TWI435433B - Esd protection device - Google Patents

Esd protection device Download PDF

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Publication number
TWI435433B
TWI435433B TW101112824A TW101112824A TWI435433B TW I435433 B TWI435433 B TW I435433B TW 101112824 A TW101112824 A TW 101112824A TW 101112824 A TW101112824 A TW 101112824A TW I435433 B TWI435433 B TW I435433B
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Taiwan
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equivalent
transistor
electrostatic discharge
switch
electrically coupled
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TW101112824A
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TW201342567A (en
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Chehung Chen
Mingfang Lai
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Nuvoton Technology Corp
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Priority to TW101112824A priority Critical patent/TWI435433B/en
Priority to CN201210229781.2A priority patent/CN103378589B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Description

靜電放電防護元件Electrostatic discharge protection element

本揭示內容是有關於一種電子裝置,且特別是有關於一種靜電放電防護裝置。The present disclosure relates to an electronic device, and more particularly to an electrostatic discharge protection device.

一般而言,各種電子裝置中均會設置有靜電放電(Electrostatic Discharge,ESD)防護的機制,藉以避免當人體帶有過多的靜電而去觸碰電子裝置時,電子裝置因為靜電所產生的瞬間大電流而導致毀損,或是避免電子裝置受到環境或運送工具所帶的靜電影響而產生無法正常運作的情形。In general, various electronic devices are provided with an Electrostatic Discharge (ESD) protection mechanism to avoid the moment when the electronic device touches the electronic device when the human body is exposed to excessive static electricity. The current causes damage, or the electronic device is prevented from being affected by static electricity from the environment or the transport tool, resulting in a malfunction.

在靜電放電元件中,一般可設置矽控整流器(Silicon Controlled Rectifier,SCR)來作為靜電放電保護的元件,並利用其驟回崩潰後具有較低的維持電壓(Holding Voltage),保護積體電路免於靜電放電的損害,又因矽控整流器具有較佳的靜電放電能力,且在積體電路中所佔的面積較小,因此其已廣泛地應用於一般靜電放電元件中。In the electrostatic discharge device, a Silicon Controlled Rectifier (SCR) can be generally provided as an electrostatic discharge protection component, and has a lower holding voltage after the sudden collapse, thereby protecting the integrated circuit from being protected. The damage of the electrostatic discharge is widely used in general electrostatic discharge devices because the controlled rectifier has a better electrostatic discharge capability and a smaller area occupied by the integrated circuit.

然而,在維持電壓過低而小於積體電路之正常操作電壓的情形下,若是元件在正常操作情形下受外部雜訊干擾的話,則將造成閂鎖(Latch Up)效應,進而致使積體電路誤動作或損毀。However, in the case where the sustain voltage is too low and is less than the normal operating voltage of the integrated circuit, if the component is disturbed by external noise under normal operating conditions, a latch up effect will be caused, thereby causing the integrated circuit. Malfunction or damage.

本發明實施例提供一種靜電放電防護電路,藉此進行靜電放電防護。Embodiments of the present invention provide an electrostatic discharge protection circuit for performing electrostatic discharge protection.

本揭示內容之一技術樣態係關於一種靜電放電防護元件,其包含矽控整流器等效電路、開關以及控制電路。矽控整流器等效電路包含第一等效電晶體以及第二等效電晶體。開關電性耦接於矽控整流器等效電路和銲墊之間,其中當開關導通時,靜電放電電流自銲墊經由開關、第一等效電晶體和第二等效電晶體進行放電。控制電路用以依據流經開關、第一等效電晶體和第二等效電晶體之靜電放電電流產生控制電壓以控制開關關閉,其中當開關關閉時,靜電放電電流自銲墊經由第二等效電晶體進行放電。One aspect of the present disclosure relates to an electrostatic discharge protection component that includes a controlled rectifier equivalent circuit, a switch, and a control circuit. The 整流 control rectifier equivalent circuit includes a first equivalent transistor and a second equivalent transistor. The switch is electrically coupled between the equivalent circuit of the step-controlled rectifier and the pad, wherein when the switch is turned on, the electrostatic discharge current is discharged from the pad via the switch, the first equivalent transistor, and the second equivalent transistor. The control circuit is configured to generate a control voltage according to an electrostatic discharge current flowing through the switch, the first equivalent transistor and the second equivalent transistor to control the switch to be closed, wherein when the switch is turned off, the electrostatic discharge current is self-welded from the pad via the second The effect transistor is discharged.

