TWI400275B - Printed wiring board and manufacturing method thereof - Google Patents

Printed wiring board and manufacturing method thereof Download PDF

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TWI400275B
TWI400275B TW98129215A TW98129215A TWI400275B TW I400275 B TWI400275 B TW I400275B TW 98129215 A TW98129215 A TW 98129215A TW 98129215 A TW98129215 A TW 98129215A TW I400275 B TWI400275 B TW I400275B
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resin
wiring board
printed wiring
mass
diamine
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TW98129215A
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TW201012851A (en
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Tomoyasu Sunaga
Hiroki Kanaya
Mamiko Nomura
Junichi Ishii
Yoshio Omori
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Dexerials Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/10Block- or graft-copolymers containing polysiloxane sequences
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/42Block-or graft-polymers containing polysiloxane sequences
    • C08G77/452Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences
    • C08G77/455Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences containing polyamide, polyesteramide or polyimide sequences
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0162Silicon containing polymer, e.g. silicone
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

印刷配線板及其製造方法Printed wiring board and method of manufacturing same

本發明係關於一種印刷配線板及其製造方法,該印刷配線板具備由感光性矽氧烷聚醯亞胺樹脂組成物所形成之保護層。The present invention relates to a printed wiring board comprising a protective layer formed of a photosensitive oxyalkylene polyimine resin composition.

由芳香族四羧酸與芳香族二胺進行醯亞胺化而成之芳香族系聚醯亞胺樹脂,因其優異之耐熱性及絕緣性而廣泛用作電子零件之層間絕緣膜及覆蓋層之材料,但對於此類芳香族系聚醯亞胺樹脂,要求具有優異之可撓性與接著性。因此,將芳香族二胺之一部分替換為矽氧烷二胺,於聚醯亞胺骨架中導入聚矽氧烷骨架而成之矽氧烷聚醯亞胺樹脂之使用正在擴大。An aromatic polyimine resin obtained by ruthenium imidation of an aromatic tetracarboxylic acid and an aromatic diamine is widely used as an interlayer insulating film and a coating layer for electronic parts because of its excellent heat resistance and insulation properties. The material, but for such an aromatic polyimide resin, it is required to have excellent flexibility and adhesion. Therefore, the use of a nonoxyalkylene polyimine resin in which a part of an aromatic diamine is replaced with a nonoxyl diamine and a polyoxyalkylene skeleton is introduced into a polyamidene skeleton is expanding.

然而,於矽氧烷聚醯亞胺樹脂之原料即矽氧烷二胺中,含有作為雜質之不具有胺基之環狀二甲基矽氧烷寡聚物,故將所製造之矽氧烷聚醯亞胺樹脂製成層間絕緣膜或覆蓋層等而應用於電子零件之情形時,若將電子零件投入回焊步驟等之熱處理步驟,則存在如下問題,即,於層間-線間絕緣膜或覆蓋層之表面會再次附著或滲出作為逸氣而產生之環狀二甲基矽氧烷寡聚物,從而產生電子零件中之接點故障或導電性降低,接著強度降低等。此外,本說明書中所謂「滲出」,係指膜等之固層中所含之物質移動至固層表面,並於此液化或固化,或於此揮發並擴散的現象。However, the rhodium oxane diamine which is a raw material of the decyl alkoxyimine resin contains a cyclic dimethyl methoxy olefin oligomer which does not have an amine group as an impurity, and thus the produced oxirane When the polyimine resin is used as an interlayer insulating film or a cover layer and applied to an electronic component, if the electronic component is put into a heat treatment step such as a reflow step, there is a problem that the interlayer-to-line insulating film is interposed. Or the surface of the cover layer may again adhere or ooze the cyclic dimethyl methoxy olefin oligomer generated as a gas, thereby causing contact failure or decrease in conductivity in the electronic component, followed by decrease in strength and the like. In addition, the term "bleed out" in the present specification means a phenomenon in which a substance contained in a solid layer such as a film moves to a surface of a solid layer, liquefies or solidifies thereon, or volatilizes and diffuses.

為了解決該問題已提出以下方法,即,使至少含有二腔基聚矽氧烷作為二胺成分之二胺化合物與四羧酸二酐於甲苯或醚系溶劑中進行醯亞胺化反應時,例如,分為數次將所揮發之溶劑排出至系統外,同時補充溶劑(專利文獻1)。根據該方法,環狀二甲基矽氧烷寡聚物相較於溶劑有較低之沸點,因此與所揮發之溶劑一起排出至系統外,而可獲得環狀二甲基矽氧烷寡聚物的濃度減少之矽氧烷聚醯胺清漆。In order to solve the problem, a method has been proposed in which a diamine compound containing at least a di-cavity polyoxyalkylene as a diamine component and a tetracarboxylic dianhydride are subjected to a ruthenium imidization reaction in a toluene or an ether solvent. For example, the solvent which is volatilized is discharged to the outside of the system several times, and the solvent is replenished (Patent Document 1). According to this method, the cyclic dimethyl methoxy olefin oligomer has a lower boiling point than the solvent, and thus is discharged to the outside of the system together with the solvent to be volatilized, thereby obtaining a cyclic dimethyl siloxane oligo. The concentration of the substance is reduced by the oxirane polyamine varnish.

專利文獻Patent literature

專利文獻1:日本專利特開2004-263058公報Patent Document 1: Japanese Patent Laid-Open Publication No. 2004-263058

然而,專利文獻1之方法因是在常壓下將揮發之溶劑排出至系統外,故可相當程度地將到六聚物為止之二甲基矽氧烷寡聚物除去,但其問題在於無法充分地除去七聚物以上之二甲基矽氧烷寡聚物。因此,其問題在於:當於專利文獻1之方法所得之矽氧烷聚醯亞胺清漆混合感光劑以賦予感光性的同時,配合有廣泛用作為聚醯亞胺之交聯劑的矽烷偶合劑、環氧胺、固體環氧樹脂等的時候,仍然難以抑制雜質即環狀二甲基矽氧烷寡聚物從將所得之感光性矽氧烷聚醯亞胺樹脂組成物成膜於印刷配線板上並圖案化再進行硬化所得之薄保護層(鍍敷保護層或焊料保護層)滲出的現象。However, in the method of Patent Document 1, since the volatilized solvent is discharged outside the system under normal pressure, the dimethyl methoxy olefin oligomer to the hexamer can be removed to a considerable extent, but the problem is that The hexamethoxane oligomer above the heptamer is sufficiently removed. Therefore, the problem is that when the oxime phthalimide varnish obtained by the method of Patent Document 1 is mixed with a sensitizer to impart photosensitivity, a decane coupling agent widely used as a crosslinking agent for polyimine is blended. In the case of epoxyamine, solid epoxy resin, etc., it is still difficult to suppress the impurity, that is, the cyclic dimethyl methoxy olefin oligomer, from forming the obtained photosensitive oxirane polyimine resin composition into a printed wiring. The thin protective layer (plating protective layer or solder protective layer) which is obtained by hardening and hardening on the board is oozing out.

此外,對於由該感光性矽氧烷聚醯亞胺樹脂組成物所形成之具備保護層之印刷配線板而言,為了於未被保護層被覆之銅或銅合金配線圖案區域(開口區域)成長無電鍍或電鍍層而施以鍍敷處理,但因保護層與銅或銅合金配線圖案之間之密合並不充分,故開口區域週邊部有時會發生變色,因而期盼能夠提升耐鍍敷性。Further, the printed wiring board having the protective layer formed of the photosensitive siloxane oxide polyimide composition is grown in a copper or copper alloy wiring pattern region (opening region) which is not covered by the protective layer. The plating treatment is performed without plating or plating, but the adhesion between the protective layer and the copper or copper alloy wiring pattern is insufficient, so that the peripheral portion of the opening region may be discolored, and thus the plating resistance is expected to be improved. Sex.

本發明之目的係欲解決上述以往技術之問題,其係提供一種具有由感光性矽氧烷聚醯亞胺樹脂組成物所構成之保護層之印刷配線板,其可充分抑制雜質之環狀二甲基矽氧烷寡聚物自保護層滲出,且耐鍍敷性優異。The object of the present invention is to solve the above problems of the prior art, and to provide a printed wiring board having a protective layer composed of a photosensitive oxyalkylene polyimine resin composition, which can sufficiently suppress the ring of impurities The methyl siloxane oligomer oozes out from the protective layer and is excellent in plating resistance.

本發明人等發現藉由使用具有二苯基亞矽基(diphenylsilylene)單位之矽氧烷二胺作為二胺成分來調製矽氧烷聚醯亞胺樹脂,再使用於此配合特定種類與量之交聯劑而成之感光性矽氧烷聚醯亞胺樹脂組成物以形成保護層,而可抑制環狀二甲基矽氧烷寡聚物的滲出,此外,若將配線板之銅或銅合金配線圖案預先進行表面粗化處理,則可提升其上所形成之保護層之耐鍍敷性,而完成本發明。The present inventors have found that a decyloxypolyimide resin is prepared by using a diphenylsilylene unit having a diphenylsilylene unit as a diamine component, and is used in combination with a specific type and amount. A photosensitive oxirane polyimine resin composition formed by a crosslinking agent to form a protective layer, thereby suppressing bleed out of the cyclic dimethyl methoxy olefin oligomer, and further, if copper or copper of the wiring board is to be formed When the alloy wiring pattern is subjected to surface roughening treatment in advance, the plating resistance of the protective layer formed thereon can be improved, and the present invention has been completed.

亦即,本發明係提供一種印刷配線板,係於印刷配線板之銅或銅合金配線圖案之至少一部分之上形成有由感光性矽氧烷聚醯亞胺樹脂組成物之熱硬化物所構成之保護層;該感光性矽氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交聯劑、以及光酸發生劑;該矽氧烷聚醯亞胺樹脂係由四羧酸二酐、具有二苯基亞矽基單位之矽氧烷二胺、與不含矽氧烷之二胺進行醯亞胺化而得者;其特徵在於:作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為1~20質量份之選自液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂(resole)類所構成之群中之至少一種;作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為5~30質量份之光酸發生劑;銅或銅合金配線圖案的表面係經過表面粗化處理。That is, the present invention provides a printed wiring board formed by forming a thermosetting substance composed of a photosensitive decyl oxymethylene iodide resin on at least a part of a copper or copper alloy wiring pattern of a printed wiring board. a protective layer; the photosensitive oxirane polyimine resin composition comprises a decyl alkoxy phthalimide resin, a crosslinking agent, and a photoacid generator; the oxirane polyimine resin is composed of four a carboxylic acid dianhydride, a nonyl fluorenylene unit having a diphenyl fluorenylene unit, and a hydrazine imidized with a non-oxane-containing diamine; wherein the crosslinking agent is used as a crosslinking agent. 100 parts by mass of the oxirane polyimine resin is at least one selected from the group consisting of liquid epoxy resins, benzoxazines, and resole resins; The sensitizer is a photoacid generator which is used in an amount of 5 to 30 parts by mass based on 100 parts by mass of the decyl iodide resin; the surface of the copper or copper alloy wiring pattern is subjected to surface roughening treatment.

