TWI475285B - Method of fabricating a touch panel - Google Patents

Method of fabricating a touch panel Download PDF

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TWI475285B
TWI475285B TW101106069A TW101106069A TWI475285B TW I475285 B TWI475285 B TW I475285B TW 101106069 A TW101106069 A TW 101106069A TW 101106069 A TW101106069 A TW 101106069A TW I475285 B TWI475285 B TW I475285B
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sensing
touch panel
transparent
photoresist
sensing series
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TW101106069A
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TW201335666A (en
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Guang Yi Zeng
Liang Hao Kang
Yi Cheng Tsai
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Chunghwa Picture Tubes Ltd
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Description

觸控面板的製造方法Touch panel manufacturing method

本發明是有關於一種觸控面板的製造方法,且特別是有關於一種減少光罩使用數目的觸控面板的製造方法。The present invention relates to a method of fabricating a touch panel, and more particularly to a method of fabricating a touch panel that reduces the number of reticle uses.

近年來,各式電子產品都不斷朝向操作簡便、小體積以及大螢幕尺寸的方向邁進,特別是攜帶式的電子產品對於體積及螢幕尺寸的要求更為嚴格。因此,許多電子產品都將觸控面板與顯示面板整合,以省略鍵盤或是操控按鍵所需的空間,進而使螢幕可配置的面積擴大。目前,觸控面板大致可區分為電阻式、電容式、紅外線式及超音波式等觸控面板,其中以電阻式觸控面板與電容式觸控面板為最常見的產品。In recent years, various electronic products have been moving toward simple operation, small size, and large screen size. In particular, portable electronic products have stricter requirements on volume and screen size. Therefore, many electronic products integrate the touch panel with the display panel to omit the space required for the keyboard or the control buttons, thereby expanding the configurable area of the screen. Currently, touch panels can be roughly classified into resistive, capacitive, infrared, and ultrasonic touch panels. Among them, resistive touch panels and capacitive touch panels are the most common products.

以其中一種電容式觸控面板來說,觸控面板中的感測區包括X方向與Y方向的感測串列,感測串列通常是由感測墊以及橋接線組成。另外,這些感測串列往往以設置於感測區之外的金屬傳輸線來與控制電路連接。為了節省光罩使用數目,通常在製作金屬傳輸線時同時製作橋接線。然而,感測區中會因為橋接線為金屬材料而反射外界環境的光線會造成目視品位不佳的問題。In one of the capacitive touch panels, the sensing region in the touch panel includes sensing series in the X direction and the Y direction, and the sensing series is usually composed of a sensing pad and a bridge wire. In addition, these sensing series are often connected to the control circuit with metal transmission lines disposed outside the sensing region. In order to save the number of reticle use, it is common to make a bridge wire while making a metal transmission line. However, in the sensing area, the light that reflects the external environment due to the bridge wire is a metal material, which may cause a problem of poor visual quality.

此外,由於用以製作金屬橋接線的金屬膜層膜厚較厚,若是使用金屬膜層製作橋接線,則其容易造成後續的透明橋接線(跨過金屬橋接線之上層的透明橋接線)的製作過程中產生成膜平坦性不佳(或爬坡斷線)的現象,這樣的現象會增加觸控面板產生靜電放電(Electrostatic Discharge)的機率。當靜電放電發生在橋接線交錯之區域時,會造成X方向與Y方向的傳輸訊號有短路的現象。因此,為了減少目視品位不佳以及短路的情形,必須增加一道光罩製程來完成以透明橋接線取代前述之金屬橋接線的製作,如此一來便增加一道光罩製程,造成製作成本的增加。In addition, since the metal film layer used to make the metal bridge wire has a thick film thickness, if the metal film layer is used to make the bridge wire, it is easy to cause the subsequent transparent bridge wire (crossing the transparent bridge wire above the metal bridge wire). The phenomenon of poor film formation (or climbing line breakage) occurs during the manufacturing process, which increases the probability of the electrostatic panel discharge (Electrostatic Discharge). When the electrostatic discharge occurs in the area where the bridge wires are staggered, the transmission signals in the X direction and the Y direction are short-circuited. Therefore, in order to reduce the visual quality and short circuit conditions, it is necessary to add a mask process to complete the fabrication of the metal bridge wiring by the transparent bridge wiring, thereby adding a mask process and increasing the manufacturing cost.

本發明提供一種觸控面板的製造方法,其使用透明導電物質作為橋接線,因此有助於提供良好的目視品位以及避免不同方向之感測串列產生短路的情形。The present invention provides a method of manufacturing a touch panel that uses a transparent conductive material as a bridge wire, thereby contributing to providing a good visual quality and avoiding a situation in which a sense series in different directions is short-circuited.

本發明提供一種觸控面板的製造方法,其包括下列步驟。首先,提供一基板,此基板具有一感測區以及位於感測區周邊的一周邊區。接著,於感測區中形成多條第一感測串列以及多條第二感測串列並在周邊區中形成連接於第一感測串列以及第二感測串列的多條傳輸線,第一感測串列的延伸方向與第二感測串列的延伸方向相互交錯,其中形成第一感測串列、第二感測串列與傳輸線的步驟包括:於基板上依序形成一透明導電層與一金屬層;進行一圖案化製程使透明導電層與金屬層圖案化為一圖案化透明導電層以及一圖案化金屬層,圖案化透明導電層包括第一感測串列的多條第一透明橋接線及位於周邊區的多條透明傳輸線,而圖案化金屬層包括位於周邊區的多條金屬傳輸線,其中透明傳輸線與金屬傳輸線疊置以構成傳輸線。再來,形成一圖案化絕緣層,其中圖案化絕緣層覆蓋第一透明橋接線。最後,於圖案化絕緣層上形成第二感測串列的多條第二透明橋接線。The present invention provides a method of manufacturing a touch panel, which includes the following steps. First, a substrate is provided having a sensing region and a peripheral region located around the sensing region. And forming a plurality of first sensing series and a plurality of second sensing series in the sensing region and forming a plurality of transmission lines connected to the first sensing series and the second sensing series in the peripheral area The extending direction of the first sensing series and the extending direction of the second sensing series are mutually staggered, wherein the step of forming the first sensing series, the second sensing series and the transmission line comprises: sequentially forming on the substrate a transparent conductive layer and a metal layer; performing a patterning process to pattern the transparent conductive layer and the metal layer into a patterned transparent conductive layer and a patterned metal layer, wherein the patterned transparent conductive layer comprises the first sensing series The plurality of first transparent bridge wires and the plurality of transparent transmission lines located in the peripheral region, and the patterned metal layer comprises a plurality of metal transmission lines located in the peripheral region, wherein the transparent transmission lines and the metal transmission lines are stacked to form a transmission line. Further, a patterned insulating layer is formed, wherein the patterned insulating layer covers the first transparent bridge. Finally, a plurality of second transparent bridge wires of the second sensing series are formed on the patterned insulating layer.