本揭示內容之另一技術樣態係關於一種靜電放電防護元件,其包含矽控整流器等效電路、開關以及控制電路。矽控整流器等效電路包含等效PNP型雙載子接面電晶體以及等效NPN型雙載子接面電晶體。開關之第一端電性耦接銲墊和等效PNP型雙載子接面電晶體之基極,開關之第二端電性耦接等效PNP型雙載子接面電晶體之射極。控制電路之第一端電性耦接等效NPN型電晶體之射極以及開關之控制端,控制電路之第二端電性耦接低位準電壓。Another aspect of the present disclosure is directed to an electrostatic discharge protection component that includes a controlled rectifier equivalent circuit, a switch, and a control circuit. The equivalent circuit of the controlled rectifier includes an equivalent PNP type double carrier junction transistor and an equivalent NPN type double carrier junction transistor. The first end of the switch is electrically coupled to the base of the pad and the equivalent PNP type bipolar junction transistor, and the second end of the switch is electrically coupled to the emitter of the equivalent PNP type bipolar junction transistor . The first end of the control circuit is electrically coupled to the emitter of the equivalent NPN transistor and the control terminal of the switch, and the second end of the control circuit is electrically coupled to the low level voltage.

根據本揭示之技術內容,應用前述靜電放電防護元件可避免靜電放電防護機制啟動時閂鎖效應的發生。According to the technical content of the present disclosure, the application of the aforementioned electrostatic discharge protection element can prevent the occurrence of a latch-up effect when the electrostatic discharge protection mechanism is activated.

本發明內容旨在提供本揭示內容的簡化摘要,以使閱讀者對本揭示內容具備基本的理解。此發明內容並非本揭示內容的完整概述,且其用意並非在指出本發明實施例的重要(或關鍵)元件或界定本發明的範圍。This summary is intended to provide a simplified summary of the disclosure This Summary is not an extensive overview of the disclosure, and is intended to be illustrative of the embodiments of the invention.

下文係舉實施例配合所附圖式作詳細說明,但所提供之實施例並非用以限制本發明所涵蓋的範圍,而結構運作之描述非用以限制其執行之順序,任何由元件重新組合之結構,所產生具有均等功效的裝置,皆為本發明所涵蓋的範圍。此外,圖式僅以說明為目的,並未依照原尺寸作圖。The embodiments are described in detail below with reference to the accompanying drawings, but the embodiments are not intended to limit the scope of the invention, and the description of the structure operation is not intended to limit the order of execution, any component recombination The structure, which produces equal devices, is within the scope of the present invention. In addition, the drawings are for illustrative purposes only and are not drawn to the original dimensions.

關於本文中所使用之『約』、『大約』或『大致』一般通常係指數值之誤差或範圍於百分之二十以內,較好地是於百分之十以內,而更佳地則是於百分之五以內。文中若無明確說明,其所提及的數值皆視作為近似值,即如『約』、『大約』或『大致』所表示的誤差或範圍。As used herein, "about", "about" or "substantially" generally means that the error or range of the index value is within 20%, preferably within 10%, and more preferably It is within 5 percent. In the text, unless otherwise stated, the numerical values referred to are regarded as approximations, that is, the errors or ranges indicated by "about", "about" or "roughly".

另外,關於本文中所使用之『耦接』或『連接』,均可指二或多個元件相互直接作實體或電性接觸,或是相互間接作實體或電性接觸,而『耦接』還可指二或多個元件相互操作或動作。In addition, as used herein, "coupled" or "connected" may mean that two or more elements are in direct physical or electrical contact with each other, or indirectly in physical or electrical contact with each other, and "coupled" It can also mean that two or more elements operate or act on each other.

第1圖係依照本發明第一實施例繪示一種靜電放電防護元件的示意圖。如第1圖所示,靜電放電防護元件100包含矽控整流器等效電路110、開關120以及控制電路130,其中矽控整流器係為一種具有P/N/P/N半導體介面的電子元件。矽控整流器等效電路110包含第一等效電晶體112以及第二等效電晶體114。開關120電性耦接於矽控整流器等效電路110和銲墊(pad)105之間。控制電路130則電性耦接矽控整流器等效電路110和開關120,並依據自銲墊105流經矽控整流器等效電路110或其中部分等效電路的靜電放電(ESD)電流來控制開關120導通或關閉。1 is a schematic view showing an electrostatic discharge protection element according to a first embodiment of the present invention. As shown in FIG. 1, the electrostatic discharge protection device 100 includes a controlled rectifier equivalent circuit 110, a switch 120, and a control circuit 130, wherein the controlled rectifier is an electronic component having a P/N/P/N semiconductor interface. The controlled rectifier equivalent circuit 110 includes a first equivalent transistor 112 and a second equivalent transistor 114. The switch 120 is electrically coupled between the controlled rectifier equivalent circuit 110 and the pad 105. The control circuit 130 is electrically coupled to the controlled rectifier equivalent circuit 110 and the switch 120, and controls the switch according to the electrostatic discharge (ESD) current flowing from the pad 105 through the controlled rectifier equivalent circuit 110 or a part of the equivalent circuit thereof. 120 is turned on or off.