此外,本發明亦提供一種用以製造上述之印刷配線板之製造方法,係於印刷配線板之銅或銅合金配線圖案的表面進行表面粗化處理;於經表面粗化處理後之銅或銅合金配線圖案之至少一部分之上形成有由感光性矽氧烷聚醯亞胺樹脂組成物經過成膜、並進行曝光、顯影以圖案化、再藉由後烘而熱硬化成為保護層,進而視需要施行無電鍍或電鍍;該感光性矽氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交聯劑、以及光酸發生劑;該矽氧烷聚醯亞胺樹脂係由四羧酸二酐、具有二苯基亞矽基單位之矽氧烷二胺、不含矽氧烷之二胺進行醯亞胺化而得者;其特徵在於:作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為1~20質量份之選自液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂類所構成之群中之至少一種;作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為5~30質量份之光酸發生劑。In addition, the present invention also provides a method for manufacturing the above-mentioned printed wiring board, which is subjected to surface roughening treatment on the surface of a copper or copper alloy wiring pattern of a printed wiring board; copper or copper after surface roughening treatment At least a part of the alloy wiring pattern is formed by forming a film of a photosensitive decyl oxymethylene imide resin film, exposing it to development, patterning, and then thermally curing to form a protective layer by post-baking. It is required to perform electroless plating or electroplating; the photosensitive oxirane polyimine resin composition contains a decyl alkoxy phthalimide resin, a crosslinking agent, and a photoacid generator; the decyl alkoxy amide resin It is obtained by ruthenium imidization of tetracarboxylic dianhydride, a nonoxyalkylene diamine having a diphenylarylene unit, and a diamine containing no alkoxysilane; and is characterized in that as a crosslinking agent, Using at least one selected from the group consisting of a liquid epoxy resin, a benzoxazine, and a resol resin, in an amount of 1 to 20 parts by mass based on 100 parts by mass of the decyl iodide resin; Relative oxirane 100 parts by mass of the resin is 5 to 30 parts by mass of photoacid generator.

本發明因使用具有二苯基亞矽基單位之矽氧烷二胺作為二胺成分,且進一步於感光性矽氧烷聚醯亞胺樹脂組成物所構成之薄膜等保護層中形成有特定之熱硬化性交聯劑所致之三維構造,故該三維構造中捕捉了作為雜質之環狀二甲基矽氧烷寡聚物,其結果可防止甚至是抑制環狀二甲基矽氧烷寡聚物的滲出,進而藉由熱硬化而獲得良好之耐鍍敷性。此外,因含有特定量之光酸發生劑作為感光劑,故矽氧烷聚醯亞胺樹脂組成物成為正型感光性,並可藉由曝光、鹼顯影來進行圖案化。In the present invention, a non-oxyalkylene diamine having a diphenylarylene unit is used as a diamine component, and further, a protective layer such as a film composed of a photosensitive oxirane polyimine resin composition is formed. The three-dimensional structure caused by the thermosetting cross-linking agent captures the cyclic dimethyl methoxy olefin oligomer as an impurity in the three-dimensional structure, and as a result, it prevents or even inhibits the cyclic dimethyl oxyalkylene oligomerization. Exudation of the material, and further good plating resistance by thermal hardening. Further, since a specific amount of the photoacid generator is contained as a sensitizer, the decyl oxymethylene iodide resin composition has a positive photosensitive property and can be patterned by exposure or alkali development.

此外,印刷配線板之銅或銅合金配線圖案因預先經過表面粗化處理,故可提升銅或銅合金配線圖案與保護層之間的密合性,亦可提升保護層之耐鍍敷性。Further, since the copper or copper alloy wiring pattern of the printed wiring board is subjected to surface roughening treatment in advance, the adhesion between the copper or copper alloy wiring pattern and the protective layer can be improved, and the plating resistance of the protective layer can be improved.

本發明之用以形成印刷配線板之保護層之感光性矽氧烷聚醯亞胺樹脂組成物係含有:由四羧酸二酐、具有二苯基亞矽基單位之矽氧烷二胺、與不含矽氧烷之二胺進行醯亞胺化所得之矽氧烷聚醯亞胺樹脂100質量份;選自液狀環氧樹脂、苯并噁嗪類、及可溶酚醛樹脂類所構成之群中之至少一種之交聯劑1~20質量份;作為感光劑之光酸發生劑5~30質量份。The photosensitive oxirane polyimine resin composition for forming a protective layer of a printed wiring board of the present invention contains: a tetracarboxylic dianhydride, a nonoxyalkylene diamine having a diphenyl fluorenylene unit, 100 parts by mass of a decyl alkoxyimide resin obtained by ruthenium imidization with a non-oxane-containing diamine; and selected from the group consisting of liquid epoxy resins, benzoxazines, and resol phenol resins 1 to 20 parts by mass of the crosslinking agent of at least one of the groups; and 5 to 30 parts by mass of the photoacid generator as a sensitizer.

首先,針對感光性矽氧烷聚醯亞胺樹脂組成物之主成分之矽氧烷聚醯亞胺樹脂進行說明。此矽氧烷聚醯亞胺樹脂因係使用具有二苯基亞矽基單位之二胺基矽氧烷作為二胺成分,故可減少環狀二甲基矽氧烷寡聚物之發生量。First, a decyloxypolyimine resin which is a main component of a photosensitive siloxane oxy-imide resin composition will be described. Since the decane polyimine resin is a diamine sulfoxane having a diphenyl fluorenylene unit as a diamine component, the amount of occurrence of the cyclic dimethyl methoxy olefin oligomer can be reduced.

作為本發明所使用之矽氧烷聚醯亞胺樹脂之構成單位即四羧酸二酐之具體例,可列舉:均苯四羧酸二酐、3,4,3',4'-聯苯四羧酸二酐、4,4'-氧雙鄰苯二甲酸二酐、3,4,3',4'-二苯甲酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、9,9-雙(3,4-二羧基苯基)茀二酐、9,9-雙[4-(3,4-二羧基苯氧基)苯基]茀二酐、2,3,6,7-萘四羧酸二酐、4,4'-(六氟異亞丙基)雙鄰苯二甲酸酐、1,2,3,4-環丁烷四羧酸二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、乙二醇雙偏苯三甲酸酯二酐、2,2-雙(4-(3,4-二羧基苯氧基)苯基)丙烷二酐等。其中,較佳為可使用3,3',4,4'-二苯基碸四羧酸二酐。Specific examples of the tetracarboxylic dianhydride which is a constituent unit of the oxirane polyimine resin used in the present invention include pyromellitic dianhydride and 3,4,3',4'-biphenyl. Tetracarboxylic dianhydride, 4,4'-oxydiphthalic dianhydride, 3,4,3',4'-benzophenonetetracarboxylic dianhydride, 3,3',4,4'- Diphenylphosphonium tetracarboxylic dianhydride, 9,9-bis(3,4-dicarboxyphenyl)ruthenium anhydride, 9,9-bis[4-(3,4-dicarboxyphenoxy)phenyl茀 dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,4'-(hexafluoroisopropylidene)diphthalic anhydride, 1,2,3,4-cyclobutane Alkane tetracarboxylic dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, ethylene glycol trimellitate dianhydride, 2,2-double (4-(3,4-Dicarboxyphenoxy)phenyl)propane dianhydride or the like. Among them, 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride is preferably used.

此外,作為本發明所使用之矽氧烷聚醯亞胺樹脂的構成單位即矽氧烷二胺,係至少於分子内具有二甲基亞矽基骨架之化合物,並且可使用以往用於聚醯亞胺樹脂之矽氧烷改質者。其中,從確保難燃性、相溶性之觀點來看,較佳可使用具有下式(1)之構造者。Further, the constituent unit of the oxirane polyimine resin used in the present invention, that is, a decane diamine, is a compound having at least a dimethyl fluorenylene skeleton in the molecule, and can be used conventionally for polyfluorene. Alkoxylate modified by imine resin. Among them, from the viewpoint of ensuring flame retardancy and compatibility, a structure having the following formula (1) can be preferably used.

式(1)中,n為1~30之整數,較佳為1~20之整數,m為1~20之整數,較佳為1~10之整數。因m為1以上,故式(1)之矽氧烷二胺便具有二苯基亞矽基骨格,而矽氧烷聚醯亞胺樹脂之難燃性提升。且因m為1以上,故可一定程度地抑制雜質即環狀二甲基矽氧烷寡聚物之滲出。上述矽氧烷二胺之具體例可舉出信越化學工業股份有限公司製之X-22-9409(m>1)。此外,作為矽氧烷二胺,亦可使用胺基由第三丁氧基羰基等之胺基甲酸酯系、酞醯基等之醯亞胺系、對甲苯磺醯基等之磺醯胺系所保護者。In the formula (1), n is an integer of 1 to 30, preferably an integer of 1 to 20, and m is an integer of 1 to 20, preferably an integer of 1 to 10. Since m is 1 or more, the alkoxydiamine of the formula (1) has a diphenyl fluorene-based skeleton, and the flame retardancy of the decyl alkene polyimide resin is improved. Further, since m is 1 or more, bleed out of the impurity dimethyl methoxy siloxane oligomer, which is an impurity, can be suppressed to some extent. Specific examples of the above-mentioned oxime diamines include X-22-9409 (m>1) manufactured by Shin-Etsu Chemical Co., Ltd. Further, as the alkoxyalkylene diamine, an amine group such as a third butoxycarbonyl group, an anthracene group such as a fluorenyl group, or a sulfonamide such as a p-toluenesulfonyl group may be used. Protected by the system.

