrasonic vibrator)

13a‧‧‧Load 1 (1st ultrasonic vibrator)

13b‧‧‧Load 2 (2nd ultrasonic vibrator)

13c‧‧‧Load 3 (3rd ultrasonic vibrator)

14‧‧‧Oscillator

14a‧‧‧Oscillator 1 (1st oscillator)

14b‧‧‧Oscillator 2 (2nd oscillator)

14c‧‧‧Oscillator 3 (3rd oscillator)

15‧‧‧Electric meter

16‧‧‧Power Supply Department

17‧‧‧Oscillation Department

18‧‧‧Control Department

19‧‧‧Detection Department

20‧‧‧ Computing Department

21‧‧‧ Record Department

31‧‧‧1st ultrasonic cleaning device

32‧‧‧2nd ultrasonic cleaning device

33‧‧‧3rd ultrasonic cleaning device

34‧‧‧Automatic switching power meter

35‧‧‧1st switch

36‧‧‧2nd switch

Fig. 1 is a schematic view showing the configuration of an ultrasonic cleaning apparatus according to an aspect of the present invention.

Figure 2 is a perspective view of an ultrasonic cleaning device for explaining one aspect of the present invention. A schematic diagram of a power control method.

Fig. 3 is a schematic view showing the configuration of an ultrasonic cleaning apparatus according to an aspect of the present invention.

9‧‧‧Power supply

10‧‧‧cleaning trough

11‧‧‧Processed objects

12‧‧‧ Cleaning solution

13‧‧‧Load (ultrasonic vibrator)

14‧‧‧Oscillator

15‧‧‧Electric meter

16‧‧‧Power Supply Department

17‧‧‧Oscillation Department

18‧‧‧Control Department

19‧‧‧Detection Department

20‧‧‧ Computing Department

21‧‧‧ Record Department

Claims (12)

