CN103874550A - ultrasonic cleaning device and power control method thereof - Google Patents
ultrasonic cleaning device and power control method thereof Download PDFInfo
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- CN103874550A CN103874550A CN201280039420.XA CN201280039420A CN103874550A CN 103874550 A CN103874550 A CN 103874550A CN 201280039420 A CN201280039420 A CN 201280039420A CN 103874550 A CN103874550 A CN 103874550A
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- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 93
- 238000000034 method Methods 0.000 title claims description 34
- 238000012937 correction Methods 0.000 claims abstract description 95
- 238000001514 detection method Methods 0.000 claims abstract description 43
- 238000004140 cleaning Methods 0.000 claims abstract description 38
- 238000012360 testing method Methods 0.000 claims description 90
- 230000000052 comparative effect Effects 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 30
- 239000012530 fluid Substances 0.000 claims description 26
- 230000001915 proofreading effect Effects 0.000 claims description 24
- 238000009795 derivation Methods 0.000 claims description 9
- 238000004364 calculation method Methods 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- DKKFRAISFPGHSW-UHFFFAOYSA-N PB=B Chemical compound PB=B DKKFRAISFPGHSW-UHFFFAOYSA-N 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
- B06B1/0223—Driving circuits for generating signals continuous in time
- B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
- B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
- B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/71—Cleaning in a tank
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- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention provides an ultrasonic cleaning device capable of further improving the reliability of power management. To this end, the ultrasonic cleaning device is provided with an object to be cleaned (11), a cleaning liquid (12), an ultrasonic vibrator (13), an oscillator (14), a power supply unit (16), and a power meter (15), wherein the oscillator (14) comprises: an oscillating unit (17); a control unit (18) that controls the 1 st power oscillated by the oscillation unit (17) to a set power value and outputs the power value to the ultrasonic transducer; a detection unit (19) that detects the 2 nd power output to the ultrasonic transducer (13) by the control unit (18); and a calculation unit (20), wherein the calculation unit (20) has the following functions: a1 st corrected power value obtained by correcting the 1 st detected power value by a correction value alpha is derived, a 2 nd corrected power value obtained by correcting the measured power value measured by a power meter (15) by a correction value beta is derived, and when the 1 st corrected power value deviates from the 2 nd corrected power value by a predetermined value or more, a correction value alpha' obtained by correcting the correction value alpha so that the 1 st corrected power value becomes the 2 nd corrected power value is recorded in a recording unit (21).
Description
Technical field
The present invention relates to cleaned material to carry out ultrasonic cleaning equipment and the Poewr control method etc. thereof of Ultrasonic Cleaning.
Background technology
Existing ultrasonic cleaning equipment has to the hyperacoustic ultrasonic oscillator of the cleaning solution supplying that cleaned material is cleaned, oscillator and power supply unit, and this oscillator has oscillating portion, test section and operational part.Be electrically connected with oscillator at ultrasonic oscillator, be electrically connected with power supply unit at oscillator.The power being produced by this oscillating portion vibration is exported to ultrasonic oscillator.The power of this output is detected by test section, and by operational part relatively this performance number detecting whether occurred to depart from setting power value (as the suitable performance number of the power that puts on ultrasonic oscillator).Then,, in the case of having departed from setting power value to the performance number of ultrasonic oscillator output, control the power (for example, with reference to patent documentation 1) for setting power value to ultrasonic oscillator output.
In order to make the actual power that puts on ultrasonic oscillator become setting power value, need to correctly detect the power that puts on ultrasonic oscillator by test section.This test section, utilizes capability correction device to adjust when ultrasonic cleaning equipment being manufactured in factory etc., correctly detection power value.
In existing ultrasonic cleaning equipment as described above, detect the performance number that imposes on ultrasonic oscillator by test section, this performance number and setting power value are compared, control to make the performance number that imposes on ultrasonic oscillator to become setting power value.Thus, even if such as, put on the power of ultrasonic oscillator changes due to environmental condition (kind of temperature, quality, kind or the cleaned material of cleaning fluid) etc., also can make this performance number consistent with setting power value, its result, can suppress the decrease in efficiency of Ultrasonic Cleaning.
But, owing to being not in the test section of oscillator inside, be provided with the equipment that is configured to power meter, thereby the power management that this test section carries out is simpler and easy.In addition,, the in the situation that of also can expecting having exchanged ultrasonic oscillator in ultrasonic cleaning equipment, the performance number being detected by test section can depart from the situation of right value.
[formerly technical literature]
[patent documentation]
Patent documentation 1:JP JP 2000-49619 communique
Summary of the invention
The problem that invention will solve
A mode of the present invention is, a kind of ultrasonic cleaning equipment and Poewr control method thereof of the reliability that can further improve power management is provided.
Solve the means of problem
The ultrasonic cleaning equipment of a mode of the present invention is characterised in that,
Described ultrasonic cleaning equipment possesses: cleaning fluid, and it cleans cleaned material, ultrasonic oscillator, it is to described cleaning solution supplying ultrasonic wave, oscillator, it is electrically connected with described ultrasonic oscillator, and power meter, its mensuration puts on the power of described ultrasonic oscillator, and described oscillator has: oscillating portion, control part, it controls to make the 1st power being produced from described oscillating portion vibration become setting power value and export to described ultrasonic oscillator, test section, it detects the 2nd power to described ultrasonic oscillator output by described control part, recording unit, its record the 1st corrected value and the 2nd corrected value, and operational part, its respectively with described test section, described control part, described recording unit and the electrical connection of described power meter, described operational part has following function: derive and utilize described the 1st corrected value to carry out the 1st corrected power value of proofreading and correct to the 1st detection power value being detected by described test section, derivation utilizes described the 2nd corrected value to carry out the 2nd corrected power value of proofreading and correct to the mensuration performance number of being measured by described power meter, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that described the 1st corrected value has been carried out revise to make described the 1st corrected power value become described the 2nd corrected power value is recorded to described recording unit.
