TWI424165B - Contact probe and probe unit - Google Patents

Description

Contact probe and probe unit

The present invention relates to a contact probe and a probe unit which are applied to electrical characteristics inspection of electronic components such as a semiconductor package and a liquid crystal panel.

In the case of performing an on-state inspection or an operation characteristic inspection of an electronic component such as a semiconductor package or a liquid crystal panel, the electrical connection between the inspection target and the tester that transmits the inspection signal to the inspection target is used. A plurality of probe units of conductive contact probes. With regard to the development of the semiconductor package and the liquid crystal panel in recent years, the pitch of the probe unit has been narrowed, and the pitch between the contact probes has been pursued.

In the technique of narrowing the pitch between the contact probes, a wire-type contact probe that can be bent and has elasticity with respect to the load from the outside is known (see, for example, Patent Document 1). Such a contact probe is realized by adding an insulating film to a lead composed of a conductive material.

(previous technical literature) (Patent Literature)

Patent Document 1: Japanese Patent Laid-Open Publication No. 2003-222637

However, the above-mentioned conventional lead type contact probes are composed of a single material except for the insulating film, so that all the properties required for the contact probes such as elasticity, electrical properties, and durability are satisfied. It is really difficult.

The present invention has been made in view of the above problems, and aims to provide a contact probe and a probe unit which are capable of satisfying at least desired properties with respect to elastic properties, electrical characteristics, and durability.

In order to solve the above problems, the contact probe of the present invention comprises: a linear core material composed of a conductive material having a Vickers Hardness of 450 or more; and a conductive coating material having a resistivity a conductive material of 5.00×10 ^-8 Ω·m or less and covering the outer periphery of the core material; an insulating film composed of an insulating material and covering the outer periphery of the conductive coating material; elastic covering material And consisting of an elastic material having a longitudinal elastic modulus of 1.00×10 ⁴ kgf/mm ² or more and covering the outer periphery of the insulating coating; and a coating film covering the outer periphery of the elastic covering material; and the contact probe is formed as an axis Symmetrical shape.

Moreover, the contact probe of the present invention further includes a second insulating film which is composed of an insulating material and covers the outer periphery of the plating film.

Further, the contact probe of the present invention comprises: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive coating material having a conductivity of 5.00×10 ^-8 Ω·m or less. The elastic material is composed of an elastic material having a longitudinal elastic modulus of 1.00×10 ⁴ kgf/mm ² or more and covering the outer periphery of the conductive coating material; An insulating film composed of an insulating material and covering an outer periphery of the elastic covering material; and a plunger composed of a conductive material, mounted on the core material, the conductive covering material, the elastic covering material, and An end portion of the insulating film in the longitudinal direction; and the contact probe is formed in an axisymmetric shape.

Moreover, the probe unit of the present invention comprises: a contact probe comprising: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive coating material having a resistivity of 5.00×10 ^-8 Ω. a conductive material of ‧ m or less and covering the outer periphery of the core material; an insulating film composed of an insulating material and covering the outer periphery of the covering material; and an elastic covering material having a longitudinal elastic modulus of 1.00×10 ⁴ kgf / mm ² or more of an elastic material, and covering the outer periphery of the insulating film; and coating, covering the outer periphery of the elastic covering material; and the contact probe is formed into an axisymmetric shape; and probe clamping The device is composed of a conductive material, and a plurality of the contact probes are fixed separately and connected to the ground.

Further, the probe unit of the present invention comprises: a contact probe comprising: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive coating material having a resistivity of 5.00×10 ^-8 a conductive material of Ω‧m or less and covering the outer periphery of the core material; an insulating film composed of an insulating material and covering the outer periphery of the covering material; and an elastic covering material having a longitudinal elastic modulus of 1.00× 10 ⁴ kgf / mm ² or more of an elastic material, and covering the outer periphery of the insulating film; coating, covering the outer periphery of the elastic covering material; and a second insulating film, composed of an insulating material, and coating the coating The outer periphery; and the contact probe is formed in an axisymmetric shape; and the probe holder has at least a surface composed of an insulating material and each of which accommodates a plurality of the contact probes.