本發明所使用之矽氧烷聚醯亞胺樹脂之構成單位即不含矽氧烷之二胺,可使用分子内不具有二甲基亞矽基骨架及二苯基亞矽基骨架之二胺,作為其具體例,可列舉:3,3'-二胺基-4,4'-二羥基二苯基碸、2,2-雙(3-胺基-4-羥基苯基)六氟丙烷、2,2-雙(3-胺基-4-羥基苯基)丙烷、3,3'-二胺基-4,4'-二羥基二苯基甲烷、3,3'-二羥基-4,4'-二胺基聯苯、2,4-二胺基苯酚、9,9-雙(3-胺基-4-羥基苯基)茀等之二胺基苯酚衍生物;對苯二胺、4,4'-二胺基二苯基醚、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、雙[4-(4-胺基苯氧基)苯基]碸、1,3-雙(4-胺基苯氧基)苯、2,2'-雙(三氟甲基)-4,4'-二胺基聯苯、1,3-雙(3-胺基苯氧基)苯、4,4'-二胺基苯甲醯苯胺、5,5'-亞甲基-雙(鄰胺苯甲酸)、9,9-雙[4-(4-胺基苯氧基苯基)]茀、9,9-雙(4-胺基苯氧基)茀、4,4'-二胺基二苯基碸、3,4'-二胺基二苯基醚、2,2-雙[4-(4-胺基苯氧基)苯基]六氟丙烷、4,4'-雙(4-胺基苯氧基)聯苯、1,4-雙(4-胺基苯氧基)苯、鄰聯甲苯胺碸等之芳香族二胺;反式-1,4-環己烷二胺、順式-1,4-環己烷二胺、4,4,-亞甲雙(環己胺)等之脂肪族二胺,但並不限定於該等,較佳可列舉二胺基苯酚衍生物,特別是3,3'-二胺基-4,4'-二羥基二苯基碸。The constituent unit of the oxirane polyimine resin used in the present invention is a diamine containing no alkane, and a diamine having no dimethyl fluorenylene skeleton and a diphenyl fluorenylene skeleton in the molecule can be used. As specific examples thereof, 3,3'-diamino-4,4'-dihydroxydiphenylanthracene, 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane , 2,2-bis(3-amino-4-hydroxyphenyl)propane, 3,3'-diamino-4,4'-dihydroxydiphenylmethane, 3,3'-dihydroxy-4 , a diaminophenol derivative such as 4'-diaminobiphenyl, 2,4-diaminophenol, 9,9-bis(3-amino-4-hydroxyphenyl)anthracene; p-phenylenediamine , 4,4'-diaminodiphenyl ether, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, bis[4-(4-aminophenoxy)benzene碸, 1,3-bis(4-aminophenoxy)benzene, 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl, 1,3-double ( 3-aminophenoxy)benzene, 4,4'-diaminobenzimidamide, 5,5'-methylene-bis(o-amine benzoic acid), 9,9-bis[4-(4 -aminophenoxyphenyl)]indole, 9,9-bis(4-aminophenoxy)anthracene, 4,4'-diaminodiphenylanthracene, 3,4'-diaminodiyl Phenyl ether, 2,2-bis[4-(4-aminophenoxy)phenyl] An aromatic diamine such as fluoropropane, 4,4'-bis(4-aminophenoxy)biphenyl, 1,4-bis(4-aminophenoxy)benzene, ortho-toluidine oxime; An aliphatic diamine such as 1,4-cyclohexanediamine, cis-1,4-cyclohexanediamine or 4,4,-methylenebis(cyclohexylamine), but is not limited thereto These preferably include a diaminophenol derivative, particularly 3,3'-diamino-4,4'-dihydroxydiphenylanthracene.

本發明中所使用之矽氧烷聚醯亞胺樹脂可由四羧酸二酐與具有二苯基亞矽基單位之矽氧烷二胺及視需要之不含矽氧烷之二胺於溶劑中在回流條件下進行醯亞胺化反應來製造,亦可經由具有以下步驟(a)及(b)之製造方法來獲得。The oxirane polyimine resin used in the present invention may be a solvent of tetracarboxylic dianhydride and a nonoxyalkylene diamine having a diphenyl fluorenylene unit and, if necessary, a non-oxane-containing diamine. It can be produced by performing a hydrazine imidation reaction under reflux conditions, or can be obtained by the production method which has the following steps (a) and (b).

步驟(a)Step (a)

首先,使四羧酸二酐與具有二苯基亞矽基單位之矽氧烷二胺於溶劑中在回流條件下進行醯亞胺化反應以獲得含有酸酐末端矽氧烷醯亞胺寡聚物之反應混合物。First, a tetracarboxylic dianhydride and a nonyl fluorenylene diamine having a diphenylhydrazinyl unit are subjected to hydrazine imidation under reflux conditions to obtain an anhydride-containing terminal oxirane quinone imine oligomer. The reaction mixture.

為了獲得酸酐末端矽氧烷醯亞胺寡聚物,只要第1之四羧酸二酐的莫耳量多於矽氧烷二胺即可。其中,矽氧烷二胺之使用量相對於所有四羧酸二酐1莫耳,若過少則有難以維持接著性、可撓性的傾向;若過多則有耐熱性降低的傾向,故較佳為0.1~0.9莫耳,更佳為0.3~0.8莫耳。In order to obtain an acid anhydride terminal oxime oxime imine oligomer, it is sufficient that the first tetracarboxylic dianhydride has more moles than the oxime diamine. In particular, the amount of the oxoxane diamine used is less than 1 mole per all of the tetracarboxylic dianhydride. If the amount is too small, it tends to be difficult to maintain the adhesion and flexibility. If the amount is too high, the heat resistance tends to decrease. It is 0.1 to 0.9 moles, more preferably 0.3 to 0.8 moles.

步驟(a)中,在回流條件下進行醯亞胺化反應之理由係為了使用Dean-Stark分離管等來除去醯亞胺化水。因此,溶劑係使用在四羧酸二酐與矽氧烷二胺之間會進行醯亞胺化反應之溫度來進行回流之溶劑,並且藉由共沸可將水分離出來之溶劑。上述溶劑可使用二甘二甲醚(diglyme)、三甘醇二甲醚等甘醇二甲醚類、二噁烷、四氫呋喃等醚系溶劑、或γ-丁內酯、γ-戊內酯等內酯系溶劑、該等之混合物。又,只要不會損及發明效果,亦可併用甲苯、二甲苯、苯、均三甲苯(mesitylene)等芳香族烴系溶劑、N-甲基-2-吡咯烷酮等醯胺系溶劑。本步驟(a)中,從回流溫度等觀點來看,較佳為甘醇二甲醚類與非極性溶劑之混合溶劑,其中較佳可使用三甘醇二甲醚與選自苯、甲苯、二甲苯及三甲苯所構成之群之至少一種之混合溶劑(w/wl/(0.1~10))。In the step (a), the reason for carrying out the hydrazine imidization reaction under reflux conditions is to remove the hydrazide water using a Dean-Stark separation tube or the like. Therefore, the solvent is a solvent which is refluxed at a temperature at which a quinone imidization reaction is carried out between a tetracarboxylic dianhydride and a decyloxydiamine, and a solvent which can separate water by azeotropy. As the solvent, glyceryl glycol such as diglyme or triglyme, an ether solvent such as dioxane or tetrahydrofuran, or γ-butyrolactone or γ-valerolactone may be used. Lactone solvent, a mixture of these. Further, an aromatic hydrocarbon solvent such as toluene, xylene, benzene or mesylene or a guanamine solvent such as N-methyl-2-pyrrolidone may be used in combination as long as the effects of the invention are not impaired. In the step (a), from the viewpoint of the reflux temperature and the like, a mixed solvent of a glyme and a non-polar solvent is preferred, and among them, triethylene glycol dimethyl ether and a benzene, toluene, and the like are preferably used. A mixed solvent of at least one of a group consisting of xylene and trimethylbenzene (w/wl/(0.1 to 10)).

步驟(a)中溶劑之使用量雖依溶劑或反應基質的種類而異,但若過少則會引起單體分散不良或回流效率的降低;而若過多則溶劑之氣化熱會變大使反應槽内之溫度變得難以上升,故較佳係使用四羧酸二酐與矽氧烷二胺之合計質量為5~60質量%的量。The amount of the solvent used in the step (a) varies depending on the type of the solvent or the reaction substrate, but if it is too small, the monomer may be poorly dispersed or the reflux efficiency may be lowered. If too large, the heat of vaporization of the solvent may become large. Since the temperature inside is difficult to rise, it is preferable to use the total mass of the tetracarboxylic dianhydride and the decane diamine in an amount of 5 to 60% by mass.

醯亞胺化反應時之反應溫度雖依溶劑或反應基質的種類或使用量而異,但若過低則醯亞胺化反應無法完成;而若過高則可能會發生醯亞胺化反應以外之副反應,故較佳為150~220℃,更佳為160~200℃。反應時間係將理論量之醯亞胺化水除去所需要之時間,通常為0.5~12小時,較佳為1~8小時。The reaction temperature in the imidization reaction varies depending on the type of the solvent or the reaction substrate or the amount used, but if it is too low, the imidization reaction cannot be completed; and if it is too high, the oxime imidization reaction may occur. The side reaction is preferably from 150 to 220 ° C, more preferably from 160 to 200 ° C. The reaction time is a time required for removing the theoretical amount of hydrazine imidized water, and is usually from 0.5 to 12 hours, preferably from 1 to 8 hours.

其中,於步驟(a)中進行醯亞胺化之際,亦可視需要添加三乙胺等三級胺、芳香族系異喹啉、吡啶等鹼性觸媒、或苯甲酸、對羥基苯甲酸等酸觸媒。In the step (a), when a ruthenium imidization is carried out, an alkali catalyst such as triethylamine, an aromatic isoquinoline or pyridine, or a benzoic acid or p-hydroxybenzoic acid may be added as needed. Acid catalyst.

步驟(b)Step (b)

步驟(a)之反應結束後,於步驟(a)中所得之酸酐末端矽氧烷醯亞胺寡聚物的溶液中添加不含矽氧烷之二胺,以使不含矽氧烷之二胺與酸酐末端矽氧烷醯亞胺寡聚物進行醯亞胺化反應,藉此獲得矽氧烷聚醯亞胺樹脂。此情況時,亦可視需要與不含矽氧烷之二胺同時添加與前使用者相同或相異之四羧酸二酐。又,亦可視需要添加溶劑。因此可調整聚醯亞胺固體成分濃度。溶劑可使用步驟(a)中可使用者。尤其在以清漆形態使用矽氧烷聚醯亞胺樹脂的情況時,為了防止塗佈時之吸濕所致之聚醯亞胺析出,可單獨或混合使用吸濕性較低之溶劑即醚系溶劑、內酯系溶劑、非極性溶劑等。尤其在本步驟(b)中較佳可使用三甘醇二甲醚(別名:三乙二醇二甲基醚)與γ-丁內酯之混合溶劑(w/w=1/(0.1~10))。After the reaction of the step (a) is completed, a dioxane-free diamine is added to the solution of the anhydride terminal oxirane quinone imine oligomer obtained in the step (a) so that the oxime-free The amine is subjected to a hydrazine imidization reaction with an acid anhydride terminal oxirane quinone imine oligomer, whereby a decyloxypolyimine resin is obtained. In this case, it is also possible to add a tetracarboxylic dianhydride which is the same as or different from the former user at the same time as the diamine containing no alkane. Further, a solvent may be added as needed. Therefore, the concentration of the solid component of the polyimine can be adjusted. The solvent can be used in step (a). In particular, when a decyloxypolyimide resin is used in the form of a varnish, an ether system which is a solvent having a low hygroscopic property may be used singly or in combination in order to prevent precipitation of polyamidene due to moisture absorption during coating. Solvent, lactone solvent, non-polar solvent, and the like. Especially in this step (b), a mixed solvent of triethylene glycol dimethyl ether (alias: triethylene glycol dimethyl ether) and γ-butyrolactone (w/w=1/(0.1~10) can be preferably used. )).