The ultrasonic cleaning equipment of a mode of the present invention, there is the 1st ultrasonic cleaning equipment, the 2nd ultrasonic cleaning equipment and power meter, described ultrasonic cleaning equipment is characterised in that, described the 1st ultrasonic cleaning equipment has: the 1st cleaning fluid, and it cleans the 1st cleaned material, the 1st ultrasonic oscillator, it is to described the 1st cleaning solution supplying ultrasonic wave, with the 1st oscillator, it is electrically connected with described the 1st ultrasonic oscillator, and described the 2nd ultrasonic cleaning equipment has: the 2nd cleaning fluid, and it cleans the 2nd cleaned material, the 2nd ultrasonic oscillator, it is to described the 2nd cleaning solution supplying ultrasonic wave, with the 2nd oscillator, it is electrically connected with described the 2nd ultrasonic oscillator, described power meter is measured the power that puts on the power of described the 1st ultrasonic oscillator or put on described the 2nd ultrasonic oscillator, described the 1st ultrasonic oscillator and described the 2nd ultrasonic oscillator are electrically connected with described power meter via the 1st switch, described the 1st oscillator and described the 2nd oscillator are electrically connected with described power meter via the 2nd switch, and described the 1st oscillator has: the 1st oscillating portion, the 1st control part, it controls to make the 1st power being produced from described the 1st oscillating portion vibration become the 1st setting power value and export to described the 1st ultrasonic oscillator, the 1st test section, it detects the 2nd power to described the 1st ultrasonic oscillator output by described the 1st control part, the 1st recording unit, its record the 1st corrected value and the 2nd corrected value, with the 1st operational part, its respectively with described the 1st test section, described the 1st control part, described the 1st recording unit and the electrical connection of described power meter, and be electrically connected with described power meter via described the 2nd switch, described the 1st operational part has following function: derive and utilize described the 1st corrected value to carry out the 1st corrected power value of proofreading and correct to the 1st detection power value being detected by described the 1st test section, derivation utilizes described the 2nd corrected value to carry out the 2nd corrected power value of proofreading and correct to the 1st mensuration performance number of being measured by described power meter, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that makes described the 1st corrected power value become described the 2nd corrected power value to described the 1st corrected value correction is recorded to described recording unit, described the 2nd oscillator has: the 2nd oscillating portion, the 2nd control part, it controls to make the 3rd power being produced from described the 2nd oscillating portion vibration become the 2nd setting power value and export to described the 2nd ultrasonic oscillator, the 2nd test section, it detects the 4th power to described the 2nd ultrasonic oscillator output by described the 2nd control part, the 2nd recording unit, its record the 3rd corrected value and the 4th corrected value, with the 2nd operational part, its respectively with described the 2nd test section, described the 2nd control part, described the 2nd recording unit and the electrical connection of described power meter, and be electrically connected with described power meter via described the 2nd switch, described the 2nd operational part has following function: derive and utilize described the 3rd corrected value to carry out the 4th corrected power value of proofreading and correct to the 3rd detection power value being detected by described the 2nd test section, derivation utilizes described the 4th corrected value to carry out the 5th corrected power value of proofreading and correct to the 2nd mensuration performance number of being measured by described power meter, described the 5th corrected power value and described the 4th corrected power value are compared, depart from described the 5th corrected power value setting above in the situation that in described the 4th corrected power value, the 2nd correction corrected value that described the 3rd corrected value has been carried out revise to make described the 4th corrected power value become described the 5th corrected power value is recorded to described recording unit.
The Poewr control method of the ultrasonic cleaning equipment of a mode of the present invention, described ultrasonic cleaning equipment has: cleaning fluid, it cleans cleaned material; Ultrasonic oscillator, it is to described cleaning solution supplying ultrasonic wave; Oscillator, it is electrically connected with described ultrasonic oscillator; And power meter, it is electrically connected with described oscillator and described ultrasonic oscillator, and described oscillator has: oscillating portion; Control part, it is electrically connected with described oscillating portion; Test section, it is electrically connected with described control part; Operational part, it is electrically connected with described test section and described control part respectively; and recording unit, it is electrically connected with described operational part, described Poewr control method is characterised in that, control to make the 1st power being produced from described oscillating portion vibration become setting power value and export to described ultrasonic oscillator from described control part, detected to the 2nd power of described ultrasonic oscillator output by described test section, the 1st corrected value being recorded in described recording unit by utilization by described operational part proofreaies and correct to derive the 1st corrected power value to the 1st detection power value being detected by described test section, measured to described the 2nd power of described ultrasonic oscillator output by described power meter, proofread and correct to derive the 2nd corrected power value by described operational part by utilizing the 2nd corrected value recording to measure performance number to the measured by described power meter the 1st in described recording unit, by described operational part, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that described the 1st corrected value has been carried out revise to make described the 1st corrected power value become described the 2nd corrected power value is recorded to described recording unit.
Invention effect
According to a mode of the present invention, can provide a kind of ultrasonic cleaning equipment and Poewr control method thereof of the reliability that can further improve power management.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that represents the formation of the related ultrasonic cleaning equipment of a mode of the present invention.
Fig. 2 is the schematic diagram of the Poewr control method for the related ultrasonic cleaning equipment of a mode of the present invention is described.
Fig. 3 is the schematic diagram that represents the formation of the related ultrasonic cleaning equipment of a mode of the present invention.
The specific embodiment
Use accompanying drawing at length to describe embodiments of the present invention below.But the present invention is not limited to explanation below, if those skilled in the art just easily understand: can not depart from purport of the present invention and scope thereof its mode and details are carried out to various changes.Therefore, the present invention should not be limited to embodiment shown below record content explained.
(the 1st embodiment)
Fig. 1 is the schematic diagram that represents the formation of the related ultrasonic cleaning equipment of a mode of the present invention.
Ultrasonic cleaning equipment has: cleaning fluid 12, and it cleans cleaned material 11; Rinse bath 10, it is equipped with this cleaning fluid 12; Ultrasonic oscillator (load) 13, it supplies with ultrasonic wave to cleaning fluid 12; Oscillator 14, it is electrically connected with this ultrasonic oscillator 13; Power supply unit 16, it is electrically connected with this oscillator 14; Power meter 15, its mensuration puts on the power of ultrasonic oscillator 13; With power supply 9, it is electrically connected with this power meter 15.In addition, cleaned material 11 can be semiconductor wafer, compact-disc (compact disc), glass substrate, flat-panel monitor (flat panel display), thin dish or substrate etc.
The power meter that power meter 15 was preferably corrected, the power meter being for example more preferably corrected in 1 year in the past.In addition, power meter 15 preferably can easily be installed from ultrasonic cleaning equipment, dismantle.
Analog output of power meter 15 is electrically connected with the analog input terminal of oscillator 14.Oscillator 14 has oscillating portion 17, control part 18, test section 19, operational part 20 and recording unit 21.Power meter 15 is electrically connected with operational part 20.
By oscillating portion 17 vibrate produce oscillator signal (the 1st power) be supplied to control part 18, control to make the 1st power to become setting power value from control part 18, and the control signal (the 2nd power) of exporting after controlling to ultrasonic oscillator 13.The setting power value here means as the comparatively suitable performance number of power that puts on ultrasonic oscillator 13, and this suitable performance number is due to the kind of the temperature of each ultrasonic oscillator, cleaning fluid, quality, kind, cleaned material etc. and different.
Correction value alpha is to adjust by capability correction device when ultrasonic cleaning equipment is manufactured in factory etc., makes it possible to the value of the performance number correct in oscillator internal calculation, is recorded in recording unit 21.
In the ultrasonic cleaning equipment of Fig. 1, there is the function that makes the performance number of the signal of supplying with to ultrasonic oscillator 13 further approach setting power value.