操作上,在開關120導通的情形下,當靜電放電情形發生而產生瞬間靜電放電電流時,靜電放電電流自銲墊105經由開關120、第一等效電晶體112和第二等效電晶體114,流經控制電路130往低位準電壓VSS或接地電壓GND,藉此進行放電;亦即,靜電放電電流係自銲墊105經由矽控整流器等效電路110進行放電。此時,控制電路130依據流經開關120、第一等效電晶體112和第二等效電晶體114之靜電放電電流產生一控制電壓VA,藉以控制開關120關閉。Operationally, in the case where the switch 120 is turned on, when an electrostatic discharge condition occurs to generate a transient electrostatic discharge current, the electrostatic discharge current from the pad 105 via the switch 120, the first equivalent transistor 112, and the second equivalent transistor 114 And flowing through the control circuit 130 to the low level voltage VSS or the ground voltage GND, thereby discharging; that is, the electrostatic discharge current is discharged from the pad 105 via the controlled rectifier equivalent circuit 110. At this time, the control circuit 130 generates a control voltage VA according to the electrostatic discharge current flowing through the switch 120, the first equivalent transistor 112, and the second equivalent transistor 114, thereby controlling the switch 120 to be turned off.

接著,在開關120關閉的情形下,若後續仍有靜電放電情形發生而產生瞬間靜電放電電流時,則靜電放電電流自銲墊105經由第二等效電晶體114,流經控制電路130往低位準電壓VSS或接地電壓GND而進行放電。具體而言,靜電放電電流不流經開關120和第一等效電晶體112,而是自銲墊105直接經由第二等效電晶體114進行放電,此時靜電放電電流便不經由整體矽控整流器等效電路110進行放電,而是僅透過矽控整流器等效電路110中的第二等效電晶體114進行放電。Then, when the switch 120 is turned off, if an electrostatic discharge current occurs and a transient electrostatic discharge current is generated, the electrostatic discharge current flows from the pad 105 to the low position via the second equivalent transistor 114 through the control circuit 130. The discharge is performed by the quasi-voltage VSS or the ground voltage GND. Specifically, the electrostatic discharge current does not flow through the switch 120 and the first equivalent transistor 112, but is discharged directly from the pad 105 via the second equivalent transistor 114, and the electrostatic discharge current is not controlled by the whole The rectifier equivalent circuit 110 discharges, but only discharges through the second equivalent transistor 114 in the rectifier rectifier equivalent circuit 110.

其次,當經由第二等效電晶體114流向控制電路130之靜電放電電流改變,而使得控制電壓VA據以改變至一定電壓時,開關120則再依據控制電壓VA從關閉狀態切回至導通狀態。舉例來說,如第1圖所示,開關120可包含P型金氧半場效電晶體(MOSFET)MS,當靜電放電電流改變,使得控制電壓VA降至低於P型金氧半場效電晶體MS的臨界電壓時,則P型金氧半場效電晶體MS相對應地自關閉狀態回復至導通狀態。Secondly, when the electrostatic discharge current flowing to the control circuit 130 via the second equivalent transistor 114 is changed, so that the control voltage VA is changed to a certain voltage, the switch 120 is switched back from the off state to the on state according to the control voltage VA. . For example, as shown in FIG. 1, the switch 120 may include a P-type metal oxide half field effect transistor (MOSFET) MS, and when the electrostatic discharge current is changed, the control voltage VA is lowered to be lower than the P-type metal oxide half field effect transistor. When the threshold voltage of the MS is reached, the P-type MOS field-effect transistor MS is returned from the off state to the on state correspondingly.

由於在靜電放電防護元件100藉由矽控整流器等效電路110釋放靜電放電電流的過程中,控制電路130會依據靜電放電電流來控制開關120關閉,使得藉由矽控整流器等效電路110持續進行靜電放電的操作,經過一定時間之後轉為由其中的單一等效電晶體來進行放電(亦即,關閉原先矽控整流器放電的模式),因此可使矽控整流器等效電路110驟回崩潰後所具有的維持電壓(Holding Voltage)不至於降至過低的準位,相對地提高維持電壓的準位。如此一來,在靜電放電防護元件100釋放靜電放電電流之後,維持電壓便不會過低而小於積體電路的正常操作電壓,可進一步避免元件在正常操作情形下受外部雜訊干擾時可能造成的閂鎖(Latch Up)效應。Since the ESD protection element 100 releases the ESD current by the Rectifier Rectifier Equivalent Circuit 110, the control circuit 130 controls the switch 120 to be turned off according to the ESD current, so that the Rectifier Rectifier Equivalent Circuit 110 continues. The operation of the electrostatic discharge is switched to a single equivalent transistor for discharging after a certain period of time (that is, the mode of turning off the discharge of the original controlled rectifier), so that the controlled rectifier equivalent circuit 110 can be suddenly collapsed. The holding voltage does not fall to an excessively low level, and the level of the sustain voltage is relatively increased. In this way, after the electrostatic discharge protection element 100 discharges the electrostatic discharge current, the sustain voltage is not too low and is less than the normal operating voltage of the integrated circuit, which can further prevent the component from being disturbed by external noise under normal operating conditions. Latch Up effect.