An ultrasonic cleaning device comprising: a cleaning liquid for washing a washed object; an ultrasonic vibrator for supplying ultrasonic waves to the cleaning liquid; and an oscillator The ultrasonic vibrator is electrically connected; and the electric meter measures electric power applied to the ultrasonic vibrator, the oscillator includes an oscillation unit, and the control unit is configured by the oscillation unit The first electric power that is oscillated is controlled so as to be set to the electric power value, and is output to the ultrasonic vibrator. The detecting unit detects the second electric power that is output to the ultrasonic vibrator by the control unit, and the recording unit. Recording a first correction value and a second correction value; and a calculation unit electrically connected to each of the detection unit, the control unit, the recording unit, and the power meter, wherein the calculation unit has a derivation The first corrected power value corrected by the detection unit is corrected by the first corrected value, and the measured power value measured by the power meter is derived by the second Correction The second corrected power value after the correction is compared with the first corrected power value, and when the first corrected power value is shifted by a predetermined value or more from the second corrected power value, The first corrected power value is the second correction In the method of the electric power value, the first correction correction value obtained by correcting the first correction value is recorded in the function of the recording unit. The ultrasonic cleaning device according to the first aspect of the invention, wherein the calculation unit has a second detection power value detected by the detection unit and corrected by the first correction correction value. The third corrected power value is obtained by comparing the third corrected power value with the set power value, and when the third corrected power value is obtained by shifting the set power value by a predetermined value or more, the comparison result is output to the comparison result. In the function of the control unit, the control unit controls and outputs the ultrasonic vibration element to the ultrasonic vibrator by using the comparison result while the first electric power oscillated by the oscillation unit is the set voltage value. The ultrasonic cleaning device according to the second aspect of the invention, wherein the first signal corresponding to the first detected power value detected by the detecting unit is input to the computing unit, and the first correction The power value is derived by the calculation of the first signal and the first correction value, and the second signal corresponding to the measured power value measured by the power meter is input to the calculation unit. The corrected power value is derived by the calculation of the second signal and the second correction value, and the first corrected correction value is equal to the first corrected power value and the second corrected power value. When the correction value is corrected, the third signal corresponding to the second detected power value detected by the detecting unit is input to the computing unit, and the third correcting power is supplied to the computing unit. The force value is derived by the calculation of the third signal and the first correction correction value. An ultrasonic cleaning device comprising a first ultrasonic cleaning device, a second ultrasonic cleaning device, and an ultrasonic cleaning device for a power meter, wherein the first ultrasonic cleaning device has a first cleaning liquid that washes the first object to be washed; a first ultrasonic vibrator that supplies ultrasonic waves to the first cleaning liquid; and a first oscillator that is related to the first 1 ultrasonic wave vibrator is electrically connected, and the second ultrasonic cleaning device includes: a second cleaning liquid that cleans the second object to be washed; and a second ultrasonic vibrator that is the second 2, the cleaning liquid is supplied to the ultrasonic wave; and the second oscillator is electrically connected to the second ultrasonic vibrator, and the electric power meter is applied to the electric power of the first ultrasonic vibrator or is applied When the electric power of the second ultrasonic vibrator is measured, the first ultrasonic vibrator and the second ultrasonic vibrator are electrically connected to the electric power meter through the first switch, and the first oscillator and The second oscillator is electrically connected to the power meter through the second switch, and the first oscillator is have: The first oscillating unit controls the first electric power that is oscillated by the first oscillating unit to be the first set electric power value, and outputs the first electric power to the first ultrasonic vibrator; a detecting unit that detects a second electric power that is output to the first ultrasonic vibrator by the first control unit, and a first recording unit that records the first corrected value and the second corrected value; and the first The computing unit is electrically connected to each of the first detecting unit, the first control unit, and the first recording unit, and is electrically connected to the power meter through the second switch, wherein the first computing unit is And a first corrected power value obtained by correcting the first detected power value detected by the first detecting unit by the first corrected value, and deriving the measured value obtained by the power meter The second corrected power value corrected by the second corrected value is compared with the first corrected power value, and the first corrected power value is the second corrected power value. When the correction power value is shifted by a certain value or more, the first correction will be made. The first correction correction value obtained by correcting the first correction value is recorded in the first recording unit in a manner that the electric power value is the second correction electric power value, and the second oscillator includes a second oscillation unit and a second a control unit that controls the third electric power that is oscillated by the second oscillating unit to be the second set electric power value, and outputs the second ultrasonic vibration vibrator; The second detecting unit detects the fourth electric power that is output to the second ultrasonic vibrator by the second control unit, and the second recording unit records the third corrected value and the fourth corrected value; The second calculation unit is electrically connected to each of the second detection unit, the second control unit, and the second recording unit, and is electrically