Detected the 2nd power of being exported to ultrasonic oscillator 13 by control part 18 by test section 19, the 2nd detection power detecting with this is worth corresponding signal A and inputs to operational part 20 from test section 19, the signal A of operational part 20 by this input with revise correction value alpha ' computing (product) derive the 3rd corrected power value, the 3rd corrected power value and setting power value are compared, in the situation that obtaining the 3rd corrected power value and having departed from more than setting power value setting this comparative result, this comparative result is outputed to control part 18.In addition, setting also can comprise 0.
Derive and revise correction value alpha with power meter 15 as described above ' operation both can automatically perform, carry out during also can be according to the rules.By shortening terrifically specified time limit, can almost approach in real time and more accurately setting power value.In addition, the adjuster being corrected by use is as power meter 15, can export to ultrasonic oscillator 13 with performance number more accurately.
In addition, the in the situation that of having exchanged ultrasonic oscillator 13 in ultrasonic cleaning equipment, even if the performance number that test section 19 detects has departed from right value, by deriving and revise correction value alpha with power meter 15 as described above ', and by this correction correction value alpha ' be recorded to recording unit 21, the performance number that also test section 19 can be detected is made as value more accurately.
Then, on one side the Poewr control method of ultrasonic cleaning equipment is at length carried out with reference to Fig. 1 on one side.This power control is carried out according to the order of following (1)～(10).
(1) controlled to make become setting power value and export to ultrasonic oscillator 13 from oscillating portion 17 the 1st power producing that vibrates from control part 18.
(2) by test section 19, the 2nd power of being controlled by control part 18 and exporting to ultrasonic oscillator 13 is detected.
(3) proofread and correct derive 1st corrected power value PA according to following formula (a) to being worth corresponding signal A with the 1st detection power being detected by test section 19 by the correction value alpha of utilizing record in recording unit 21 by operational part 20.
(a)PA＝A×α
(4) by power meter 15, the 2nd power of being controlled by control part 18 and exporting to ultrasonic oscillator 13 is measured.
(5) measure by power meter 15 the 2nd power of exporting to ultrasonic oscillator 13, and obtain the 1st measure performance number, the signal B corresponding with the 1st mensuration performance number is imported into operational part 20, according to following formula (b), signal B proofreaied and correct to derive the 2nd corrected power value PB by operational part 20 by the correction value beta of utilizing record in recording unit 21.
(b)PB＝B×β
(6) by operational part 20, the 2nd corrected power value PB and the 1st corrected power value PA are compared, depart from the 2nd corrected power value PB setting above in the situation that at the 1st corrected power value PA, will automatically carry out revising to make the 1st corrected power value PA become the correction correction value alpha of the 2nd corrected power value PB to correction value alpha according to following formula (c) ' be automatically recorded to recording unit 21.In addition, setting also can comprise 0.
(c) automatic adjustment algorithm PB=PA=A × α '
(7) will revise correction value alpha ' be recorded to recording unit 21 after, controlled to make become setting power value and export to ultrasonic oscillator 13 from oscillating portion 17 the 3rd power producing that vibrates from control part 18.
(8) detect by test section 19 the 4th power of exporting to ultrasonic oscillator 13 from control part 18, revise correction value alpha by operational part 20 by utilization ' the 2nd detection power value being detected by test section 19 is proofreaied and correct to derive the 3rd corrected power value.
(9) by operational part 20, the 3rd corrected power value and setting power value are compared, in the situation that obtaining the 3rd corrected power value and having departed from more than setting power value setting this comparative result, comparative result is outputed to control part 18.
(10) utilize above-mentioned comparative result while control to make from control part 18 and become setting power value and export to ultrasonic oscillator 13 from oscillating portion 17 the 5th power producing that vibrates.In addition, setting can comprise 0.
(the 2nd embodiment)
Fig. 2 is the schematic diagram of the Poewr control method for the related ultrasonic cleaning equipment of a mode of the present invention is described.
This ultrasonic cleaning equipment has the 1st～3rd ultrasonic cleaning equipment 31～33 and power meter 15.
The 1st ultrasonic cleaning equipment 31 has: the 1st cleaning fluid 12a, and it cleans the 1st cleaned material (cleaned material 1) 11a; The 1st ultrasonic oscillator (load 1) 13a, it supplies with ultrasonic wave to the 1st cleaning fluid 12a; With the 1st oscillator (oscillator 1) 14a, it is electrically connected with the 1st ultrasonic oscillator 13a.The 1st oscillator 14a has the formation same with the oscillator 14 shown in Fig. 1.
The 2nd ultrasonic cleaning equipment 32 has: the 2nd cleaning fluid 12b, and it cleans the 2nd cleaned material (cleaned material 2) 11b; The 2nd ultrasonic oscillator (load 2) 13b, it supplies with ultrasonic wave to the 2nd cleaning fluid 12b; With the 2nd oscillator (oscillator 2) 14b, it is electrically connected with the 2nd ultrasonic oscillator 13b.The 2nd oscillator 14b has the formation same with the oscillator 14 shown in Fig. 1.
The 3rd ultrasonic cleaning equipment 33 has: the 3rd cleaning fluid 12c, and it cleans the 3rd cleaned material (cleaned material 3) 11c; The 3rd ultrasonic oscillator (load 3) 13c, it supplies with ultrasonic wave to the 3rd cleaning fluid 12c; With the 3rd oscillator (oscillator 3) 14c, it is electrically connected with the 3rd ultrasonic oscillator 13c.The 3rd oscillator 14c has the formation same with the oscillator 14 shown in Fig. 1.
As long as there is a power meter 15 for the 1st to the 3rd ultrasonic cleaning equipment 31～33, and can easily install, dismantle power meter 15 for each in the 1st to the 3rd ultrasonic cleaning equipment 31～33.
Then, the Poewr control method of above-mentioned ultrasonic cleaning equipment is described.This power control is carried out according to the order of following (1)～(14).
(1) power meter 15 is electrically connected respectively with the 1st ultrasonic oscillator 13a and the 1st oscillator 14a, by the method same with the oscillator 14 shown in Fig. 1, control to make the 1st power to become the 1st setting power value and export to the 1st ultrasonic oscillator 13a from control part 18.
(2) by the method same with the oscillator 14 shown in Fig. 1, detected to the 2nd power of the 1st ultrasonic oscillator 13a output by test section 19, and by the correction value alpha of utilizing record in recording unit 21, the 1st detection power value that this detects is proofreaied and correct to derive the 1st corrected power value by operational part 20.
(3) by the method same with the oscillator 14 shown in Fig. 1, measured to the 2nd power of the 1st ultrasonic oscillator 13a output by power meter 15, and proofread and correct to derive the 2nd corrected power value by operational part 20 by utilizing the correction value beta of record in recording unit 21 to measure performance number to the 1st of this mensuration the.