在本實施例中,第一等效電晶體112可為等效PNP型雙載子接面電晶體(BJT)M1,第二等效電晶體114可為等效NPN型雙載子接面電晶體(BJT)M2。等效PNP型雙載子接面電晶體M1之基極(例如:n型重摻雜半導體層142可作為電晶體M1之基極)電性耦接銲墊105和開關120之第一端,等效PNP型雙載子接面電晶體M1之射極(例如:p型重摻雜半導體層144可作為電晶體M1之射極)電性耦接開關之第二端。In this embodiment, the first equivalent transistor 112 can be an equivalent PNP type bipolar junction transistor (BJT) M1, and the second equivalent transistor 114 can be an equivalent NPN type dual carrier junction. Crystal (BJT) M2. The base of the equivalent PNP-type bipolar junction transistor M1 (eg, the n-type heavily doped semiconductor layer 142 can serve as the base of the transistor M1) is electrically coupled to the first end of the pad 105 and the switch 120. The emitter of the equivalent PNP type bipolar junction transistor M1 (eg, the p-type heavily doped semiconductor layer 144 can serve as the emitter of the transistor M1) is electrically coupled to the second end of the switch.

其次,等效NPN型電晶體M2之射極(例如:n型重摻雜半導體層146可作為電晶體M2之射極)以及基極(例如:p型重摻雜半導體層148可作為電晶體M2之射極)電性耦接控制電路130之第一端。再者,控制電路130之第一端電性耦接開關120之控制端,而控制電路130之第二端電性耦接低位準電壓VSS或接地電壓GND。Secondly, the emitter of the equivalent NPN type transistor M2 (for example, the n-type heavily doped semiconductor layer 146 can serve as the emitter of the transistor M2) and the base (for example, the p-type heavily doped semiconductor layer 148 can function as a transistor) The emitter of M2 is electrically coupled to the first end of the control circuit 130. Furthermore, the first end of the control circuit 130 is electrically coupled to the control terminal of the switch 120, and the second end of the control circuit 130 is electrically coupled to the low level voltage VSS or the ground voltage GND.

操作上,控制電路130之第一端可依據流經開關120、等效PNP型雙載子接面電晶體M1和等效NPN型雙載子接面電晶體M2之靜電放電電流而產生控制電壓VA,且開關120依據控制電壓VA進行關閉。接著,當經由等效NPN型雙載子接面電晶體M2流向控制電路130之靜電放電電流改變,而使得控制電壓VA據以改變至一定電壓時,開關120依據控制電壓VA自關閉狀態回復至導通狀態。Operationally, the first end of the control circuit 130 can generate a control voltage according to the electrostatic discharge current flowing through the switch 120, the equivalent PNP type dual carrier junction transistor M1, and the equivalent NPN type dual carrier junction transistor M2. VA, and the switch 120 is turned off according to the control voltage VA. Then, when the electrostatic discharge current flowing to the control circuit 130 via the equivalent NPN-type bipolar junction transistor M2 is changed, so that the control voltage VA is changed to a certain voltage, the switch 120 is restored from the off state according to the control voltage VA. On state.

實作上,矽控整流器等效電路110可以是低電壓觸發式矽控整流器(LVTSCR)、改良型橫向矽控整流器(MLSCR)、寄生矽控整流器(embedded SCR)。開關120可包含金氧半場效電晶體(MOSFET)、雙載子接面電晶體(BJT)以及可變電阻器中至少一者;換言之,在本揭示內容中,開關120可由金氧半場效電晶體(可為P型或N型)、雙載子接面電晶體(可為P型或N型)、可變電阻器或其他可實現開關功能的元件來實現,其並不以本揭示內容所述為限。In practice, the controlled rectifier equivalent circuit 110 can be a low voltage triggered voltage controlled rectifier (LVTSCR), a modified laterally controlled rectifier (MLSCR), or a parasitic controlled rectifier (embedded SCR). The switch 120 may include at least one of a gold oxide half field effect transistor (MOSFET), a bipolar junction transistor (BJT), and a variable resistor; in other words, in the present disclosure, the switch 120 may be powered by a gold oxide half field effect The crystal (which may be P-type or N-type), the bipolar junction transistor (which may be P-type or N-type), a variable resistor or other component that implements a switching function is implemented without the present disclosure. The limit is limited.

第2圖係依照本發明第二實施例繪示一種靜電放電防護元件的示意圖。如第2圖所示,靜電放電防護元件200包含矽控整流器等效電路110、開關120以及控制電路230,其中矽控整流器等效電路110、開關120與控制電路230的連接和操作關係類似第1圖相關之實施例,故於此不再贅述。2 is a schematic view showing an electrostatic discharge protection element according to a second embodiment of the present invention. As shown in FIG. 2, the ESD protection component 200 includes a 整流 control rectifier equivalent circuit 110, a switch 120, and a control circuit 230, wherein the connection and operation relationship of the 整流 control rectifier equivalent circuit 110, the switch 120, and the control circuit 230 are similar. 1 related embodiment, so it will not be described here.

