TWI402165B - Copper foil and the use of its copper clad laminate - Google Patents

Copper foil and the use of its copper clad laminate Download PDF

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TWI402165B
TWI402165B TW099146067A TW99146067A TWI402165B TW I402165 B TWI402165 B TW I402165B TW 099146067 A TW099146067 A TW 099146067A TW 99146067 A TW99146067 A TW 99146067A TW I402165 B TWI402165 B TW I402165B
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copper foil
copper
less
oil film
film equivalent
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TW099146067A
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TW201124269A (en
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Kaichiro Nakamuro
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Jx Nippon Mining & Metals Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B3/00Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/02Alloys based on copper with tin as the next major constituent

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metal Rolling (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Description

銅箔及使用其之覆銅積層板Copper foil and copper clad laminate using the same

本發明係關於一種使用於例如撓性印刷配線板(FPC:Flexible Printed Circuit)中之銅箔、及將該銅箔積層於樹脂層之至少單面之覆銅積層板。The present invention relates to a copper foil used in, for example, a flexible printed wiring board (FPC), and a copper clad laminate in which the copper foil is laminated on at least one side of a resin layer.

作為驅動數位相機或行動電話等電子機器之電路,使用有撓性印刷配線板(FPC:Flexible Printed Circuit)或覆晶軟板(COF,chip of flexible circuit)。該FPC或COF係使用於樹脂層之單面或雙面積層有銅箔之覆銅積層板(CCL,copper-clad laminate),且於銅箔上形成電路圖案而成。As a circuit for driving an electronic device such as a digital camera or a mobile phone, a flexible printed wiring board (FPC) or a chip of flexible circuit (COF) is used. The FPC or COF is used for a copper-clad copper-clad laminate (CCL) on a single-sided or double-area layer of a resin layer, and a circuit pattern is formed on the copper foil.

並且,為使此種電子機器小型化及高功能化,採用有將FPC摺疊收納至殼體內之狹小空間之方法。又,於用於液晶顯示器周邊之COF之情形時,為使鑲框(所謂之「邊框」)變細,而將COF之銅配線折回至液晶基板之內側。Further, in order to reduce the size and function of such an electronic device, a method of folding and housing the FPC into a narrow space in the casing is employed. Moreover, in the case of using COF around the liquid crystal display, in order to make a bezel (so-called "frame") thin, the copper wiring of COF is folded back to the inside of a liquid crystal substrate.

然而,摺疊FPC或COF時,存在銅箔部分受到較大之變形負載而易造成斷裂之問題。However, when the FPC or the COF is folded, there is a problem in that the copper foil portion is subjected to a large deformation load and is liable to cause cracking.

因此,揭示有由包含柱狀之銅晶粒且25℃之伸長率為5%以上之電解銅箔構成FPC,藉此獲得配線圖案不易斷裂之FPC(專利文獻1)。For this reason, it has been disclosed that FPC is composed of an electrolytic copper foil containing columnar copper crystal grains and an elongation at 25 ° C of 5% or more, thereby obtaining an FPC in which the wiring pattern is not easily broken (Patent Document 1).

專利文獻1:日本特開2007-335541號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-335541

先前,認為CCL之銅箔之彎曲性與銅箔之伸長存在關聯,因此如上述專利文獻1中所揭示般,使用伸長較大之電解銅箔。In the past, it has been considered that the bendability of the copper foil of CCL is related to the elongation of the copper foil. Therefore, as disclosed in the above Patent Document 1, an electrolytic copper foil having a large elongation is used.

然而,本發明者等人發現:即便使用伸長較大之壓延銅箔,亦存在CCL之彎曲性並未提高之情形。However, the inventors of the present invention have found that even when a rolled copper foil having a large elongation is used, there is a case where the bendability of CCL is not improved.

即,本發明係為解決上述課題研究而成者,其目的在於提供一種用於覆銅積層板時彎曲性優異之銅箔及使用其之覆銅積層板。In other words, the present invention has been made to solve the problems described above, and an object of the invention is to provide a copper foil excellent in flexibility when used for a copper clad laminate and a copper clad laminate using the same.

本發明者等人經種種研討後,發現作為提高CCL之彎曲性之因素,重要的並非銅箔之伸長而是加工硬化指數(n值)。The inventors of the present invention have found through various studies that it is not the elongation of the copper foil but the work hardening index (n value) as a factor for improving the flexibility of the CCL.

為達成上述目的,本發明之銅箔為厚度5~30 μm,壓延平行方向之表面粗糙度Ra≦0.1 μm,且以350℃進行0.5小時退火後之加工硬化指數為0.3以上0.45以下。In order to achieve the above object, the copper foil of the present invention has a thickness of 5 to 30 μm, a surface roughness Ra of 0.1 μm in the parallel direction of rolling, and a work hardening index of 0.3 to 0.45 or less after annealing at 350 ° C for 0.5 hour.

本發明之銅箔之半軟化溫度較佳為150℃以下。The semi-softening temperature of the copper foil of the present invention is preferably 150 ° C or lower.

又,本發明之銅箔較佳為由無氧銅或精銅構成,或者無氧銅或精銅中含有合計500質量ppm以下之由Ag及Sn組成之群中之1種以上。In addition, the copper foil of the present invention is preferably composed of oxygen-free copper or fine copper, or one or more of a group consisting of Ag and Sn in total of 500 ppm by mass or less in oxygen-free copper or refined copper.

於使用在上述銅箔之單面積層樹脂層且合計厚度為50 μm以下、寬度為3 mm以上5 mm以下之試料,以上述銅箔之露出面為外側進行180度密合彎曲時,至上述銅箔斷裂為止之彎曲次數較佳為4次以上。When a sample having a single-layer resin layer of the copper foil and having a total thickness of 50 μm or less and a width of 3 mm or more and 5 mm or less is used, the exposed surface of the copper foil is 180 degrees tightly bent outside, The number of bendings until the copper foil is broken is preferably 4 or more.