在本發明之一實施例中,上述觸控面板的製造方法,更包括:形成多個第一感測墊,且第一感測墊是由第一透明橋接線串接而成;形成多個第二感測墊,且第二感測墊是由第二透明橋接線串接而成。In an embodiment of the present invention, the method for manufacturing the touch panel further includes: forming a plurality of first sensing pads, wherein the first sensing pads are serially connected by the first transparent bridge wires; The second sensing pad is formed by connecting the second transparent bridge wires in series.

在本發明之一實施例中,上述進行圖案化製程的步驟更包括使圖案化透明導電層包括第一感測墊。In an embodiment of the invention, the step of performing the patterning process further comprises: causing the patterned transparent conductive layer to include the first sensing pad.

在本發明之一實施例中,上述進行圖案化製程的步驟更包括使圖案化透明導電層包括第二感測墊。In an embodiment of the invention, the step of performing the patterning process further comprises: causing the patterned transparent conductive layer to include a second sensing pad.

在本發明之一實施例中,上述形成第二透明橋接線的同時更形成第一感測墊。In an embodiment of the invention, the first transparent pad is formed to form a first sensing pad.

在本發明之一實施例中,上述形成第二透明橋接線的同時更形成第二感測墊。In an embodiment of the invention, the second transparent pad is formed while forming the second transparent pad.

在本發明之一實施例中,上述觸控面板的製造方法更包括形成一保護層,保護層覆蓋第一感測串列以及第二感測串列。In an embodiment of the invention, the method for manufacturing the touch panel further includes forming a protective layer covering the first sensing series and the second sensing series.

在本發明之一實施例中,上述圖案化製程係為一光罩製程。In an embodiment of the invention, the patterning process is a mask process.

在本發明之一實施例中,上述光罩製程使用的光罩包括一半色調光罩或是一灰色調光罩。In an embodiment of the invention, the reticle used in the reticle process comprises a halftone reticle or a gray dimming hood.

基於上述,本發明之觸控面板的製造方法以透明導電材料來製作橋接線,因此觸控面板可具有較佳的目視品位。此外,依據本發明之觸控面板的製造方法,使用一道光罩製程即可完成部份的透明橋接線以及位於周邊的傳輸線的製作。因此,本發明之觸控面板的製造方法有助於減少光罩製程的數目並降低製作成本。Based on the above, the manufacturing method of the touch panel of the present invention uses a transparent conductive material to form a bridge wire, so that the touch panel can have a better visual quality. In addition, according to the manufacturing method of the touch panel of the present invention, a part of the transparent bridge wiring and the production of the transmission line at the periphery can be completed by using a mask process. Therefore, the manufacturing method of the touch panel of the present invention contributes to reducing the number of mask processes and reducing the manufacturing cost.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

為詳細說明本發明之觸控面板的製造方法,在此先說明觸控面板的大致配置。圖1繪示本發明一實施例之一觸控面板的示意圖。請參考圖1,從結構上來看,觸控面板TP基本上包括一感測區100以及一周邊區200,其中周邊區200位於感測區100的周邊。感測區100中具有多條第一感測串列110以及多條第二感測串列120。周邊區200中具有多條傳輸線210。每一條第一感測串列110都是由多條第一橋接線112以及多個第一感測墊114所構成,且同一條第一感測串列110中的第一橋接線112將這些第一感測墊114串接在一起。相似地,每一條第二感測串列120都是由多條第二橋接線122以及多個第二感測墊124所構成,且同一條第二感測串列120中的第二橋接線122將這些第二感測墊124串接在一起。第一橋接線112與第二橋接線122會呈現彼此交錯的配置。In order to explain in detail the method of manufacturing the touch panel of the present invention, the general configuration of the touch panel will be described. FIG. 1 is a schematic diagram of a touch panel according to an embodiment of the invention. Referring to FIG. 1 , the touch panel TP basically includes a sensing area 100 and a peripheral area 200 , wherein the peripheral area 200 is located at the periphery of the sensing area 100 . The sensing area 100 has a plurality of first sensing series 110 and a plurality of second sensing series 120. There are a plurality of transmission lines 210 in the peripheral area 200. Each of the first sensing series 110 is composed of a plurality of first bridge wires 112 and a plurality of first sensing pads 114, and the first bridge wires 112 of the same first sensing series 110 will The first sensing pads 114 are connected in series. Similarly, each of the second sensing series 120 is composed of a plurality of second bridge lines 122 and a plurality of second sensing pads 124, and a second bridge line of the same second sensing series 120 These second sensing pads 124 are connected in series. The first bridge line 112 and the second bridge line 122 may assume a staggered configuration.

詳細而言,第一感測串列110的延伸方向與第二感測串列120的延伸方向相互交錯。換言之,在此實施例中,第一感測串列110的延伸方向例如為X方向,第二感測串列120的延伸方向例如為Y方向,X方向與Y方向相互交錯。然而,本發明不限於此,在其他實施例中,第一感測串列110的延伸方向可例如為Y方向,而第二感測串列120的延伸方向例如為X方向。In detail, the extending direction of the first sensing series 110 and the extending direction of the second sensing series 120 are interdigitated. In other words, in this embodiment, the extending direction of the first sensing series 110 is, for example, the X direction, and the extending direction of the second sensing series 120 is, for example, the Y direction, and the X direction and the Y direction are interlaced with each other. However, the present invention is not limited thereto. In other embodiments, the extending direction of the first sensing series 110 may be, for example, the Y direction, and the extending direction of the second sensing series 120 is, for example, the X direction.

