TW201012851A - Printed wiring board and method for manufacturing same - Google Patents

Printed wiring board and method for manufacturing same Download PDF

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Publication number
TW201012851A
TW201012851A TW098129215A TW98129215A TW201012851A TW 201012851 A TW201012851 A TW 201012851A TW 098129215 A TW098129215 A TW 098129215A TW 98129215 A TW98129215 A TW 98129215A TW 201012851 A TW201012851 A TW 201012851A
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Taiwan
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wiring board
printed wiring
resin
copper
diamine
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TW098129215A
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Chinese (zh)
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TWI400275B (en
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Tomoyasu Sunaga
Hiroki Kanaya
Mamiko Nomura
Junichi Ishii
Yoshio Omori
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Sony Chem & Inf Device Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/10Block- or graft-copolymers containing polysiloxane sequences
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/42Block-or graft-polymers containing polysiloxane sequences
    • C08G77/452Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences
    • C08G77/455Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences containing polyamide, polyesteramide or polyimide sequences
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0162Silicon containing polymer, e.g. silicone
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A printed wiring board having excellent plating resistance, wherein bleed-out of a cyclic dimethylsiloxane oligomer from a protective layer which is composed of a photosensitive siloxane polyimide resin composition is sufficiently suppressed. Specifically, a protective layer which is composed of a thermoset product of a photosensitive siloxane polyimide resin composition containing a siloxane polyimide resin, which is obtained by imidizing a tetracarboxylic acid dianhydride, a siloxane diamine having a diphenylsilylene unit and a diamine containing no siloxane, a crosslinking agent and a photoacid generator is formed on at least a part of a copper or copper alloy wiring pattern of a printed wiring board. A certain amount of at least one substance selected from the group consisting of liquid epoxy resins, benzoxazines and resols is used as the crosslinking agent, and a certain amount of the photoacid generator is used as a sensitizer. The surface of the copper or copper alloy wiring pattern of a printed wiring board has been subjected to a roughening treatment.

Description

201012851 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種印刷配線板及其製造方法該印刷 配線板具備由感光性球氧统聚酿亞胺樹脂組成物所形成之 保護層。 【先前技術】[Technical Field] The present invention relates to a printed wiring board having a protective layer formed of a photosensitive oxymethylene polyienimine resin composition and a method for producing the same. [Prior Art]