較佳為最後冷壓延時之總加工度為85%以上,且將上述最後冷壓延中之最後3道次中之油膜當量設為以下條件壓延而成。其中,將最後道次之前2個道次之油膜當量設為25000以下,將最後道次之前1道次之油膜當量設為30000以下,將最後道次之油膜當量設為35000以下。此處,將鑄錠熱壓延後,經冷壓延製造銅箔時,於冷壓延中交替地進行冷壓延及退火。並且,將最後退火後最後進行之冷壓延設為「最後冷壓延」。Preferably, the total degree of processing of the final cold press delay is 85% or more, and the oil film equivalent of the last three passes in the last cold rolling is formed by the following conditions. In this case, the oil film equivalent of two passes before the last pass is set to 25,000 or less, the oil film equivalent of one pass before the last pass is set to 30,000 or less, and the oil film equivalent of the last pass is set to 35,000 or less. Here, after the ingot is hot rolled, when the copper foil is produced by cold rolling, cold rolling and annealing are alternately performed in cold rolling. Further, the cold rolling which is finally performed after the final annealing is referred to as "final cold rolling".

本發明之覆銅積層板係將上述銅箔積層於樹脂層之至少單面而成。In the copper clad laminate of the present invention, the copper foil is laminated on at least one side of the resin layer.

根據本發明,可獲得用於覆銅積層板時彎曲性優異之銅箔。According to the present invention, a copper foil excellent in flexibility when used for a copper clad laminate can be obtained.

以下,針對本發明之實施形態之銅箔進行說明。再者,本發明中之%,只要未特別預先說明,則表示質量%。Hereinafter, a copper foil according to an embodiment of the present invention will be described. Further, % in the present invention means % by mass unless otherwise specified.

本發明之實施形態之銅箔為厚度5~30 μm,壓延平行方向之表面粗糙度Ra≦0.1 μm,且以350℃進行0.5小時退火後之加工硬化指數為0.3以上0.45以下。The copper foil according to the embodiment of the present invention has a thickness of 5 to 30 μm, a surface roughness Ra of 0.1 μm in the parallel direction of rolling, and a work hardening index of 0.3 to 0.45 or less after annealing at 350 ° C for 0.5 hour.

加工硬化指數(n值)係由降伏點以上之塑性變形域之應力與應變之關係由下式1(Hollomon式)近似之情形時的指數n表示。The work hardening index (n value) is represented by the index n when the relationship between the stress and the strain in the plastic deformation domain above the relief point is approximated by the following formula 1 (Hollomon formula).

[真應力]=[材料常數]×[真應變]n (1)[True stress]=[material constant]×[true strain]n (1)

加工硬化指數越大,越難發生局部變形,變形時越難斷裂。又,加工硬化指數較高之材料拉伸加工性優異,適合於壓製加工。並且,於將銅箔積層於樹脂層之至少單面而製造覆銅積層板,且評估該覆銅積層板之彎曲性之情形時,認為加工硬化指數為0.3以上之銅箔不易發生局部變形,並且由彎曲部位整體承受變形,故銅箔難以斷裂。然而,加工硬化指數超過0.45之材料退火後之強度較低且操作性劣化,故不適宜用作覆銅積層板。The larger the work hardening index, the more difficult it is to cause local deformation, and the more difficult it is to break during deformation. Further, a material having a high work hardening index is excellent in stretch workability and is suitable for press working. Further, when a copper clad laminate is produced by laminating a copper foil on at least one side of the resin layer, and the bendability of the copper clad laminate is evaluated, it is considered that the copper foil having a work hardening index of 0.3 or more is less likely to be locally deformed. Further, since the entire curved portion is subjected to deformation, the copper foil is hard to be broken. However, a material having a work hardening index of more than 0.45 is less suitable for use as a copper clad laminate because of its low strength after annealing and deterioration in workability.

此處,將以350℃進行0.5小時退火後之加工硬化指數加以界定之理由,係因為製造覆銅積層板時之加熱條件為該程度。再者,於覆銅積層板之樹脂層為將樹脂組成物塗佈於銅箔並硬化而得之情形(樹脂層及銅箔之間未夾有接著層之2層CCL之情形)時,於上述加熱條件下進行樹脂之硬化。Here, the reason why the work hardening index after annealing at 350 ° C for 0.5 hour is defined is because the heating condition at the time of producing the copper clad laminate is such a degree. In addition, when the resin layer of the copper-clad laminate is applied by applying a resin composition to a copper foil and hardening (in the case where two layers of CCL of the adhesive layer are not interposed between the resin layer and the copper foil), The resin is hardened under the above heating conditions.

再者,作為提昇銅箔之彎曲性之因素,認為重要的並非銅箔之伸長而是加工硬化指數(n值)之理由如下。Further, as a factor for improving the flexibility of the copper foil, it is considered that the reason why the elongation of the copper foil is not the elongation of the work foil (n value) is as follows.

首先,加工硬化指數係表示材料之加工硬化行為的值之一,該值越大,材料具有越容易加工硬化之性質。此處,材料受到拉伸變形時,將局部地發生收縮而斷裂,然而加工硬化係數較大之材料,將發生收縮之部分加工硬化,收縮部變得不易變形。因此,其以外之部分便代替了不易變形之收縮部,開始發生變形。藉由重複該步驟,而使材料整體均勻地變形。另一方面,伸長係在不考慮此種狀況之下以宏觀地把握之指標,故即便伸長較大者亦未必加工硬化指數較大。First, the work hardening index is one of the values indicating the work hardening behavior of the material, and the larger the value, the more easily the material has work hardening properties. Here, when the material is subjected to tensile deformation, the material locally shrinks and breaks. However, the material having a large work hardening coefficient hardens the portion where the shrinkage occurs, and the shrinkage portion is less likely to be deformed. Therefore, the other part replaces the shrinkable portion which is not easily deformed, and starts to deform. By repeating this step, the entire material is uniformly deformed. On the other hand, the elongation is a macroscopically grasped index without considering such a situation, so even if the elongation is large, the work hardening index is not necessarily large.