以下將列舉三個實施例以詳細介紹上述第一感測串列110、第二感測串列120以及傳輸線210的製造方法。必須先說明的是,為簡潔說明本發明之觸控面板的製造方法,在下列的圖示中將以圖1中的區域M之放大示意圖作為說明。並且,下列的圖示中將僅以一條傳輸線210、一條第一感測串列110以及一條第二感測串列120的形成方法作為說明。然而,於此領域中具有通常知識者當可依照以下之說明而理解本發明之觸控面板的製造方法。Three embodiments will be exemplified below to describe in detail the manufacturing methods of the first sensing series 110, the second sensing series 120, and the transmission line 210 described above. It is to be noted that, in order to succinctly explain the manufacturing method of the touch panel of the present invention, an enlarged schematic view of the area M in FIG. 1 will be described in the following drawings. Moreover, in the following drawings, only one transmission line 210, one first sensing series 110, and one second sensing series 120 will be described as a description. However, those skilled in the art can understand the manufacturing method of the touch panel of the present invention in accordance with the following description.

圖2A至圖2J為本發明第一實施例之一觸控面板的製作流程示意圖。須注意的是,為清楚表示製作流程,下列的圖式皆同時包括觸控面板的上視圖(上)以及觸控面板的剖面圖(下),並且同時搭配圖1之整體架構進行說明。請參考圖2A,首先,於基板10上形成一透明導電層12與一金屬層14。接著,對透明導電層12以及金屬層14進行一圖案化製程。2A to 2J are schematic diagrams showing a manufacturing process of a touch panel according to a first embodiment of the present invention. It should be noted that in order to clearly illustrate the production process, the following drawings include both the upper view (top) of the touch panel and the cross-sectional view of the touch panel (bottom), and are also described in conjunction with the overall architecture of FIG. Referring to FIG. 2A, first, a transparent conductive layer 12 and a metal layer 14 are formed on the substrate 10. Next, a patterning process is performed on the transparent conductive layer 12 and the metal layer 14.

於本實施例中,圖案化製程可以包括以下步驟,但不以此為限。形成一光阻層(未繪示)於形成有透明導電層12以及金屬層14的基板10上,接著以一光罩製程對光阻層進行圖案化,其中此光罩製程例如是一半色調光罩製程或是一灰色調光罩製程。如此,一第一光阻16以及一第二光阻18a會形成於金屬層14上,其中第一光阻16的膜層厚度小於第二光阻18a,如圖2B所示,並且第一光阻16例如位於感測區100而第二光阻18a例如位在周邊區200。In this embodiment, the patterning process may include the following steps, but is not limited thereto. Forming a photoresist layer (not shown) on the substrate 10 on which the transparent conductive layer 12 and the metal layer 14 are formed, and then patterning the photoresist layer by a mask process, wherein the mask process is, for example, halftone light. The mask process or a gray dimmer process. Thus, a first photoresist 16 and a second photoresist 18a are formed on the metal layer 14, wherein the first photoresist 16 has a film thickness smaller than the second photoresist 18a, as shown in FIG. 2B, and the first light The resistor 16 is, for example, located in the sensing region 100 and the second photoresist 18a is located, for example, in the peripheral region 200.

再來,以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分金屬層14,如圖2C所示。類似地,再以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分透明導電層12,如圖2D所示。圖2C及圖2D所繪的移除步驟例如是透過一蝕刻製程來實現。經由蝕刻製程後,透明導電層12以及金屬層14都被圖案化而僅剩下被第一光阻16以及第二光阻18a所遮蔽的部份。Then, with the first photoresist 16 and the second photoresist 18a as masks, the exposed portion of the metal layer 14 is removed, as shown in FIG. 2C. Similarly, the exposed portion of the transparent conductive layer 12 is removed by using the first photoresist 16 and the second photoresist 18a as masks, as shown in FIG. 2D. The removal steps depicted in Figures 2C and 2D are accomplished, for example, by an etch process. After the etching process, the transparent conductive layer 12 and the metal layer 14 are patterned to leave only the portion shielded by the first photoresist 16 and the second photoresist 18a.

然後,移除第一光阻16以及部分第二光阻18a以形成第三光阻18b並且暴露出部分金屬層14,如圖2E所示。此處,移除第一光阻16以及部分第二光阻18a的方法例如是灰化法。並且第三光阻18b例如是由被薄化的第二光阻18a所構成。亦即,第三光阻18b與第二光阻18a在上視圖中具有相同的輪廓,但在剖面圖中具有不同的厚度。Then, the first photoresist 16 and a portion of the second photoresist 18a are removed to form a third photoresist 18b and a portion of the metal layer 14 is exposed, as shown in FIG. 2E. Here, the method of removing the first photoresist 16 and a part of the second photoresist 18a is, for example, an ashing method. And the third photoresist 18b is composed of, for example, a thinned second photoresist 18a. That is, the third photoresist 18b and the second photoresist 18a have the same profile in the upper view, but have different thicknesses in the cross-sectional view.

接著,將原本被第一光阻16遮蔽而後被暴露出來的部分金屬層14移除以使暴露出來的部分透明導電層12構成圖1中第一感測串列110的第一橋接線112,如圖2F所示。此時,第三光阻18b仍保留於基板10的周邊區200中。Then, the portion of the metal layer 14 that is originally exposed by the first photoresist 16 and then exposed is removed to make the exposed portion of the transparent conductive layer 12 form the first bridge 112 of the first sensing series 110 in FIG. As shown in Figure 2F. At this time, the third photoresist 18b remains in the peripheral region 200 of the substrate 10.

