TWI428607B - Probe card - Google Patents

Description

Probe card

This invention relates to a probe card, and more particularly to a probe card for testing a tape and reel package.

With the improvement of semiconductor technology, the liquid crystal display has the advantages of low power consumption, light weight, high resolution, high color saturation, long life, etc., and thus is widely used in the liquid crystal screen of a notebook computer or a desktop computer. And LCD TVs and other electronic products that are closely related to life. Among them, the integrated circuit (IC) of the display is an indispensable important component of the liquid crystal display.

In response to the demand for various applications of liquid crystal display device driving wafers, tape-wrapped packaging technology is generally used for chip packaging, including chip on-film (COF) packaging, tape carrier package (TCP), etc. . The tape and reel type package electrically connects the semiconductor wafer to the flexible film substrate having the wiring structure formed on the surface thereof, wherein the wiring structure comprises an input terminal pin and an output terminal pin, and the inner ends of the pins are electrically connected to the chip. The electrical end point (eg, bump) has an outer end that extends outwardly and is formed with a test pad for power supply testing.

Currently, cantilever probe cards are often used for the testing of tape and reel packages. 1A is a schematic view of a conventional cantilever probe card. Fig. 1B is an enlarged schematic view of a portion A of Fig. 1A. Referring to FIG. 1A and FIG. 1B simultaneously, the probe card 10 includes a plurality of cantilever probes 11 for testing the tape and reel package 20 under the cantilever probe 11, and the cantilever probe 11 and the tape and reel package 20 The test pads 21 are in contact to thereby test the tape and reel package 20. Here, the cantilever probes 11 are obliquely extended and fixed in an annular fixing seat 12 so that the tips of the cantilever probes 11 are concentrated toward the center and are located in a common plane. The annular mount 12 is disposed on a circuit board P, and one end of the cantilever probes 11 is electrically connected to the circuit board P. Both the annular mount 12 and the circuit board P have a window for observing the tip end of the cantilever probe 11 and the position of the test pad 21. After the alignment operation is performed through the window, the tip end of the cantilever probe 11 can correctly detect the test pad 21 of the tape package 20 . However, the cantilever probe 11 is arranged in a manual pendulum manner, and its tip cannot be densely arranged, which is difficult to cope with the trend that the pitch of the test pad 21 is shrinking. Furthermore, the cantilever probe 11 is obliquely extended, in actual operation. When the probe is easily deformed by the cantilever bending, lateral displacement (slip needle) may occur, which is liable to cause instability of the probe.

In order to improve the limitations of the cantilever probe card, there is a vertical probe card design. The vertical probe card mounts multiple rows of probes vertically and densely to one of the probe heads to match the high pitch circuit test. Although the vertical probe card can solve the shortcomings of the above-mentioned cantilever probe card, the probe head does not have a window, and the probe position of the vertical probe cannot be observed by the CCD camera under visual shielding, so the alignment cannot be accurately performed. Therefore, how to improve the related shortcomings of the above probe card is worthy of further investigation by relevant personnel.

The invention provides a probe card which has better stability and an easier manufacturing process.

One embodiment of the present invention provides a probe card adapted to be in contact with a plurality of test pads of a tape package component. The probe card includes a circuit board, a probe holder, and a plurality of sheet probes. The probe holder is disposed on the circuit board. The probe holder has a light transmissive window and a plurality of probe assembly slots. The light transmissive window is not obscured by the circuit board, and the probe assembly slots are adjacently arranged outside at least two opposite sides of the light transmissive window. Each of the sheet probes is assembled in one of the probe assembly slots, and at least a portion of the sheet probes extend above the light transmission window. Each of the sheet probes includes an assembly portion, a vertical detecting portion and a horizontal extending portion. The assembly has a horizontal base and an arcuate support. The horizontal base is disposed in the corresponding probe assembly slot, and the curved support is connected to the horizontal base adjacent to one end of the light transmission window. The vertical detecting portion is adapted to be in contact with the test pad. The horizontal extension connects the curved support and extends in the direction of the light transmission window to be connected to the vertical detecting portion.

In an embodiment of the invention, the probe assembly slot extends in a direction perpendicular to the opposite side of the light transmission window, and the length of each probe assembly slot is greater than the length of each horizontal base.

In an embodiment of the invention, the chip probes are divided into a plurality of groups, and the horizontal bases of the chip probes in each group are misaligned in the corresponding probe assembly slots to enable corresponding The tips of the vertical detecting portions are located on the same plane and are arranged on at least two columns, and the at least two columns are on opposite sides of the parallel light transmitting window.