先前,作為此種材料整體之均勻變形容易程度之指標,例如於具有厚度之材料的拉伸加工中,使用加工硬化指數,然而薄如銅箔之材料不會進行拉伸加工等加工,故迄今尚未有將加工硬化指數作為指標者。因此,本發明中,考慮若使銅箔之加工硬化指數增大,則即便於CCL之180度密合彎曲中,彎曲部整體亦會因均勻地變形而不於發生斷裂之下彎曲。In the past, as an index of the ease of uniform deformation of the entire material, for example, in a drawing process of a material having a thickness, a work hardening index is used, whereas a material such as a copper foil is not subjected to a drawing process or the like, so There is no work hardening index as an indicator. Therefore, in the present invention, in consideration of an increase in the work hardening index of the copper foil, even if the CCL is tightly bent at 180 degrees, the entire curved portion is bent uniformly without being broken.

進而,以200℃進行0.5小時退火後之加工硬化指數亦較佳為0.3以上0.45以下。其原因在於,製造使用膜作為樹脂層且膜與銅箔經由接著層而積層之3層CCL時的層壓溫度為200℃左右。加工硬化指數由於銅箔因加熱發生再結晶而增大,因此若較350℃低溫之200℃之加工硬化指數為0.3以上,則於350℃亦可獲得0.3以上之加工硬化指數。又,為於上述退火中充分地獲得再結晶組織,銅箔之半軟化溫度較佳為150℃以下。Further, the work hardening index after annealing at 200 ° C for 0.5 hour is also preferably 0.3 or more and 0.45 or less. This is because the lamination temperature at the time of producing a three-layer CCL in which a film is used as a resin layer and a film and a copper foil are laminated via an adhesive layer is about 200 ° C. Since the work hardening index increases due to recrystallization by heating, the work hardening index of 0.3 or more can be obtained at 350 ° C if the work hardening index at 200 ° C lower than 350 ° C is 0.3 or more. Further, in order to sufficiently obtain the recrystallized structure in the above annealing, the semi-softening temperature of the copper foil is preferably 150 ° C or lower.

作為將以350℃進行0.5小時退火後之銅箔之加工硬化指數控制在0.3以上之方法,可舉出將最後冷壓延時之總加工度設為85%以上。又,因必須獲得再結晶組織,故較佳為將銅箔之半軟化溫度控制在150℃以下。通常再結晶溫度係依銅箔之組成及加工度決定,然而為使加工硬化指數為0.3以上,可採用任一種方法。The method of controlling the work hardening index of the copper foil after annealing at 350 ° C for 0.5 hours is 0.3 or more, and the total workability of the final cold press delay is 85% or more. Further, since it is necessary to obtain a recrystallized structure, it is preferred to control the half softening temperature of the copper foil to 150 ° C or lower. The recrystallization temperature is usually determined by the composition and processing degree of the copper foil. However, in order to make the work hardening index 0.3 or more, either method may be employed.

若最後冷壓延時之總加工度未滿85%,則加工度會降低且銅箔之軟化溫度會升高,故存在製造CCL時之加熱所引起的銅之再結晶變得不充分,殘留有加工應變且彎曲性會降低之傾向。If the total processing degree of the final cold pressing delay is less than 85%, the degree of processing will decrease and the softening temperature of the copper foil will increase, so that the recrystallization of copper caused by the heating during the production of CCL becomes insufficient, and remains. The tendency to process strain and bendability is reduced.

為提高將銅箔用於覆銅積層板時之彎曲性,除上述加工硬化指數之外,還必須考慮表面粗糙度之影響。此處,針對加工硬化指數之大小,重要之要素為「材料最終可加工硬化至何種程度」。因此,為使加工硬化指數為較大值,初期階段中材料必須為未加工硬化之狀態、即已除去加工應變之狀態。對於CCL用銅箔而言,必須係藉由CCL製造步驟中之熱處理而使銅箔再結晶。In order to improve the flexibility when the copper foil is used for a copper clad laminate, in addition to the work hardening index described above, the influence of the surface roughness must also be considered. Here, the important factor for the size of the work hardening index is "to what extent the material can be hardened by machining." Therefore, in order to make the work hardening index a large value, the material in the initial stage must be in a state of being unprocessed and hardened, that is, a state in which the strain is removed. For the copper foil for CCL, the copper foil must be recrystallized by heat treatment in the CCL manufacturing step.

並且,CCL製造步驟中之熱處理條件係取決於樹脂之性質,故銅箔之再結晶溫度必須符合熱處理條件。銅箔之再結晶溫度受組成及加工度影響,對於大量包含添加元素之組成而言軟化溫度變得過高。又,即便銅箔之組成適當,若加工度過高則會導致常溫軟化,若加工度過低則軟化溫度變得過高。Moreover, the heat treatment conditions in the CCL manufacturing step depend on the nature of the resin, so the recrystallization temperature of the copper foil must conform to the heat treatment conditions. The recrystallization temperature of the copper foil is affected by the composition and the degree of workability, and the softening temperature becomes too high for a large amount of the composition containing the added element. Further, even if the composition of the copper foil is appropriate, if the degree of processing is too high, softening at room temperature occurs, and if the degree of processing is too low, the softening temperature becomes too high.

除此種因素外,表面粗糙度係因與加工硬化指數不同之原因而影響彎曲性。若表面粗糙度較大,且於銅箔之材料表面存在缺口狀之凹凸,則進行彎曲時應力集中於缺口前端,成為斷裂之原因。In addition to such factors, the surface roughness is affected by the difference in work hardening index. When the surface roughness is large and there is a notch-like unevenness on the surface of the material of the copper foil, the stress concentrates on the tip end of the notch when bending, and causes cracking.