為了確保用以獲得充分機械特性之保護層之分子量,不含有矽氧烷之二胺的使用量與矽氧烷二腔合計之莫耳數相對於總四羧酸二酐1莫耳,較佳為0.1~0.9莫耳,更佳為0.3~0.8莫耳的量。In order to ensure the molecular weight of the protective layer for obtaining sufficient mechanical properties, the amount of the diamine containing no alkane and the molar amount of the two-cavity two-cavity are preferably 1 mol with respect to the total tetracarboxylic dianhydride. It is 0.1 to 0.9 moles, more preferably 0.3 to 0.8 moles.

其中,當步驟(b)中進行醯亞胺化時,與步驟(a)的情況相同,亦可視需要添加三乙胺等三級胺、芳香族系異喹啉、吡啶等鹼性觸媒、或苯甲酸、對羥基苯甲酸等酸觸媒。In the case of the imidization of the oxime in the step (b), as in the case of the step (a), an alkaline catalyst such as a tertiary amine such as triethylamine, an aromatic isoquinoline or a pyridine may be added as needed. Or an acid catalyst such as benzoic acid or p-hydroxybenzoic acid.

關於步驟(b)中之醯亞胺化反應溫度,當於步驟(b)中使用具有極性基之酸二酐或二胺成分時,因威森堡效應(Weiselberg effect)所生成之矽氧烷聚醯亞胺樹脂的黏度會增大,且有時會發生繞於攪拌棒周圍之現象。為了避免所生成之矽氧烷聚醯亞胺樹脂的黏度增大,較佳係使反應系統中存在有水。於此情況,水的量若過少則黏度增加的危險會提高;而若過多則聚醯亞胺的分子量有降低之虞,故較佳係於反應混合物中存在有0.01~1.1質量%比例之水。Regarding the temperature of the hydrazine imidization reaction in the step (b), when the acid dianhydride or diamine component having a polar group is used in the step (b), the oxime oxide generated by the Weistelberg effect The viscosity of the polyimide resin increases, and sometimes it occurs around the stirring rod. In order to avoid an increase in the viscosity of the produced oxyalkylene polyimine resin, it is preferred to have water present in the reaction system. In this case, if the amount of water is too small, the risk of increasing the viscosity is increased. If the molecular weight of the polyimide is decreased, the molecular weight of the polyamidene is preferably 0.01 to 1.1% by mass. .

步驟(b)中進行醯亞胺化時之反應溫度雖依溶劑或反應基質之種類或使用量而異,但若過低則醯亞胺化反應無法完成;而若過高則可能會發生醯亞胺化反應以外之副反應,故較佳為150~220℃,更佳為160~200℃。反應時間通常為0.5~12小時,較佳為1~8小時。藉此可以清漆狀態獲得環狀二甲基矽氧烷寡聚物之含量少之矽氧烷聚醯亞胺樹脂。The reaction temperature in the imidization of the hydrazine in the step (b) varies depending on the type or amount of the solvent or the reaction substrate, but if it is too low, the hydrazide reaction cannot be completed; and if it is too high, bismuth may occur. The side reaction other than the imidization reaction is preferably from 150 to 220 ° C, more preferably from 160 to 200 ° C. The reaction time is usually from 0.5 to 12 hours, preferably from 1 to 8 hours. Thereby, a decyl alkene polyimine resin having a small content of a cyclic dimethyl methoxy olefin oligomer can be obtained in a varnish state.

接著,針對感光性矽氧烷聚醯亞胺樹脂組成物中所使用之交聯劑進行說明。交聯劑,如字面所述,其本身係經由加熱而聚合硬化形成三維交聯構造。因此,可將作為雜質之環狀二甲基矽氧烷寡聚物鎖在三維構造中,抑制或防止其滲出。Next, the crosslinking agent used in the photosensitive oxirane polyimine resin composition will be described. The cross-linking agent, as it is literally, is itself polymerized by heating to form a three-dimensional crosslinked structure. Therefore, the cyclic dimethyl methoxy olefin oligomer as an impurity can be locked in a three-dimensional structure to inhibit or prevent it from oozing out.

作為上述交聯劑,可舉出對矽氧烷聚醯亞胺樹脂具有相溶性之選自液狀環氧樹脂、苯并噁嗪類、及可溶酚醛樹脂類所構成之群中之至少一種。尤其從防止環狀二甲基矽氧烷寡聚物之揮發、擴散之點來看,可同時併用液狀環氧樹脂與苯并噁嗪類,或同時併用液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂類。此時,液狀環氧樹脂的聚合係在殘存於矽氧烷聚醯亞胺樹脂之胺基經加熱而成為陰離子聚合起始點後進行。苯并噁嗪類之聚合,係經加熱使得噁嗪環開環而生成甲基鎓(methylenium)陽離子與酚性之氧鎓陰離子,然後甲基鎓陽離子對苯環進行親核取代聚合來進行。可溶酚醛樹脂類的情況時,係藉由酚性羥基經加熱而對苯環進行脫水縮合聚合來進行。The crosslinking agent may be at least one selected from the group consisting of a liquid epoxy resin, a benzoxazine, and a resol resin, which are compatible with the decyloxypolyimine resin. . In particular, from the viewpoint of preventing the volatilization and diffusion of the cyclic dimethyl methoxy olefin oligomer, a liquid epoxy resin and a benzoxazine may be used together, or a liquid epoxy resin or a benzoxazole may be used in combination. Pyrazines and resoles. At this time, the polymerization of the liquid epoxy resin is carried out after the amine group remaining in the oxirane polyimine resin is heated to become an anion polymerization starting point. The polymerization of benzoxazines is carried out by heating to open a ring of the oxazine ring to form a methylenium cation and a phenolic oxonium anion, and then the methyl sulfonium cation is subjected to nucleophilic substitution polymerization of the benzene ring. In the case of a resol phenol resin, the benzene ring is subjected to dehydration condensation polymerization by heating with a phenolic hydroxyl group.

作為上述液狀環氧樹脂及可溶酚醛樹脂類,為了對矽氧烷聚醯亞胺樹脂具有良好之相溶性,較佳為1~100000mPa‧s、更佳為1~50000mPa‧s。此處,黏度係於25℃以B型黏度計所測得之值。另一方面,苯并噁嗪類通常在常溫下為固體,但軟化點若過高則對矽氧烷聚醯亞胺樹脂之相溶性會降低,因此較佳為軟化點約100℃以下者。The liquid epoxy resin and the resol resin are preferably from 1 to 100,000 mPa·s, more preferably from 1 to 50,000 mPa·s, in order to have good compatibility with the decyloxypolyimide resin. Here, the viscosity is measured at 25 ° C with a B-type viscometer. On the other hand, the benzoxazines are usually solid at normal temperature, but if the softening point is too high, the compatibility with the oxirane polyimine resin is lowered. Therefore, the softening point is preferably about 100 ° C or lower.

作為用作交聯劑之液狀環氧樹脂之較佳具體例,可舉出:雙酚F型環氧樹脂(jER807、日本環氧樹脂股份有限公司)、雙酚A型環氧樹脂(例如jER828、日本環氧樹脂股份有限公司)、脂環式環氧樹脂(Celloxide 2021、Daicel Chemical Industries,Ltd.)、環氧丙基胺型環氧樹脂(jER604、日本環氧樹脂股份有限公司;GAN、日本化藥股份有限公司等)等。其中,從取得容易性之觀點來看,較佳可使用雙酚F型環氧樹脂及雙酚A型環氧樹脂。Preferred examples of the liquid epoxy resin used as the crosslinking agent include bisphenol F type epoxy resin (jER807, Japan Epoxy Resin Co., Ltd.) and bisphenol A type epoxy resin (for example). jER828, Japan Epoxy Co., Ltd.), alicyclic epoxy resin (Celloxide 2021, Daicel Chemical Industries, Ltd.), epoxy propylamine epoxy resin (jER604, Japan Epoxy Resin Co., Ltd.; GAN , Japan Chemical Pharmaceutical Co., Ltd., etc.). Among them, a bisphenol F type epoxy resin and a bisphenol A type epoxy resin are preferably used from the viewpoint of availability.

作為用作交聯劑之苯并噁嗪類之較佳具體例,可舉出下式(1)之雙酚S型苯并噁嗪、式(2)之雙酚F型苯并噁嗪、式(3)之雙酚A型苯并噁嗪(皆為小西化學工業股份有限公司製)。其中,從取得容易性之觀點來看,較佳可使用雙酚F型苯并噁嗪。Preferable specific examples of the benzoxazines used as the crosslinking agent include bisphenol S-type benzoxazine of the following formula (1) and bisphenol F-type benzoxazine of the formula (2). The bisphenol A type benzoxazine of the formula (3) (all manufactured by Xiaoxi Chemical Industry Co., Ltd.). Among them, bisphenol F type benzoxazine is preferably used from the viewpoint of easiness of availability.

又,作為用作交聯劑之可溶酚醛樹脂類之較佳具體例,可舉出:使用鹼金屬或鹼土類金屬之氫氧化物作為觸媒所得之鹼性可溶酚醛樹脂、使用氨作為觸媒所得之氨可溶酚醛樹脂樹脂、使用2價金屬鹽作為觸媒所得之高鄰位(High-ortho)可溶酚醛樹脂樹脂等。其中,從取得容易性之觀點來看,較佳可使用鹼性可溶酚醛樹脂。Moreover, as a preferable specific example of the resole phenol resin used as a crosslinking agent, the alkali-soluble phenol resin obtained using the hydroxide of an alkali metal or an alkaline earth metal as a catalyst, and ammonia are used. An ammonia-soluble phenol resin resin obtained by a catalyst, a high-ortho resol resin obtained by using a divalent metal salt as a catalyst, or the like. Among them, an alkali-soluble phenol resin can be preferably used from the viewpoint of availability.