According to the present invention, a linear core material composed of a conductive material having a Vickers hardness of 450 or more is composed of a conductive material having a specific resistance of 5.00 × 10 ^-8 Ω ‧ m or less, and the core material is coated The outer peripheral conductive coating material and the elastic coating material composed of an elastic material having a longitudinal elastic modulus of 1.00×10 ⁴ kgf/mm ² or more and located on the outer periphery of the conductive coating material, so that the core material can be used Improves durability, enhances electrical properties with conductive coating materials, and ensures desired elastic properties with elastic coating materials. Thus, at least the desired properties can be satisfied with respect to elastic properties, electrical properties, and durability.

Embodiments of the present invention will be described below with reference to the drawings. Moreover, these drawings are schematic drawings, and attention should be paid to the relationship between the thickness and the width of each part, or the thickness ratio of each part, etc., which may be different from the actual items, and of course, the mutual The size relationship and the condition of the different proportions.

(First embodiment)

Fig. 1 is a schematic view showing the configuration of a probe unit according to a first embodiment of the present invention. The probe unit 1 shown in Fig. 1 is a device for connecting a semiconductor package to be inspected and a tester for outputting an inspection signal to the semiconductor package. More specifically, the probe unit 1 includes a plurality of lead type contact probes 2, a probe holder 3 for individually fixing a plurality of contact probes 2, and a wiring board 5 in which the wiring 4 is buried. Further, the probe unit 1 shown in Fig. 1 is in which the contact probes 2 are arranged side by side in a direction perpendicular to the plane of the paper.

Fig. 2 is a schematic view showing the internal structure of the contact probe 2, and is a cross-sectional view taken along line AA of Fig. 1. The contact probe 2 includes a linear core material 21 composed of a conductive material having a Vickers hardness (VH) of 450 or more, and a conductive material having a specific resistance of 5.00×10 ^-8 Ω··m or less. And a conductive coating material 22 covering the outer periphery of the core material 21, an insulating coating film composed of an insulating material and covering the outer periphery of the conductive coating material 22, and having a longitudinal elastic modulus of 1.00 × 10 ⁴ kgf / mm ² The above elastic material is composed of an elastic covering material 24 covering the outer periphery of the insulating film 23, and a plating film 25 covering the outer periphery of the elastic covering material 24; and the contact probe is formed in an axisymmetric shape. The conductive members (the core material 21 and the conductive clad material 22) on the inner peripheral side of the insulating film 23 and the conductive members (the elastic clad material 24 and the plating film 25) on the outer peripheral side of the insulating film 23 are separated by the insulating film 23 . Therefore, the conductive member on the inner peripheral side of the insulating film 23 and the conductive member on the outer peripheral side of the insulating film 23 are not short-circuited. Further, the thickness of each layer shown in Fig. 2 is merely an illustrative example, and an appropriate setting can be made in accordance with the performance required for the contact probe 2.

The core material 21 has a circular cross section and is realized by materials such as tungsten, niobium nickel, stainless steel, or SK. The conductive coating material 22 is realized by gold, silver, aluminum, copper, a gold alloy, a silver alloy, a copper alloy, beryllium copper, ruthenium nickel, or a palladium alloy. The insulating film 23 is realized by a resin, a ceramic, or a mixture of a resin and a ceramic. The elastic covering material 24 is realized by materials such as elastic steel, stainless steel, beryllium copper, hard steel wire, or phosphor bronze. The plating film 25 is realized by gold, gold-tin alloy, palladium, or nickel.

The probe holder 3 has a head side plate 31 for inserting and fixing in the vicinity of the end of the contact probe 2 facing the detection target side (hereinafter referred to as "head side") for insertion and fixation inspection. The wiring side plate 32 located in the vicinity of the end portion of the contact probe 2 facing the wiring board side (hereinafter referred to as "wiring side") and the head side plate 31 and the wiring side plate 32 are interposed, and the head side plate 31 and the wiring are connected. The connecting member 33 of the side plate 32. The head side plate 31, the wiring side plate 32, and the connecting member 33 are composed of a conductive material and are connected to a ground. Further, a plating film made of gold, gold-tin alloy, palladium, or nickel may be provided on the surface of the probe holder 3.

