KR101273843B1 - 히터 지지 장치 - Google Patents

히터 지지 장치 Download PDF

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Publication number
KR101273843B1
KR101273843B1 KR1020110043653A KR20110043653A KR101273843B1 KR 101273843 B1 KR101273843 B1 KR 101273843B1 KR 1020110043653 A KR1020110043653 A KR 1020110043653A KR 20110043653 A KR20110043653 A KR 20110043653A KR 101273843 B1 KR101273843 B1 KR 101273843B1
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South Korea
Prior art keywords
fitting
piece
heating element
holding
holding piece
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KR1020110043653A
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English (en)
Korean (ko)
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KR20110124719A (ko
Inventor
데쯔야 고스기
히또시 무라따
시노부 스기우라
마사아끼 우에노
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가부시키가이샤 히다치 고쿠사이 덴키
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Publication of KR20110124719A publication Critical patent/KR20110124719A/ko
Application granted granted Critical
Publication of KR101273843B1 publication Critical patent/KR101273843B1/ko
Assigned to 가부시키가이샤 코쿠사이 엘렉트릭 reassignment 가부시키가이샤 코쿠사이 엘렉트릭 권리의 전부이전등록 Assignors: 가부시키가이샤 히다치 고쿠사이 덴키
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection

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  • Resistance Heating (AREA)
  • Furnace Details (AREA)
KR1020110043653A 2010-05-11 2011-05-09 히터 지지 장치 Active KR101273843B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2010-108968 2010-05-11
JP2010108968 2010-05-11
JP2011058673A JP5787563B2 (ja) 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース
JPJP-P-2011-058673 2011-03-17

Related Child Applications (2)

Application Number Title Priority Date Filing Date
KR1020120117401A Division KR101319197B1 (ko) 2010-05-11 2012-10-22 히터 지지 장치
KR1020130044188A Division KR101353231B1 (ko) 2010-05-11 2013-04-22 히터 지지 장치

Publications (2)

Publication Number Publication Date
KR20110124719A KR20110124719A (ko) 2011-11-17
KR101273843B1 true KR101273843B1 (ko) 2013-06-11

Family

ID=44912091

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020110043653A Active KR101273843B1 (ko) 2010-05-11 2011-05-09 히터 지지 장치
KR1020120117401A Active KR101319197B1 (ko) 2010-05-11 2012-10-22 히터 지지 장치
KR1020130044188A Active KR101353231B1 (ko) 2010-05-11 2013-04-22 히터 지지 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020120117401A Active KR101319197B1 (ko) 2010-05-11 2012-10-22 히터 지지 장치
KR1020130044188A Active KR101353231B1 (ko) 2010-05-11 2013-04-22 히터 지지 장치

Country Status (4)

Country Link
US (1) US9779970B2 (https=)
JP (1) JP5787563B2 (https=)
KR (3) KR101273843B1 (https=)
TW (2) TWI555959B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186833A (ja) 2013-03-22 2014-10-02 Tokyo Electron Ltd ヒータ装置及び熱処理装置
CN104253064A (zh) * 2013-06-28 2014-12-31 上海华虹宏力半导体制造有限公司 一种半导体熔炉加热器固定装置
KR101466816B1 (ko) * 2013-09-23 2014-12-10 국제엘렉트릭코리아 주식회사 히터 부재 및 그것을 갖는 기판 처리 장치
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354B (zh) * 2018-01-26 2022-05-03 鸿成国际科技股份有限公司 一种加热器支撑装置
CN110081712B (zh) * 2019-05-14 2024-04-30 广东世创金属科技股份有限公司 一种搁丝砖及低热损、高热效电热结构
CN112333855B (zh) * 2019-08-05 2023-02-28 信和发瑞斯股份有限公司 线圈型加热结构
CN112461005A (zh) * 2019-09-09 2021-03-09 信源陶磁股份有限公司 热处理设备载具防破裂的结构及其方法
KR20240072549A (ko) * 2022-11-17 2024-05-24 주식회사 불카누스 배기라인용 히팅 파이프
CN120313356A (zh) * 2024-01-12 2025-07-15 北京北方华创微电子装备有限公司 炉体结构和半导体工艺设备
CN118299324A (zh) * 2024-03-15 2024-07-05 北京北方华创微电子装备有限公司 支撑装置、加热器和半导体工艺设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006216566A (ja) * 2006-04-05 2006-08-17 Hitachi Kokusai Electric Inc ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846619A (en) * 1973-11-12 1974-11-05 Emerson Electric Co Open coil electric heater
JPH0110921Y2 (https=) * 1984-11-05 1989-03-29
JPS6410921U (https=) 1987-07-08 1989-01-20
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
US5578232A (en) * 1995-05-04 1996-11-26 Hart & Cooley, Inc. Open-coil heater assembly and insulator therefor
JP3848442B2 (ja) * 1997-08-20 2006-11-22 株式会社日立国際電気 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法
US6596974B2 (en) * 2000-09-21 2003-07-22 Tutco, Inc. Support apparatus for resistive coils and insulators in electric heaters
US20070169701A1 (en) 2006-01-21 2007-07-26 Integrated Materials, Inc. Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks
KR20060133505A (ko) * 2006-11-17 2006-12-26 에이스하이텍 주식회사 열처리 장치의 히터 어셈블리
JP5096182B2 (ja) * 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006216566A (ja) * 2006-04-05 2006-08-17 Hitachi Kokusai Electric Inc ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法

Also Published As

Publication number Publication date
KR101353231B1 (ko) 2014-01-17
TWI439655B (zh) 2014-06-01
KR101319197B1 (ko) 2013-10-16
TWI555959B (zh) 2016-11-01
KR20110124719A (ko) 2011-11-17
US20110281226A1 (en) 2011-11-17
JP2011258544A (ja) 2011-12-22
TW201430307A (zh) 2014-08-01
KR20120131136A (ko) 2012-12-04
TW201207344A (en) 2012-02-16
JP5787563B2 (ja) 2015-09-30
US9779970B2 (en) 2017-10-03
KR20130062301A (ko) 2013-06-12

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