由芳香族四魏酸與芳香族二胺進行醯亞胺化而成之芳 香族系聚醯亞胺樹脂,因其優異之耐熱性及絕緣性而廣泛 用作電子零件之層間絕緣膜及覆蓋層之材料,但對於此類 芳香族系聚醯亞胺樹脂,要求具有優異之可撓性與接著 性。因此’將芳香族二胺之一部分替換為矽氧烷二胺,於 聚醯亞胺骨架中導入聚矽氧烷骨架而成之矽氧烷聚醯亞胺 樹脂之使用正在擴大。 然而,於矽氧烷聚醯亞胺樹脂之原料即矽氧烷二胺 中,含有作為雜質之不具有胺基之環狀二甲基石夕氧 11物,故將所製造之碎氧烧聚酿亞胺樹脂製成層間絕緣膜或 覆蓋層等而應用於電子零件之情形時,若將電子零件投入 回焊步驟等之熱處理步驟,則存在如下問題,即,於層 線間絕緣膜或覆蓋層之表面會再次附著或滲出作為逸^曰而 產生之環狀二甲基矽氧烷寡聚物,從而產生電子零件中之 接點故障或導電性降低,接著強度降低等。此外,本說曰 書中所謂「渗出」,係指膜等之固層中所含之物質移^至 固層表面,並於此液化或固化,或於此揮發並擴散的現象。 201012851 為了解決該問題已提出以下方法,即,使至小人 胺基聚石夕氧烧作為二胺成分之二胺化合物與四致酸:二: 甲苯或醚系溶劑中進行醯亞胺化反應時’例如,八:數二 將所揮發之溶劑排出至系統外,同時補充溶劑(:利文: 小根據該方法,環狀二甲基錢烧寡聚物相較於溶劑有 較低之沸m與所揮發之㈣卜起排出至系統外,而 可獲得環狀二甲基⑦氧轉聚物的濃度減少切氧烧聚酿 胺清漆。 專利文獻 專利文獻1 :日本專利特開2004 263058公報 【發明内容】 發明所欲解決之課題 然而,專利文獻1之方法因是在常壓下將揮發之溶劑 排出至系統外,故可相當程度地將到六聚物為止之二甲基 矽氧烷寡聚物除去,但其問題在於無法充分地除去七聚物 乂上之一甲基石夕氧燒寡聚物。因此,其問題在於:當於專 利文獻1之方法所得之矽氧烷聚醯亞胺清漆混合感光劑以 賦予感光性的同時,配合有廣泛用作為聚醯亞胺之交聯劑 的矽烷偶合劑、環氧胺、固體環氧樹脂等的時候,仍然難 以抑制雜質即環狀二甲基矽氧烷寡聚物從將所得之感光性 石夕氧烧聚酿亞胺樹脂組成物成膜於印刷配線板上並圖案化 再進行硬化所得之薄保護層(鍍敷保護層或焊料保護層)滲 出的現象。 201012851 此外’對於由該感光性矽氧烷聚醯亞胺樹脂組成物所 形成之具備保護層之印刷配線板而言,為了於未被保護層 被覆之銅或銅合金配線圖案區域(開口區域)成長無電鍍或 電鍍層而施以鍍敷處理,但因保護層與銅或銅合金配線圖 案之間之密合並不充分,故開口區域週邊部有時會發生變 色,因而期盼能夠提升耐鍍敷性。 本發明之目的係欲解決上述以往技術之問題,其係提 供一種具有由感光性矽氧烷聚醯亞胺樹脂組成物所構成之 〇 保護層之印刷配線板,其可充分抑制雜質之環狀二甲基石夕 氧烧寡聚物自保護層滲出,且耐錢敷性優異。 用以解決課題之手段 本發明人等發現藉由使用具有二苯基亞矽基 (diphenylsilylene)單位之矽氧烷二胺作為二胺成分來調製 石夕氧院聚酿亞胺樹脂,再使用於此配合特定種類與量之交 聯劑而成之感光性矽氧烷聚醯亞胺樹脂組成物以形成保護 層’而可抑制環狀二甲基矽氧烷募聚物的滲出,此外,若 〇將配線板之銅或銅合金配線圖案預先進行表面粗化處理, 則可提升其上所形成之保護層之耐鍍敷性,而完成本發明。 亦即,本發明係提供一種印刷配線板,係於印刷配線 板之銅或銅合金配線圖案之至少一部分之上形成有由感光 性矽氧烷聚醯亞胺樹脂組成物之熱硬化物所構成之保護 層;該感光性矽氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚 酿亞胺樹脂、交聯劑、以及光酸發生劑;該石夕氧烧聚醯亞 胺樹脂係由四緩酸二酐、具有二苯基亞矽基單位之矽氧烷 5 201012851 二胺'與不含矽氧烷之二胺進行醯亞胺化而得者;其特徵 在於: 作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂1〇〇質 量份為1〜20質量份之選自液狀環氧樹脂、苯并噁嗪類及 可溶酚醛樹脂(resole)類所構成之群中之至少一種; 作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂丨〇〇質 量份為5〜30質量份之光酸發生劑; 銅或銅合金配線圖案的表面係經過表面粗化處理。 此外’本發明亦提供一種用以製造上述之印刷配線板 之製造方法,係於印刷配線板之銅或銅合金配線圖案的表 面進行表面粗化處理; 於經表面粗化處理後之銅或銅合金配線圖案之至少一 4刀之上形成有由感光性石夕^貌聚酿亞胺樹脂組成物經過 成膜、並進行曝光、顯影以圖案化、再藉由後烘而熱硬化 成為保4層’ $而視需要施行無電鍍或電鐘;該感光性石夕 氧烷聚醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交 聯劑W &光酸發生冑;該石夕氧燒聚醢亞胺樹脂係由四叛 酸二軒、具有二苯基亞石夕基單位之發氧烧二胺、不含石夕氧 烷之二胺進行醯亞胺化而得者; 其特徵在於: 作為交聯劑,係使用相對矽氧烷聚醯亞胺樹脂100質 量伤為1〜20質量份之選自液狀環氧樹脂、苯并鳴唤類及 可溶酚醛樹脂類所構成之群_之至少一種,· 作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂100質 201012851 量份為5〜30質量份之光酸發生劑。 發明效果 本發明因使用具有二苯基亞石夕基單位之石夕氧貌二胺作 為二胺成分,且進一步於感光性矽氧烷聚醯亞胺樹脂组成 物所構成之薄膜等保護層中形成有特定之熱硬化性交聯劑 所致之三維構造,故該三維構造中捕捉了作為雜質之環狀 二甲基碎氧燒寡聚物,其結果可防止甚至是抑制環狀二甲 基矽氧烷寡聚物的滲出,進而藉由熱硬化而獲得良好之耐 ©鑛敷性。此外,因含有特定量之光酸發生劑作為感光劑, 故矽氧烷聚醯亞胺樹脂組成物成為正型感光性,並可藉由 曝光、驗顯影來進行圖案化。 此外’印刷配線板之銅或銅合金配線圖案因預先經過 表面粗化處理,故可提升銅或銅合金配線圖案與保護層之 間的密合性,亦可提升保護層之耐鍍敷性。 【實施方式】 本發明之用以形成印刷配線板之保護層之感光性妙氧 燒聚醢亞胺樹脂組成物係含有:由四繞酸二酐、具有二苯 基亞矽基單位之矽氧烷二胺、與不含矽氧烷之二胺進行醯 亞胺化所得之矽氧烷聚醯亞胺樹脂100質量份;選自液狀 環氧樹脂、苯并噁嗪類、及可溶酚醛樹脂類所構成之群中 之至少一種之交聯劑1〜20質量份;作為感光劑之光酸發生 劑5〜30質量份。 