本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物中之交聯劑的含量,相對於矽氧烷聚醯亞胺樹脂100質量份為1~20質量份,較佳為1~15質量份,更佳為1~10質量份。交聯劑之含量若低於此範圍則環狀二甲基矽氧烷寡聚物之揮發、擴散之抑制效果會不充分;若超過則會缺乏可撓性,膜有變硬之傾向,故不佳。The content of the crosslinking agent in the photosensitive oxirane polyimine resin composition used in the present invention is 1 to 20 parts by mass, preferably 1 to 1 part by mass per 100 parts by mass of the decyl alkoxyimide resin. 15 parts by mass, more preferably 1 to 10 parts by mass. When the content of the crosslinking agent is less than this range, the effect of suppressing volatilization and diffusion of the cyclic dimethyl methoxy olefin oligomer may be insufficient; if it exceeds, the flexibility will be lacking and the film tends to become hard. Not good.

此外,同時併用液狀環氧樹脂與苯并噁嗪類作為交聯劑時,相對於液狀環氧樹脂1質量份,苯并噁嗪類較佳係使用0.5~10質量份之比例。此原因在於苯并噁嗪類若過少,則環狀二甲基矽氧烷寡聚物之揮發、擴散抑制效果會不充分;而若過多則會缺乏可撓性,膜有變硬之傾向。此外,同時併用液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂類時,相對於液狀環氧樹脂1質量份,苯并噁嗪類較佳係使用0.5~10質量份、可溶酚醛樹脂類較佳係使用0.5~10質量份之比例。此原因在於可溶酚醛樹脂類若過少,則環狀二甲基矽氧烷寡聚物之揮發、擴散抑制效果會不充分;而若過多則會缺乏可撓性,膜有變硬之傾向。Further, when a liquid epoxy resin and a benzoxazine are used together as a crosslinking agent, the benzoxazine is preferably used in a ratio of 0.5 to 10 parts by mass based on 1 part by mass of the liquid epoxy resin. The reason for this is that if the benzoxazine is too small, the effect of volatilization and diffusion inhibition of the cyclic dimethyl methoxy olefin oligomer is insufficient, and if it is too large, the flexibility is lacking and the film tends to be hard. Further, when a liquid epoxy resin, a benzoxazine or a resol resin is used in combination, the benzoxazine is preferably used in an amount of 0.5 to 10 parts by mass based on 1 part by mass of the liquid epoxy resin. The phenol resin is preferably used in a proportion of 0.5 to 10 parts by mass. The reason for this is that if the amount of the resol phenol resin is too small, the effect of volatilization and diffusion suppression of the cyclic dimethyl methoxy olefin oligomer is insufficient, and if it is too large, the flexibility is lacking and the film tends to be hard.

接著,針對感光性矽氧烷聚醯亞胺樹脂組成物中所使用之光酸發生劑進行說明。光酸發生劑具有以下特性,係使用作為感光劑:當含有光酸發生劑之矽氧烷聚醯亞胺樹脂組成物之薄膜曝光於紫外線等時,於薄膜中會分解而產生酸,而賦予組成物可將薄膜鹼顯影之特性。Next, the photoacid generator used in the photosensitive oxirane polyimine resin composition will be described. The photo-acid generator has the following characteristics and is used as a sensitizer: when a film of a oxime phthalimide resin composition containing a photo-acid generator is exposed to ultraviolet rays or the like, it is decomposed in the film to generate an acid, and is imparted thereto. The composition can develop the characteristics of the film alkali.

作為上述光酸發生劑,可舉出:重氮鹽、重氮醌磺酸醯胺、重氮醌磺酸酯、重氮醌磺酸鹽、硝基苯甲基酯、鎓鹽、鹵化物、鹵化異氰酸酯、鹵化三嗪、二芳基磺醯基重氮甲烷、二碸等。其中,可較佳使用具有抑制未曝光部分之水溶性之效果的鄰醌二疊氮化合物。作為鄰醌二疊氮化合物之具體例,可舉出:1,2-苯醌-2-疊氮-4-磺酸酯或磺酸醯胺、1,2-萘醌-2-二疊氮-5-磺酸酯或磺酸醯胺、1,2-萘醌-2-二疊氮-4-磺酸酯或磺酸醯胺等。該等可藉由例如1,2-苯醌-2-疊氮-4-磺醯氯、1,2-萘醌-2-二疊氮-5-磺醯氯、1,2-萘醌-2-二疊氮-4-磺醯氯等之鄰醌二疊氮磺醯氯類與聚羥基化合物或聚胺化合物在脫鹽酸觸媒的存在下進行縮合反應而獲得。Examples of the photoacid generator include a diazonium salt, a guanamine diazonium sulfonate, a diazonium sulfonate, a diazonium sulfonate, a nitrobenzyl ester, a phosphonium salt, and a halide. Halogenated isocyanate, halogenated triazine, diarylsulfonyldiazomethane, dioxane, and the like. Among them, an o-quinonediazide compound having an effect of suppressing water solubility of an unexposed portion can be preferably used. Specific examples of the ortho-quinonediazide compound include 1,2-benzoquinone-2-azido-4-sulfonate or decylsulfonate, 1,2-naphthoquinone-2-diazepine -5-sulfonate or decylamine sulfonate, 1,2-naphthoquinone-2-diazide-4-sulfonate or decylamine sulfonate. These may be, for example, by 1,2-benzoquinone-2-azido-4-sulfonyl chloride, 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride, 1,2-naphthoquinone- An o-quinonediazidesulfonium chloride such as 2-diazide-4-sulfonyl chloride is obtained by a condensation reaction with a polyhydroxy compound or a polyamine compound in the presence of a dehydrochlorination catalyst.

本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物中之光酸發生劑之含量,相對於矽氧烷聚醯亞胺樹脂100質量份為5~30質量份,較佳為5~20質量份。光酸發生劑之含量若低於此範圍則無法獲得充分之感度;而若超過此範圍則樹脂組成物之耐熱性會有降低之傾向,故不佳。The content of the photoacid generator in the photosensitive oxirane polyimine resin composition used in the present invention is 5 to 30 parts by mass, preferably 5 parts by mass based on 100 parts by mass of the decyl alkoxyimide resin. ~20 parts by mass. If the content of the photoacid generator is less than this range, sufficient sensitivity cannot be obtained. When the content exceeds this range, the heat resistance of the resin composition tends to be lowered, which is not preferable.

本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物中可視需要配合金屬減活劑、消泡劑、防鏽劑、有機溶劑等習知之添加劑。The photosensitive oxirane polyimine resin composition used in the present invention may optionally contain a conventional additive such as a metal deactivator, an antifoaming agent, a rust preventive agent, or an organic solvent.

本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物可藉由將矽氧烷聚醯亞胺樹脂、交聯劑、感光劑、其他添加劑或溶劑以通常之方法均勻混合來製造。The photosensitive oxirane polyimine resin composition used in the present invention can be produced by uniformly mixing a decane oxime polyimide resin, a crosslinking agent, a sensitizer, other additives or a solvent in a usual manner.

本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物經熱硬化而獲得之保護層(鍍敷保護層或焊料保護層等),係可大幅抑制環狀二甲基矽氧烷寡聚物之滲出,而與以往之矽氧烷聚醯亞胺樹脂不同。The protective layer (plating protective layer or solder protective layer, etc.) obtained by thermally curing the photosensitive oxirane polyimine resin composition used in the present invention can greatly suppress cyclic dimethyl oxirane The polymer oozes out, unlike the conventional oxirane polyimine resin.

本發明之印刷配線板,係於印刷配線板之銅或銅合金配線圖案之至少一部分之上形成有由上述感光性矽氧烷聚醯亞胺樹脂組成物之熱硬化物之保護層,其特徵在於:銅或銅合金配線圖案的表面係經過表面粗化處理。因此,於銅或銅合金配線圖案的表面會形成保護層之錨固物之微少凹凸,結果提升了保護層之密合性,並提升了耐鍍敷性。The printed wiring board of the present invention is characterized in that a protective layer of a thermosetting material composed of the photosensitive siloxane oxy-imide resin composition is formed on at least a part of a copper or copper alloy wiring pattern of a printed wiring board, and is characterized in that It is that the surface of the copper or copper alloy wiring pattern is subjected to surface roughening treatment. Therefore, the unevenness of the anchor layer of the protective layer is formed on the surface of the copper or copper alloy wiring pattern, and as a result, the adhesion of the protective layer is improved, and the plating resistance is improved.

作為上述表面粗化處理,可較佳列舉利用無機微粒子之水性漿料之濕式噴砂處理、或利用銅或銅合金用之化學蝕刻劑之所謂化學研磨處理。此外,粗化之層級,從與顯影性取得平衡之觀點來看,Ra(平均表面粗度)為50~500nm。As the surface roughening treatment, a so-called chemical polishing treatment using a wet blasting treatment of an aqueous slurry of inorganic fine particles or a chemical etchant using copper or a copper alloy is preferably used. Further, the roughened layer has an Ra (average surface roughness) of from 50 to 500 nm from the viewpoint of balance with developability.

作為濕式噴砂處理所使用之水性漿料中分散之用作研磨劑之無機微粒子,可列舉鋁粒子、矽粒子、鋯粒子、樹脂粒子等。其中,從取得容易性之觀點來看,較佳為使用鋁粒子。Examples of the inorganic fine particles used as the polishing agent dispersed in the aqueous slurry used in the wet blasting treatment include aluminum particles, cerium particles, zirconium particles, and resin particles. Among them, aluminum particles are preferably used from the viewpoint of availability.

該等之無機微粒子之平均粒徑,若過小則於水性漿料中不易分散;若過大則於銅或銅配線圖案的表面會難以形成細微之凹凸,故較佳為1~200μm、更佳為2~200μm。When the average particle diameter of the inorganic fine particles is too small, it is less likely to be dispersed in the aqueous slurry; if it is too large, it is difficult to form fine unevenness on the surface of the copper or copper wiring pattern, and therefore it is preferably 1 to 200 μm, more preferably 2 to 200 μm.

該等之無機微粒子係使用作為水性漿料,但除了以水為媒介以外,亦可併用水混合性有機溶劑(甲醇、乙醇、丙酮等)。此外,亦可於水性漿料中配合習知之分散安定劑。These inorganic fine particles are used as an aqueous slurry, but in addition to water, a mixed organic solvent (methanol, ethanol, acetone, etc.) may be used in combination. Further, a conventional dispersion stabilizer may be blended in the aqueous slurry.

濕式噴砂處理中,水性漿料通常係藉由壓縮空氣以80~200m/秒之速度噴射至印刷配線板較佳。In the wet blasting treatment, the aqueous slurry is usually sprayed to the printed wiring board by compressed air at a speed of 80 to 200 m/sec.