根據此種事由,本發明之實施形態之銅箔的壓延平行方向之表面粗糙度Ra為0.1 μm以下。其理由在於,若表面粗糙度Ra超過0.1 μm,則於彎曲銅箔時,容易以表面之凹凸為起點產生破裂(斷裂)。由壓延而形成於銅箔表面之被稱作油坑之凹陷係於壓延直角方向上形成伸長之槽狀,故表面粗糙度係於壓延平行方向上進行測定。Ra係依照JIS(Japanese Industrial Standards,日本工業標準)-B0601而經測定之算術平均粗糙度。In this case, the surface roughness Ra of the copper foil of the embodiment of the present invention in the parallel direction of rolling is 0.1 μm or less. The reason for this is that when the surface roughness Ra exceeds 0.1 μm, when the copper foil is bent, cracking (fracture) is likely to occur from the unevenness of the surface. The depression called the oil pit formed on the surface of the copper foil by rolling is formed into an elongated groove shape in the direction perpendicular to the rolling direction, so that the surface roughness is measured in the parallel direction of the rolling. Ra is an arithmetic mean roughness measured in accordance with JIS (Japanese Industrial Standards) - B0601.

作為將銅箔之壓延平行方向之表面粗糙度Ra調整至0.1 μm以下之方法,可舉出對最後冷壓延之最後3道次中之油膜當量進行調整者。具體而言,將最後冷壓延之最後道次之前2道次之油膜當量設為25000以下,將最後道次之前1道次之油膜當量設為30000以下,將最後道次之油膜當量設為35000以下。As a method of adjusting the surface roughness Ra of the rolling direction of the copper foil in the parallel direction to 0.1 μm or less, the oil film equivalent in the last three passes of the final cold rolling may be adjusted. Specifically, the oil film equivalent of two passes before the last pass of the final cold rolling is set to 25,000 or less, the oil film equivalent of one pass before the last pass is set to 30,000 or less, and the oil film equivalent of the last pass is set to 35000. the following.

再者,若材料厚度變薄則油膜當量有增大之傾向,故最後3道次之油膜當量之值逐漸增大。因此,針對各個厚度不同之最後3道次,必須設定適當之油膜當量。Further, if the thickness of the material is thinned, the oil film equivalent tends to increase, so that the value of the oil film equivalent of the last three passes gradually increases. Therefore, for the last 3 passes of different thicknesses, an appropriate oil film equivalent must be set.

於最後冷壓延中,若使壓延油黏度及材料降伏應力於所有道次中為相等,則油膜當量係與(壓延速度)/(咬入角)成比例。若材料厚度變薄則咬入角變小,故存在越接近最後道次則油膜當量越增大之傾向。又,為確保生產性,越接近材料長度較長之最後道次越有必要提高壓延速度,由此亦存在越接近最後道次則油膜當量越增大之傾向。In the final cold rolling, if the rolling oil viscosity and the material lodging stress are equal in all passes, the oil film equivalent is proportional to (calendering speed) / (biting angle). When the thickness of the material is thinned, the bite angle becomes small, so that the oil film equivalent tends to increase as it approaches the last pass. Further, in order to ensure productivity, it is more necessary to increase the rolling speed as the final pass of the material length is longer, and thus the oil film equivalent tends to increase as it approaches the last pass.

並且,若於最後冷壓延之中間道次中之材料表面粗糙度較高,則即便於最後道次中將油膜當量抑制至較低亦無法使材料表面充分地平滑。根據此種事由,而對最後冷壓延之最後3道次中之油膜當量進行管理。Further, if the surface roughness of the material in the middle pass of the final cold rolling is high, the surface of the material cannot be sufficiently smoothed even if the oil film equivalent is suppressed to a low level in the last pass. Based on this, the oil film equivalent of the last three passes of the final cold rolling is managed.

另一方面,於最後冷壓延中之最後3道次中,若未全部滿足最後道次之前2道次之油膜當量為25000以下、最後道次之前1道次之油膜當量為30000以下、最後道次之油膜當量為35000以下(若於最後3道次之任一道次中油膜當量超過上述值),則銅箔之表面變粗糙且壓延平行方向之表面粗糙度Ra超過0.1 μm,會產生以下之不良狀況。On the other hand, in the last three passes of the final cold rolling, if not all of the oil film equivalents of 2 passes before the last pass are 25000 or less, and the oil film equivalent of 1 pass before the last pass is 30,000 or less, the last pass The oil film equivalent is 35,000 or less (if the oil film equivalent exceeds the above value in any of the last 3 passes), the surface of the copper foil becomes rough and the surface roughness Ra in the parallel direction of rolling exceeds 0.1 μm, resulting in the following Bad condition.

為降低油膜當量,使最後道次之壓延加工度為25%以 上即可。In order to reduce the oil film equivalent, the final pass rolling degree is 25%. Just go up.

再者,上述油膜當量以下式表示。Further, the above oil film equivalent is represented by the following formula.

(油膜當量)={(壓延油黏度、40℃之動黏度;cSt)×(壓延速度;m/分)}/{(材料之降伏應力=kg/mm2 )×(輥咬入角;rad)}(oil film equivalent) = {(calendering oil viscosity, dynamic viscosity at 40 ° C; cSt) × (calendering speed; m / min)} / {(material lodging stress = kg / mm 2 ) × (roll bite angle; rad )}

可設壓延油黏度為4.0~8.0 cSt左右,壓延速度為200~600 m/分,輥之咬入角較佳為0.001~0.04 rad。The rolling oil viscosity can be set to about 4.0 to 8.0 cSt, the rolling speed is 200 to 600 m/min, and the bite angle of the roller is preferably 0.001 to 0.04 rad.