首先,針對感光性矽氧烷聚醯亞胺樹脂組成物之主成 7 201012851 分之矽氧烷聚醯亞胺樹脂進行說明。此矽氧烷聚醯亞胺樹 脂因係使用具有二苯基亞矽基單位之二胺基石夕氧烧作為二 胺成分,故可減少環狀二曱基矽氧烷寡聚物之發生量。 作為本發明所使用之矽氧烷聚醯亞胺樹脂之構成單位 即四叛酸二酐之具體例’可列舉:均苯四羧酸二酐、3,4,3,,4'-聯苯四羧酸二酐、4,4’-氧雙鄰苯二甲酸二酐、3,4,3,,4'-二苯 甲酮四羧酸二酐、3,3,,4,4,-二苯基砜四羧酸二酐、9,9_雙 (3,4·二羧基苯基)第二酐、9,9_雙[4-(3,4-二羧基苯氧基)苯基] 苐二酐、2,3,6,7-萘四羧酸二酐、4,4,-(六氟異亞丙基)雙鄰苯 二曱酸酐、1,2,3,4-環丁烷四羧酸二酐、雙環[2 2 2]辛_7_烯 -2,3,5,6-四羧酸二酐、乙二醇雙偏苯三甲酸酯二酐、2,2·雙 (4-(3,4-二羧基苯氧基)苯基)丙烷二酐等。其中較佳為可 使用3,3,4,4’-二苯基碱四叛酸二針。 此外’作為本發明所使用之矽氧烷聚醯亞胺樹脂的構 成單位即矽氧烷二胺,係至少於分子内具有二曱基亞矽基 骨架之化合物,並且可使用以往用於聚醯亞胺樹脂之矽氧 烷改質者。其+,從確保難燃性、相溶性之觀點來看,較 佳可使用具有下式(1)之構造者。 H2N-(CH2)~-An aromatic polyimine resin obtained by ruthenium imidization of aromatic tetracarboxylic acid and aromatic diamine is widely used as an interlayer insulating film and coating layer for electronic parts because of its excellent heat resistance and insulation properties. The material, but for such an aromatic polyimide resin, it is required to have excellent flexibility and adhesion. Therefore, the use of a nonoxyalkylene polyimine resin in which a part of an aromatic diamine is replaced by a nonoxyldiamine and a polyoxyalkylene skeleton is introduced into a polyimidazole skeleton is expanding. However, in the nonoxyldiamine diamine which is a raw material of the fluorinated polyimine resin, the cyclic dimethyl oxa oxime 11 which does not have an amine group as an impurity is contained, so that the produced oxy-combustion is sintered. When the imine resin is used as an interlayer insulating film or a cover layer and applied to an electronic component, if the electronic component is put into a heat treatment step such as a reflow step, there is a problem that the interlayer insulating film or the interlayer is covered. The surface of the layer reattaches or exudes the cyclic dimethyl methoxy olefin oligomer which is generated as an oxime, thereby causing contact failure or decrease in conductivity in the electronic component, followed by decrease in strength and the like. In addition, the term "exudation" in the book refers to a phenomenon in which a substance contained in a solid layer such as a film is transferred to a surface of a solid layer, liquefied or solidified therein, or volatilized and diffused. 201012851 In order to solve this problem, the following method has been proposed, that is, a ruthenium imidization reaction is carried out in a solvent of a diamine compound and a tetraacid in a toluene or an ether solvent; When, for example, eight: two, the solvent evaporated is discharged to the outside of the system, and the solvent is replenished (: Levin: small according to the method, the cyclic dimethyl ketone oligomer has a lower boiling point than the solvent. And the volatilized (4) is discharged to the outside of the system, and the concentration of the cyclic dimethyl 7 oxygen transpolymer can be reduced to reduce the oxygen-burning