作為較佳之化學研磨處理,可列舉利用蝕刻劑(含有硫酸、過氧化氫、唑系防繡劑、芳香族系過氧化氫分解抑制劑)者。於此,作為唑系防繡劑,可列舉咪唑系化合物、三唑系化合物、四唑系化合物等。此外,作為芳香族系過氧化氫分解抑制劑,可列舉苯磺酸類,例如可添加甲苯磺酸、苯酚磺酸等。此外,一般認為藉由上述化學研磨處理,唑系防繡劑或芳香族系過氧化氫分解抑制劑會於銅或銅合金表面以化學性或物理性結合,而使其與有機物之保護層之間之密合性更加以提升。As a preferable chemical polishing treatment, an etchant (containing sulfuric acid, hydrogen peroxide, an azole-based anti-embroidering agent, or an aromatic hydrogen peroxide decomposition inhibitor) can be used. Here, examples of the azole-based anti-emulsion agent include an imidazole-based compound, a triazole-based compound, and a tetrazole-based compound. Further, examples of the aromatic hydrogen peroxide decomposition inhibitor include benzenesulfonic acid, and for example, toluenesulfonic acid or phenolsulfonic acid may be added. Further, it is considered that, by the above chemical polishing treatment, the azole-based anti-embroidering agent or the aromatic hydrogen peroxide decomposition inhibitor is chemically or physically bonded to the surface of the copper or copper alloy to form a protective layer with the organic substance. The closeness of the relationship is even more enhanced.

硫酸之蝕刻液(1公升)中之含量,若過少則蝕刻速度慢;若過多則依舊無法獲得配合量所對應之效果,故較佳為50~300g。過氧化氫之蝕刻液中之含量,若過少則蝕刻速度慢;若過多則難以均勻蝕刻,故較佳為每硫酸100g為10~30質量%。When the content of the sulfuric acid etching solution (1 liter) is too small, the etching rate is slow; if it is too large, the effect corresponding to the compounding amount is still not obtained, so it is preferably 50 to 300 g. When the content in the etching solution of hydrogen peroxide is too small, the etching rate is slow, and if it is too large, it is difficult to uniformly etch, and therefore it is preferably 10 to 30% by mass per 100 g of sulfuric acid.

化學研磨處理中,較佳為一面將蝕刻液維持於室溫~50℃,且一面對印刷配線板之銅或銅合金配線圖案面進行噴射,或將印刷配線板浸漬於攪拌後之蝕刻液中。In the chemical polishing treatment, it is preferred to maintain the etching liquid at room temperature to 50 ° C, and to eject a copper or copper alloy wiring pattern surface facing the printed wiring board, or to immerse the printed wiring board in the etched liquid after stirring. in.

本發明之印刷配線板,可適用於所謂可撓性印刷配線板、玻璃環氧配線板、積層印刷配線板等。此外,作為銅或銅合金圖案,亦可適用以往之半加成法或增層法所形成之任意厚度者。The printed wiring board of the present invention can be applied to a so-called flexible printed wiring board, a glass epoxy wiring board, a laminated printed wiring board, or the like. Further, as the copper or copper alloy pattern, any thickness formed by the conventional semi-additive method or the build-up method can be applied.

此外,印刷配線板之保護層的形成位置,係於銅或銅合金配線圖案之至少一部分之上方。於配線圖案露出之情形,因存有保護層與配線圖案之交界,故得以輕易確認出保護層之耐蝕刻性的提升效果。此外,於配線圖案的整面被保護層覆蓋之情形,因無法假定該等之間可形成境界,故難以確認耐蝕刻性的提升效果。Further, the formation position of the protective layer of the printed wiring board is above at least a part of the copper or copper alloy wiring pattern. When the wiring pattern is exposed, since the boundary between the protective layer and the wiring pattern exists, the effect of improving the etching resistance of the protective layer can be easily confirmed. Further, in the case where the entire surface of the wiring pattern is covered by the protective layer, since it is impossible to form a boundary between the two, it is difficult to confirm the effect of improving the etching resistance.

以上說明之本發明之印刷配線板,可藉由以下方式製造。首先,將印刷配線板之銅或銅合金配線圖案的表面利用上述方式進行表面粗化處理。接著,利用棒塗佈機、輥塗佈機、缺角輪塗佈機(Comma coater)、或網板印刷機等將本發明之感光性矽氧烷聚醯亞胺樹脂組成物塗佈於表面粗化處理後之配線圖案上,以50~100℃乾燥成膜,然後將其膜隔著光罩照射紫外線等之活性能量線使其曝光,再藉由利用氫氧化鈉水溶液等之鹼顯影去除曝光部分使其圖案化,之後藉由加熱至120~250℃之後烘進行熱硬化以形成保護層,進而視需要可施行無電鍍鎳等之無電鍍,或施行電鍍來製造。The printed wiring board of the present invention described above can be manufactured in the following manner. First, the surface of the copper or copper alloy wiring pattern of the printed wiring board is subjected to surface roughening treatment in the above manner. Next, the photosensitive oxirane polyimine resin composition of the present invention is applied to the surface by a bar coater, a roll coater, a comma coater, a screen printing machine or the like. The wiring pattern after the roughening treatment is dried at 50 to 100 ° C to form a film, and then the film is exposed to an active energy ray such as ultraviolet rays through a mask, and then removed by alkali development using an aqueous solution of sodium hydroxide or the like. The exposed portion is patterned, and then thermally cured by heating to 120 to 250 ° C to form a protective layer, and may be subjected to electroless plating such as electroless nickel plating or electroplating as needed.

實施例Example

以下藉由實施例對本發明進行更具體的說明。The invention will now be described more specifically by way of examples.

參考例1(含有交聯劑之感光性矽氧烷聚醯亞胺樹脂組成物)Reference Example 1 (Photosensitive oxirane polyimine resin composition containing a crosslinking agent)

(1)矽氧烷聚醯亞胺樹脂之製造(1) Manufacture of oxoxane polyimine resin

於具備Dean-Stark分離管(Dean-Stark Trap)之聚醯亞胺樹脂用合成裝置之反應容器投入862.65g(0.639mol)之二胺基矽氧烷(二胺基二苯基/二甲基矽氧烷(胺當量675g/mol)、商品名:X-22-9409、信越化學工業股份有限公司製)、363.6g(1.01mol)之3,3’,4,4’-二苯碸四羧酸二酐(Rikacid DSDA、新日本理化股份有限公司製,純度99.6%)、547g之三甘醇二甲醚、200g之甲苯,並將混合物充分攪拌2小時。其後,升溫至185℃,並保持在該溫度2小時,一邊以Dean-Stark分離管將水回收,一邊回流攪拌反應液。862.65 g (0.639 mol) of diamino sulfoxane (diaminodiphenyl/dimethyl group) was placed in a reaction vessel of a synthesis apparatus equipped with a Dean-Stark Trap (Dean-Stark Trap). Oxane (amine equivalent: 675 g/mol), trade name: X-22-9409, manufactured by Shin-Etsu Chemical Co., Ltd.), 363.6 g (1.01 mol) of 3,3',4,4'-diphenylfluorene A carboxylic acid dianhydride (Rikacid DSDA, manufactured by Nippon Chemical Co., Ltd., purity: 99.6%), 547 g of triethylene glycol dimethyl ether, and 200 g of toluene, and the mixture was thoroughly stirred for 2 hours. Thereafter, the temperature was raised to 185 ° C, and the temperature was maintained at this temperature for 2 hours, and the water was recovered by a Dean-Stark separation tube, and the reaction liquid was stirred under reflux.

將所得之反應混合物塗佈於氧化被膜已除去之矽晶圓上,以100℃乾燥10分鐘再以FT-IR透過法進行末端官能基之鑑定。因於1780cm-1 附近出現醯亞胺羰基之吸收,並於1860cm-1 附近確認到環狀酸酐羰基伸縮振動之吸收,故可確認生成酸酐末端矽氧烷寡聚物。The resulting reaction mixture was applied to a ruthenium wafer from which the oxidized film had been removed, and dried at 100 ° C for 10 minutes, and then the terminal functional group was identified by FT-IR transmission. The absorption of the quinone imine carbonyl group occurred in the vicinity of 1780 cm -1 , and the absorption of the cyclic anhydride carbonyl stretching vibration was confirmed in the vicinity of 1860 cm -1 . Therefore, it was confirmed that the anhydride terminal siloxane oligomer was formed.

將反應混合物放冷至80℃,投入101.44g(0.361mol)之3,3’-二胺基-4,4’-二羥基二苯碸(BSDA、小西化學工業股份有限公司製;純度99.7%),並於室溫攪拌12小時。攪拌後升溫至185℃,並以該溫度加熱攪拌2小時。其後,冷卻至室溫,而獲得含二苯基亞矽基單位之矽氧烷聚醯亞胺樹脂之清漆。The reaction mixture was cooled to 80 ° C, and 101.44 g (0.361 mol) of 3,3'-diamino-4,4'-dihydroxydiphenyl hydrazine (BSDA, manufactured by Xiaoxi Chemical Industry Co., Ltd.; purity 99.7%) was charged. ) and stirred at room temperature for 12 hours. After stirring, the temperature was raised to 185 ° C, and the mixture was heated and stirred at this temperature for 2 hours. Thereafter, it was cooled to room temperature to obtain a varnish containing a diphenylarylene unit-based oxirane polyimine resin.

(2)感光性矽氧烷聚醯亞胺樹脂組成物之調製(2) Modulation of photosensitive oxirane polyimine resin composition

於矽氧烷聚醯亞胺樹脂之清漆中加入感光劑(4NT-300、東洋合成工業股份有限公司)10phr、金屬減活劑(防鏽劑)(CDA-10、ADEKA股份有限公司)0.3phr、作為交聯劑之液狀環氧樹脂(jER807、日本環氧樹脂股份有限公司)0.5phr、苯并噁嗪(BF-BXZ、小西化學工業股份有限公司)5phr、可溶酚醛樹脂(BRL-274、昭和高分子股份有限公司)2phr,於室溫下均勻地混合以獲得感光性矽氧烷聚醯亞胺樹脂組成物。此處,phr之意思為當聚醯亞胺固體成分為100質量份時之添加量(質量份)。Adding sensitizer (4NT-300, Toyo Synthetic Industrial Co., Ltd.) 10 phr, metal deactivator (rust inhibitor) (CDA-10, ADEKA Co., Ltd.) 0.3 phr to the varnish of the decyl oxyalkylene resin , liquid epoxide (jER807, Japan Epoxy Co., Ltd.) as a crosslinking agent, 0.5 phr, benzoxazine (BF-BXZ, Xiaoxi Chemical Industry Co., Ltd.) 5 phr, resol phenolic resin (BRL- 274, Showa Polymer Co., Ltd.) 2 phr, uniformly mixed at room temperature to obtain a photosensitive oxirane polyimine resin composition. Here, phr means the amount (parts by mass) added when the solid content of the polyimine is 100 parts by mass.