其次,相較於第1圖所示之實施例,本實施例中的控制電路230更包含等效電阻器R1,而開關120包含電晶體(如:P型金氧半場效電晶體MS)。電晶體MS的控制端電性耦接等效電阻器R1的第一端,電晶體MS的第一端電性耦接銲墊105,電晶體的第二端電性耦接矽控整流器等效電路110之陽極(例如:p型重摻雜半導體層144可作為電晶體M1之射極和矽控整流器等效電路110之陽極)。此外,等效電阻器R1之第一端更電性耦接等效NPN型電晶體M2之基極(例如:p型重摻雜半導體層148可作為電晶體M2之射極)和射極(例如:n型重摻雜半導體層146可作為電晶體M2之射極),而等效電阻器R1之第二端電性耦接低位準電壓VSS或接地電壓GND。Secondly, compared with the embodiment shown in FIG. 1, the control circuit 230 in this embodiment further includes an equivalent resistor R1, and the switch 120 includes a transistor (for example, a P-type MOS field-effect transistor MS). The control terminal of the transistor MS is electrically coupled to the first end of the equivalent resistor R1. The first end of the transistor MS is electrically coupled to the pad 105, and the second end of the transistor is electrically coupled to the controlled rectifier. The anode of circuit 110 (e.g., p-type heavily doped semiconductor layer 144 can serve as the emitter of transistor M1 and the anode of gated rectifier equivalent circuit 110). In addition, the first end of the equivalent resistor R1 is more electrically coupled to the base of the equivalent NPN type transistor M2 (eg, the p-type heavily doped semiconductor layer 148 can serve as the emitter of the transistor M2) and the emitter ( For example, the n-type heavily doped semiconductor layer 146 can serve as the emitter of the transistor M2, and the second terminal of the equivalent resistor R1 can be electrically coupled to the low level voltage VSS or the ground voltage GND.

操作上,在P型金氧半場效電晶體MS導通的情形下,當靜電放電情形發生而產生瞬間靜電放電電流時,靜電放電電流自銲墊105經由P型金氧半場效電晶體MS、等效PNP型雙載子接面電晶體M1和等效NPN型雙載子接面電晶體M2,流經等效電阻器R1往低位準電壓VSS或接地電壓GND而進行放電。此時,等效電阻器R1的一端依據流經P型金氧半場效電晶體MS、等效PNP型雙載子接面電晶體M1和等效NPN型雙載子接面電晶體M2之靜電放電電流產生控制電壓VA,當控制電壓VA逐漸增加至P型金氧半場效電晶體MS的臨界電壓時,P型金氧半場效電晶體MS關閉。Operationally, in the case where the P-type MOS field-effect transistor MS is turned on, when an electrostatic discharge occurs to generate a transient electrostatic discharge current, the electrostatic discharge current flows from the pad 105 via the P-type MOS field-effect transistor MS, etc. The PNP type bipolar contact junction transistor M1 and the equivalent NPN type bipolar junction junction transistor M2 are discharged through the equivalent resistor R1 to the low level voltage VSS or the ground voltage GND. At this time, one end of the equivalent resistor R1 is based on the static electricity flowing through the P-type MOS field oxide crystal MS, the equivalent PNP type double carrier junction transistor M1, and the equivalent NPN type double carrier junction transistor M2. The discharge current generates a control voltage VA, and when the control voltage VA is gradually increased to the threshold voltage of the P-type MOS field-effect transistor MS, the P-type MOS field-effect transistor MS is turned off.

接著,在P型金氧半場效電晶體MS關閉的情形下,n型重摻雜半導體層142的電位與p型重摻雜半導體層144的電位不相同,此時若有靜電放電情形發生而產生瞬間靜電放電電流的話,則靜電放電電流自銲墊105經由等效NPN型雙載子接面電晶體M2,流經等效電阻器R1往低位準電壓VSS或接地電壓GND而進行放電。例如,靜電放電電流不流經P型金氧半場效電晶體MS和等效PNP型雙載子接面電晶體M1,而是自銲墊105直接經由n型重摻雜半導體層142和等效NPN型雙載子接面電晶體M2,流向低位準電壓VSS或接地電壓GND,藉此進行放電;換言之,此時靜電放電電流便不經由整體矽控整流器等效電路110進行放電,而是僅透過矽控整流器等效電路110中的NPN型雙載子接面電晶體M2進行放電。Next, in the case where the P-type MOS field oxide MS is turned off, the potential of the n-type heavily doped semiconductor layer 142 is different from the potential of the p-type heavily doped semiconductor layer 144, and if an electrostatic discharge occurs, When a momentary electrostatic discharge current is generated, the electrostatic discharge current is discharged from the pad 105 via the equivalent NPN-type bipolar junction transistor M2, through the equivalent resistor R1 to the low level voltage VSS or the ground voltage GND. For example, the electrostatic discharge current does not flow through the P-type gold oxide half field effect transistor MS and the equivalent PNP type double carrier junction transistor M1, but directly from the pad 105 via the n-type heavily doped semiconductor layer 142 and equivalent The NPN-type bipolar junction transistor M2 flows to the low level voltage VSS or the ground voltage GND, thereby discharging; in other words, the electrostatic discharge current is not discharged through the overall controlled rectifier equivalent circuit 110, but only The discharge is performed through the NPN-type bipolar junction transistor M2 in the rectifier equivalent circuit 110.