(4) by the method same with the oscillator 14 shown in Fig. 1, by operational part 20, the 2nd corrected power value and the 1st corrected power value are compared, depart from the 2nd corrected power value setting above in the situation that in the 1st corrected power value, will carry out the 1st corrected value revising to make the 1st corrected power value become the correction correction value alpha of the 2nd corrected power value ' be recorded to recording unit 21.
(5) unload power meter 15 from the 1st ultrasonic cleaning equipment 31, and this power meter 15 is electrically connected with the 2nd ultrasonic oscillator 13b and the 2nd oscillator 14b of the 2nd ultrasonic cleaning equipment 32 respectively.
(6), by the method same with the oscillator 14 shown in Fig. 1, control part 18 is controlled to make become the 2nd setting power value and exported to the 2nd ultrasonic oscillator 13b from oscillating portion 17 the 3rd power producing that vibrates.
(7) by the method same with the oscillator 14 shown in Fig. 1, detected to the 4th power of the 2nd ultrasonic oscillator 13b output by test section 19, and by the correction value alpha of utilizing record in recording unit 21, the 2nd detection power value that this detects is proofreaied and correct to derive the 3rd corrected power value by operational part 20.
(8) by the method same with the oscillator 14 shown in Fig. 1, measured to the 4th power of the 2nd ultrasonic oscillator 13b output by power meter 15, and proofread and correct to derive the 4th corrected power value by operational part 20 by utilizing the correction value beta of record in recording unit 21 to measure performance number to the 2nd of this mensuration the.
(9) by the method same with the oscillator 14 shown in Fig. 1, by operational part 20, the 4th corrected power value and the 3rd corrected power value are compared, depart from the 4th corrected power value setting above in the situation that in the 3rd corrected power value, will carry out the 3rd corrected value revising to make the 3rd corrected power value become the correction correction value alpha of the 4th corrected power value ' be recorded to recording unit 21.
(10) unload power meter 15 from the 2nd ultrasonic cleaning equipment 32, and this power meter 15 is electrically connected with the 3rd ultrasonic oscillator 13c and the 3rd oscillator 14c of the 3rd ultrasonic cleaning equipment 33 respectively.
(11), by the method same with the oscillator 14 shown in Fig. 1, controlled to make become the 3rd setting power value and export to the 3rd ultrasonic oscillator 13c from oscillating portion 17 the 5th power producing that vibrates from control part 18.
(12) by the method same with the oscillator 14 shown in Fig. 1, detected to the 6th power of the 3rd ultrasonic oscillator 13c output by test section 19, and utilize the correction value alpha of record in recording unit 21 to proofread and correct to derive the 5th corrected power value to the 3rd detection power value that this detects by operational part 20.
(13) by the method same with the oscillator 14 shown in Fig. 1, measured to the 6th power of the 3rd ultrasonic oscillator 13c output by power meter 15, and utilized the correction value beta of record in recording unit 21 to proofread and correct to derive the 6th corrected power value to the 3rd mensuration performance number of this mensuration by operational part 20.
(14) by the method same with the oscillator 14 shown in Fig. 1, by operational part 20, the 6th corrected power value and the 5th corrected power value are compared, depart from the 6th corrected power value setting above in the situation that in the 5th corrected power value, will carry out the 5th corrected value revising to make the 5th corrected power value become the correction correction value alpha of the 6th corrected power value ' be recorded to recording unit 21.
According to present embodiment, can obtain the effect same with the 1st embodiment.
In addition,, according to present embodiment, by changing the operation of a power meter 15, can utilize a power meter 15 to carry out the power control separately of the 1st～3rd ultrasonic cleaning equipment 31～33.Its result, can adjust automatically with same benchmark the power control of the 1st～3rd ultrasonic cleaning equipment 31～33.
In addition, in the present embodiment, although applied a mode of the present invention in the Poewr control method of ultrasonic cleaning equipment with the 1st～3rd ultrasonic cleaning equipment 31～33, also can apply a mode of the present invention in the Poewr control method of ultrasonic cleaning equipment with more than 2 or 4 ultrasonic cleaning equipments.
In addition, before carrying out above-mentioned power control, preferably first power meter 15 is proofreaied and correct, for example, preferably in 1 year, power meter 15 is proofreaied and correct in the past.
(the 3rd embodiment)
Fig. 3 is the schematic diagram that represents the formation of the related ultrasonic cleaning equipment of a mode of the present invention.
This ultrasonic cleaning equipment has the 1st～3rd ultrasonic cleaning equipment 31～33 and automatic switchover power meter 34.This automatic switchover power meter 34 has power meter 15, the 1st switch 35 and the 2nd switch 36.Power meter 15 has the formation same with the power meter 15 shown in Fig. 1.
The 1st～3rd ultrasonic cleaning equipment 31～33 has respectively the formation same with the 1st～3rd ultrasonic cleaning equipment 31～33 shown in Fig. 2., identical with shown in Fig. 2 of the 1st～3rd cleaned material 11a～11c the 1st～3rd cleaning fluid 12a～12c, the 1st～3rd ultrasonic oscillator 13a～13c, the 1st～3rd oscillator 14a～14c.
The 1st～3rd ultrasonic oscillator 13a～13c is electrically connected with power meter 15 via the 1st switch 35.The 1st～3rd oscillator (oscillator 1, oscillator 2, oscillator 3) 14a～14c is electrically connected with power meter 15 via the 2nd switch 36.
The operational part 20 of the 1st oscillator 14a is electrically connected with test section 19, control part 18 and the recording unit 21 of the 1st oscillator 14a respectively, and is electrically connected with power meter 15 via the 2nd switch 36.
The operational part 20 of the 1st oscillator 14a has following function: derive and utilize correction value alpha to carry out the 1st corrected power value of proofreading and correct to the 1st detection power value being detected by test section 19, derivation utilizes correction value beta to carry out the 2nd corrected power value of proofreading and correct to the 1st mensuration performance number of being measured by power meter 15, the 2nd corrected power value and the 1st corrected power value are compared, depart from the 2nd corrected power value setting above in the situation that in the 1st corrected power value, to make the 1st corrected power value become the correction correction value alpha of the 2nd corrected power value to correction value alpha correction ' be recorded to recording unit 21.
In addition, the 1st detection power detecting with the test section 19 by the 1st oscillator 14a is worth corresponding signal A and is imported into operational part 20, the 1 corrected power values and is exported by the computing (product) of signal A and correction value alpha.
In addition, with measured by power meter 15 the 1st measure the corresponding signal B of performance number and be imported into operational part 20, the 2 corrected power values and be exported by the computing (product) of signal B and correction value beta.
In addition, revise correction value alpha ' be that correction value alpha has been carried out revising the value so that the 1st corrected power value is equated with the 2nd corrected power value.