polyamine varnish. Patent Document 1: Japanese Patent Laid-Open No. 2004-263058 Disclosure of the Invention Problems to be Solved by the Invention However, in the method of Patent Document 1, since the volatilized solvent is discharged to the outside of the system under normal pressure, the dimethyloxane oligomer to the hexamer can be considerably obtained. The polymer is removed, but the problem is that one of the methyl oxime oligo-oligomers on the heptamer ruthenium cannot be sufficiently removed. Therefore, the problem is that the oxirane polysiloxane obtained by the method of Patent Document 1 is obtained. Amine varnish mixed sensitizer When a decane coupling agent, an epoxy amine, a solid epoxy resin, etc., which are widely used as a crosslinking agent of a polyimine, is added to the photosensitivity, it is still difficult to suppress an impurity, that is, a cyclic dimethyl alkoxysilane. A phenomenon in which a thin protective layer (plating protective layer or solder protective layer) obtained by forming a photosensitive stellite-oxygenated imide resin composition onto a printed wiring board and patterning and then hardening it is oozing out 201012851 Further, in the case of a printed wiring board having a protective layer formed of the photosensitive oxyalkylene polyimine resin composition, a copper or copper alloy wiring pattern region (opening region) for covering the unprotected layer ) plating is performed without plating or plating, but the adhesion between the protective layer and the copper or copper alloy wiring pattern is insufficient, so that the peripheral portion of the opening region may be discolored, and thus it is expected to improve resistance. Plating property. The object of the present invention is to solve the above problems of the prior art, and to provide a ruthenium protective layer composed of a photosensitive oxirane polyimine resin composition. In the present invention, the present inventors have found that the ring-shaped dimethyl gangrene oligopolymer is bleed out from the protective layer and is excellent in the resistance to the problem. A diphenylsilylene unit of a nonoxyldiamine is used as a diamine component to prepare a sulphuric acid imide resin, which is then used in combination with a specific type and amount of a crosslinking agent. The oxane polyimine resin composition can form a protective layer ′ to suppress bleed out of the cyclic dimethyl siloxane condensate, and further, the copper or copper alloy wiring pattern of the wiring board is surface roughened in advance. The present invention can be improved by improving the plating resistance of the protective layer formed thereon. That is, the present invention provides a printed wiring board which is at least a part of a copper or copper alloy wiring pattern of a printed wiring board. a protective layer composed of a thermosetting