In an embodiment of the invention, the groups are repeatedly arranged along opposite sides of the light transmission window.

In an embodiment of the invention, each of the groups includes at least one first sheet probe and one second sheet probe. The vertical detecting portions of the first sheet probe and the second sheet probe are located above the light transmitting window and are respectively arranged in the first column and the second column, wherein the second column is away from the center of the light transmitting window than the first column.

In an embodiment of the invention, each of the horizontal extensions has at least one slot to increase the elasticity of each of the sheet probes.

In an embodiment of the invention, a reinforcing plate is further disposed on the circuit board. The probe holder and the reinforcing plate are respectively disposed on two opposite surfaces of the circuit board.

In an embodiment of the invention, the reinforcing plate does not obscure the light transmissive window.

In an embodiment of the invention, each of the sheet probes has a thickness between 0.015 mm and 0.027 mm.

Based on the above, in the above embodiment of the present invention, the probe card is assembled by the probe assembly having a length larger than the horizontal base of the sheet probe, so that the sheet probes inserted therein can be adjusted in position and horizontally displaced from each other. The configuration is adapted to various arrangements of the test pads of the tape, and the feasibility of the elastic configuration probe is increased, thereby effectively reducing the cost and difficulty of the probe card fabrication or maintenance. Moreover, the vertical detecting portion of the probe can avoid the problem of deformation and lateral slip of the cantilever probe, and has better stability during testing. Furthermore, the probe holder and the circuit board are provided with a light transmission window, and the sheet probe system extends above the light transmission window, so that the CCD camera can observe the probe and the test pad of the package component to be tested. Corresponding position, and the effect of the exact alignment can be achieved before the probe test.

The above described features and advantages of the present invention will be more apparent from the following description.

2 is a schematic diagram of a probe card in accordance with an embodiment of the present invention. 3 is a schematic illustration of the probe card of FIG. 2 testing a tape and wrap package component. 4 is a partial enlarged view of the probe card and the tape and tape package component of FIG. 3, where the probe card of FIG. 4 is drawn along the center of the light transmission window, and a part of the tape and package component is drawn in a plan view. Shown to clearly identify the relative position between the sheet probe of the probe card and the test pad of the tape package component. Referring to FIG. 2 to FIG. 4 , the probe card 100 includes a circuit board 110 , a probe fixing base 120 , a plurality of sheet probes 130 , and a reinforcing plate 140 . The probe fixing base 120 is disposed on the circuit board 110 . On one surface, the reinforcing plate 140 is disposed on the other surface of the circuit board 110 facing away from the probe holder 120. In the present embodiment, the probe card 100 is adapted to be in contact with a plurality of test pads 210 of a tape package component 200 for associated electrical testing of the tape and tape package component 200.

Figure 5 is a partial enlarged view of the probe card of Figure 2, wherein one of the sheet probes is moved away from the probe assembly slot to clearly identify the configuration relationship therebetween. Referring to FIG. 3 to FIG. 5 simultaneously, in the embodiment, the probe holder 120 further has a light-transmissive window 122, for example, a light-transmissive plate is embedded in an opening in the probe holder 120. production. Moreover, the circuit board 110 also has an opening 112 corresponding to the light-transmitting window 122, and the reinforcing plate 140 is substantially an annular member for increasing the structural strength of the circuit board 110 to prevent the circuit board 110 from warping. The 140 also has an opening (not shown) corresponding to the light-transmissive window 122. Accordingly, since the light transmission window 122 is not shielded by the circuit board 110 and the reinforcing plate 140, when the probe card 100 tests the tape package component 200, the light generated by the light source 300 can be transmitted through the light transmission window 122. The CCD camera can recognize the position of the probe 130 and the test pad 210 of the tape package component 200 to be tested, perform alignment, and then contact the probe 130 to the corresponding test pad 210 for electrical testing.

In addition, the probe holder 120 further has a plurality of probe assembly slots 124, and the probe assembly slots 124 are adjacently arranged on opposite sides of the light-transmitting window 122 (only one of FIG. 4 and FIG. 5 is illustrated). Side as a representative). Each of the sheet probes 130 is correspondingly assembled in the probe assembly groove 124, and a portion of the sheet probes 130 extend above the light transmission window 122 to enable light to be irradiated to the partial sheet probe 130 and the tape package. The test pad 210 of the component 200 allows the CCD camera to observe the corresponding position of the two for alignment.