再來,將第三光阻18b移除,即完成圖案化金屬層以及圖案化透明導電層,如圖2G所示。請再參考圖2G並同時參照圖1,圖案化金屬層包括多條金屬傳輸線214(在此僅繪示1條)。圖案化透明導電層包括第一感測串列110的多條第一透明橋接線112(在此僅繪示1條)以及位於周邊區200的多條透明傳輸線212(在此僅繪示1條)。此外,透明傳輸線212與金屬傳輸線214疊置以構成傳輸線210。具體而言,前述步驟中第一光阻16的圖案即為第一透明橋接線112的圖案,而第二光阻18a的圖案及為傳輸線210的圖案。並且,在本實施例中,以一道光罩製程即可將兩種不同材料的材料層圖案化以完成傳輸線210以及第一透明橋接線112的製作,因此有助於降低觸控面板的製作成本。Then, the third photoresist 18b is removed, that is, the patterned metal layer and the patterned transparent conductive layer are completed, as shown in FIG. 2G. Referring again to FIG. 2G and referring to FIG. 1 simultaneously, the patterned metal layer includes a plurality of metal transmission lines 214 (only one is shown here). The patterned transparent conductive layer includes a plurality of first transparent bridge lines 112 of the first sensing series 110 (only one is shown here) and a plurality of transparent transmission lines 212 located in the peripheral area 200 (only one is shown here) ). Further, the transparent transmission line 212 is overlapped with the metal transmission line 214 to constitute the transmission line 210. Specifically, in the foregoing step, the pattern of the first photoresist 16 is the pattern of the first transparent bridge 112, and the pattern of the second photoresist 18a is the pattern of the transmission line 210. Moreover, in the embodiment, the material layers of two different materials can be patterned by a mask process to complete the fabrication of the transmission line 210 and the first transparent bridge line 112, thereby helping to reduce the manufacturing cost of the touch panel. .

隨後,請參考圖2H,形成一圖案化絕緣層20並覆蓋部分第一透明橋接線112以及傳輸線210。詳細來看,圖案化絕緣層20可藉由一道光罩製程圖案化而具有暴露出部分第一透明橋接線112以及部分金屬傳輸線214的多個開口。Subsequently, referring to FIG. 2H, a patterned insulating layer 20 is formed and covers a portion of the first transparent bridge line 112 and the transmission line 210. In detail, the patterned insulating layer 20 can be patterned by a reticle process to have a plurality of openings exposing portions of the first transparent bridge lines 112 and portions of the metal transmission lines 214.

再來,請參考圖2I,於圖案化絕緣層20上形成第二感測串列120以及多個第一感測墊114。本實施例例如是藉由一道光罩製程圖案化一透明導電層(未繪示)使得第二透明橋接線122、第一感測墊114以及第二感測墊124同時製作。第一透明橋接線112透過圖案化絕緣層20的開口與第一感測墊114串接成第一感測串列110,而第二透明橋接線122與第二感測墊124直接連接成以構成第二感測串列120。此外,位於周邊區200與感測區100之間的第一感測墊114例如更延伸至周邊區200中,而與圖案化絕緣層20所暴露出的部分金屬傳輸線214電性連接,藉此可將感測訊號傳送至傳輸線210上。Referring to FIG. 2I , a second sensing series 120 and a plurality of first sensing pads 114 are formed on the patterned insulating layer 20 . In this embodiment, for example, a transparent conductive layer (not shown) is patterned by a mask process such that the second transparent bridge 122, the first sensing pad 114, and the second sensing pad 124 are simultaneously fabricated. The first transparent bridge line 112 is connected in series with the first sensing pad 114 through the opening of the patterned insulating layer 20 to form a first sensing series 110, and the second transparent bridge line 122 is directly connected to the second sensing pad 124. A second sensing series 120 is formed. In addition, the first sensing pad 114 located between the peripheral region 200 and the sensing region 100 extends into the peripheral region 200, for example, and is electrically connected to a portion of the metal transmission line 214 exposed by the patterned insulating layer 20, thereby The sensing signal can be transmitted to the transmission line 210.

最後,請參考圖2J,形成一保護層30。保護層30覆蓋第一感測串列110以及第二感測串列120。至此,完成觸控面板TP1的製作。在本實施例中,第二透明橋接線122、第一感測墊114以及第二感測墊124都是由透明導電材料所構成。另外,根據圖2A至圖2G的製作流程,第一透明橋接線112也是由透明導電材料所構成。所以,位於感測區100內的第一感測串列110與第二感測串列120整體都是透明的構件,這有助於提高觸控面板TP1的目視品味。Finally, please refer to FIG. 2J to form a protective layer 30. The protective layer 30 covers the first sensing series 110 and the second sensing series 120. So far, the production of the touch panel TP1 is completed. In this embodiment, the second transparent bridge wire 122, the first sensing pad 114, and the second sensing pad 124 are all made of a transparent conductive material. In addition, according to the fabrication flow of FIGS. 2A to 2G, the first transparent bridge wire 112 is also composed of a transparent conductive material. Therefore, the first sensing series 110 and the second sensing series 120 located in the sensing area 100 are all transparent members, which helps to improve the visual taste of the touch panel TP1.

以下將列舉其他實施例以作為說明。在此必須說明的是,下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重複描述。Other embodiments are listed below for illustration. It is to be noted that the following embodiments use the same reference numerals and parts of the above-mentioned embodiments, and the same reference numerals are used to refer to the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted portions, reference may be made to the foregoing embodiments, and the following embodiments are not repeatedly described.

圖3A至圖3J為本發明第二實施例之一觸控面板的製作流程示意圖。須注意的是,為清楚表示製作流程,下列的圖式皆同時包括觸控面板的上視圖(上)以及觸控面板的剖面圖(下),並且同時搭配圖1之整體架構進行說明。在此實施例中,第一感測串列110的延伸方向例如為Y方向,第二感測串列120的延伸方向例如為X方向。請參考圖3A,首先,於基板10上形成一透明導電層12與一金屬層14。接著,對透明導電層12以及金屬層14進行一圖案化製程。3A to 3J are schematic diagrams showing a manufacturing process of a touch panel according to a second embodiment of the present invention. It should be noted that in order to clearly illustrate the production process, the following drawings include both the upper view (top) of the touch panel and the cross-sectional view of the touch panel (bottom), and are also described in conjunction with the overall architecture of FIG. In this embodiment, the extending direction of the first sensing series 110 is, for example, the Y direction, and the extending direction of the second sensing series 120 is, for example, the X direction. Referring to FIG. 3A, first, a transparent conductive layer 12 and a metal layer 14 are formed on the substrate 10. Next, a patterning process is performed on the transparent conductive layer 12 and the metal layer 14.