material of a photosensitive decyloxypolyimine resin composition; the photosensitive decyl oxymethylene amide resin composition containing a decyl oxyalkylene amide resin Crosslinker And a photoacid generator; the oxime oxygenated polyimine resin is a tetrabasic acid dianhydride, a decyl oxide having a diphenyl fluorenylene unit, 5 201012851 diamine' and a non-oxane-containing diamine The ruthenium imidization is carried out; and the crosslinking agent is used in an amount of 1 to 20 parts by mass based on 1 part by mass to 1 part by mass of the decyl oxymethylene imino resin. And at least one of the group consisting of an oxazine and a resole; and as the sensitizer, a light having a mass fraction of 5 to 30 parts by mass relative to the oxime phthalimide resin is used. The acid generator; the surface of the copper or copper alloy wiring pattern is subjected to surface roughening treatment. Further, the present invention also provides a method for manufacturing the above-described printed wiring board, which is subjected to surface roughening treatment on the surface of a copper or copper alloy wiring pattern of a printed wiring board; copper or copper after surface roughening treatment At least one of the four metal knives of the alloy wiring pattern is formed by forming a film of a photosensitive smectite, and exposing and developing to form a film, and then thermally curing by post-baking. An electroless plating or an electric clock is required as the layer '$; the photosensitive oxalyl polyoxyimide resin composition contains a decyl alkoxy phthalimide resin, a crosslinking agent W & photoacid generating enthalpy; Shixi Oxygen-Poly-Polyimide Resin Resin is obtained by ruthenium imidization of tetrazoic acid dioxins, oxydiamine diamines having diphenyl sulfite units, and diamines containing no oxalate. It is characterized in that: as a crosslinking agent, it is selected from the group consisting of liquid epoxy resin, benzophenone, and resol type phenolic resin, with a mass loss of 1 to 20 parts by mass relative to the decyl alkoxyimide resin. At least one of the groups constituting _, as a sensitizer, a phase is used Silicon siloxane polyimide resin 100 parts by mass 201 012 851 amount of 5~30 parts by mass of photoacid generator. Advantageous Effects of Invention The present invention uses a diazonite diamine having a diphenyl sulfite unit as a diamine component, and further in a protective layer such as a film composed of a photosensitive oxirane polyimine resin composition. Since a three-dimensional structure due to a specific thermosetting crosslinking agent is formed, a cyclic dimethyl oxy-oxygen oligomer as an impurity is trapped in the three-dimensional structure, and as a result, the cyclic dimethyl hydrazine can be prevented or even suppressed. The osmolality of the oxyalkylene oligomer is further improved by thermal hardening