The operational part 20 of the 2nd oscillator 14b is electrically connected with test section 19, control part 18 and the recording unit 21 of the 2nd oscillator 14b respectively, and is electrically connected with power meter 15 via the 2nd switch 36.
The operational part 20 of the 2nd oscillator 14b has following function: derive and utilize correction value alpha to carry out the 4th corrected power value of proofreading and correct to the 3rd detection power value being detected by test section 19, derivation utilizes correction value beta to carry out the 5th corrected power value of proofreading and correct to the 2nd mensuration performance number of being measured by power meter 15, the 5th corrected power value and the 4th corrected power value are compared, depart from the 5th corrected power value setting above in the situation that in the 4th corrected power value, will correction value alpha has been carried out revise to make the 4th corrected power value become the correction correction value alpha of the 5th corrected power value ' be recorded to recording unit 21.
In addition, the 3rd detection power detecting with the test section 19 by the 2nd oscillator 14b is worth corresponding signal A and is imported into operational part 20, the 4 corrected power values and is exported by the computing (product) of signal A and correction value alpha.
In addition, with measured by power meter 15 the 2nd measure the corresponding signal B of performance number and be imported into operational part 20, the 5 corrected power values and be exported by the computing (product) of signal B and correction value beta.
In addition, revise correction value alpha ' be that correction value alpha has been carried out revising the value so that the 4th corrected power value is equated with the 5th corrected power value.
The operational part 20 of the 3rd oscillator 14c is electrically connected with test section 19, control part 18 and the recording unit 21 of the 3rd oscillator 14c respectively, and is electrically connected with power meter 15 via the 2nd switch 36.
The operational part 20 of the 3rd oscillator 14c has following function: derive and utilize correction value alpha to carry out the 7th corrected power value of proofreading and correct to the 5th detection power value being detected by test section 19, derivation utilizes correction value beta to carry out the 8th corrected power value of proofreading and correct to the 3rd mensuration performance number of being measured by power meter 15, the 8th corrected power value and the 7th corrected power value are compared, depart from the 8th corrected power value setting above in the situation that in the 7th corrected power value, will correction value alpha has been carried out revise to make the 7th corrected power value become the correction correction value alpha of the 8th corrected power value ' be recorded to recording unit 21.
In addition, the 5th detection power detecting with the test section 19 by the 3rd oscillator 14c is worth corresponding signal A and is imported into operational part 20, the 7 corrected power values and is exported by the computing (product) of signal A and correction value alpha.
In addition, with measured by power meter 15 the 3rd measure the corresponding signal B of performance number and be imported into operational part 20, the 8 corrected power values and be exported by the computing (product) of signal B and correction value beta.
In addition, revise correction value alpha ' be that correction value alpha has been carried out revising the value so that the 7th corrected power value is equated with the 8th corrected power value.
The operational part 20 of the 1st oscillator 14a has following function: derive to utilize and revise correction value alpha ' the 2nd detection power value that the test section 19 by the 1st oscillator 14a is detected carried out the 3rd corrected power value of proofreading and correct, the 3rd corrected power value and the 1st setting power value are compared, depart from the 1st more than the 1st setting power value setting such comparative result in the case of obtaining the 3rd corrected power value, the 1st comparative result has been outputed to control part 18.In addition, the 2nd detection power detecting with the test section 19 by the 1st oscillator 14a be worth corresponding signal A be imported into operational part 20, the 3 corrected power values by signal A with revise correction value alpha ' computing (product) be exported.
The control part 18 of the 1st oscillator 14a utilizes the 1st comparative result while controls to make and become the 1st setting voltage value and exported to described the 1st ultrasonic oscillator 13a from the oscillating portion 17 of the 1st oscillator 14a the 1st power producing that vibrates.
The operational part 20 of the 2nd oscillator 14b has following function: derive to utilize and revise correction value alpha ' the 4th detection power value that the test section 19 by the 2nd oscillator 14b is detected carried out the 6th corrected power value of proofreading and correct, the 6th corrected power value and the 2nd setting power value are compared, depart from the 2nd more than the 2nd setting power value setting such comparative result in the case of obtaining the 6th corrected power value, the 2nd comparative result has been outputed to control part 18.In addition, the 4th detection power detecting with the test section 19 by the 2nd oscillator 14b be worth corresponding signal A be imported into operational part 20, the 6 corrected power values by signal A with revise correction value alpha ' computing (product) be exported.
The control part 18 of the 2nd oscillator 14b utilize the 2nd comparative result while control to make from the oscillating portion 17 of the 2nd oscillator 14b vibrate produce the 3rd power become the 2nd setting voltage value and export to the 2nd ultrasonic oscillator 13b.
The operational part 20 of the 3rd oscillator 14c has following function: derive to utilize and revise correction value alpha ' the 6th detection power value that the test section 19 by the 3rd oscillator 14c is detected carried out the 9th corrected power value of proofreading and correct, the 9th corrected power value and the 3rd setting power value are compared, depart from the 3rd more than the 3rd setting power value setting such comparative result in the case of obtaining the 9th corrected power value, the 3rd comparative result has been outputed to control part 18.In addition, the 6th detection power detecting with the test section 19 by the 3rd oscillator 14c be worth corresponding signal A be imported into operational part 20, the 9 corrected power values by signal A with revise correction value alpha ' computing (product) be exported.
The control part 18 of the 3rd oscillator 14c utilizes the 3rd comparative result while controls to make and become the 3rd setting voltage value and exported to the 3rd ultrasonic oscillator 13c from the oscillating portion 17 of the 3rd oscillator 14c the 3rd power producing that vibrates.
Then, the Poewr control method of above-mentioned ultrasonic cleaning equipment is described, but only the different part of the Poewr control method of carrying out from the order according to (1) of the 2nd embodiment～(14) is described.
(1) switch to make the 1st ultrasonic oscillator 13a of the 1st ultrasonic cleaning equipment 31 and the 1st oscillator 14a to be electrically connected with power meter 15 respectively to the 1st and the 2nd switch 35,36.In other words, by the 1st switch 35, the 1st ultrasonic oscillator 13a is electrically connected with power meter 15, and by the 2nd switch 36, power meter 15 is electrically connected with the 1st oscillator 14a.
(5) switch to make the 2nd ultrasonic oscillator 13b of the 2nd ultrasonic cleaning equipment 32 and the 2nd oscillator 14b to be electrically connected with power meter 15 respectively to the 1st and the 2nd switch 35,36.In other words, by the 1st switch 35, the 2nd ultrasonic oscillator 13b is electrically connected with power meter 15, and by the 2nd switch 36, power meter 15 is electrically connected with the 2nd oscillator 14b.