再者,當經由NPN型雙載子接面電晶體M2流向等效電阻器R1之靜電放電電流改變,而使得控制電壓VA據以改變至一定電壓時,P型金氧半場效電晶體MS再依據控制電壓VA自關閉狀態回復至導通狀態。Furthermore, when the electrostatic discharge current flowing to the equivalent resistor R1 via the NPN-type bipolar junction transistor M2 is changed, so that the control voltage VA is changed to a certain voltage, the P-type MOS half-field effect transistor MS is further According to the control voltage VA, the state is restored from the off state to the on state.

如此一來,便可提高矽控整流器等效電路110驟回崩潰後所具有的維持電壓(Holding Voltage),且在靜電放電防護元件200釋放靜電放電電流之後,維持電壓便不會過低而小於積體電路的正常操作電壓,可進一步避免元件在正常操作情形下受外部雜訊干擾時可能造成的閂鎖(Latch Up)效應。In this way, the holding voltage of the step-by-step rectifier circuit 110 can be increased, and after the electrostatic discharge protection device 200 discharges the electrostatic discharge current, the sustain voltage is not too low and is less than The normal operating voltage of the integrated circuit can further avoid the latch up effect that may be caused when the component is disturbed by external noise under normal operating conditions.

實作上,前述控制電路230可包含等效電阻器R1,亦可包含與等效電阻器R1具相同功能的電晶體或電路,而且等效電阻器R1也可以多晶矽電阻(poly resistor)、擴散電阻(diffusion resistor)、井電阻(well resistor)...等或是不同類型的電晶體來實現;換言之,在本揭示內容中,控制電路230可依據實際需求由各類的元件或電路來實現,其並不以本揭示內容所述為限。In practice, the foregoing control circuit 230 may include an equivalent resistor R1, and may also include a transistor or circuit having the same function as the equivalent resistor R1, and the equivalent resistor R1 may also have a poly resistor and a diffusion. Diffusion resistors, well resistors, etc. or different types of transistors are implemented; in other words, in the present disclosure, the control circuit 230 can be implemented by various types of components or circuits according to actual needs. It is not limited to the disclosure.

下列表(一)為經測試後本揭示內容中之靜電放電防護元件與一般矽控整流器或防護元件的特性比較表。如表(一)所示,在幾近相同的靜電放電防護能力之下,本揭示內容之靜電放電防護元件的製作佈局(layout)面積只需要1422 um2 ,明顯比採用NMOS或PMOS的防護元件的佈局面積還要小。此外,本揭示內容中之靜電放電防護元件的維持電壓也比一般矽控整流器的維持電壓更大,可使閂鎖效應不易發生。The following table (1) is a comparison table of the characteristics of the electrostatic discharge protection element and the general controlled rectifier or protection element in the present disclosure after testing. As shown in Table (1), under the same electrostatic discharge protection capability, the layout area of the electrostatic discharge protection component of the present disclosure only needs 1422 um 2 , which is significantly better than that of the NMOS or PMOS protection component. The layout area is even smaller. In addition, the sustain voltage of the electrostatic discharge protection element in the present disclosure is also larger than the sustain voltage of the general controlled rectifier, so that the latch-up effect is less likely to occur.

第3圖係繪示本揭示內容之靜電放電防護元件和一般矽控整流器經暫態觸發閂鎖效應(Transient Latch-up,TLU)測試後的結果示意圖。如第3圖所示,本揭示內容之靜電放電防護元件的維持電壓約6.7 V,反觀一般矽控整流器的維持電壓則只有2.1 V。因此,於操作上,相較於一般矽控整流器或防護元件而言,應用本揭示內容之靜電放電防護元件確實可避免閂鎖效應的發生。FIG. 3 is a schematic diagram showing the results of the static discharge protection component and the general controlled rectifier of the present disclosure after Transient Latch-up (TLU) test. As shown in Fig. 3, the sustain voltage of the electrostatic discharge protection device of the present disclosure is about 6.7 V, and the sustain voltage of the conventional controlled rectifier is only 2.1 V. Therefore, in operation, the application of the electrostatic discharge protection element of the present disclosure does avoid the occurrence of a latch-up effect as compared to a conventional controlled rectifier or guard element.