本發明之實施形態之銅箔中,將銅箔以350℃×0.5小時進行大氣退火後,進行壓延面之X射線繞射時,各個(220)面及(200)面之強度的積分值(I)之比I(220)/I(200)較佳為0.11以下。該情形時,銅箔中之(220)面之比例增多,且350℃×0.5小時之退火時銅箔之再結晶會進行,加工應變會減少而彎曲性提高。In the copper foil according to the embodiment of the present invention, when the copper foil is subjected to atmospheric annealing at 350 ° C for 0.5 hours, and the X-ray diffraction of the rolled surface is performed, the integral values of the respective (220) planes and (200) planes are integrated ( The ratio I(220) / I(200) of I) is preferably 0.11 or less. In this case, the ratio of the (220) surface in the copper foil is increased, and recrystallization of the copper foil is performed at 350 ° C × 0.5 hour annealing, and the processing strain is reduced to improve the flexibility.

進而,使用於本發明之實施形態之銅箔之單面積層樹脂層,合計厚度為50 μm以下,且寬度為3 mm以上5 mm以下之試料,並以銅箔之露出面為外側進行180度密合彎曲時,至銅箔斷裂為止之彎曲次數較佳為4次以上。Furthermore, the single-layer resin layer of the copper foil of the embodiment of the present invention has a total thickness of 50 μm or less and a width of 3 mm or more and 5 mm or less, and the exposed surface of the copper foil is 180 degrees outside. In the case of tight bending, the number of times of bending until the copper foil is broken is preferably 4 or more.

於銅箔之單面積層樹脂層,合計厚度為50 μm以下之試料係模擬覆銅積層板者,且其180度密合彎曲之彎曲次數用於對覆銅積層板之彎曲性進行評估。In the single-layer resin layer of the copper foil, the sample having a total thickness of 50 μm or less is a simulated copper-clad laminate, and the degree of bending of the 180-degree close bending is used to evaluate the bendability of the copper-clad laminate.

樹脂層可使用聚醯亞胺;聚對苯二甲酸乙二酯(polyethylene terephthalate,PET);環氧樹脂、酚醛樹脂等熱固性樹脂;及飽和聚酯樹脂等之熱塑性樹脂,但並不限定於該等。又,亦可將溶劑中溶解有該等樹脂層成分而成之清漆(例如聚醯亞胺之前驅物即聚醯胺酸溶液)塗佈於銅箔之單面並加熱,藉此除去溶劑而使得反應(例如醯亞胺化反應)進行而使其硬化。The resin layer may be a thermoplastic resin such as a polyimide, a polyethylene terephthalate (PET), a thermosetting resin such as an epoxy resin or a phenol resin, or a saturated polyester resin, but is not limited thereto. Wait. Further, a varnish obtained by dissolving the resin layer components in a solvent (for example, a polyamidamine solution which is a polyimide precursor) may be applied to one surface of the copper foil and heated to remove the solvent. The reaction (for example, hydrazine imidization reaction) is allowed to proceed to harden it.

180度密合彎曲係以折痕平行於自身之寬度方向之方式折回試料,且以手壓機反覆壓扁而進行。並且,以光學顯微鏡觀察彎曲部之剖面之銅箔部分有無斷裂。若無斷裂,則打開密合彎曲後之試料,且使用手壓機使其伸展為平坦之後,於同一部位再次折回並以手壓機壓扁。如此,求出直至銅箔斷裂為止之彎曲次數。The 180 degree close bending system folds back the sample in such a manner that the crease is parallel to the width direction of the crease, and is repeatedly pressed and flattened by a hand press. Further, the copper foil portion of the cross section of the curved portion was observed by an optical microscope for the presence or absence of breakage. If there is no break, the sample after the close bending is opened, and after being stretched flat by using a hand press, it is folded back again at the same portion and flattened by a hand press. Thus, the number of times of bending until the copper foil was broken was obtained.

本發明之實施形態之銅箔之組成較佳為由無氧銅或精銅(均由JIS-H3100規定)構成。又,亦可於上述無氧銅或精銅中含有合計500質量ppm以下之由Ag及Sn組成之群中之1種以上。於本發明之實施形態之銅箔中,若添加Ag及Sn組成之群之1種以上超過合計500質量ppm,則存在再結晶溫度過度升高,且CCL製造步驟之熱處理中再結晶變得不充分之情形。The composition of the copper foil according to the embodiment of the present invention is preferably composed of oxygen-free copper or refined copper (all defined by JIS-H3100). In addition, one or more of a group consisting of Ag and Sn in total of 500 ppm by mass or less may be contained in the oxygen-free copper or the refined copper. In the copper foil of the embodiment of the present invention, when one or more of the group of Ag and Sn are added in an amount exceeding 500 ppm by mass in total, the recrystallization temperature is excessively increased, and recrystallization does not occur in the heat treatment in the CCL production step. Sufficient situation.

本發明之覆銅積層板係將上述之銅箔積層於上述樹脂層之至少單面而成。本發明之實施形態之銅箔之彎曲性優異,故採用其之覆銅積層板之彎曲性亦優異。例如,本發明之覆銅積層板可適宜地使用於以半徑5 mm以下彎折90~180度之用途。In the copper clad laminate of the present invention, the copper foil is laminated on at least one side of the resin layer. Since the copper foil of the embodiment of the present invention is excellent in flexibility, the copper clad laminate using the same is also excellent in flexibility. For example, the copper clad laminate of the present invention can be suitably used for a purpose of bending 90 to 180 degrees with a radius of 5 mm or less.