於本實施例中,圖案化製程可以包括以下步驟,但不以此為限。形成一光阻層(未繪示)於形成有透明導電層12以及金屬層14的基板10上,接著以一光罩製程對光阻層進行圖案化,其中此光罩製程例如是一半色調光罩製程或是一灰色調光罩製程。如此,一第一光阻16以及一第二光阻18a會形成於金屬層14上,其中第一光阻16的膜層厚度小於第二光阻18a,如圖3B所示,並且第一光阻16例如位於感測區100而第二光阻18a例如位在周邊區200。In this embodiment, the patterning process may include the following steps, but is not limited thereto. Forming a photoresist layer (not shown) on the substrate 10 on which the transparent conductive layer 12 and the metal layer 14 are formed, and then patterning the photoresist layer by a mask process, wherein the mask process is, for example, halftone light. The mask process or a gray dimmer process. Thus, a first photoresist 16 and a second photoresist 18a are formed on the metal layer 14, wherein the first photoresist 16 has a film thickness smaller than the second photoresist 18a, as shown in FIG. 3B, and the first light The resistor 16 is, for example, located in the sensing region 100 and the second photoresist 18a is located, for example, in the peripheral region 200.

再來,以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分金屬層14並暴露出透明導電層12,如圖3C所示。類似地,再以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分透明導電層12,如圖3D所示。圖3C及圖3D所繪的移除步驟例如是透過一蝕刻製程來實現。經由蝕刻製程後,透明導電層12以及金屬層14都被圖案化而僅剩下被第一光阻16以及第二光阻18a所遮蔽的部份。Then, with the first photoresist 16 and the second photoresist 18a as masks, the exposed portion of the metal layer 14 is removed and the transparent conductive layer 12 is exposed, as shown in FIG. 3C. Similarly, the exposed portion of the transparent conductive layer 12 is removed by using the first photoresist 16 and the second photoresist 18a as masks, as shown in FIG. 3D. The removal steps depicted in Figures 3C and 3D are accomplished, for example, by an etch process. After the etching process, the transparent conductive layer 12 and the metal layer 14 are patterned to leave only the portion shielded by the first photoresist 16 and the second photoresist 18a.

然後,移除第一光阻16以及部分第二光阻18a以形成第三光阻18b並且暴露出原本被第一光阻16遮蔽的部分金屬層14,如圖3E所示。此處,移除第一光阻16以及部分第二光阻18a的方法例如是灰化法。並且第三光阻18b例如是由被薄化的第二光阻18a所構成。亦即,第三光阻18b與第二光阻18a在上視圖中具有相同的輪廓,但在剖面圖中具有不同的厚度。Then, the first photoresist 16 and a portion of the second photoresist 18a are removed to form a third photoresist 18b and expose a portion of the metal layer 14 that was originally shielded by the first photoresist 16, as shown in FIG. 3E. Here, the method of removing the first photoresist 16 and a part of the second photoresist 18a is, for example, an ashing method. And the third photoresist 18b is composed of, for example, a thinned second photoresist 18a. That is, the third photoresist 18b and the second photoresist 18a have the same profile in the upper view, but have different thicknesses in the cross-sectional view.

接著,將原本被第一光阻16遮蔽而後被暴露出來的部分金屬層14移除以使暴露出來的部分透明導電層12構成圖1中的第一感測串列110以及第二感測串列120的第二感測墊124,如圖3F所示。此時,第三光阻18b仍保留於基板10的周邊區200中。Then, the portion of the metal layer 14 that is originally exposed by the first photoresist 16 and then exposed is removed to expose the exposed portion of the transparent conductive layer 12 to form the first sensing series 110 and the second sensing string in FIG. The second sensing pad 124 of column 120 is shown in Figure 3F. At this time, the third photoresist 18b remains in the peripheral region 200 of the substrate 10.

再來,將第三光阻18b移除,即完成圖案化金屬層以及圖案化透明導電層,如圖3G所示。請再參考圖3G並同時參照圖1,圖案化金屬層包括多條金屬傳輸線214(在此僅繪示1條)。圖案化透明導電層包括第一感測串列110、第二感測串列120的第二感測墊124以及位於周邊區200的透明傳輸線212。換言之,本實施例例如是使得第一透明橋接線112、第一感測墊114以及第二感測墊124同時製作,其中第一透明橋接線112與第一感測墊114直接連接成第一感測串列110。此外,透明傳輸線212與金屬傳輸線214疊置以構成傳輸線210。具體而言,前述步驟中第一光阻16的圖案即為第一感測串列110以及第二感測墊124的圖案。並且,在本實施例中以一道光罩製程即可將兩種不同材料的材料層圖案化以完成傳輸線210、第一感測串列110以及第二感測墊124的製作,因此有助於降低觸控面板的製作成本。Then, the third photoresist 18b is removed, that is, the patterned metal layer and the patterned transparent conductive layer are completed, as shown in FIG. 3G. Referring again to FIG. 3G and referring to FIG. 1 simultaneously, the patterned metal layer includes a plurality of metal transmission lines 214 (only one is shown here). The patterned transparent conductive layer includes a first sensing series 110, a second sensing pad 124 of the second sensing series 120, and a transparent transmission line 212 located in the peripheral region 200. In other words, in this embodiment, for example, the first transparent bridge 112, the first sensing pad 114, and the second sensing pad 124 are simultaneously fabricated, wherein the first transparent bridge 112 is directly connected to the first sensing pad 114 to be the first The series 110 is sensed. Further, the transparent transmission line 212 is overlapped with the metal transmission line 214 to constitute the transmission line 210. Specifically, the pattern of the first photoresist 16 in the foregoing step is the pattern of the first sensing series 110 and the second sensing pad 124. Moreover, in the embodiment, a material layer of two different materials can be patterned by a mask process to complete the fabrication of the transmission line 210, the first sensing series 110, and the second sensing pad 124, thereby contributing to Reduce the production cost of the touch panel.

隨後,請參考圖3H,形成一圖案化絕緣層20並覆蓋第一透明橋接線112以及傳輸線210。詳細來看,圖案化絕緣層20可藉由一道光罩製程圖案化而具有暴露出部分第二感測墊124的多個開口。Subsequently, referring to FIG. 3H, a patterned insulating layer 20 is formed and covers the first transparent bridge line 112 and the transmission line 210. In detail, the patterned insulating layer 20 can have a plurality of openings exposing a portion of the second sensing pads 124 by patterning a mask process.