The head side plate 31 has a plurality of insertion holes 311 through which the probe 2 is inserted and penetrated in the thickness direction of the board. Further, the wiring side plate 32 has a plurality of insertion holes 321 through which the probe 2 is inserted in the thickness direction of the board, and the insertion hole 321 and any of the plurality of insertion holes 311 are aligned with each other. The arrangement pattern of the insertion holes 311 and 321 can be determined in accordance with the electrode arrangement pattern of the inspection target.

The wiring board 5 has a fixing hole 51 through which the end of the wiring 4 is inserted and fixed. The end portion of the wiring 4 inserted through the fixing hole 51 is fixed to the wiring substrate 5 by an insulating adhesive G. The wiring board 5 is made of a conductive material and is connected to the ground like the probe holder 3.

Fig. 3 is a schematic view showing the state of the probe unit 1 at the time of inspection. At the time of inspection, the electrode 301 of the inspection object 300 comes into contact with the tip end side of the contact probe 2, and receives the load from the electrode 301. The contact probe 2 is deflected by the load from the contact electrode 301, and its outer edge is in contact with the probe holder 3. Since the outer edge of the contact probe 2 has the plating film 25, the contact probe 2 is electrically connected to the probe holder 3 to form an equipotential. Thus, the surface of the contact probe 2 is shielded to prevent noise and reduce cross talk. Thereby, the electrical characteristics of the contact probe 2 are improved to correspond to high frequency signals of 1 GHz or more.

According to the first embodiment of the present invention described above, the linear core material 21 composed of a conductive material having a Vickers hardness of 450 or more and a conductive material having a specific resistance of 5.00 × 10 ^-8 Ω ‧ m or less The conductive coating material 22 composed of the outer periphery of the core material and the elastic material composed of an elastic material having a longitudinal elastic modulus of 1.00 × 10 ⁴ kgf / mm ² or more and located on the outer peripheral side of the conductive coating material Since the material 24 is coated, the durability can be improved by the core material 21, the electrical characteristics can be improved by the conductive coating material 22, and the desired elastic properties can be ensured by the elastic covering material 24. Thus, at least the desired properties can be satisfied with respect to elastic properties, electrical properties, and durability.

Moreover, according to the first embodiment, since the probe holder 3 is realized by a conductive material, the surface of the contact probe 2 is shielded to prevent noise and reduce string interference. Thereby, the electrical characteristics of the contact probe 2 can be further improved.

(Second embodiment)

Fig. 4 is a view showing the configuration of a main part of a probe unit according to a second embodiment of the present invention. The probe unit 6 shown in FIG. 4 is a device for detecting electrical characteristics by a coaxial structure, and includes: a plurality of lead type contact probes 7, and probe holders for individually fixing a plurality of contact probes 7 A wiring board 10 comprising an insulating material, having a fixing hole 101 for inserting and fixing the coaxial wiring 9, and an insulating material, forming a flat plate and interposed between the probe holder 8 and Between the wiring boards 10, the guiding members 11 of one electrode tip end portion of the coaxial wiring 9 are guided.

The contact probe 7 has the same cross section as the contact probe 2. Hereinafter, in the contact probe 7, a portion corresponding to the core material 21, the conductive coating material 22, the insulating coating 23, the elastic coating material 24, and the plating film 25 of the contact probe 2 will be referred to as a core material 71, and conductivity. The covering material 72, the insulating coating 73, the elastic covering material 74, and the plating film 75. The contact probe 7 is formed in a crown shape at the end on the side in contact with the inspection object. When the contact probe 7 comes into contact with the electrode to be inspected, the core material 71, the conductive coating material 72, the elastic coating material 74, and the plating film 75 are brought into contact with the electrode.