實施例Example

熔解無氧銅或精銅(JIS H3100),且視需要以表1中所示之量添加Ag、Sn而進行鑄造,從而製作鑄錠。對鑄錠進行熱壓延後,適當地重複冷壓延及退火而製作銅箔。為調整軟化溫度,使最後冷壓延時之總加工度為85%以上,且為降低表面粗糙度,使用表面平滑(輥軸方向上Ra≦0.1 μm)之輥進行最後冷壓延,而製造銅箔。於壓延油黏度為4.0~8.0 cSt左右、壓延速度200~600 m/分、輥之咬入角0.003~0.03 rad之範圍內進行調整,使最後冷壓延之最後3道次中之油膜當量之任一者均為35000以下。Oxygen-free copper or refined copper (JIS H3100) was melted, and if necessary, Ag and Sn were added in an amount shown in Table 1 to carry out casting, thereby producing an ingot. After the ingot is subjected to hot rolling, cold rolling and annealing are appropriately repeated to prepare a copper foil. In order to adjust the softening temperature, the total working degree of the final cold pressing delay is 85% or more, and in order to reduce the surface roughness, the final cold rolling is performed using a roll having a smooth surface (Ra ≦ 0.1 μm in the roll direction) to produce a copper foil. . Adjusting the viscosity of the oil in the range of 4.0 to 8.0 cSt, the rolling speed of 200 to 600 m/min, and the bite angle of the roller from 0.003 to 0.03 rad, so that the oil film equivalent of the last 3 passes of the final cold rolling is One is less than 35,000.

<加工硬化指數><Process Hardening Index>

將所獲得之銅箔分別以200℃×0.5小時及350℃×0.5小時進行大氣退火後,進行拉伸試驗(依照JIS-Z2241),求出加工硬化指數。再者,必須使用材料經降伏後之均勻伸長及應力來求出加工硬化指數,故使用自伸長2%至最大應力點為止之值。而且,以最小平方法使根據所測定之伸長及應力求出之真應變與真應力的雙對數曲線近似,根據曲線之斜率而求出加工硬化指數。真應變與真應力係藉由以下之式而求出。The copper foil obtained was subjected to atmospheric annealing at 200 ° C for 0.5 hours and 350 ° C for 0.5 hours, and then subjected to a tensile test (in accordance with JIS-Z2241) to obtain a work hardening index. Furthermore, it is necessary to use a uniform elongation and stress after the material has been lowered to determine the work hardening index, so the value from the elongation of 2% to the maximum stress point is used. Further, the true logarithm of the true strain and the true stress obtained from the measured elongation and stress are approximated by a least square method, and the work hardening index is obtained from the slope of the curve. The true strain and the true stress are obtained by the following equation.

[真應變]=ln(1+[應變])[true strain]=ln(1+[strain])

[真應力]=(1+[真應變])×[應力][True stress]=(1+[true strain])×[stress]

<半軟化溫度><Semi-softening temperature>

將所獲得之銅箔分別以100~400℃×0.5小時進行大氣退火後進行拉伸試驗,求出對應於熱處理條件之強度(拉伸強度)。將退火後之強度TSh為壓延完成時(退火前)之強度TSasroll與已完全軟化之狀態之強度TSanneal之平均值的退火溫度設為半軟化溫度。The copper foil obtained was subjected to atmospheric annealing at 100 to 400 ° C for 0.5 hours, and then subjected to a tensile test to determine the strength (tensile strength) corresponding to the heat treatment conditions. The annealing temperature after the annealing TSH is the average of the strength TSasroll at the completion of calendering (before annealing) and the strength of the fully softened state TSanneal is set to a semi-softening temperature.

<覆銅積層板之彎折次數><Number of bends of copper clad laminates>

其次,於所獲得之銅箔之單面,以鑄膜法將厚度約20 μm之聚醯亞胺層製膜,而製作單面CCL。具體而言,對所獲得之銅箔之單面進行化學處理(電鍍),且於該面以厚度成為20 μm之方式塗佈聚醯亞胺樹脂之前驅物清漆(宇部興產製U-清漆A)。其後,於設定為130℃之熱風循環式高溫槽中乾燥30分鐘,且經2000秒時間逐漸升溫至350℃為止使其硬化(醯亞胺化)而形成樹脂層(聚醯亞胺層),從而製作單面CCL。Next, on one side of the obtained copper foil, a polyimine layer having a thickness of about 20 μm was formed by a cast film method to produce a single-sided CCL. Specifically, the single side of the obtained copper foil was subjected to chemical treatment (electroplating), and the surface of the copper foil was coated with a polyimide varnish (U-varnished by Ube Industries) in a thickness of 20 μm. A). Thereafter, it was dried in a hot air circulating high temperature bath set at 130 ° C for 30 minutes, and gradually heated to 350 ° C for 2,000 seconds to be hardened (yttrium imidized) to form a resin layer (polyimine layer). To make a single-sided CCL.

180度密合彎曲係按照以下順序進行。首先,將該單面CCL以寬度3.2 mm,長度30 mm且使試驗片之長度方向與壓延方向平行之方式切出而作為試驗片,以樹脂層面為內側並使其呈環狀,且以手壓機壓扁後進行180度密合彎曲。然後,藉由光學顯微鏡觀察彎曲部之剖面之銅箔部分有無斷裂。若無斷裂,則打開密合彎曲後之試料,使用手壓機使其伸展為平坦之後,於同一部位再次折回並以手壓機壓扁。如此,求出至銅箔斷裂為止之彎曲次數。The 180 degree close bending system was carried out in the following order. First, the one-side CCL was cut out as a test piece with a width of 3.2 mm and a length of 30 mm and the longitudinal direction of the test piece was parallel to the rolling direction, and the resin layer was inside and made into a ring shape, and the hand was The press is flattened and then bent at 180 degrees. Then, the copper foil portion of the cross section of the bent portion was observed by an optical microscope for the presence or absence of breakage. If there is no break, the sample after the close bending is opened, and after being stretched flat by using a hand press, it is folded back again at the same portion and flattened by a hand press. Thus, the number of times of bending until the copper foil was broken was obtained.