connected to the power meter through the second switch, and the second operation The department has a fourth corrected power value obtained by correcting the third detected power value detected by the second detecting unit by the third corrected value, and is derived and measured by the power meter. The second corrected power value obtained by the fourth corrected power value is corrected by the fourth corrected power value, and the fifth corrected power value is compared with the fourth corrected power value, and the fourth corrected power value is as described above. When the fifth corrected power value is shifted by a predetermined value or more, the second corrected correction value obtained by correcting the third corrected value so that the fourth corrected power value is the fifth corrected power value is recorded in the second record. The function of the department. The ultrasonic cleaning device according to the fourth aspect of the invention, wherein the first calculation unit has a second correction power value detected by the first detection unit by the first correction correction value The third corrected power value after the correction is compared with the first set power value, and the first corrected power value is obtained by shifting the first set power value by a predetermined value or more. In the comparison result, the first comparison result is output to the function of the first control unit, and the first control unit sets the first electric power that is oscillated by the first oscillation unit to the first set voltage value. Way before use The first comparison result is controlled and outputted to the first ultrasonic vibrator, and the second calculation unit has a fourth detection power value that is detected by the second detection unit by the second The corrected sixth corrected power value is corrected, and the sixth corrected power value is compared with the second set power value, and the sixth corrected power value is obtained by shifting the second set power value by a predetermined value or more In the second comparison result, the second comparison result is output to the function of the second control unit, and the second control unit is configured to be the second setting by the third electric power oscillated by the second oscillation unit. The voltage value is controlled while being output to the second ultrasonic vibrator while being controlled by the second comparison result. The ultrasonic cleaning device according to the fifth aspect of the invention, wherein the first signal corresponding to the first detected power value detected by the first detecting unit is input to the first computing unit, The first corrected power value is derived by the calculation of the first signal and the first correction value, and the second signal corresponding to the first measured power value measured by the power meter is input to The first calculation unit derives the second corrected power value by an operation of the second signal and the second correction value, wherein the first corrected correction value is the first corrected power value and the second corrected power If the values are equal, the first correction value is corrected. The third signal corresponding to the second detected power value detected by the first detecting unit is input to the first computing unit, and the third corrected power value is obtained by the third signal and the foregoing The calculation of the corrected correction value is derived, and the fourth signal corresponding to the third detected power value detected by the second detecting unit is input to the second computing unit, and the fourth corrected power value is By the calculation of the fourth signal and the third correction value, the fifth signal corresponding to the second measured power value measured by the power meter is input to the second calculation unit, and the The fifth corrected power value is derived by the calculation of the fifth signal and the fourth correction value, and the second corrected correction value is obtained by the fourth corrected power value being equal to the fifth corrected power value. When the correction value is corrected, the sixth signal corresponding to the fourth detected power value detected by the second detecting unit is input to the second computing unit, and the sixth corrected power value is obtained by The aforementioned sixth signal and the aforementioned second The operator who corrects the correction value is exported. The ultrasonic cleaning device according to any one of claims 1 to 6, wherein the electric power meter is a calibrator. An electric power control method for an ultrasonic cleaning device, characterized in that the ultrasonic cleaning device has a cleaning liquid, which is used to wash the washed object; An ultrasonic vibrator for supplying ultrasonic waves to the cleaning liquid; an oscillator electrically connected to the ultrasonic vibrator; and an electric meter which is coupled to the oscillator and the ultrasonic vibrator Electrically connected, the oscillator has an oscillating portion, a control unit electrically connected to the oscillating portion, a detecting portion electrically connected to the control portion, and a computing unit and the detecting portion And the control unit is electrically connected to each other; and the recording unit is electrically connected to the computing unit, and the power control method is configured such that the first power that is oscillated by the oscillating unit is a set power value Controlled by the control unit and outputted to the ultrasonic vibrator, the second electric power outputted to the ultrasonic vibrator is detected by the detecting unit, and the first detected electric power value detected by the detecting unit is detected. By correcting the first correction value recorded in the recording unit, the first correction power value is derived by the calculation unit, and the second electric power output to the ultrasonic vibrator is used before The electric power meter measures the first measured electric power value measured by the electric power meter by correcting the second corrected value recorded in the recording unit, thereby deriving the second corrected electric power value by the calculation unit. , The calculation unit compares the second corrected power value with the first corrected power value, and when the first corrected power value is shifted by a predetermined value or more from the second corrected power value, the first correction is performed. The first corrected correction value obtained by correcting the first corrected value is recorded in the recording unit in a manner that the electric power value is the second corrected electric power value. The power control method of the ultrasonic cleaning