The probe holder 8 has a head side plate 81 for inserting and fixing the vicinity of the head side end portion of the contact probe 7, and a wiring side plate 82 for inserting and fixing the vicinity of the wiring side end portion of the contact probe 7. The connection member 83 that connects the head side plate 81 and the wiring side plate 82 is interposed between the head side plate 81 and the wiring side plate 82. The head side plate 81, the wiring side plate 82, and the connecting member 83 are made of a conductive material and are connected to the ground.

The head side plate 81 has a plurality of insertion holes 811 that penetrate the contact lens 7 in the thickness direction of the board. Further, the wiring side plate 82 has a plurality of insertion holes 821 that are inserted through the contact probe 7 in the thickness direction of the board. The arrangement pattern of the insertion holes 811 and 821 can be determined according to the electrode arrangement pattern of the inspection target.

The coaxial wiring 9 has a center conductor 91, a peripheral conductor 92, and a hollow insulator 93 interposed between the center conductor 91 and the outer conductor 92. The end portion of the center wire 91 protrudes from the end portions of the outer peripheral wire 92 and the insulator 93, and the protruding portion is inserted through the insertion hole 111 of the guiding member 11. The peripheral lead 92 is connected to ground and is equipotential to the probe holder 8. Further, when the coaxial wiring 9 is fixed to the fixing hole 101, the coaxial wiring 9 can be fixed to the wiring substrate 10 by using the adhesive G of the first embodiment.

Fig. 5 is a schematic view showing the state of the probe unit 6 at the time of inspection. At the time of inspection, the electrode 301 of the inspection object 300 comes into contact with the crown-shaped tip end portion of the contact probe 7. Thereby, the contact probe 7 is subjected to deflection due to the load of the electrode 301, and is in contact with the probe holder 8. At this time, the conductive layer (the core material 71 and/or the conductive coating material 72) located on the inner peripheral side of the insulating film 23 is electrically connected to the center lead 91 on the wiring side, and is located on the outer peripheral side of the insulating film 23 on the other hand. The elastic covering material 74 and the plating film 75 are electrically connected to the outer peripheral wire 92 via the probe holder 8 . On the other hand, on the head side, as shown in the enlarged cross-sectional view of Fig. 6, the core material 71, the conductive coating material 72, the elastic coating material 74, and the plating film 75 are in contact with the electrode 301. Here, the tip end shape of the contact probe 7 must be such that the conductive layer on the inner peripheral side of the insulating film 73 and the conductive layer on the outer peripheral side can simultaneously contact the shape of the electrode 301. By providing such a shape, it is possible to perform electrical characteristic inspection through a coaxial structure that reduces noise and crosstalk.

According to the second embodiment described above, as in the first embodiment, at least the desired properties can be satisfied with respect to the elastic properties, electrical properties, and durability.

Further, according to the second embodiment, the probe holder 8 is realized by a conductive material, and the probe holder 8 and the outer peripheral lead 92 of the coaxial wiring 9 are connected to the ground to be equipotential, so that when contact is made When the probe 7 is deflected, the contact probe 7 is indirectly connected to the outer peripheral wire 92 via the probe holder 8. Therefore, the contact probe 7 can be formed into a substantially coaxial structure, and the electrical characteristic inspection performed by the transmission coaxial structure for reducing external noise and crosstalk can be performed by a simple configuration. As a result, even if the diameter of the contact probe 7 is reduced to 0.1 mm or less, the measurement can be easily performed.

(Third embodiment)

Fig. 7 is a view showing the configuration of a main part of a probe unit according to a third embodiment of the present invention. The probe unit 12 shown in FIG. 7 is a device for performing electrical characteristic inspection by a four-terminal measurement method, and includes a plurality of lead type contact probes 13 and probe holders for fixing a plurality of contact probes 7 each. The wiring board 16 is made of an insulating material and has a fixing hole 161 through which the coaxial wiring 15 is inserted and fixed.