The size of the light-transmissive window 122 or the opening 112 and the extension of the sheet-like probe 130 toward the light-transmitting window 122 are not limited herein, which may depend on the light source 300, the light-transmissive window 122, and the test pad 210 of the tape and tape package component 200. The configuration of the sheet probe 130 is appropriately adjusted. In addition, the embodiment also does not limit the position of the sheet-like probe 130 disposed adjacent to the light-transmitting window 122. In another embodiment not shown, the sheet-like probe 130 may also be disposed around the light-transmitting window 122. All around, it depends on the configuration of the test pad 210 of the tape package component 200.

Referring to FIG. 4 and FIG. 5 again, in the embodiment, the sheet probe 130 includes an assembly portion 132, a vertical detecting portion 134, and a horizontal extending portion 136. The assembly portion 132 has a horizontal base 132a and an arcuate support 132b. The sheet probe 130 is fixedly mounted in the corresponding probe assembly slot 124 by a horizontal base 132a, and the curved support 132b is connected to the horizontal base 132a. One end of the light transmission window 122. The horizontal extension 136 connects the curved support 132b and extends toward the light-transmitting window 122. The base of the vertical detecting portion 134 is connected to the horizontal extension 136, while its tip is adapted to be in contact with the test pad 210 of the tape and tape package component 200.

In other words, in the present embodiment, the horizontal extension 136 of the sheet probe 130 extends horizontally laterally from the assembly portion 132, and the vertical detection portion 134 extends vertically upward based on the horizontal extension portion 136. In addition, the horizontal extension portion 136 has a slot 136a for increasing the elasticity of the sheet probe 130 to buffer the pressure when the vertical detecting portion 134 is in contact with the test pad 210. In this way, when the sheet probe 130 is in contact with the test pad 210 of the tape package component 200, the curved support 132b and the horizontal extension portion 136 of the assembly portion 132 can be pressed against the test pad 210 as the vertical detecting portion 134. The buffer structure at the time.

Further, in the present embodiment, the sheet-like probe 130 has a thickness of between 0.015 mm and 0.027 mm, and a preferred thickness of 0.02 ± 0.002 mm.

In detail, in the present embodiment, the extending directions of the probe assembling grooves 124 are parallel to each other and perpendicular to the opposite sides of the light transmitting window 122, and the length of each probe assembling groove 124 is greater than the length of the horizontal base 132a. In this way, the horizontal base 132a of the sheet probe 130 can be inserted at different positions in the extending direction of the probe assembly groove 124 to adjust the position of the sheet probe 130 according to the corresponding test pad 210. In addition, the sheet probes 130 are generally divided into a plurality of groups, and the groups are repeatedly disposed along opposite sides of the light transmission window, respectively. Referring to FIG. 5, the sheet probe 130 only shows two groups 130A, 130B as an example. In each group, the horizontal bases 132a of the chip probes 130 are misplaced and fixed in the corresponding probe assembly slots 124, that is, the plurality of sheet probes 130 in each group and the light transmission. The centerlines of window 122 have different linear distances and are in an unaligned arrangement.

The above configuration is such that the tips of the vertical detecting portions 134 of each group of the sheet-like probes 130 are located on the same plane and are arranged in at least two columns, which are at least two opposite sides of the parallel light-transmitting window 122. For example, the sheet probe 130A1 of the group 130A and the sheet probe 130B1 of the other group 130B extend into the light-transmitting window 122 such that the vertical detecting portions 134 of both are located above the light-transmitting window 122 and Arranged in the first column R1. In contrast, the sheet probe 130A2 of the group 130A and the sheet probe 130B2 of the other group 130B also extend into the light transmission window 122 such that the vertical detection portions 134 of the two are positioned above the light transmission window 122 and arranged. In the second column R2, the second column R2 is away from the center of the light-transmitting window 122 than the first column R1. In the present embodiment, the vertical detecting portions 134 located in the first column R1 and the second column R2 are located above the light transmitting window 122. However, in the present invention, the vertical detecting portion 134 is not limited to the light transmitting window in each group. The number of the sheet-like probes 130 above the 122, the sheet-like probes 130 on one side only need at least two columns of vertical detecting portions 134 located above the light-transmitting window 122, so that light can be transmitted through the light-transmitting window 122, so that the CCD The camera can capture the corresponding positions of the two rows of vertical detecting portions 134 and the test pads 210 of the tape package component 200 to be positively aligned before the probe. More specifically, the CCD camera only needs to capture the corresponding positions of each of the vertical detecting portions 134 and the corresponding two test pads 210 in the two columns, and the alignment can be performed. The length of the probe assembly slot 124, the number of groups, and the number of sheet probes within the group are not limited herein.

