Claims (8)
一種濕製程設備晶圓夾自動進出旋乾機之裝置，利用傳送機構將晶圓夾沿滑軌傳送軌道送進旋乾機或自旋乾機取出，至少包含：一個晶舟，用以裝載晶圓，可在滑軌傳送軌道上前進或後退；一組滑軌傳送軌道，可向前或向後移動，前端有定位銷，可與製程腔體轉子之定位孔對正；一組定位裝置，該滑軌傳送軌道前端有之定位銷可與製程腔體轉子的定位孔對正；一個傳送機構，前端以晶舟夾持器夾持晶舟，該滑軌傳送軌道向前，於定位銷進入定位孔後，該傳送機構可將晶舟在滑軌傳送軌道上平穩傳送至製程腔體內，以避免震動所引起的晶圓破片；以及一組推進機構，以推進螺桿推送該傳送機構使晶舟進入該製程腔體轉子內，或自該製程腔體轉子內取出晶舟。
The utility model relates to a device for automatically entering and leaving a spin dryer of a wet process equipment wafer clip, which uses a transport mechanism to send a wafer clip along a rail transfer track to a spin dryer or a spin dryer, and at least comprises: a wafer boat for loading crystal Round, can advance or retreat on the rail transfer track; a set of slide rails can be moved forward or backward, the front end has a positioning pin, which can be aligned with the positioning hole of the process cavity rotor; a set of positioning devices, the The positioning pin at the front end of the slide rail can be aligned with the positioning hole of the process cavity rotor; and a conveying mechanism, the front end of which holds the boat with the boat holder, the slide conveys the track forward, and the positioning pin enters the positioning After the hole, the conveying mechanism can smoothly transfer the boat to the processing chamber to avoid wafer fragmentation caused by vibration; and a set of propulsion mechanism for pushing the screw to push the conveying mechanism to enter the boat The wafer boat is taken out of the process cavity rotor or from the process cavity rotor.
一種濕製程設備晶圓夾自動進出旋乾機之裝置，利用傳送機構將特殊晶舟載具內之晶圓夾沿滑軌傳送軌道送進旋乾機或自旋乾機取出，至少包含：一個晶舟，用以裝載晶圓，可在滑軌傳送軌道上前進或後退；一個特殊晶舟載具，可容納各種不同形狀的晶舟，並以晶圓固定器與晶舟固定器將晶舟與晶圓固定，以方便與晶舟同時進入固定形狀之製程腔體，以進行高速旋轉之晶圓蝕刻、清洗、或晶圓乾燥等製程；一組滑軌傳送軌道，可向前或向後移動，前端有定位銷，可與製程腔體轉子之定位孔對正；一組定位裝置，該滑軌傳送軌道前端有之定位銷可與製程腔體轉子之定位孔對正；一個傳送機構，前端以特殊晶舟載具夾具夾持持該特殊晶舟載具，該滑軌傳送軌道向前，於定位銷進入定位孔後，該傳送機構可將特殊晶舟載具及其內之晶舟在滑軌傳送軌道上平穩傳送至製程腔體內，以避免震動所引起的晶圓破片；以及
一組推進機構，以螺旋桿之推力推送該傳送機構使晶舟進入該製程腔體轉子內，或自該製程腔體轉子內取出晶舟。
The utility model relates to a device for automatically entering and leaving a rotary dryer of a wet process equipment wafer clip, which uses a conveying mechanism to send a wafer clip in a special wafer carrier to a spin dryer or a spin dryer along a rail transfer track, at least: one A wafer boat for loading wafers that can be advanced or retracted on a rail transfer track; a special boat carrier that can accommodate a variety of different shapes of boat and a wafer holder with a wafer holder and a boat holder Fixed to the wafer to facilitate simultaneous entry into the fixed-shape process chamber with the boat for high-speed rotary wafer etching, cleaning, or wafer drying processes; a set of rail transfer tracks that can be moved forward or backward The front end has a positioning pin, which can be aligned with the positioning hole of the process cavity rotor; a set of positioning devices, the positioning pin at the front end of the slide rail can be aligned with the positioning hole of the process cavity rotor; a conveying mechanism, the front end The special wafer carrier is held by a special boat carrier fixture, and the rail conveys the track forward. After the positioning pin enters the positioning hole, the conveying mechanism can place the special boat carrier and the boat therein Slide rail Stable transferred to the process chamber, in order to avoid vibration induced wafer fragments; and
A group of propulsion mechanisms that push the conveyor mechanism with the thrust of the auger to cause the boat to enter the rotor of the process chamber or to withdraw the boat from the rotor of the process chamber.
如申請專利範圍第1或2項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該傳送機構為齒輪式。
The apparatus for automatically entering and exiting a spin dryer of a wet process equipment wafer holder according to claim 1 or 2, wherein the conveying mechanism is a gear type.
如申請專利範圍第1或2項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該傳送機構為空壓式。
The device for automatically entering and leaving the spin dryer of the wet process equipment wafer holder according to claim 1 or 2, wherein the conveying mechanism is air pressure type.
如申請專利範圍第1或2項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該定位裝置為定位銷及定位孔定位。
The apparatus for automatically entering and leaving the spin dryer of the wet process equipment wafer clip according to claim 1 or 2, wherein the positioning device is positioned by the positioning pin and the positioning hole.
如申請專利範圍第1或2項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該定位裝置為光學定位。
A device for automatically entering and exiting a spin dryer of a wet process equipment wafer holder according to claim 1 or 2, wherein the positioning device is optically positioned.
如申請專利範圍第5項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該定位銷及定位孔為單點式。
The apparatus for automatically entering and leaving the spin dryer of the wet process equipment wafer holder according to claim 5, wherein the positioning pin and the positioning hole are single-point type.
如申請專利範圍第5項所述之濕製程設備晶圓夾自動進出旋乾機之裝置，其中該定位銷及定位孔為多點式。
The device for automatically entering and leaving the spin dryer of the wet process equipment wafer clip according to claim 5, wherein the positioning pin and the positioning hole are multi-point type.