參考例2(不含交聯劑之感光性矽氧烷聚醯亞胺樹脂組成物)Reference Example 2 (Photosensitive oxirane polyimine resin composition containing no crosslinking agent)

除了不使用作為交聯劑之液狀環氧樹脂(jER807、日本環氧樹脂股份有限公司)、苯并噁嗪(BF-BXZ、小西化學工業股份有限公司)、可溶酚醛樹脂(BRL-274、昭和高分子股份有限公司)以外,其餘以與參考例1相同的方式取得矽氧烷聚醯亞胺樹脂,並進一步製得感光性矽氧烷聚醯亞胺樹脂組成物。In addition to not using liquid epoxy resin as a crosslinking agent (jER807, Japan Epoxy Co., Ltd.), benzoxazine (BF-BXZ, Xiaoxi Chemical Industry Co., Ltd.), resol phenolic resin (BRL-274) In addition to the Showa Polymer Co., Ltd., the oxirane polyimine resin was obtained in the same manner as in Reference Example 1, and a photosensitive oxirane polyimine resin composition was further prepared.

參考例3(經過濕式噴砂之物理性粗化處理後之配線板之製作)Reference Example 3 (Production of wiring board after physical roughening treatment by wet blasting)

於絕緣層厚25μm及銅厚12μm之覆銅積層板(Upisel N、宇部日東化成股份有限公司)之銅表面,利用Macoho Co.,Ltd之濕式噴砂系統(參照http://www.macoho.co.jp),藉由以下條件(WB1)進行表面粗化處理,以獲得經物理性粗化處理後之配線板(平均表面粗度Ra:73.95nm)。The copper surface of a copper-clad laminate (Upisel N, Ube Nitto Chemical Co., Ltd.) with an insulating layer thickness of 25 μm and a copper thickness of 12 μm is used by the wet blasting system of Macoho Co., Ltd. (refer to http://www.macoho. Co.jp), the surface roughening treatment was carried out by the following condition (WB1) to obtain a wiring board after physical roughening treatment (average surface roughness Ra: 73.95 nm).

(WB1條件)(WB1 condition)

研磨劑:鋁微粒子Abrasive: aluminum microparticles

中心粒徑:6.7μmCenter particle size: 6.7μm

水性漿料中研磨劑濃度:14體積%Abrasive concentration in aqueous slurry: 14% by volume

使用噴槍:寬幅型Use spray gun: wide format

處理速度:1.8m/分Processing speed: 1.8m / min

投射距離:20mmProjection distance: 20mm

投射角度:90度Projection angle: 90 degrees

空氣壓力:0.15MPaAir pressure: 0.15MPa

參考例4(經過濕式噴砂之物理性粗化處理後之配線板之製作)Reference Example 4 (Production of wiring board after physical roughening treatment by wet blasting)

除了將空氣壓力設為0.25MPa以外(WB2條件),其餘藉由重覆參考例3的方式,以獲得經物理性粗化處理後之配線板(平均表面粗度Ra:100.7nm)。Except that the air pressure was set to 0.25 MPa (WB2 condition), the wiring board after the physical roughening treatment (average surface roughness Ra: 100.7 nm) was obtained by repeating the method of Reference Example 3.

參考例5(經過化學性粗化處理之配線板之製作)Reference Example 5 (Production of wiring board subjected to chemical roughening treatment)

於絕緣層厚25μm及銅厚12μm之覆銅積層板(Upisel N、宇部日東化成股份有限公司)之銅表面,首先以酸性洗淨液(CB-7612、MEC股份有限公司)之10倍稀釋液(液溫25℃)進行噴灑,再噴灑自來水,然後以蝕刻液(25℃)(BO7770VP、MEC股份有限公司)預浸泡,接著再以蝕刻液(25℃)(BO7770VP、MEC股份有限公司)正式浸泡,然後噴灑純水,再以氣刀(50℃)去除水分,最後藉由鼓風機熱風(80℃)乾燥,以獲得銅表面經過化學性粗化處理之配線板(蝕刻量:約0.5μm)。The copper surface of a copper-clad laminate (Upisel N, Ube Nitto Chemical Co., Ltd.) with an insulating layer thickness of 25 μm and a copper thickness of 12 μm is first diluted with a 10-fold dilution of an acidic cleaning solution (CB-7612, MEC Co., Ltd.). (liquid temperature 25 ° C) spray, spray tap water, and then pre-soaked with etching solution (25 ° C) (BO7770VP, MEC Co., Ltd.), and then officially etched (25 ° C) (BO7770VP, MEC Co., Ltd.) Soak, then spray pure water, remove the water with an air knife (50 ° C), and finally dry with a blower hot air (80 ° C) to obtain a chemically roughened wiring board on the copper surface (etching amount: about 0.5 μm) .

參考例6(經過化學性粗化處理之配線板之製作)Reference Example 6 (Production of wiring board subjected to chemical roughening treatment)

於絕緣層厚25μm及銅厚12μm之覆銅積層板(Upisel N、宇部日東化成股份有限公司)之銅表面,首先以軟蝕刻液(CPE-755、三菱瓦斯化學股份有限公司)之10倍稀釋液(液溫30℃)進行浸泡。然後以純水洗淨,再以氣刀去除水分,並藉由鼓風機熱風(50℃)乾燥,以獲得銅表面經過化學性粗化處理之配線板。The copper surface of a copper-clad laminate (Upisel N, Ube Nitto Chemical Co., Ltd.) with an insulating layer thickness of 25 μm and a copper thickness of 12 μm was first diluted 10 times with a soft etching solution (CPE-755, Mitsubishi Gas Chemical Co., Ltd.). The solution was immersed in a liquid (liquid temperature: 30 ° C). Then, it was washed with pure water, and then the water was removed by an air knife, and dried by a blower hot air (50 ° C) to obtain a wiring board on which the copper surface was chemically roughened.

實施例1~6以及比較例1~3Examples 1 to 6 and Comparative Examples 1 to 3

依照表1所示之組合,利用棒塗佈機將參考例1或2之感光性矽氧烷聚醯亞胺樹脂組成物塗佈於參考例3~6之配線板使其預乾燥後成為10μm,再以80℃乾燥10分鐘。對該樹脂組成物,隔著光罩照射紫外線(條件2500mJ/cm2 )進行曝光。曝光後,將基板浸漬於40℃ 3質量%之氫氧化鈉水溶液60秒,除去樹脂組成物膜的曝光部進行顯影。然後以30℃的水洗淨基板60秒,再於10質量%(室溫)之稀硫酸水溶液酸洗淨10秒,進而以蒸餾水(室溫)清洗120秒。之後,於氮環境氣氛下進行後烘(200℃、60分),最後將樹脂組成物膜熱硬化,以獲得具備保護層之配線板。According to the combination shown in Table 1, the photosensitive oxirane polyimine resin composition of Reference Example 1 or 2 was applied to the wiring board of Reference Examples 3 to 6 by a bar coater to be predried to 10 μm. And dried at 80 ° C for 10 minutes. The resin composition was exposed to ultraviolet light (condition 2500 mJ/cm 2 ) through a photomask. After the exposure, the substrate was immersed in a 3 % by mass aqueous sodium hydroxide solution at 40 ° C for 60 seconds, and the exposed portion of the resin composition film was removed for development. Then, the substrate was washed with water at 30 ° C for 60 seconds, and then washed with 10% by mass (room temperature) of a dilute sulfuric acid aqueous solution for 10 seconds, and further washed with distilled water (room temperature) for 120 seconds. Thereafter, post-baking (200 ° C, 60 minutes) was carried out under a nitrogen atmosphere, and finally, the resin composition film was thermally cured to obtain a wiring board having a protective layer.

<環狀二甲基矽氧烷寡聚物的滲出之抑制效果評價><Evaluation of inhibition effect of exudation of cyclic dimethyl methoxy olefin oligomer>

從實施例以及比較例之配線板中存在樹脂組成物膜之部位切取寬4mm、長50mm之尺寸之試樣,並於50ml/分之流速之氦氣循環下260℃加熱15分鐘,藉此將揮發性成分自試樣中去除,並於他處將該揮發成分於-20℃的環境收集於Tenax-TA收集管中。接著,將所收集之成份以既定條件下氣化於氦氣流中,再將其氦氣導入GC-MS裝置(JAS100、JAI公司製),對環狀二甲基矽氧烷寡聚物的量進行定量。所得之結果示於表1。Samples having a width of 4 mm and a length of 50 mm were cut out from the portions of the wiring sheet of the examples and the comparative examples, and heated at 260 ° C for 15 minutes at a flow rate of 50 ml/min. The volatile components were removed from the sample and the volatile components were collected elsewhere in a Tenax-TA collection tube at -20 °C. Next, the collected components were gasified in a helium gas stream under a predetermined condition, and then the helium gas was introduced into a GC-MS apparatus (JAS100, manufactured by JAI Co., Ltd.), and the amount of the cyclic dimethyloxane oligomer was used. Quantify. The results obtained are shown in Table 1.

<耐鍍敷性之評價><Evaluation of plating resistance>

於實施例以及比較例之配線板所露出之銅表面進行鍍金以形成鍍金膜(0.03μm厚)。或者,於銅表面露出之曝光部進行鍍鎳/鍍金以形成硬質鍍Ni(3μm)/鍍金(0.05μm厚)。對所得之經電鍍處理且具備保護層之實施例以及比較例之配線板中之電鍍區域周圍的保護層之變色情況以目視方式進行評價。未變色之情形評價為良(G)、有些許變色的情形評價為不良(NG)。The copper surface exposed on the wiring boards of the examples and the comparative examples was subjected to gold plating to form a gold plating film (0.03 μm thick). Alternatively, the exposed portion exposed on the copper surface is subjected to nickel plating/gold plating to form a hard Ni plating (3 μm)/gold plating (0.05 μm thick). The discoloration of the protective layer around the plating region in the obtained electroplated and protected layer and the wiring board of the comparative example was visually evaluated. The case where no discoloration was evaluated as good (G) and the case where there was some discoloration was evaluated as poor (NG).

從表1可明確得知,參考例3~5之經表面粗化處理後之配線板中,實施例1~6之配線板(所具備的保護層係具有由含有參考例1之交聯劑之特有的矽氧烷聚醯亞胺樹脂組成物之熱硬化物所構成之三維交聯構造)可抑制環狀二甲基矽氧烷寡聚物的滲出,且具有優異的耐鍍敷性。As is clear from Table 1, in the wiring boards after the surface roughening treatment of Reference Examples 3 to 5, the wiring boards of Examples 1 to 6 (the protective layer provided has the crosslinking agent containing Reference Example 1). The three-dimensional crosslinked structure composed of a thermosetting product of a specific composition of a decane oxide polyimide composition can suppress the bleeding of a cyclic dimethyl methoxy olefin oligomer and has excellent plating resistance.