to obtain a mineralization resistance. Further, since a specific amount of the photoacid generator is contained as a sensitizer, the oxime siloxane polyimide composition has a positive photosensitive property and can be patterned by exposure and development. Further, since the copper or copper alloy wiring pattern of the printed wiring board is subjected to surface roughening treatment in advance, the adhesion between the copper or copper alloy wiring pattern and the protective layer can be improved, and the plating resistance of the protective layer can be improved. [Embodiment] The photosensitive oxy-oxygenated polyimine resin composition for forming a protective layer of a printed wiring board of the present invention contains: an oxygen-containing dianhydride having a diphenyl fluorenylene unit 100 parts by mass of a decyl iodide resin obtained by hydrazine imidization with a diamine containing no alkane, selected from liquid epoxy resins, benzoxazines, and resoles 1 to 20 parts by mass of the crosslinking agent of at least one of the groups of the resins; and 5 to 30 parts by mass of the photoacid generator as the sensitizer. First, the main component of the photosensitive oxirane polyimine resin composition will be described as a decyl oxyalkylene resin. Since the decyl alkoxyimine resin is a diamine sulfonium oxide having a diphenyl fluorenylene unit as a diamine component, the amount of occurrence of the cyclic dimercapto methoxy olefin oligomer can be reduced. Specific examples of the tetraoxo-dianhydride which is a constituent unit of the oxirane polyimine resin used in the present invention include pyromellitic dianhydride and 3,4,3,4'-biphenyl. Tetracarboxylic dianhydride, 4,4'-oxydiphthalic dianhydride, 3,4,3,4'-benzophenone tetracarboxylic dianhydride, 3,3,,4,4,- Diphenyl sulfone tetracarboxylic dianhydride, 9,9-bis(3,4·dicarboxyphenyl) second anhydride, 9,9-bis[4-(3,4-dicarboxyphenoxy)phenyl ] succinic anhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,4,-(hexafluoroisopropylidene) bisphthalic anhydride, 1,2,3,4-cyclobutane Alkane tetracarboxylic dianhydride, bicyclo[2 2 2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, ethylene glycol trimellitate dianhydride, 2,2·double (4-(3,4-Dicarboxyphenoxy)phenyl)propane dianhydride or the like. Among them, it is preferred to use a 3,3,4,4'-diphenyl base tetra-retensive two-needle. Further, 'the constituent unit of the oxirane polyimine resin used in the present invention is a fluorinated diamine, which is a compound having at least a fluorenylene fluorenylene skeleton in the molecule, and can be used for the polymerization. Alkoxylate modified by imine resin. From the viewpoint of ensuring flame retardancy and compatibility, it is preferable to use a structure having the following formula (1). H2N-(CH2)~-