device according to the eighth aspect of the invention, wherein the third correction power is oscillated by the oscillation unit after the first correction correction value is recorded in the recording unit The method of setting the power value is controlled by the control unit and output to the ultrasonic vibrator, and the fourth power output to the ultrasonic vibrator is detected by the detecting unit, and is detected by the detecting unit. The second detected power value that has been obtained is corrected by the first corrected correction value, and the third correction power value is derived by the calculation unit, and the third correction power value and the set power are obtained by the calculation unit. When the comparison result is obtained by comparing the values of the third corrected power value by a predetermined value or more, the comparison result is output to the control unit, and the fifth oscillation is performed by the oscillation unit. The electric power is set to the set electric power value, and the control unit performs control by the comparison result and outputs the ultrasonic vibrator to the ultrasonic vibrator. Electric power control method for ultrasonic cleaning device, characterized by The ultrasonic cleaning device includes a first ultrasonic cleaning device, a second ultrasonic cleaning device, and a power meter, and the first ultrasonic cleaning device includes a first cleaning liquid. Washing the first object to be washed; the first ultrasonic vibrator supplying the ultrasonic wave to the first cleaning liquid; and the first oscillator electrically connected to the first ultrasonic vibrator The first oscillator includes a first oscillating portion, a first control portion electrically connected to the first oscillating portion, and a first detecting portion electrically connected to the first control portion; The first calculation unit is electrically connected to each of the first detection unit and the first control unit, and the first recording unit is electrically connected to the first calculation unit, and the second ultrasonic wave is washed. The cleaning apparatus includes: a second cleaning liquid that cleans the second object to be washed; a second ultrasonic vibrator that supplies ultrasonic waves to the second cleaning liquid; and a second oscillator that The second ultrasonic vibrator is electrically connected to the second ultrasonic vibrator, and the second oscillator has a second oscillating portion; The second control unit is electrically connected to the second oscillating unit, the second detecting unit is electrically connected to the second control unit, and the second calculating unit is connected to the second detecting unit and Each of the second control units is electrically connected to the second control unit, and the second recording unit is electrically connected to the second calculation unit, and the power control method is configured to cause each of the first ultrasonic vibrator and the first oscillator Electrically connected to the electric power meter, the first electric power that is oscillated by the first oscillating unit is controlled by the first control unit and output to the first ultrasonic wave. The vibrator detects the second electric power outputted to the first ultrasonic vibrator by the first detecting unit, and records the first detected electric power value detected by the first detecting unit in the foregoing The first correction value of the first recording unit is corrected, and the first correction power value is derived by the first calculation unit, and the second power output to the first ultrasonic vibration oscillator is performed by the power meter. Measurement, the first measurement measured by the aforementioned electric meter The electric power value is corrected by the second correction value recorded in the first recording unit, whereby the second correction power value is derived by the first calculation unit, and the second correction unit is used to correct the second correction power value. When the electric power value is compared with the first corrected electric power value, when the first corrected electric power value is shifted by a predetermined value or more, the first corrected electric power value is the second corrected electric power value. Carry out the aforementioned first correction value The corrected first corrected correction value is recorded in the first recording unit, and each of the second ultrasonic vibrator and the second oscillator is electrically connected to the electric power meter, and the second oscillation unit is used by the second oscillation unit. The second electric power that is oscillated is controlled by the second control unit and output to the second ultrasonic vibrator, and the fourth electric power that is output to the second ultrasonic vibrator is The second detecting unit detects that the second detected power value detected by the second detecting unit is corrected by the third corrected value recorded in the second recording unit, thereby performing the second operation. The third corrected power value is derived, and the fourth power output to the second ultrasonic vibrator is measured by the power meter, and the second measured power value measured by the power meter is used by The fourth correction value is corrected by the second calculation unit, and the fourth correction power value is derived by the second calculation unit, and the fourth correction power value and the fourth 3 correction power value comparison, if the above When the corrected power value is shifted by a predetermined value or more, the third correction power value obtained by correcting the third correction value so that the third corrected power value is the fourth corrected power value is used Recorded in the second recording unit. The power control method of the ultrasonic cleaning device according to claim 10, wherein each of the first ultrasonic vibrator and the first oscillator is electrically connected to the electric power meter by a first switch. Before The first ultrasonic vibrator is electrically connected to the electric power meter, and the electric meter is electrically connected to the first oscillator by the second switch, and the second ultrasonic vibrator and the second Each of the oscillators is electrically connected to the electric power meter, and the second ultrasonic vibrator is electrically connected to the electric power meter by the first switch, and the electric power meter and the electric power meter are configured by the second switch. The second oscillator is electrically connected. The power control method of the ultrasonic cleaning device according to any one of claims 8 to 11, wherein the electric power meter is corrected before the power control is performed.