Fig. 8 is a schematic view showing the internal structure of the contact probe 13, and is a cross-sectional view taken along line B-B of Fig. 7. The contact probe 13 sequentially includes a core material 131, a conductive coating material 132, an insulating coating film 133, an elastic covering material 134, a plating film 135, and a second insulating coating film 136 on the outer periphery of the coating plating film 135 from the inner peripheral side; The contact probe is formed in an axisymmetric shape. The core material 131, the conductive coating material 132, the insulating coating film 133, the elastic coating material 134, and the plating film 135 are respectively connected to the core material 21 of the contact probe 2, the conductive coating material 22, the insulating coating 23, and the elastic package. The material 24 and the coating 25 are made of the same material. Further, the second insulating film 136 is composed of the same insulating material as the insulating film 133. Further, the thickness of each layer shown in Fig. 8 is merely an illustrative example, and an appropriate setting can be made in accordance with the performance required for the contact probe 13.

The probe holder 14 has a head side plate 141 for inserting and fixing the vicinity of the head side end portion of the contact probe 13, and a wiring side plate 142 for inserting and fixing the vicinity of the end portion of the contact side of the contact probe 13 on the wiring side. The connecting member 143 is interposed between the head side plate 141 and the wiring side plate 142 and connects the head side plate 141 and the wiring side plate 142. The head side plate 141, the wiring side plate 142, and the connecting member 143 are composed of an insulating material. Further, the head side plate 141, the wiring side plate 142, and the connecting member 143 may be applied to an insulating film provided on the surface of the conductive material.

The head side plate 141 has a plurality of insertion holes 1411 that penetrate the thickness direction of the board and are inserted into the contact probe 13. Further, the wiring side plate 142 has a plurality of insertion holes 1421 that penetrate the thickness direction of the board and are inserted into the contact probe 13. The arrangement pattern of the insertion holes 1411 and 1421 can be determined in accordance with the electrode arrangement pattern of the inspection target.

The coaxial wiring 15 has a center conductor 151, an outer circumference conductor 152, and a hollow insulator 153 interposed between the center conductor 151 and the outer circumference conductor 152. Among them, the outer peripheral wire 152 protrudes more than the center wire 151 and the insulator 153.

Fig. 9 is a cross-sectional view showing an enlarged portion of the contact state of the contact probe 13 and the coaxial wiring 15. The core member 131 is in contact with the center wire 151. Further, the elastic covering material 134 and the plating film 135 are in contact with the outer peripheral wire 152. Therefore, both the center wire 151 and the outer peripheral wire 152 are electrically connected to the contact probe 13, and one of them is used as an applied current, and the other is used for voltage measurement, whereby the 4-terminal measurement of the inspection target can be performed.

According to the third embodiment described above, as in the first embodiment described above, at least the elastic properties, electrical characteristics, and durability can satisfy the desired performance.

According to the third embodiment, the outer peripheral wire 152 of the coaxial wire 15 is protruded from the center wire 151 and the insulator 153, and the conductive layer (elastic covering material) on the outer peripheral side of the insulating film 133 provided on the contact probe 13 is formed. Since the 134 and/or the plating film 135) are in contact with each other, the four-terminal measurement can be performed by a remarkable simple configuration as compared with the technique disclosed in, for example, Japanese Laid-Open Patent Publication No. 2009-8579. Therefore, even if the diameter of the contact probe 13 is reduced to 0.1 mm or less, the four-terminal measurement can be easily performed.

(Fourth embodiment)

Fig. 10 is a view showing the configuration of a main part of a probe unit according to a fourth embodiment of the present invention. The probe unit 17 shown in FIG. 10 includes a plurality of lead type contact probes 18, a probe holder 19 that individually fixes a plurality of contact probes 18, and a plug holder 19 for inserting and fixing the wiring 41. The wiring substrate 42 of the fixing hole 421 is fixed.

The contact probe 18 is composed of a conductive material forming an axisymmetric shape, and has a needle 181 that comes into contact with the inspection object, and a lead portion 182 that is attached to the proximal end portion of the needle 181.