由上述本發明之實施例可知,應用前述靜電放電防護元件可於釋放靜電放電電流的過程中切換釋放靜電放電電流的路徑,使得矽控整流器等效電路110驟回崩潰後所具有的維持電壓提高,如此一來,維持電壓便不會過低而小於積體電路的正常操作電壓,可進一步避免元件在正常操作情形下受外部雜訊干擾時可能造成的閂鎖(Latch Up)效應。According to the embodiment of the present invention, the electrostatic discharge protection component can be used to switch the path of releasing the electrostatic discharge current during the discharge of the electrostatic discharge current, so that the sustain voltage of the rectifier rectifier equivalent circuit 110 is increased after the collapse. In this way, the sustain voltage is not too low and is less than the normal operating voltage of the integrated circuit, which can further avoid the latch up effect that may be caused when the component is interfered by external noise under normal operating conditions.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何本領域具通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in the above embodiments, but it is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

100、200...靜電放電防護元件100, 200. . . Electrostatic discharge protection element

105...銲墊105. . . Solder pad

110...矽控整流器等效電路110. . . Voltage controlled rectifier equivalent circuit

112...第一等效電晶體112. . . First equivalent transistor

114...第二等效電晶體114. . . Second equivalent transistor

120...開關120. . . switch

130、230...控制電路130, 230. . . Control circuit

142、146...n型重摻雜半導體層142, 146. . . N-type heavily doped semiconductor layer

144、148...p型重摻雜半導體層144, 148. . . P-type heavily doped semiconductor layer

第1圖係依照本發明第一實施例繪示一種靜電放電防護元件的示意圖。1 is a schematic view showing an electrostatic discharge protection element according to a first embodiment of the present invention.

第2圖係依照本發明第二實施例繪示一種靜電放電防護元件的示意圖。2 is a schematic view showing an electrostatic discharge protection element according to a second embodiment of the present invention.

第3圖係繪示本揭示內容之靜電放電防護元件和一般矽控整流器經暫態觸發閂鎖效應(Transient Latch-up,TLU)測試後的結果示意圖。FIG. 3 is a schematic diagram showing the results of the static discharge protection component and the general controlled rectifier of the present disclosure after Transient Latch-up (TLU) test.

200...靜電放電防護元件200. . . Electrostatic discharge protection element

105..銲墊105. . Solder pad

110...矽控整流器等效電路110. . . Voltage controlled rectifier equivalent circuit

112...第一等效電晶體112. . . First equivalent transistor

114...第二等效電晶體114. . . Second equivalent transistor

120...開關120. . . switch

230...控制電路230. . . Control circuit

142、146...n型重摻雜半導體層142, 146. . . N-type heavily doped semiconductor layer

144、148...p型重摻雜半導體層144, 148. . . P-type heavily doped semiconductor layer

Claims (11)