(10) switch to make the 3rd ultrasonic oscillator 13c of the 3rd ultrasonic cleaning equipment 33 and the 3rd oscillator 14c to be electrically connected with power meter 15 respectively to the 1st and the 2nd switch 35,36.In other words, by the 1st switch 35, the 3rd ultrasonic oscillator 13c is electrically connected with power meter 15, and by the 2nd switch 36, power meter 15 is electrically connected with the 3rd oscillator 14c.
According to present embodiment, can obtain the effect same with the 2nd embodiment.
In addition in the present embodiment, can automatically switch and being connected of power meter 15 according to the order from the 1st ultrasonic cleaning equipment 31 to the 3rd ultrasonic cleaning equipment 33.
In addition, in the present embodiment, in the ultrasonic cleaning equipment with the 1st～3rd ultrasonic cleaning equipment 31～33, apply a mode of the present invention, but also can in the ultrasonic cleaning equipment with more than 2 or 4 ultrasonic cleaning equipments, apply a mode of the present invention.
In addition, before carrying out above-mentioned power control, preferably first power meter 15 is proofreaied and correct, for example, preferably in 1 year, power meter 15 is proofreaied and correct in the past.
[symbol description]
9 power supplys
10 rinse baths
11 cleaned materials
11a the 1st cleaned material (cleaned material 1)
11b the 2nd cleaned material (cleaned material 2)
11c the 3rd cleaned material (cleaned material 3)
12 cleaning fluids
12a the 1st cleaning fluid
12b the 2nd cleaning fluid
12c the 3rd cleaning fluid
13 loads (ultrasonic oscillator)
13a 1 (the 1st ultrasonic oscillator) of loading
13b 2 (the 2nd ultrasonic oscillators) of loading
13c 3 (the 3rd ultrasonic oscillators) of loading
14 oscillators
14a oscillator 1 (the 1st oscillator)
14b oscillator 2 (the 2nd oscillator)
14c oscillator 3 (the 3rd oscillator)
15 power meters
16 power supply units
17 oscillating portions
18 control parts
19 test sections
20 operational parts
21 recording units
31 the 1st ultrasonic cleaning equipments
32 the 2nd ultrasonic cleaning equipments
33 the 3rd ultrasonic cleaning equipments
34 automatic switchover power meters
35 the 1st switches
36 the 2nd switches
Claims (12)
1. a ultrasonic cleaning equipment, is characterized in that, possesses:
Cleaning fluid, it cleans cleaned material;
Ultrasonic oscillator, it is to described cleaning solution supplying ultrasonic wave;
Oscillator, it is electrically connected with described ultrasonic oscillator; With
Power meter, its mensuration puts on the power of described ultrasonic oscillator,
Described oscillator has:
Oscillating portion;
Control part, it controls to make the 1st power being produced from described oscillating portion vibration become setting power value and export to described ultrasonic oscillator;
Test section, it detects the 2nd power to described ultrasonic oscillator output by described control part;
Recording unit, its record the 1st corrected value and the 2nd corrected value; With
Operational part, it is electrically connected with described test section, described control part, described recording unit and described power meter respectively,
Described operational part has following function: derive and utilize described the 1st corrected value to carry out the 1st corrected power value of proofreading and correct to the 1st detection power value being detected by described test section, derivation utilizes described the 2nd corrected value to carry out the 2nd corrected power value of proofreading and correct to the mensuration performance number of being measured by described power meter, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that described the 1st corrected value has been carried out revise to make described the 1st corrected power value become described the 2nd corrected power value is recorded to described recording unit.
2. ultrasonic cleaning equipment according to claim 1, is characterized in that,
Described operational part has following function: derive and utilize described the 1st correction corrected value to carry out the 3rd corrected power value of proofreading and correct to the 2nd detection power value being detected by described test section, described the 3rd corrected power value and described setting power value are compared, in the situation that obtaining described the 3rd corrected power value and having departed from more than described setting power value setting this comparative result, described comparative result is outputed to described control part
Described control part utilizes described comparative result while controls to make described the 1st power being produced from described oscillating portion vibration become described setting voltage value and export to described ultrasonic oscillator.
3. ultrasonic cleaning equipment according to claim 2, is characterized in that,
Be worth the 1st corresponding signal with described the 1st detection power being detected by described test section and be imported into described operational part, described the 1st corrected power value is exported by the computing of described the 1st signal and described the 1st corrected value,
2nd signal corresponding with the described mensuration performance number of being measured by described power meter is imported into described operational part, and described the 2nd corrected power value is exported by the computing of described the 2nd signal and described the 2nd corrected value,
Described the 1st correction corrected value is that described the 1st corrected value has been carried out revising the value so that described the 1st corrected power value is equated with described the 2nd corrected power value,
Be worth the 3rd corresponding signal with described the 2nd detection power being detected by described test section and be imported into described operational part, described the 3rd corrected power value is exported by described the 3rd signal and the described the 1st computing of revising corrected value.
4. a ultrasonic cleaning equipment, it has the 1st ultrasonic cleaning equipment, the 2nd ultrasonic cleaning equipment and power meter, and described ultrasonic cleaning equipment is characterised in that,
Described the 1st ultrasonic cleaning equipment has:
The 1st cleaning fluid, it cleans the 1st cleaned material;
The 1st ultrasonic oscillator, it is to described the 1st cleaning solution supplying ultrasonic wave; With
The 1st oscillator, it is electrically connected with described the 1st ultrasonic oscillator,
Described the 2nd ultrasonic cleaning equipment has:
The 2nd cleaning fluid, it cleans the 2nd cleaned material;
The 2nd ultrasonic oscillator, it is to described the 2nd cleaning solution supplying ultrasonic wave;
The 2nd oscillator, it is electrically connected with described the 2nd ultrasonic oscillator,
Described power meter is measured the power that puts on the power of described the 1st ultrasonic oscillator or put on described the 2nd ultrasonic oscillator,
Described the 1st ultrasonic oscillator and described the 2nd ultrasonic oscillator are electrically connected with described power meter via the 1st switch,
Described the 1st oscillator and described the 2nd oscillator are electrically connected with described power meter via the 2nd switch,
Described the 1st oscillator has:
The 1st oscillating portion;
The 1st control part, it controls to make the 1st power being produced from described the 1st oscillating portion vibration become the 1st setting power value and export to described the 1st ultrasonic oscillator;
The 1st test section, it detects the 2nd power to described the 1st ultrasonic oscillator output by described the 1st control part;
The 1st recording unit, its record the 1st corrected value and the 2nd corrected value; With
The 1st operational part, it is electrically connected with described the 1st test section, described the 1st control part and described the 1st recording unit respectively, and is electrically connected with described power meter via described the 2nd switch,
Described the 1st operational part has following function: derive and utilize described the 1st corrected value to carry out the 1st corrected power value of proofreading and correct to the 1st detection power value being detected by described the 1st test section, derivation utilizes described the 2nd corrected value to carry out the 2nd corrected power value of proofreading and correct to the 1st mensuration performance number of being measured by described power meter, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that described the 1st corrected value has been carried out revise to make described the 1st corrected power value become described the 2nd corrected power value is recorded to described the 1st recording unit,
Described the 2nd oscillator has:
The 2nd oscillating portion;
The 2nd control part, it controls to make the 3rd power being produced from described the 2nd oscillating portion vibration become the 2nd setting power value and export to described the 2nd ultrasonic oscillator;
The 2nd test section, it detects the 4th power to described the 2nd ultrasonic oscillator output by described the 2nd control part;
The 2nd recording unit, its record the 3rd corrected value and the 4th corrected value; With
The 2nd operational part, it is electrically connected with described the 2nd test section, described the 2nd control part and described the 2nd recording unit respectively, and is electrically connected with described power meter via described the 2nd switch,
Described the 2nd operational part has following function: derive and utilize described the 3rd corrected value to carry out the 4th corrected power value of proofreading and correct to the 3rd detection power value being detected by described the 2nd test section, derivation utilizes described the 4th corrected value to carry out the 5th corrected power value of proofreading and correct to the 2nd mensuration performance number of being measured by described power meter, described the 5th corrected power value and described the 4th corrected power value are compared, depart from described the 5th corrected power value setting above in the situation that in described the 4th corrected power value, the 2nd correction corrected value that described the 3rd corrected value has been carried out revise to make described the 4th corrected power value become described the 5th corrected power value is recorded to described the 2nd recording unit.