The needle 181 has a distal end portion 181a having a sharp end, a flange portion 181b having a diameter larger than the distal end portion 181a, and a flange portion 181b provided in the opposite direction of the distal end portion 181a for fixing the lead portion A lead fixing portion 181c at one end of the 182. The lead portion 182 is attached to the lead fixing portion 181c by soldering, gold wax bonding, silver wax bonding, pressure bonding, driving, or laser splicing. The needle 181 is realized by a nickel alloy having a low contact resistance or an SK material having excellent wear resistance.

Fig. 11 is a schematic view showing the internal structure of the lead portion 182, and is a cross-sectional view taken along line CC of Fig. 10. The lead portion 182 has a linear core material 1821 composed of a conductive material having a Vickers hardness of 450 or more and a conductive material having a specific resistance of 5.00 × 10 ^-8 Ω ‧ m or less, and covers the core material 1821 The outer peripheral conductive coating material 1822, which is composed of an elastic material having a longitudinal elastic modulus of 1.00×10 ⁴ kgf/mm ² or more, and covers the outer peripheral elastic covering material 1823 of the conductive covering material 1822, and is insulated The material is composed of and covers the outer peripheral insulating film 1824 of the elastic covering material; and the lead portion is formed in an axisymmetric shape. More specifically, the core material 1821, the conductive coating material 1822, the elastic coating material 1823, and the insulating coating film 1824 are respectively separated from the core material 21, the conductive coating material 22, the elastic coating material 24, and the insulating coating 23 The same material is achieved. Further, the thickness of each layer shown in Fig. 11 is merely an illustrative example, and an appropriate setting can be made in accordance with the performance required for the lead portion 182.

The probe holder 19 has a head side plate 191 for inserting and fixing the vicinity of the end portion on the head side of the contact probe 18, and a wiring side plate for inserting and fixing the vicinity of the end portion on the wiring side of the contact probe 18. 192. A connecting member 193 interposed between the head side plate 191 and the wiring side plate 192 and connecting the head side plate 191 and the wiring side plate 192. The head side plate 191, the wiring side plate 192, and the connecting member 193 are made of an insulating material.

The head side plate 191 has an insertion hole 1911 that penetrates the thickness direction of the board and is inserted into the contact probe 18. Further, the wiring side plate 192 has an insertion hole 1921 that penetrates the thickness direction of the board and is inserted into the contact probe 18. The arrangement pattern of the insertion holes 1911 and 1921 can be determined in accordance with the electrode arrangement pattern of the inspection target.

The end portion of the wiring 41 that is inserted into the fixing hole 421 of the wiring board 42 is fixed to the wiring board 42 by an insulating adhesive G.

In the probe unit 17 having the above configuration, when the electrode to be inspected is brought into contact with the distal end portion 181a and the load is applied, the lead portion 182 is deflected, and the inspection target and the wiring 41 are turned on in such a state of being deflected.

According to the fourth embodiment described above, as in the first embodiment, at least the desired properties can be satisfied with respect to the elastic properties, electrical properties, and durability.

Further, the mounting aspect of the needle and the lead portion of the fourth embodiment is not limited to the above. For example, the needle and the lead portion may be mechanically connected (banausic) according to a close-fitting elastic joint disclosed in Japanese Laid-Open Patent Publication No. 2007-178404. Further, as disclosed in Japanese Laid-Open Patent Publication No. 2007-178404, both ends of the lead portion are connected to the needle.

(Fifth Embodiment)

Fig. 12 is a view showing the configuration of a main part of a probe unit according to a fifth embodiment of the present invention. The probe unit 20 shown in FIG. 12 is a device for performing electrical characteristic inspection by a coaxial structure, and includes a plurality of lead type contact probes 2, a probe holder 34 for individually fixing a plurality of contact probes 2, and The wiring substrate 5 of the coaxial wiring 94 is buried.

The probe holder 34 has a head side plate 35 that is inserted and fixed near the end of the contact probe 2 on the head side, and is inserted and fixed near the end of the contact probe 2 on the wiring side. The wiring side plate 36 and the connecting member 37 interposed between the head side plate 35 and the wiring side plate 36 and connecting the head side plate 35 and the wiring side plate 36 are provided. Further, on the top surface of the probe holder 34, an insulating member 38 covering the upper surface of the head side plate 35 is provided, which is realized by using an insulating material. The head side plate 35, the wiring side plate 36, and the connecting member 37 are made of a conductive material and are connected to the ground.