In summary, in the above embodiment of the present invention, the probe assembly slot having a length greater than the horizontal base of the sheet probe is used, so that the sheet probes inserted therein can be adjusted in position and arranged horizontally offset from each other. In order to adapt to the various arrangement modes of the test tape of the tape, the feasibility of the elastic configuration probe is increased, and the cost and difficulty of the probe card production or maintenance are effectively reduced. Moreover, the vertical detecting portion of the probe can avoid the problem of deformation and lateral slip of the cantilever probe, and has better stability during testing. Furthermore, the probe holder and the circuit board are provided with a light-transmitting window, so that the light of the light source can be irradiated to the component to be tested, and the CCD camera can observe the corresponding position of the probe and the test pad of the package component to be tested. In order to achieve the correct alignment effect before the test.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

10,100. . . Probe card

11. . . Cantilever probe

12. . . Ring mount

20. . . Tape and reel package

110, P. . . Circuit board

112. . . Opening

120. . . Probe holder

122. . . Light transmission window

124. . . Probe assembly slot

130, 130A1, 130A2, 130B1, 130B2. . . Chip probe

130A, 130B. . . Group

132. . . Assembly department

132a. . . Horizontal base

132b. . . Curved support

134. . . Vertical detection unit

136. . . Horizontal extension

136a. . . Slot

140. . . Reinforcement board

200. . . Tape and reel package

21, 210. . . Test pad

300. . . light source

R1. . . first row

R2. . . The second column

1A is a schematic view of a conventional cantilever probe card.

Fig. 1B is an enlarged schematic view of a portion A of Fig. 1A.

2 is a schematic diagram of a probe card in accordance with an embodiment of the present invention.

3 is a schematic illustration of the probe card of FIG. 2 testing a tape and wrap package component.

4 is a partial enlarged view of the probe card and tape and tape package component of FIG. 3.

Figure 5 is a partial enlarged view of the probe card of Figure 2;

100. . . Probe card

120. . . Probe holder

122. . . Light transmission window

124. . . Probe assembly slot

130. . . Chip probe

132. . . Assembly department

132a. . . Horizontal base

132b. . . Curved support

134. . . Vertical detection unit

136. . . Horizontal extension

136a. . . Slot

200. . . Tape and reel package

210. . . Test pad

Claims (8)

A probe card is adapted to be in contact with a plurality of test pads of a packaged package component, the probe card comprising: a circuit board; a probe mount disposed on the circuit board, the probe mount having a a light transmissive window and a plurality of probe assembly slots, the light transmission window is not shielded by the circuit board, and the probe assembly slots are adjacent to at least two opposite sides of the light transmission window; Each of the sheet probes is assembled in one of the probe assembly slots, and at least a portion of the sheet probes extend above the light transmission window, and each of the sheet probes comprises: an assembly portion having a horizontal base and an arc support, the horizontal base is disposed in the corresponding probe assembly slot, the arc support is connected to the horizontal base adjacent to one end of the light transmission window, wherein the probe assembly slots extend Vertically facing the opposite sides of the light-transmissive window, and each of the probe assembly grooves has a length greater than a length of each of the horizontal bases; a vertical detecting portion adapted to be in contact with the test pads; and a horizontal extension portion connecting the Curved support and toward the light transmission window Extending the probe is connected to the vertical portion. The probe card of claim 1, wherein the chip probes are divided into a plurality of groups, and the horizontal bases of the chip probes in each group are misaligned. The probes are assembled in the slots such that the tips of the respective vertical detecting portions are disposed on the same plane and are arranged on at least two columns parallel to the opposite sides of the light transmitting window. The probe card of claim 2, wherein the groups are repeatedly disposed along the opposite sides of the light transmission window. The probe card of claim 3, wherein each of the groups comprises at least a first sheet probe and a second sheet probe, the first sheet probe and the second The vertical detecting portions of the sheet probes are located above the light transmitting window and are respectively arranged in a first column and a second column, wherein the second column is away from the center of the light transmitting window than the first column. The probe card of claim 1, wherein each of the horizontal extensions has at least one slot to increase the elasticity of each of the sheet probes. The probe card of claim 1, further comprising a reinforcing plate, wherein the reinforcing plate is disposed on the circuit board, and the probe fixing base and the reinforcing plate are respectively disposed on the circuit board. On the surface. The probe card of claim 6, wherein the reinforcing plate does not shield the light-transmitting window. The probe card of claim 1, wherein each of the sheet probes has a thickness of between 0.015 mm and 0.027 mm.