5. ultrasonic cleaning equipment according to claim 4, is characterized in that,
Described the 1st operational part has following function: derive and utilize described the 1st correction corrected value to carry out the 3rd corrected power value of proofreading and correct to the 2nd detection power value being detected by described the 1st test section, described the 3rd corrected power value and described the 1st setting power value are compared, depart from the 1st more than described the 1st setting power value setting such comparative result in the case of obtaining described the 3rd corrected power value, described the 1st comparative result is outputed to described the 1st control part
Described the 1st control part utilizes described the 1st comparative result while controls to make described the 1st power being produced from described the 1st oscillating portion vibration become described the 1st setting voltage value and export to described the 1st ultrasonic oscillator,
Described the 2nd operational part has following function: derive and utilize described the 2nd correction corrected value to carry out the 6th corrected power value of proofreading and correct to the 4th detection power value being detected by described the 2nd test section, described the 6th corrected power value and described the 2nd setting power value are compared, depart from the 2nd more than described the 2nd setting power value setting such comparative result in the case of obtaining described the 6th corrected power value, described the 2nd comparative result is outputed to described the 2nd control part
Described the 2nd control part utilizes described the 2nd comparative result while controls to make described the 3rd power being produced from described the 2nd oscillating portion vibration become described the 2nd setting voltage value and export to described the 2nd ultrasonic oscillator.
6. ultrasonic cleaning equipment according to claim 5, is characterized in that,
Be worth the 1st corresponding signal with described the 1st detection power being detected by described the 1st test section and be imported into described the 1st operational part, described the 1st corrected power value is exported by the computing of described the 1st signal and described the 1st corrected value,
2nd signal corresponding with described the 1st mensuration performance number of being measured by described power meter is imported into described the 1st operational part, and described the 2nd corrected power value is exported by the computing of described the 2nd signal and described the 2nd corrected value,
Described the 1st correction corrected value is that described the 1st corrected value has been carried out revising the value so that described the 1st corrected power value is equated with described the 2nd corrected power value,
Be worth the 3rd corresponding signal with described the 2nd detection power being detected by described the 1st test section and be imported into described the 1st operational part, described the 3rd corrected power value is exported by described the 3rd signal and the described the 1st computing of revising corrected value,
Be worth the 4th corresponding signal with described the 3rd detection power being detected by described the 2nd test section and be imported into described the 2nd operational part, described the 4th corrected power value is exported by the computing of described the 4th signal and described the 3rd corrected value,
5th signal corresponding with described the 2nd mensuration performance number of being measured by described power meter is imported into described the 2nd operational part, and described the 5th corrected power value is exported by the computing of described the 5th signal and described the 4th corrected value,
Described the 2nd correction corrected value is that described the 3rd corrected value has been carried out revising the value so that described the 4th corrected power value is equated with described the 5th corrected power value,
Be worth the 6th corresponding signal with described the 4th detection power being detected by described the 2nd test section and be imported into described the 2nd operational part, described the 6th corrected power value is exported by described the 6th signal and the described the 2nd computing of revising corrected value.
7. according to the ultrasonic cleaning equipment described in any one in claim 1～6, it is characterized in that,
Described power meter is the power meter being corrected.
8. a Poewr control method for ultrasonic cleaning equipment,
Described ultrasonic cleaning equipment has:
Cleaning fluid, it cleans cleaned material;
Ultrasonic oscillator, it is to described cleaning solution supplying ultrasonic wave;
Oscillator, it is electrically connected with described ultrasonic oscillator; With
Power meter, it is electrically connected with described oscillator and described ultrasonic oscillator,
Described oscillator has:
Oscillating portion;
Control part, it is electrically connected with described oscillating portion;
Test section, it is electrically connected with described control part;
Operational part, it is electrically connected with described test section and described control part respectively; With
Recording unit, it is electrically connected with described operational part,
Described Poewr control method is characterised in that,
Control to make the 1st power being produced from described oscillating portion vibration become setting power value and export to described ultrasonic oscillator from described control part,
Detected to the 2nd power of described ultrasonic oscillator output by described test section,
The 1st corrected value being recorded in described recording unit by utilization by described operational part proofreaies and correct to derive the 1st corrected power value to the 1st detection power value being detected by described test section,
Measured to described the 2nd power of described ultrasonic oscillator output by described power meter,
Proofread and correct to derive the 2nd corrected power value by described operational part by utilizing the 2nd corrected value recording to measure performance number to the measured by described power meter the 1st in described recording unit,
By described operational part, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, revised corrected value and be recorded to described recording unit described the 1st corrected value having been carried out revise to make described the 1st corrected power value become the 1st of described the 2nd corrected power value.
9. the Poewr control method of ultrasonic cleaning equipment according to claim 8, is characterized in that,
After described the 1st correction corrected value is recorded to described recording unit,
Control to make the 3rd power being produced from described oscillating portion vibration become described setting power value and export to described ultrasonic oscillator from described control part,
Detected to the 4th power of described ultrasonic oscillator output by described test section,
By described operational part by utilize described the 1st revise corrected value the 2nd detection power value being detected by described test section is proofreaied and correct to derive the 3rd corrected power value,
By described operational part, described the 3rd corrected power value and described setting power value are compared, in the situation that obtaining described the 3rd corrected power value and having departed from more than described setting power value setting this comparative result, described comparative result is outputed to described control part
Utilize described comparative result from described control part while control to make the 5th power being produced from described oscillating portion vibration become described setting power value and export to described ultrasonic oscillator.