The head side plate 35 has a plurality of insertion holes 351 that penetrate the thickness direction of the board and are inserted into the contact probe 2. Further, the wiring side plate 36 has a plurality of insertion holes 361 which penetrate the thickness direction of the board and are inserted into the contact probe 2 and are different from the axes of the plurality of insertion holes 351. The arrangement pattern of the insertion holes 351 and 361 can be determined in accordance with the electrode arrangement pattern of the inspection target.

The wiring board 5 has a fixing hole 51 through which the end portion of the coaxial wiring 94 is inserted and fixed. The end portion of the coaxial wiring 94 that is inserted into the fixing hole 51 is fixed to the wiring substrate 5 by an insulating adhesive or the like. The wiring board 5 is composed of a conductive material and is connected to the ground like the probe holder 34.

Figure 13 is a schematic diagram showing the state of the probe unit at the time of inspection. At the time of inspection, the electrode 301 of the inspection object 300 comes into contact with the tip end side of the contact probe 2, and receives the load from the electrode 301 to deflect the contact probe 2. The core material 21 of the contact probe 2 is electrically connected to the center wire 95 on the wiring side. Further, since the outer periphery of the contact probe 2 has the plating film 25 (see FIG. 2), the contact probe 2 is electrically connected to the probe holder 34 to form an equipotential. Thus, the surface of the contact probe 2 is shielded to prevent noise and reduce string interference. Thereby, the electrical characteristics of the contact probe 2 are improved to correspond to high frequency signals of 1 GHz or more.

According to the fifth embodiment of the present invention described above, even when the axes of the insertion holes 351 and 361 of the head side plate 35 and the wiring side plate 36 are different, the same as the first and second embodiments described above can be satisfied. Regarding the desired properties of the elastic property, the electrical property, and the durability, and by tilting the contact probe 2 in advance, the deflection direction of the contact probe 2 can be made the same.

Further, the insulating member 38 shown in Fig. 12 can be applied to the first to fourth embodiments described above. By providing the insulating member, it is possible to prevent the contact probes from being electrically short-circuited when the plurality of contact probes are attached to the probe holder.

Although the embodiments of the present invention have been described above, the present invention should not be limited to the first to fifth embodiments described above. In other words, various embodiments of the present invention, which are not described herein, may be included, and various modifications may be made without departing from the scope of the invention.

(industrial use)

The present invention has an effect in performing an on-state inspection and an operation characteristic inspection of an electronic component such as a semiconductor package or a liquid crystal panel.

1, 6, 12, 17, 20. . . Probe unit

2, 7, 13, 18. . . Contact probe

3, 8, 14, 19, 34. . . Probe holder

4, 41. . . Wiring

5, 10, 16, 42. . . Wiring substrate

9, 15, 94. . . Coaxial wiring

11. . . Guide member

21, 71, 131, 1821. . . Core

22, 72, 132, 1822. . . Conductive coating material

23, 73, 133, 1824. . . Insulating film

24, 74, 134, 1823‧‧‧ elastic covering materials

25, 75, 135‧ ‧ coating

31, 35, 81, 141, 191 ‧ ‧ head side panels

32, 36, 82, 142, 192‧‧‧ wiring side panels

33, 37, 83, 143, 193‧‧‧ Linked components

38‧‧‧Insulating components

51, 101, 161, 421‧‧ ‧ fixing holes

91, 95, 151‧‧‧ center conductor

92, 152‧‧‧ peripheral wires

93, 153‧‧‧ insulator

111‧‧‧ inserted through hole

136‧‧‧Second insulation film

181‧‧‧ needle

181a‧‧‧ front end

181b‧‧‧Flange

181c‧‧‧ lead wire fixing

182‧‧‧ lead parts

300‧‧‧Check objects

301‧‧‧electrode

311, 321, 351, 361, 811, 821, 1411, 1421, 1911, 1921‧‧‧

G‧‧‧Binder

Fig. 1 is a schematic view showing the configuration of a main part of a probe unit according to a first embodiment of the present invention.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 is a view showing the state of the probe unit according to the first embodiment of the present invention at the time of inspection.