再來,請參考圖31,於圖案化絕緣層20上形成第二感測串列120的多條第二透明橋接線122。至此,第二透明橋接線122透過圖案化絕緣層20的開口與第二感測墊124串接成第二感測串列120。此外,由於位於周邊區200與感測區100之間的第二感測墊124與周邊區200的透明傳輸線212為連續的線路,因此,第二感測串列120的感測訊號可藉此傳送至傳輸線210上。Referring to FIG. 31, a plurality of second transparent bridge lines 122 of the second sensing series 120 are formed on the patterned insulating layer 20. So far, the second transparent bridge wire 122 is connected in series with the second sensing pad 124 through the opening of the patterned insulating layer 20 to form the second sensing series 120. In addition, since the second sensing pad 124 located between the peripheral area 200 and the sensing area 100 and the transparent transmission line 212 of the peripheral area 200 are continuous lines, the sensing signal of the second sensing series 120 can thereby Transfer to the transmission line 210.

最後,請參考圖3J,形成一保護層30。保護層30覆蓋第一感測串列110以及第二感測串列120。至此,完成觸控面板TP2的製作。與圖2G之實施例類似地,在本實施例中,第一感測串列110與第二感測串列120整體都是透明的構件,這有助於提高觸控面板TP2的目視品味。Finally, please refer to FIG. 3J to form a protective layer 30. The protective layer 30 covers the first sensing series 110 and the second sensing series 120. So far, the production of the touch panel TP2 is completed. Similar to the embodiment of FIG. 2G, in the embodiment, the first sensing series 110 and the second sensing series 120 are all transparent members, which helps to improve the visual taste of the touch panel TP2.

圖4A至圖4J為本發明第三實施例之一觸控面板的製作流程示意圖。須注意的是,為清楚表示製作流程,下列的圖式皆同時包括觸控面板的上視圖(上)以及觸控面板的剖面圖(下),並且同時搭配圖1之整體架構進行說明。在此實施例中,第一感測串列110的延伸方向例如為X方向,第二感測串列120的延伸方向例如為Y方向。請參考圖4A,首先,於基板10上形成一透明導電層12與一金屬層14。接著,對透明導電層12以及金屬層14進行一圖案化製程。4A to 4J are schematic diagrams showing a manufacturing process of a touch panel according to a third embodiment of the present invention. It should be noted that in order to clearly illustrate the production process, the following drawings include both the upper view (top) of the touch panel and the cross-sectional view of the touch panel (bottom), and are also described in conjunction with the overall architecture of FIG. In this embodiment, the extending direction of the first sensing series 110 is, for example, the X direction, and the extending direction of the second sensing series 120 is, for example, the Y direction. Referring to FIG. 4A, first, a transparent conductive layer 12 and a metal layer 14 are formed on the substrate 10. Next, a patterning process is performed on the transparent conductive layer 12 and the metal layer 14.

於本實施例中,圖案化製程可以包括以下步驟,但不以此為限。形成一光阻層(未繪示)於形成有透明導電層12以及金屬層14的基板10上,接著以一光罩製程對光阻層進行圖案化,其中此光罩製程例如是一半色調光罩製程或是一灰色調光罩製程。如此,一第一光阻16以及一第二光阻18a會形成於金屬層14上,其中第一光阻16的膜層厚度小於第二光阻18a,如圖4B所示,並且第一光阻16例如位於感測區100而第二光阻18a例如位在周邊區200。In this embodiment, the patterning process may include the following steps, but is not limited thereto. Forming a photoresist layer (not shown) on the substrate 10 on which the transparent conductive layer 12 and the metal layer 14 are formed, and then patterning the photoresist layer by a mask process, wherein the mask process is, for example, halftone light. The mask process or a gray dimmer process. Thus, a first photoresist 16 and a second photoresist 18a are formed on the metal layer 14, wherein the thickness of the first photoresist 16 is smaller than the second photoresist 18a, as shown in FIG. 4B, and the first light The resistor 16 is, for example, located in the sensing region 100 and the second photoresist 18a is located, for example, in the peripheral region 200.

再來,以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分金屬層14並暴露出透明導電層12,如圖4C所示。類似地,再以第一光阻16以及第二光阻18a為罩幕,移除被暴露出來的部分透明導電層12,如圖4D所示。圖4C及圖4D所繪的移除步驟例如是透過一蝕刻製程來實現。經由蝕刻製程後,透明導電層12以及金屬層14都被圖案化而僅剩下被第一光阻16以及第二光阻18a所遮蔽的部份。Then, with the first photoresist 16 and the second photoresist 18a as masks, the exposed portion of the metal layer 14 is removed and the transparent conductive layer 12 is exposed, as shown in FIG. 4C. Similarly, the exposed portion of the transparent conductive layer 12 is removed by using the first photoresist 16 and the second photoresist 18a as a mask, as shown in FIG. 4D. The removal steps depicted in Figures 4C and 4D are accomplished, for example, by an etch process. After the etching process, the transparent conductive layer 12 and the metal layer 14 are patterned to leave only the portion shielded by the first photoresist 16 and the second photoresist 18a.

然後,移除第一光阻16以及部分第二光阻18a以形成第三光阻18b並且暴露出部分金屬層14,如圖4E所示。此處,移除第一光阻16以及部分第二光阻18a的方法例如是灰化法。並且第三光阻18b例如是由被薄化的第二光阻18a所構成。亦即,第三光阻18b與第二光阻18a在上視圖中具有相同的輪廓,但在剖面圖中具有不同的厚度。Then, the first photoresist 16 and a portion of the second photoresist 18a are removed to form a third photoresist 18b and a portion of the metal layer 14 is exposed, as shown in FIG. 4E. Here, the method of removing the first photoresist 16 and a part of the second photoresist 18a is, for example, an ashing method. And the third photoresist 18b is composed of, for example, a thinned second photoresist 18a. That is, the third photoresist 18b and the second photoresist 18a have the same profile in the upper view, but have different thicknesses in the cross-sectional view.

接著,將原本被第一光阻16遮蔽而後被暴露出來的部分金屬層14移除以使暴露出部分透明導電層12,其構成圖1中的第一感測串列110,如圖4F所示。此時,第三光阻18b仍保留於基板10的周邊區200中。Then, a portion of the metal layer 14 that is originally exposed by the first photoresist 16 and then exposed is removed to expose a portion of the transparent conductive layer 12, which constitutes the first sensing series 110 in FIG. 1, as shown in FIG. 4F. Show. At this time, the third photoresist 18b remains in the peripheral region 200 of the substrate 10.

