TWI439655B - 加熱器支撐裝置 - Google Patents

加熱器支撐裝置 Download PDF

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Publication number
TWI439655B
TWI439655B TW100116455A TW100116455A TWI439655B TW I439655 B TWI439655 B TW I439655B TW 100116455 A TW100116455 A TW 100116455A TW 100116455 A TW100116455 A TW 100116455A TW I439655 B TWI439655 B TW I439655B
Authority
TW
Taiwan
Prior art keywords
support
support member
members
support members
concave
Prior art date
Application number
TW100116455A
Other languages
English (en)
Chinese (zh)
Other versions
TW201207344A (en
Inventor
小杉哲也
村田等
杉浦忍
上野正昭
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TW201207344A publication Critical patent/TW201207344A/zh
Application granted granted Critical
Publication of TWI439655B publication Critical patent/TWI439655B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
TW100116455A 2010-05-11 2011-05-11 加熱器支撐裝置 TWI439655B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010108968 2010-05-11
JP2011058673A JP5787563B2 (ja) 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース

Publications (2)

Publication Number Publication Date
TW201207344A TW201207344A (en) 2012-02-16
TWI439655B true TWI439655B (zh) 2014-06-01

Family

ID=44912091

Family Applications (2)

Application Number Title Priority Date Filing Date
TW100116455A TWI439655B (zh) 2010-05-11 2011-05-11 加熱器支撐裝置
TW103114186A TWI555959B (zh) 2010-05-11 2011-05-11 加熱器支撐裝置、加熱器、半導體製造設備、半導體製造方法及支撐構件

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW103114186A TWI555959B (zh) 2010-05-11 2011-05-11 加熱器支撐裝置、加熱器、半導體製造設備、半導體製造方法及支撐構件

Country Status (4)

Country Link
US (1) US9779970B2 (https=)
JP (1) JP5787563B2 (https=)
KR (3) KR101273843B1 (https=)
TW (2) TWI439655B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354A (zh) * 2018-01-26 2019-08-02 鸿成国际科技股份有限公司 一种加热器支撑装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186833A (ja) 2013-03-22 2014-10-02 Tokyo Electron Ltd ヒータ装置及び熱処理装置
CN104253064A (zh) * 2013-06-28 2014-12-31 上海华虹宏力半导体制造有限公司 一种半导体熔炉加热器固定装置
KR101466816B1 (ko) * 2013-09-23 2014-12-10 국제엘렉트릭코리아 주식회사 히터 부재 및 그것을 갖는 기판 처리 장치
CN110081712B (zh) * 2019-05-14 2024-04-30 广东世创金属科技股份有限公司 一种搁丝砖及低热损、高热效电热结构
CN112333855B (zh) * 2019-08-05 2023-02-28 信和发瑞斯股份有限公司 线圈型加热结构
CN112461005A (zh) * 2019-09-09 2021-03-09 信源陶磁股份有限公司 热处理设备载具防破裂的结构及其方法
KR20240072549A (ko) * 2022-11-17 2024-05-24 주식회사 불카누스 배기라인용 히팅 파이프
CN120313356A (zh) * 2024-01-12 2025-07-15 北京北方华创微电子装备有限公司 炉体结构和半导体工艺设备
CN118299324A (zh) * 2024-03-15 2024-07-05 北京北方华创微电子装备有限公司 支撑装置、加热器和半导体工艺设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846619A (en) * 1973-11-12 1974-11-05 Emerson Electric Co Open coil electric heater
JPH0110921Y2 (https=) * 1984-11-05 1989-03-29
JPS6410921U (https=) 1987-07-08 1989-01-20
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
US5578232A (en) * 1995-05-04 1996-11-26 Hart & Cooley, Inc. Open-coil heater assembly and insulator therefor
JP3848442B2 (ja) * 1997-08-20 2006-11-22 株式会社日立国際電気 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法
US6596974B2 (en) * 2000-09-21 2003-07-22 Tutco, Inc. Support apparatus for resistive coils and insulators in electric heaters
US20070169701A1 (en) 2006-01-21 2007-07-26 Integrated Materials, Inc. Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks
JP4145328B2 (ja) * 2006-04-05 2008-09-03 株式会社日立国際電気 ヒータ支持装置及び加熱装置及び半導体製造装置及び半導体装置の製造方法
KR20060133505A (ko) * 2006-11-17 2006-12-26 에이스하이텍 주식회사 열처리 장치의 히터 어셈블리
JP5096182B2 (ja) * 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354A (zh) * 2018-01-26 2019-08-02 鸿成国际科技股份有限公司 一种加热器支撑装置
CN110087354B (zh) * 2018-01-26 2022-05-03 鸿成国际科技股份有限公司 一种加热器支撑装置

Also Published As

Publication number Publication date
KR20110124719A (ko) 2011-11-17
TWI555959B (zh) 2016-11-01
KR20130062301A (ko) 2013-06-12
TW201207344A (en) 2012-02-16
KR101353231B1 (ko) 2014-01-17
KR101273843B1 (ko) 2013-06-11
US9779970B2 (en) 2017-10-03
US20110281226A1 (en) 2011-11-17
JP2011258544A (ja) 2011-12-22
KR101319197B1 (ko) 2013-10-16
JP5787563B2 (ja) 2015-09-30
KR20120131136A (ko) 2012-12-04
TW201430307A (zh) 2014-08-01

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