10. a Poewr control method for ultrasonic cleaning equipment,
Described ultrasonic cleaning equipment has the 1st ultrasonic cleaning equipment, the 2nd ultrasonic cleaning equipment and power meter,
Described the 1st ultrasonic cleaning equipment has:
The 1st cleaning fluid, it cleans the 1st cleaned material;
The 1st ultrasonic oscillator, it is to described the 1st cleaning solution supplying ultrasonic wave; With
The 1st oscillator, it is electrically connected with described the 1st ultrasonic oscillator,
Described the 1st oscillator has:
The 1st oscillating portion;
The 1st control part, it is electrically connected with described the 1st oscillating portion;
The 1st test section, it is electrically connected with described the 1st control part;
The 1st operational part, it is electrically connected with described the 1st test section and described the 1st control part respectively; With
The 1st recording unit, it is electrically connected with described the 1st operational part,
Described the 2nd ultrasonic cleaning equipment has:
The 2nd cleaning fluid, it cleans the 2nd cleaned material,
The 2nd ultrasonic oscillator, it is to described the 2nd cleaning solution supplying ultrasonic wave; With
The 2nd oscillator, it is electrically connected with described the 2nd ultrasonic oscillator,
Described the 2nd oscillator has:
The 2nd oscillating portion;
The 2nd control part, it is electrically connected with described the 2nd oscillating portion;
The 2nd test section, it is electrically connected with described the 2nd control part;
The 2nd operational part, it is electrically connected with described the 2nd test section and described the 2nd control part respectively; With
The 2nd recording unit, it is electrically connected with described the 2nd operational part,
Described Poewr control method is characterised in that,
Described the 1st ultrasonic oscillator and described the 1st oscillator are electrically connected with described power meter respectively,
Control to make the 1st power being produced from described the 1st oscillating portion vibration become the 1st setting power value and export to described the 1st ultrasonic oscillator from described the 1st control part,
Detected to the 2nd power of described the 1st ultrasonic oscillator output by described the 1st test section,
The 1st corrected value being recorded in described the 1st recording unit by utilization by described the 1st operational part proofreaies and correct to derive the 1st corrected power value to the 1st detection power value being detected by described the 1st test section,
Measured to described the 2nd power of described the 1st ultrasonic oscillator output by described power meter,
Proofread and correct to derive the 2nd corrected power value by described the 1st operational part by utilizing the 2nd corrected value recording to measure performance number to the measured by described power meter the 1st in described the 1st recording unit,
By described the 1st operational part, described the 2nd corrected power value and described the 1st corrected power value are compared, depart from described the 2nd corrected power value setting above in the situation that in described the 1st corrected power value, the 1st correction corrected value that described the 1st corrected value has been carried out revise to make described the 1st corrected power value become described the 2nd corrected power value is recorded to described the 1st recording unit
Described the 2nd ultrasonic oscillator and described the 2nd oscillator are electrically connected with described power meter respectively,
Control to make the 3rd power being produced from described the 2nd oscillating portion vibration become the 2nd setting power value and export to described the 2nd ultrasonic oscillator from described the 2nd control part,
Detected to the 4th power of described the 2nd ultrasonic oscillator output by described the 2nd test section,
The 3rd corrected value being recorded in described the 2nd recording unit by utilization by described the 2nd operational part proofreaies and correct to derive the 3rd corrected power value to the 2nd detection power value being detected by described the 2nd test section,
Measured to described the 4th power of described the 2nd ultrasonic oscillator output by described power meter,
Proofread and correct to derive the 4th corrected power value by described the 2nd operational part by utilizing the 4th corrected value recording to measure performance number to the measured by described power meter the 2nd in described the 2nd recording unit,
By described the 2nd operational part, described the 4th corrected power value and described the 3rd corrected power value are compared, depart from described the 4th corrected power value setting above in the situation that in described the 3rd corrected power value, revised corrected value and be recorded to described the 2nd recording unit described the 3rd corrected value having been carried out revise to make described the 3rd corrected power value become the 2nd of described the 4th corrected power value.
The Poewr control method of 11. ultrasonic cleaning equipments according to claim 10, is characterized in that,
Described the 1st ultrasonic oscillator and described the 1st oscillator are electrically connected with described power meter respectively, referring to by the 1st switch makes described the 1st ultrasonic oscillator be electrically connected with described power meter, and by the 2nd switch, described power meter is electrically connected with described the 1st oscillator
Described the 2nd ultrasonic oscillator and described the 2nd oscillator are electrically connected with described power meter respectively, refer to by described the 1st switch described the 2nd ultrasonic oscillator is electrically connected with described power meter, and by described the 2nd switch, described power meter is electrically connected with described the 2nd oscillator.
The Poewr control method of the ultrasonic cleaning equipment in 12. according to Claim 8～11 described in any one, is characterized in that,
Before carrying out described power control, described power meter is proofreaied and correct.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012016484A JP5226141B1 (en) | 2012-01-30 | 2012-01-30 | Ultrasonic cleaning device and power control method thereof |
| JP2012-016484 | 2012-07-11 | ||
| PCT/JP2012/082337 WO2013114738A1 (en) | 2012-01-30 | 2012-12-13 | Ultrasonic cleaning apparatus and power control method employed therein |
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| CN103874550A true CN103874550A (en) | 2014-06-18 |
| CN103874550B CN103874550B (en) | 2015-10-14 |
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| CN201280039420.XA Active CN103874550B (en) | 2012-01-30 | 2012-12-13 | ultrasonic cleaning device and power control method thereof |
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| JP (1) | JP5226141B1 (en) |
| CN (1) | CN103874550B (en) |
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| JP4776689B2 (en) * | 2006-09-22 | 2011-09-21 | 株式会社カイジョー | Ultrasonic cleaning equipment |
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2012
- 2012-01-30 JP JP2012016484A patent/JP5226141B1/en active Active
- 2012-12-11 TW TW101146613A patent/TWI476054B/en active
- 2012-12-13 CN CN201280039420.XA patent/CN103874550B/en active Active
- 2012-12-13 WO PCT/JP2012/082337 patent/WO2013114738A1/en active Application Filing
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| JP2004113846A (en) * | 2002-09-24 | 2004-04-15 | Honda Electronic Co Ltd | Oscillator for ultrasonic cleaning apparatus |
| JP2004251845A (en) * | 2003-02-21 | 2004-09-09 | Toshiba Corp | Instrument and method for measuring sound pressure |
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| Publication number | Publication date |
|---|---|
| TWI476054B (en) | 2015-03-11 |
| JP5226141B1 (en) | 2013-07-03 |
| WO2013114738A1 (en) | 2013-08-08 |
| CN103874550B (en) | 2015-10-14 |
| TW201341072A (en) | 2013-10-16 |
| JP2013154291A (en) | 2013-08-15 |
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