<銅箔之滑動彎曲次數><The number of sliding bends of copper foil>

其次,將所獲得之銅箔以寬度12.7 mm、長度200 mm且使試驗片之長度方向與壓延方向平行之方式切出而作為試驗片,且以200℃進行30分鐘加熱而使其再結晶。藉由圖1所示之IPC(美國印刷電路工業協會,The Institute of Printed Circuits)滑動彎曲裝置對其進行IPC滑動彎曲次數之測定。該裝置係將振動傳遞構件3結合於振盪驅動體4之構造,且試驗片1係於箭頭所示之螺釘2之部分與3之前端部之共計4點處固定於裝置。若振動部3上下驅動,則試驗片1之中間部以預定之曲率半徑r彎曲為髮夾狀。本試驗中,求出按照以下條件重複彎曲時之直至斷裂為止之次數。Next, the obtained copper foil was cut out to have a width of 12.7 mm and a length of 200 mm, and the longitudinal direction of the test piece was parallel to the rolling direction, and was used as a test piece, and heated at 200 ° C for 30 minutes to be recrystallized. The number of IPC sliding bends was measured by the IPC (The Institute of Printed Circuits) sliding bending device shown in FIG. This apparatus is a structure in which the vibration transmitting member 3 is coupled to the oscillation driving body 4, and the test piece 1 is fixed to the apparatus at a total of four points of the portion of the screw 2 indicated by the arrow and the front end portion of the third portion. When the vibrating portion 3 is driven up and down, the intermediate portion of the test piece 1 is bent into a hairpin shape with a predetermined radius of curvature r. In this test, the number of times until the fracture was repeated under the following conditions was determined.

於曲率半徑r:2.5 mm、振動行程:25 mm、振動速度:1500次/分之條件下進行試驗。The test was carried out under the conditions of a radius of curvature r: 2.5 mm, a vibration stroke: 25 mm, and a vibration speed: 1500 beats/min.

<I(220)/I(200)><I(220)/I(200)>

將所獲得之銅箔以350℃×0.5小時進行大氣退火後,進行壓延面之X射線繞射,分別求出(220)面及(200)面之繞射峰值強度之積分值(I)。After the obtained copper foil was subjected to atmospheric annealing at 350 ° C for 0.5 hours, X-ray diffraction of the rolled surface was performed, and integral values (I) of the diffraction peak intensities of the (220) plane and the (200) plane were obtained.

表1表示所獲得之結果。再者,於表1之組成中,OFC及TPC分別表示無氧銅及精銅(JIS H3100),Ag100ppmTPC係表示於精銅中添加100質量ppm之Ag者。Table 1 shows the results obtained. Further, in the composition of Table 1, OFC and TPC respectively represent oxygen-free copper and refined copper (JIS H3100), and Ag100 ppm TPC means that 100 mass ppm of Ag is added to the refined copper.

根據表1可明確,於半軟化溫度為150℃以下,壓延平行方向之表面粗糙度Ra≦0.1 μm,且以350℃進行0.5小時退火後之加工硬化指數為0.3以上之實施例1~8之情形時,進行180度密合彎曲時之彎曲次數為4次以上,彎曲性優異。According to Table 1, it is clear that the semi-softening temperature is 150 ° C or less, and the surface roughness Ra ≦ 0.1 μm in the parallel direction is rolled, and the work hardening index after annealing at 350 ° C for 0.5 hour is 0.3 or more. In the case of the case, the number of times of bending when the 180-degree adhesion is performed is four or more times, and the bending property is excellent.

另一方面,最後冷壓延時之總加工度未滿85%之比較例3、6、7、8之情形時,以350℃進行0.5小時退火後之加工硬化指數未滿0.3,進行180度密合彎曲時之彎曲次數未滿4次,彎曲性劣化。再者,於比較例1之情形時,因銅箔中Sn之添加量超過500質量ppm,故半軟化溫度超過150℃,且加工硬化指數未滿0.3。On the other hand, in the case of Comparative Examples 3, 6, 7, and 8 in which the total processing degree of the final cold pressing delay is less than 85%, the work hardening index after annealing at 350 ° C for 0.5 hours is less than 0.3, and 180 degree dense is performed. When the bending is performed, the number of bending is less than four times, and the bending property is deteriorated. Further, in the case of Comparative Example 1, since the addition amount of Sn in the copper foil exceeded 500 ppm by mass, the semi-softening temperature exceeded 150 ° C, and the work hardening index was less than 0.3.

又,於半軟化溫度超過150℃之比較例1、7、8之情形時,以350℃進行0.5小時退火後之加工硬化指數未滿0.3,進行180度密合彎曲時之彎曲次數未滿4次,彎曲性劣化。Further, in the case of Comparative Examples 1, 7, and 8 in which the semi-softening temperature exceeds 150 ° C, the work hardening index after annealing at 350 ° C for 0.5 hours is less than 0.3, and the number of bends at 180 degree close bending is less than 4 The bending property is deteriorated.

於作為最後冷壓延之最後3道次中之油膜當量,最後道次之前2道次之油膜當量超過25000,最後道次之前1道次之油膜當量超過30000,且最後道次之油膜當量超過35000之比較例2之情形時,壓延平行方向之表面粗糙度Ra超過0.1 μm,進行180度密合彎曲時之彎曲次數未滿4次,彎曲性劣化。As the oil film equivalent of the last 3 passes of the final cold rolling, the oil film equivalent of 2 passes before the last pass exceeds 25000, the oil film equivalent of 1 pass before the last pass exceeds 30,000, and the last pass of the oil film equivalent exceeds 35000. In the case of Comparative Example 2, the surface roughness Ra in the rolling parallel direction exceeded 0.1 μm, and the number of bendings when the 180-degree adhesion was performed was less than four times, and the bendability was deteriorated.