Fig. 4 is a view showing the configuration of a main part of a probe unit according to a second embodiment of the present invention.

Fig. 5 is a view showing the state of the probe unit according to the second embodiment of the present invention at the time of inspection.

Fig. 6 is a cross-sectional view showing an enlarged state of contact between the contact probe and the electrode to be inspected according to the second embodiment of the present invention.

Fig. 7 is a view showing the configuration of a main part of a probe unit according to a third embodiment of the present invention.

Figure 8 is a cross-sectional view taken along line B-B of Figure 7.

Fig. 9 is a partial cross-sectional view showing the contact state of the contact probe and the coaxial wiring according to the third embodiment of the present invention.

Fig. 10 is a view showing the configuration of a main part of a probe unit according to a fourth embodiment of the present invention.

Figure 11 is a cross-sectional view taken along line C-C of Figure 10.

Fig. 12 is a view showing the configuration of a main part of a probe unit according to a fifth embodiment of the present invention.

Figure 13 is a schematic diagram showing the state of the probe unit at the time of inspection.

2. . . Contact probe

twenty one. . . Core

twenty two. . . Conductive coating material

twenty three. . . Insulating film

twenty four. . . Elastic covering material

25. . . Coating

Claims (5)

A contact probe formed into an axisymmetric shape and comprising: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive coating material having a resistivity of 5.00×10 a conductive material of ^-8 Ω·m or less and covering the outer periphery of the core material; an insulating film composed of an insulating material and covering the outer periphery of the conductive coating material; and an elastic covering material by elasticity Steel, stainless steel, beryllium copper, hard steel wire, or phosphor bronze, and covering the outer periphery of the insulating film; and a coating film covering the outer periphery of the elastic covering material. The contact probe according to claim 1, wherein the second insulating film is made of an insulating material and covers the outer periphery of the plating film. A contact probe formed into an axisymmetric shape and comprising: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive coating material having a resistivity of 5.00×10 a conductive material of ^-8 Ω·m or less and covering the outer periphery of the core material; the elastic covering material is composed of elastic steel, stainless steel, beryllium copper, hard steel wire, or phosphor bronze, and is coated with the foregoing An outer periphery of the conductive coating material; an insulating film composed of an insulating material and covering an outer circumference of the elastic coating material; and a plunger composed of a conductive material, mounted on the core material, and the conductive package The covering material, the elastic covering material, and the end portion of the insulating film in the longitudinal direction. A probe unit comprising: a contact probe formed into an axisymmetric shape, having: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive covering material having a resistivity of 5.00×10 a conductive material of ^-8 Ω·m or less and covering the outer periphery of the core material; an insulating film composed of an insulating material and covering the outer periphery of the covering material; and an elastic covering material made of elastic steel, a stainless steel, beryllium copper, a hard steel wire, or a phosphor bronze, and covering the outer periphery of the insulating film; a coating film covering the outer periphery of the elastic covering material; and a probe holder made of a conductive material, and A plurality of the aforementioned contact probes are individually fixed and connected to the ground. A probe unit comprising: a contact probe formed as an axisymmetric, comprising: a linear core material composed of a conductive material having a Vickers hardness of 450 or more; and a conductive covering material having a resistivity of 5.00×10 ^{− 8} Ω ‧ m or less of electrically conductive material, and covering the outer periphery of the core material; insulating film, composed of an insulating material, and covering the outer periphery of the covering material; elastic covering material, made of elastic steel, stainless steel And consisting of beryllium copper, a hard steel wire, or phosphor bronze, and covering the outer periphery of the insulating coating; a coating film covering the outer periphery of the elastic coating material; and a second insulating film composed of an insulating material and covering the foregoing The outer periphery of the coating; and the probe holder, at least the surface of which is composed of an insulating material, and each of which accommodates a plurality of the aforementioned contact probes.