一種靜電放電防護元件,包含:一矽控整流器等效電路,包含一第一等效電晶體以及一第二等效電晶體;一開關,電性耦接於該矽控整流器等效電路和一銲墊之間,其中當該開關導通時,靜電放電電流自該銲墊經由該開關、該第一等效電晶體和該第二等效電晶體進行放電;以及一控制電路,用以依據流經該開關、該第一等效電晶體和該第二等效電晶體之靜電放電電流產生一控制電壓以控制該開關關閉,其中當該開關關閉時,靜電放電電流自該銲墊經由該第二等效電晶體進行放電。An electrostatic discharge protection component comprising: a controlled rectifier equivalent circuit comprising a first equivalent transistor and a second equivalent transistor; a switch electrically coupled to the gated rectifier equivalent circuit and a Between the pads, wherein when the switch is turned on, an electrostatic discharge current is discharged from the pad via the switch, the first equivalent transistor, and the second equivalent transistor; and a control circuit for depending on the flow And generating, by the switch, the first equivalent transistor and the second equivalent transistor, a control voltage to control the switch to be turned off, wherein when the switch is turned off, the electrostatic discharge current is from the pad via the first The second equivalent transistor is discharged. 如請求項1所述之靜電放電防護元件,其中當流經該第二等效電晶體之靜電放電電流改變而使得該控制電壓據以改變至一定電壓時,該開關自關閉狀態回復至導通狀態。The electrostatic discharge protection device of claim 1, wherein the switch returns from a closed state to a conductive state when an electrostatic discharge current flowing through the second equivalent transistor is changed such that the control voltage is changed to a certain voltage. . 如請求項1所述之靜電放電防護元件,其中該控制電路包含一等效電阻器,靜電放電電流流經該等效電阻器使得該等效電阻器之一端產生該控制電壓。The electrostatic discharge protection device of claim 1, wherein the control circuit comprises an equivalent resistor, and an electrostatic discharge current flows through the equivalent resistor such that one of the equivalent resistors generates the control voltage. 如請求項1所述之靜電放電防護元件,其中該開關包含一電晶體,該控制電路包含一等效電阻器,該電晶體之一控制端電性耦接該等效電阻器之一第一端,該電晶體之一第一端電性耦接該銲墊,該電晶體之一第二端電性耦接該矽控整流器等效電路之一陽極。The electrostatic discharge protection device of claim 1, wherein the switch comprises a transistor, the control circuit comprises an equivalent resistor, and one of the control terminals is electrically coupled to the first resistor. The first end of the transistor is electrically coupled to the pad, and the second end of the transistor is electrically coupled to an anode of the equivalent circuit of the step-controlled rectifier. 如請求項4所述之靜電放電防護元件,其中該第一等效電晶體係為一等效PNP型電晶體,該第二等效電晶體係為一等效NPN型電晶體,該等效PNP型電晶體之一基極電性耦接該銲墊,該等效PNP型電晶體之一射極電性耦接該電晶體之該第二端,該等效NPN型電晶體之一基極和一射極電性耦接該等效電阻器之該第一端。The electrostatic discharge protection device of claim 4, wherein the first equivalent electro-crystal system is an equivalent PNP-type transistor, and the second equivalent electro-crystal system is an equivalent NPN-type transistor, the equivalent One of the PNP-type transistors is electrically coupled to the pad, and one of the equivalent PNP-type transistors is electrically coupled to the second end of the transistor, and one of the equivalent NPN-type transistors is The pole and the emitter are electrically coupled to the first end of the equivalent resistor. 如請求項1所述之靜電放電防護元件,其中該開關包含一金氧半場效電晶體、一雙載子接面電晶體以及一可變電阻器中至少一者。The electrostatic discharge protection device of claim 1, wherein the switch comprises at least one of a metal oxide half field effect transistor, a double carrier junction transistor, and a variable resistor. 一種靜電放電防護元件,包含:一矽控整流器等效電路,包含一等效PNP型雙載子接面電晶體以及一等效NPN型雙載子接面電晶體;一開關,該開關之一第一端電性耦接一銲墊和該等效PNP型雙載子接面電晶體之一基極,該開關之一第二端電性耦接該等效PNP型雙載子接面電晶體之一射極;以及一控制電路,該控制電路之一第一端電性耦接該等效NPN型電晶體之一射極以及該開關之一控制端,該控制電路之一第二端電性耦接一低位準電壓。An electrostatic discharge protection component comprising: a controlled rectifier equivalent circuit comprising an equivalent PNP type dual carrier junction transistor and an equivalent NPN type dual carrier junction transistor; a switch, one of the switches The first end is electrically coupled to a pad and a base of the equivalent PNP type bipolar junction transistor, and the second end of the switch is electrically coupled to the equivalent PNP type bipolar junction One of the crystals of the crystal; and a control circuit, the first end of the control circuit is electrically coupled to one of the emitters of the equivalent NPN type transistor and one of the control terminals of the switch, and the second end of the control circuit Electrically coupled to a low level voltage. 如請求項7所述之靜電放電防護元件,其中該開關包含一電晶體,該控制電路包含一等效電阻器,該等效電阻器之一第一端電性耦接該電晶體之一控制端以及該等效NPN型電晶體之該基極和該射極,該等效電阻器之一第二端電性耦接該低位準電壓。The electrostatic discharge protection device of claim 7, wherein the switch comprises a transistor, the control circuit comprises an equivalent resistor, and the first end of the equivalent resistor is electrically coupled to one of the transistors. The terminal and the base of the equivalent NPN-type transistor and the emitter, the second end of the equivalent resistor is electrically coupled to the low-level voltage. 如請求項8所述之靜電放電防護元件,其中該電晶體係為一金氧半場效電晶體或一雙載子接面電晶體。The electrostatic discharge protection device of claim 8, wherein the electro-crystalline system is a gold oxide half field effect transistor or a double carrier junction transistor. 如請求項7所述之靜電放電防護元件,其中該開關包含一金氧半場效電晶體、一雙載子接面電晶體以及一可變電阻器中至少一者。The electrostatic discharge protection device of claim 7, wherein the switch comprises at least one of a metal oxide half field effect transistor, a double carrier junction transistor, and a variable resistor. 如請求項7所述之靜電放電防護元件,其中該控制電路之該第一端係依據流經該開關、該等效PNP型雙載子接面電晶體和該等效NPN型雙載子接面電晶體之靜電放電電流而產生一控制電壓,該開關依據該控制電壓關閉。The electrostatic discharge protection device of claim 7, wherein the first end of the control circuit is based on flowing through the switch, the equivalent PNP type dual carrier junction transistor, and the equivalent NPN type dual carrier connection The electrostatic discharge current of the surface transistor generates a control voltage, and the switch is turned off according to the control voltage.
TW101112824A 2012-04-11 2012-04-11 Esd protection device TWI435433B (en)

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US6838707B2 (en) * 2002-05-06 2005-01-04 Industrial Technology Research Institute Bi-directional silicon controlled rectifier for electrostatic discharge protection
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US7187527B2 (en) * 2004-09-02 2007-03-06 Macronix International Co., Ltd. Electrostatic discharge conduction device and mixed power integrated circuits using same

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