於最後冷壓延之最後3道次中之油膜當量之中,最後道次之前1道次之油膜當量超過30000之比較例4之情形時,壓延平行方向之表面粗糙度Ra超過0.1 μm,進行180度密合彎曲時之彎曲次數未滿4次,彎曲性劣化。In the case of the oil film equivalent of the last three passes of the final cold rolling, in the case of Comparative Example 4 in which the oil film equivalent of one pass before the last pass exceeds 30,000, the surface roughness Ra of the rolling parallel direction exceeds 0.1 μm, and 180 is performed. When the degree of tightness is bent, the number of bending is less than four times, and the bendability is deteriorated.

於最後冷壓延之最後3道次中之油膜當量之中,最後道次之前2道次之油膜當量超過25000之比較例5之情形時,亦為壓延平行方向之表面粗糙度Ra超過0.1 μm,進行180度密合彎曲時之彎曲次數未滿4次,彎曲性劣化。In the case of the oil film equivalent of the last three passes of the final cold rolling, in the case of Comparative Example 5 in which the oil film equivalent of 2 passes before the last pass exceeds 25,000, the surface roughness Ra of the rolling parallel direction is more than 0.1 μm. When the 180 degree close bending is performed, the number of bending is less than four times, and the bendability is deteriorated.

再者,可知於比較例1~8之情形時,先前之彎曲性之評估即IPC滑動彎曲次數亦與各實施例相同,於滑動彎曲試驗中無法評估覆銅積層板之彎曲性。Further, it can be seen that in the case of Comparative Examples 1 to 8, the evaluation of the previous bending property, that is, the number of IPC sliding bending was also the same as in the respective examples, and the bendability of the copper clad laminate could not be evaluated in the sliding bending test.

1...試驗片1. . . Test piece

2...螺釘2. . . Screw

3...振動傳遞構件3. . . Vibration transmitting member

4...振盪驅動體4. . . Oscillating drive

r...曲率半徑r. . . Radius of curvature

圖1係表示採用IPC滑動彎曲裝置之滑動彎曲方法之圖。Fig. 1 is a view showing a sliding bending method using an IPC sliding bending device.

1...試驗片1. . . Test piece

2...螺釘2. . . Screw

3...振動傳遞構件3. . . Vibration transmitting member

4...振盪驅動體4. . . Oscillating drive

r...曲率半徑r. . . Radius of curvature

Claims (8)

一種銅箔,其厚度為5~30 μm,壓延平行方向之表面粗糙度Ra≦0.1 μm,且以350℃進行0.5小時退火後之加工硬化指數為0.3以上0.45以下。A copper foil having a thickness of 5 to 30 μm, a surface roughness Ra ≦ 0.1 μm in a rolling parallel direction, and a work hardening index after annealing at 350 ° C for 0.5 hours is 0.3 or more and 0.45 or less. 如申請專利範圍第1項之銅箔,其半軟化溫度為150℃以下。The copper foil of the first aspect of the patent application has a semi-softening temperature of 150 ° C or less. 如申請專利範圍第1項之銅箔,其係由無氧銅或精銅構成,或者於無氧銅或精銅中含有合計為500質量ppm以下之由Ag及Sn組成之群中之1種以上。The copper foil of the first aspect of the patent application, which is composed of oxygen-free copper or refined copper, or one of a group consisting of Ag and Sn in total of 500 ppm by mass or less in oxygen-free copper or refined copper. the above. 如申請專利範圍第2項之銅箔,其係由無氧銅或精銅構成,或者於無氧銅或精銅中含有合計為500質量ppm以下之由Ag及Sn組成之群中之1種以上。The copper foil of claim 2, which is composed of oxygen-free copper or refined copper, or one of a group consisting of Ag and Sn in total of 500 ppm by mass or less in oxygen-free copper or refined copper. the above. 如申請專利範圍第1至4項中任一項之銅箔,其中,於使用在該銅箔之單面積層樹脂層且合計厚度為50 μm以下、寬度為3 mm以上5 mm以下之試料,以該銅箔之露出面為外側進行180度密合彎曲時,至該銅箔斷裂為止之彎曲次數為4次以上。The copper foil according to any one of claims 1 to 4, wherein a sample having a single-layer resin layer of the copper foil and having a total thickness of 50 μm or less and a width of 3 mm or more and 5 mm or less is used. When the exposed surface of the copper foil is bent outward at 180 degrees, the number of times of bending until the copper foil is broken is four or more. 如申請專利範圍第1至4項中任一項之銅箔,其係最後冷壓延時之總加工度為85%以上,且將該最後冷壓延之最後3道次中之油膜當量設為以下條件進行壓延而成;其中,最後道次之前2道次之油膜當量為25000以下;最後道次之前1道次之油膜當量為30000以下;最後道次之油膜當量為35000以下。The copper foil according to any one of claims 1 to 4, wherein the total cold working delay is 85% or more, and the oil film equivalent of the last 3 passes of the final cold rolling is set to the following. The condition is calendered; wherein the oil film equivalent of 2 passes before the last pass is 25000 or less; the oil film equivalent of 1 pass before the last pass is 30,000 or less; the last pass oil film equivalent is 35000 or less. 如申請專利範圍第5項之銅箔,其係最後冷壓延時之總加工度為85%以上,且將該最後冷壓延之最後3道次中之油膜當量設為以下條件進行壓延而成;其中,最後道次之前2道次之油膜當量為25000以下;最後道次之前1道次之油膜當量為30000以下;最後道次之油膜當量為35000以下。For example, the copper foil of the fifth aspect of the patent application has a total working degree of the final cold pressing delay of 85% or more, and the oil film equivalent of the last three passes of the final cold rolling is subjected to the following conditions for calendering; Among them, the oil film equivalent of 2 passes before the last pass is 25000 or less; the oil film equivalent of 1 pass before the last pass is 30,000 or less; the oil film equivalent of the last pass is 35000 or less. 一種覆銅積層板,其係將申請專利範圍第1至7項中任一項之銅箔積層於樹脂層之至少單面而成。A copper-clad laminate in which a copper foil according to any one of claims 1 to 7 is laminated on at least one side of a resin layer.
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