再來,將第三光阻18b移除,即完成圖案化金屬層以及圖案化透明導電層,如圖4G所示。請再參考圖4G並同時參照圖1,圖案化金屬層包括多條金屬傳輸線214(在此僅繪示1條)。圖案化透明導電層包括第一感測串列110以及位於周邊區200的多條透明傳輸線212(在此僅繪示1條)。換言之,本實施例例如是使得第一透明橋接線112以及第一感測墊114同時製作,其中第一透明橋接線112與第一感測墊114直接連接成第一感測串列110。此外,透明傳輸線212與金屬傳輸線214疊置以構成傳輸線210。具體而言,前述步驟中第一光阻16的圖案即為第一感測串列110的圖案。並且,在本實施例中以一道光罩製程即可將兩種不同材料的材料層圖案化以完成傳輸線210以及第一感測串列110的製作,因此有助於降低觸控面板的製作成本。。Then, the third photoresist 18b is removed, that is, the patterned metal layer and the patterned transparent conductive layer are completed, as shown in FIG. 4G. Referring again to FIG. 4G and referring to FIG. 1 simultaneously, the patterned metal layer includes a plurality of metal transmission lines 214 (only one is shown here). The patterned transparent conductive layer includes a first sensing series 110 and a plurality of transparent transmission lines 212 (only one is shown here) in the peripheral region 200. In other words, the present embodiment is, for example, such that the first transparent bridge line 112 and the first sensing pad 114 are simultaneously fabricated, wherein the first transparent bridge line 112 and the first sensing pad 114 are directly connected into the first sensing series 110. Further, the transparent transmission line 212 is overlapped with the metal transmission line 214 to constitute the transmission line 210. Specifically, the pattern of the first photoresist 16 in the foregoing step is the pattern of the first sensing series 110. Moreover, in the embodiment, the material layers of two different materials can be patterned by a mask process to complete the fabrication of the transmission line 210 and the first sensing series 110, thereby helping to reduce the manufacturing cost of the touch panel. . .

隨後,請參考圖4H,形成一圖案化絕緣層20並覆蓋第一透明橋接線112。詳細來看,圖案化絕緣層20可藉由一道光罩製程圖案化而僅覆蓋第一透明橋接線112。Subsequently, referring to FIG. 4H, a patterned insulating layer 20 is formed and covers the first transparent bridge 112. In detail, the patterned insulating layer 20 can be patterned to cover only the first transparent bridge line 112 by a mask process.

再來,請參考圖4I,於圖案化絕緣層20上形成第二感測串列120的多條第二透明橋接線122。並且,在形成第二透明橋接線122的同時,更於基板10上形成多個第二感測墊124,其中第二透明橋接線122與第二感測墊124為同時製作且直接連接成第二感測串列120。此外,由於位於周邊區200與感測區100之間的第一感測墊114與周邊區200的透明傳輸線212為連續的線路,因此,第一感測串列110的感測訊號可藉此傳送至傳輸線210上。Referring to FIG. 4I, a plurality of second transparent bridge wires 122 of the second sensing series 120 are formed on the patterned insulating layer 20. Moreover, a plurality of second sensing pads 124 are formed on the substrate 10 while forming the second transparent bridge wires 122. The second transparent bridge wires 122 and the second sensing pads 124 are simultaneously fabricated and directly connected to the first The second sensing series 120. In addition, since the first sensing pad 114 located between the peripheral area 200 and the sensing area 100 and the transparent transmission line 212 of the peripheral area 200 are continuous lines, the sensing signal of the first sensing series 110 can thereby Transfer to the transmission line 210.

最後,請參考圖4J,形成一保護層30。保護層30覆蓋第一感測串列110以及第二感測串列120。至此,完成觸控面板TP3的製作。與圖2G之實施例類似地,在本實施例中,第一感測串列110與第二感測串列120整體都是透明的構件,這有助於提高觸控面板TP3的目視品味。Finally, please refer to FIG. 4J to form a protective layer 30. The protective layer 30 covers the first sensing series 110 and the second sensing series 120. So far, the production of the touch panel TP3 is completed. Similar to the embodiment of FIG. 2G, in the embodiment, the first sensing series 110 and the second sensing series 120 are all transparent members, which helps to improve the visual taste of the touch panel TP3.

綜上所述,本發明之觸控面板的製造方法以透明導電材料來製作橋接線,因此觸控面板可具有較佳的目視品位。此外,依據本發明之觸控面板的製造方法,可僅以一道光罩製程即完成部份的透明橋接線以及位於周邊的傳輸線的製作,上述光罩製程例如是半色調光罩製程或是灰色調光罩製程。因此,本發明之觸控面板的製造方法有助於減少光罩製程的數目並降低製作成本。In summary, the manufacturing method of the touch panel of the present invention uses a transparent conductive material to form a bridge wire, so that the touch panel can have a better visual quality. In addition, according to the manufacturing method of the touch panel of the present invention, a part of the transparent bridge wiring and the transmission line at the periphery can be completed by only one mask process, and the mask process is, for example, a halftone mask process or gray. Dimmer process. Therefore, the manufacturing method of the touch panel of the present invention contributes to reducing the number of mask processes and reducing the manufacturing cost.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

TP、TP1、TP2、TP3...觸控面板TP, TP1, TP2, TP3. . . Touch panel

10...基板10. . . Substrate

12...透明導電層12. . . Transparent conductive layer

14...金屬層14. . . Metal layer

16...第一光阻16. . . First photoresist

18a...第二光阻18a. . . Second photoresist

18b...第三光阻18b. . . Third photoresist

20...圖案化絕緣層20. . . Patterned insulation

30...保護層30. . . The protective layer

100...感測區100. . . Sensing area

110...第一感測串列110. . . First sensing series

112...第一透明橋接線112. . . First transparent bridge wiring

114...第一感測墊114. . . First sensing pad

120...第二感測串列120. . . Second sensing series

122...第二透明橋接線122. . . Second transparent bridge wiring

124...第二感測墊124. . . Second sensing pad

200...周邊區200. . . Surrounding area

210...傳輸線210. . . Transmission line

212...透明傳輸線212. . . Transparent transmission line

214...金屬傳輸線214. . . Metal transmission line

X...X方向X. . . X direction

Y...Y方向Y. . . Y direction

M...區域M. . . region

圖1繪示本發明一實施例之一觸控面板的示意圖。FIG. 1 is a schematic diagram of a touch panel according to an embodiment of the invention.