另一方面,參考例6之習知之經化學研磨處理後之配線板中,比較例1之配線板(所具備的保護層係使用不含交聯劑之參考例2之感光性矽氧烷聚醯亞胺樹脂組成物而得)並未抑制環狀二甲基矽氧烷寡聚物的滲出,且亦具有耐鍍敷性的問題。參考例6之習知之經化學研磨處理後之配線板中,比較例3之配線板(所具備的保護層係使用參考例1之感光性矽氧烷聚醯亞胺樹脂組成物而得)並未抑制環狀二甲基矽氧烷寡聚物的滲出,此外依然有耐鍍敷性的問題。相反地,相對於比較例1之情況,比較例2之配線板(所具備的保護層係使用含有交聯劑之參考例1之感光性矽氧烷聚醯亞胺樹脂組成物而得)雖可抑制環狀二甲基矽氧烷寡聚物的滲出,且耐鍍敷性相較比較例1已獲改善,但與比較例3、進而實施例1~6相比仍有耐鍍敷性的問題。On the other hand, in the wiring board after the chemical polishing treatment of the conventional example of Reference 6, the wiring board of Comparative Example 1 (the protective layer provided was a photosensitive oxyalkylene polymerization of Reference Example 2 containing no crosslinking agent). The quinone imine resin composition does not inhibit the bleeding of the cyclic dimethyl methoxy olefin oligomer, and also has a problem of plating resistance. In the wiring board after the chemical polishing treatment of the conventional example of Example 6, the wiring board of Comparative Example 3 (the protective layer provided is obtained by using the photosensitive decane polyimine resin composition of Reference Example 1) The bleeding of the cyclic dimethyl methoxy olefin oligomer is not inhibited, and there is still a problem of plating resistance. On the other hand, in the case of Comparative Example 1, the wiring board of Comparative Example 2 (the protective layer provided was obtained by using the photosensitive siloxane oxyalkylene resin composition of Reference Example 1 containing a crosslinking agent) The bleed out of the cyclic dimethyl methoxy olefin oligomer was suppressed, and the plating resistance was improved as compared with Comparative Example 1, but the plating resistance was still higher than that of Comparative Example 3 and Further Examples 1 to 6. The problem.

產業上之可利用性Industrial availability

具備有本發明之保護層之印刷配線板中,因使用具有二苯基亞矽基單位之矽氧烷二胺作為二胺成分,且進一步於感光性矽氧烷聚醯亞胺樹脂組成物所構成之薄膜等保護層中形成有特定之熱硬化性交聯劑所致之三維構造,故可防止甚至是抑制環狀二甲基矽氧烷寡聚物的滲出,進而藉由熱硬化而獲得良好之耐鍍敷性。此外,印刷配線板之銅或銅合金配線圖案因預先經過表面粗化處理,故可提升銅或銅合金配線圖案與保護層之間的密合性,亦可更加提升保護層之耐鍍敷性。因此,可適用於連接可靠性之高印刷配線板。In the printed wiring board having the protective layer of the present invention, a nonoxyalkylene diamine having a diphenylarylene unit is used as a diamine component, and further, a photosensitive oxirane polyimine resin composition is used. A three-dimensional structure due to a specific thermosetting cross-linking agent is formed in the protective layer such as a film formed, so that it is possible to prevent or even inhibit the bleeding of the cyclic dimethyl methoxy olefin oligomer, and to obtain good by thermal hardening. Resistance to plating. In addition, since the copper or copper alloy wiring pattern of the printed wiring board is subjected to surface roughening treatment in advance, the adhesion between the copper or copper alloy wiring pattern and the protective layer can be improved, and the plating resistance of the protective layer can be further improved. . Therefore, it can be applied to a printed wiring board having high reliability.

Claims (12)

一種印刷配線板,係於印刷配線板之銅或銅合金配線圖案之至少一部分之上形成有由感光性矽氧烷聚醯亞胺樹脂組成物之熱硬化物所構成之保護層;該感光性矽氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交聯劑、以及光酸發生劑;該矽氧烷聚醯亞胺樹脂係由四羧酸二酐、具有二苯基亞矽基單位之矽氧烷二胺、與不含矽氧烷之二胺進行醯亞胺化而得者;其特徵在於:作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為1~20質量份之選自液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂類所構成之群中之至少一種;作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為5~30質量份之光酸發生劑;銅或銅合金配線圖案的表面係經過表面粗化處理。 A printed wiring board formed with a protective layer composed of a thermosetting material of a photosensitive decyl oxymethylene imide resin composition on at least a part of a copper or copper alloy wiring pattern of a printed wiring board; The oxoxane polyimine resin composition contains a decyl alkoxyimide resin, a crosslinking agent, and a photoacid generator; the decyl oxymethylene amide resin is composed of tetracarboxylic dianhydride and has two a phenyl sulfinyl unit of a nonoxyalkylene diamine, which is obtained by hydrazine imidation with a non-oxane-containing diamine; characterized in that as a crosslinking agent, a relative oxyalkylene polyimide is used. 100 parts by mass of the resin is at least one selected from the group consisting of liquid epoxy resins, benzoxazines, and resole resins, and is used as a sensitizer, and is used as a sensitizer. 100 parts by mass of the quinone imine resin is 5 to 30 parts by mass of the photoacid generator; the surface of the copper or copper alloy wiring pattern is subjected to surface roughening treatment. 如申請專利範圍第1項之印刷配線板,其中交聯劑為液狀環氧樹脂及/或苯并噁嗪類;或液狀環氧樹脂、苯并噁嗪類、以及可溶酚醛樹脂類。 The printed wiring board of claim 1, wherein the crosslinking agent is a liquid epoxy resin and/or a benzoxazine; or a liquid epoxy resin, a benzoxazine, and a resol resin. . 如申請專利範圍第1項或第2項之印刷配線板,其中液狀環氧樹脂的黏度為1~100000mPa.s。 For example, in the printed wiring board of claim 1 or 2, the viscosity of the liquid epoxy resin is 1~100000 mPa. s. 如申請專利範圍第1項或第2項之印刷配線板,其中該四羧酸二酐為3,3’,4,4’-二苯基碸四羧酸二酐。 The printed wiring board of claim 1 or 2, wherein the tetracarboxylic dianhydride is 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride. 如申請專利範圍第1項或第2項之印刷配線板,其中具有二苯基亞矽基單位之矽氧烷二胺具有式(1)之構造: (式中,n為1~30之整數,m為1~20之整數)。The printed wiring board according to claim 1 or 2, wherein the nonoxyalkylene diamine having a diphenylarylene unit has the structure of the formula (1): (where n is an integer from 1 to 30, and m is an integer from 1 to 20). 如申請專利範圍第1項或第2項之印刷配線板,其中不含矽氧烷之二胺為二胺基酚衍生物。 A printed wiring board according to claim 1 or 2, wherein the diamine containing no alkane is a diaminophenol derivative. 如申請專利範圍第6項之印刷配線板,其中二胺基酚衍生物為3,3’-二胺基-4,4’-二羥基二苯基碸。 The printed wiring board of claim 6, wherein the diaminophenol derivative is 3,3'-diamino-4,4'-dihydroxydiphenylanthracene. 如申請專利範圍第1項或第2項之印刷配線板,其中聚矽氧烷聚醯亞胺樹脂為四羧酸二酐、矽氧烷二胺、不含矽氧烷之二胺之反應混合物在0.01~1.1質量%之水存在下進行醯亞胺化所得者。 The printed wiring board of claim 1 or 2, wherein the polyoxyalkylene polyimine resin is a reaction mixture of a tetracarboxylic dianhydride, a decane diamine, and a non-oxane-containing diamine. The yttrium imidization is carried out in the presence of 0.01 to 1.1% by mass of water. 如申請專利範圍第1項或第2項之印刷配線板,其中光酸發生劑為鄰醌二疊氮化合物。 The printed wiring board of claim 1 or 2, wherein the photoacid generator is an o-quinonediazide compound. 一種用以製造申請專利範圍第1項之印刷配線板之製造方法,係於印刷配線板之銅或銅合金配線圖案的表面進行表面粗化處理;於經表面粗化處理後之銅或銅合金配線圖案之至少一部分之上形成有由感光性矽氧烷聚醯亞胺樹脂組成物經過成膜、並進行曝光、顯影以圖案化、再藉由後烘而熱硬化成為保護層;該感光性矽氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交聯劑、以及光酸發生劑;該矽氧烷聚醯亞胺樹脂係由四羧酸二酐、具有二苯基亞矽基單位 之矽氧烷二胺、不含矽氧烷之二胺進行醯亞胺化而得者;其特徵在於:作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為1~20質量份之選自液狀環氧樹脂、苯并噁嗪類及可溶酚醛樹脂類所構成之群中之至少一種;作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂100質量份為5~30質量份之光酸發生劑。 A manufacturing method for manufacturing a printed wiring board according to the first aspect of the patent application, which is characterized in that a surface roughening treatment is performed on a surface of a copper or copper alloy wiring pattern of a printed wiring board; and copper or a copper alloy is subjected to surface roughening treatment. On at least a part of the wiring pattern, a photosensitive decyl oxymethylene imide resin composition is formed into a film, exposed, developed, patterned, and then thermally cured to form a protective layer by post-baking; The oxoxane polyimine resin composition contains a decyl alkoxyimide resin, a crosslinking agent, and a photoacid generator; the decyl oxymethylene amide resin is composed of tetracarboxylic dianhydride and has two Phenyl fluorenylene unit The non-oxyalkylene diamine and the non-oxane-containing diamine are obtained by hydrazylation; and as a crosslinking agent, 100 parts by mass of the relative oxirane polyimide resin is used as 1~ 20 parts by mass of at least one selected from the group consisting of a liquid epoxy resin, a benzoxazine, and a resol resin; and as the sensitizer, 100 parts by mass of a relative oxirane polyimide resin is used. It is 5 to 30 parts by mass of a photoacid generator. 如申請專利範圍第10項之製造方法,其中表面粗化處理為使用水性漿料之濕式噴砂處理。 The manufacturing method of claim 10, wherein the surface roughening treatment is a wet blasting treatment using an aqueous slurry. 如申請專利範圍第10項之製造方法,其中表面粗化處理為使用蝕刻劑之化學研磨處理。 The manufacturing method of claim 10, wherein the surface roughening treatment is a chemical polishing treatment using an etchant.
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