圖2A至圖2J為本發明第一實施例之一觸控面板的製作流程示意圖。2A to 2J are schematic diagrams showing a manufacturing process of a touch panel according to a first embodiment of the present invention.

圖3A至圖3J為本發明第二實施例之一觸控面板的製作流程示意圖。3A to 3J are schematic diagrams showing a manufacturing process of a touch panel according to a second embodiment of the present invention.

圖4A至圖4J為本發明第三實施例之一觸控面板的製作流程示意圖。4A to 4J are schematic diagrams showing a manufacturing process of a touch panel according to a third embodiment of the present invention.

10...基板10. . . Substrate

20...圖案化絕緣層20. . . Patterned insulation

100...感測區100. . . Sensing area

110...第一感測串列110. . . First sensing series

112...第一透明橋接線112. . . First transparent bridge wiring

114...第一感測墊114. . . First sensing pad

120...第二感測串列120. . . Second sensing series

122...第二透明橋接線122. . . Second transparent bridge wiring

124...第二感測墊124. . . Second sensing pad

200...周邊區200. . . Surrounding area

210...傳輸線210. . . Transmission line

212...透明傳輸線212. . . Transparent transmission line

214...金屬傳輸線214. . . Metal transmission line

Claims (9)

一種觸控面板的製造方法,包括下列步驟:提供一基板,該基板具有一感測區以及位於該感測區周邊的一周邊區;於該感測區中形成多條第一感測串列以及多條第二感測串列並在該周邊區中形成連接於該些第一感測串列以及該些第二感測串列的多條傳輸線,該些第一感測串列的延伸方向與該些第二感測串列的延伸方向相互交錯,其中形成該些第一感測串列、該些第二感測串列與該些傳輸線的步驟包括:於該基板上依序形成一透明導電層與一金屬層;進行一圖案化製程使該透明導電層與該金屬層圖案化為一圖案化透明導電層以及一圖案化金屬層,該圖案化透明導電層包括該些第一感測串列的多條第一透明橋接線及位於該周邊區的多條透明傳輸線,而該圖案化金屬層包括位於該周邊區的多條金屬傳輸線,其中該些透明傳輸線與該些金屬傳輸線疊置以構成該些傳輸線;形成一圖案化絕緣層,其中該圖案化絕緣層覆蓋該些第一透明橋接線;以及於該圖案化絕緣層上形成該些第二感測串列的多條第二透明橋接線。A method for manufacturing a touch panel includes the following steps: providing a substrate having a sensing area and a peripheral area around the sensing area; forming a plurality of first sensing series in the sensing area and a plurality of second sensing series and a plurality of transmission lines connected to the first sensing series and the second sensing series in the peripheral area, and extending directions of the first sensing series And extending the direction of the second sensing series, wherein the forming the first sensing series, the second sensing series, and the transmission lines comprises: forming a sequence on the substrate a transparent conductive layer and a metal layer; performing a patterning process to pattern the transparent conductive layer and the metal layer into a patterned transparent conductive layer and a patterned metal layer, the patterned transparent conductive layer including the first sense Detecting a plurality of first transparent bridge wires and a plurality of transparent transmission lines located in the peripheral region, and the patterned metal layer includes a plurality of metal transmission lines located in the peripheral region, wherein the transparent transmission lines and the metal transmission lines are stacked Construct The plurality of second transparent bridges are formed on the patterned insulating layer to form the second transparent bridge line. 如申請專利範圍第1項所述之觸控面板的製造方法,更包括:形成多個第一感測墊,且該些第一感測墊由該些第一透明橋接線串接成該些第一感測串列;以及形成多個第二感測墊,且該些第二感測墊由該些第二透明橋接線串接成該些第二感測串列。The method of manufacturing the touch panel of claim 1, further comprising: forming a plurality of first sensing pads, and the first sensing pads are connected to the first transparent bridge wires a first sensing series; and a plurality of second sensing pads are formed, and the second sensing pads are connected to the second sensing series by the second transparent bridge wires. 如申請專利範圍第2項所述之觸控面板的製造方法,其中進行該圖案化製程的步驟更包括使該圖案化透明導電層包括該些第一感測墊。The method of manufacturing the touch panel of claim 2, wherein the step of performing the patterning process further comprises: causing the patterned transparent conductive layer to include the first sensing pads. 如申請專利範圍第2項所述之觸控面板的製造方法,其中進行該圖案化製程的步驟更包括使該圖案化透明導電層包括該些第二感測墊。The method of manufacturing the touch panel of claim 2, wherein the step of performing the patterning process further comprises: causing the patterned transparent conductive layer to include the second sensing pads. 如申請專利範圍第2項所述之觸控面板的製造方法,其中形成該些第二透明橋接線的同時更形成該些第一感測墊。The method of manufacturing the touch panel of claim 2, wherein the second transparent bridge lines are formed while the first sensing pads are formed. 如申請專利範圍第2項所述之觸控面板的製造方法,其中形成該些第二透明橋接線的同時更形成該些第二感測墊。The method of manufacturing the touch panel of claim 2, wherein the second transparent pads are formed while the second sensing pads are formed. 如申請專利範圍第1項所述之觸控面板的製造方法,更包括形成一保護層,該保護層覆蓋該些第一感測串列以及該些第二感測串列。The method of manufacturing the touch panel of claim 1, further comprising forming a protective layer covering the first sensing series and the second sensing series. 如申請專利範圍第1項所述之觸控面板的製造方法,其中該圖案化製程係為一光罩製程。The method of manufacturing a touch panel according to claim 1, wherein the patterning process is a mask process. 如申請專利範圍第8項所述之觸控面板的製造方法,其中該光罩製程使用的光罩包括一半色調光罩或是一灰色調光罩。The method of manufacturing a touch panel according to claim 8, wherein the mask used in the mask process comprises a halftone mask or a gray dimming cover.
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