201012851 為1~20之整數,較佳為1〜ι〇之整數。因^為}以上,故 式0)之矽氧烷二胺便具有二苯基亞矽基骨格,而妙氧烧聚 酿亞胺樹脂之難燃性提升。且因m為1以上,故可一定程 度地抑制雜質即環狀二甲基矽氧烷寡聚物之滲出。上述石夕 氧烧二胺之具體例可舉出信越化學工業股份有限公司製之 X-22-9409(m> 1)。此外,作為矽氧烷二胺,亦可使用胺基 由第二丁氧基幾基等之胺基甲酸酯系、駄醯基等之醯亞胺 系、對甲苯續醯基等之磺醯胺系所保護者。 © 本發明所使用之矽氡烷聚醯亞胺樹脂之構成單位即不 含矽氧烷之二胺,可使用分子内不具有二曱基亞矽基骨架 及一本基亞石夕基骨架之二胺’作為其具體例,可列舉:3,3'· 二胺基-4,4’-二羥基二苯基砜、2,2-雙(3-胺基-4-羥基苯基) 六氟丙烷、2,2-雙(3-胺基-4-羥基苯基)丙烷、3,3'-二胺基 -4,4'-二羥基二苯基甲烷、3,3'-二羥基_4,4,-二胺基聯苯、2,4-二胺基苯酚、9,9-雙(3-胺基-4-羥基苯基)第等之二胺基苯酚 衍生物;對苯二胺、4,4’-二胺基二苯基醚、2,2-雙[4-(4-胺 ®基苯氧基)苯基]丙烷、雙[4-(4-胺基苯氧基)苯基]砜、ι,3-雙 (4-胺基苯氧基)苯、2,2'-雙(三氟曱基)_4,4'-二胺基聯苯、1,3-雙(3-胺基笨氧基)苯、4,4’-二胺基苯曱醯苯胺、5,5'-亞曱基-雙(鄰胺苯甲酸)、9,9-雙[4-(4-胺基苯氧基苯基)]第、9,9-雙 (4-胺基苯氧基)第、4,4'-二胺基二苯基硬、3,4,-二胺基二苯 基醚、2,2-雙[4-(4-胺基苯氧基)苯基]六氟丙烷、4,4,-雙(4-胺基苯氧基)聯苯、1,4-雙(4-胺基苯氧基)苯、鄰聯甲苯胺砜 等之芳香族二胺;反式-1,4-環己烷二胺、順式環己烷 201012851 二胺、4,4,-亞曱雙(環己胺)等之脂肪族二胺’但並不限定於 該等’較佳可列舉二胺基苯酚衍生物,特別是3,3,_二胺基 -4,4- 一經基二苯基礙。 本發明中所使用之矽氧烷聚醯亞胺樹脂可由四敌酸二 肝與具有二苯基亞矽基單位之矽氧烷二胺及視需要之不含 發氧烧之二胺於溶劑中在回流條件下進行醯亞胺化反應來 製造,亦可經由具有以下步驟(a)&(b)之製造方法來獲得。 步驟(a)201012851 is an integer from 1 to 20, preferably an integer from 1 to ι. Since ^ is more than or equal to, the alkoxydiamine of the formula 0) has a diphenyl fluorene-based skeleton, and the flame retardancy of the oxy-oxygenated imine resin is improved. Further, since m is 1 or more, the bleed out of the impurity dimethyl methoxy siloxane oligomer, which is an impurity, can be suppressed to some extent. Specific examples of the above-mentioned diarrhea diamine are X-22-9409 (m> 1) manufactured by Shin-Etsu Chemical Co., Ltd. Further, as the alkoxyalkylene diamine, an amine group having an amine group such as a second butoxy group or the like, a sulfonium group such as a fluorenyl group, or a sulfonium group such as a p-toluene group can also be used. Protected by amines. © The constituent unit of the decane polyimine resin used in the present invention, that is, a diamine containing no alkane, and a molecular group having no dimercaptoarylene skeleton and a base sulfite skeleton can be used. As a specific example, the diamine '3,3'·diamino-4,4′-dihydroxydiphenyl sulfone, 2,2-bis(3-amino-4-hydroxyphenyl) 6 Fluoropropane, 2,2-bis(3-amino-4-hydroxyphenyl)propane, 3,3'-diamino-4,4'-dihydroxydiphenylmethane, 3,3'-dihydroxyl _4,4,-Diaminobiphenyl, 2,4-diaminophenol, 9,9-bis(3-amino-4-hydroxyphenyl), etc. diaminophenol derivative; p-benzene Diamine, 4,4'-diaminodiphenyl ether, 2,2-bis[4-(4-amine-phenoxy)phenyl]propane, bis[4-(4-aminophenoxy) Phenyl]sulfone, iota, 3-bis(4-aminophenoxy)benzene, 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl, 1,3- Bis(3-Amino-p-oxy)benzene, 4,4'-diaminobenzidine, 5,5'-arylene-bis(o-amine benzoic acid), 9,9-bis[4- (4-Aminophenoxyphenyl)] 9,9,9-bis(4-aminophenoxy), 4,4'-diaminodiphenyl, 3,4 -diaminodiphenyl ether, 2,2-bis[4-(4-aminophenoxy)phenyl]hexafluoropropane, 4,4,-bis(4-aminophenoxy)biphenyl , an aromatic diamine such as 1,4-bis(4-aminophenoxy)benzene or o-toluidinesulfone; trans-1,4-cyclohexanediamine, cis-cyclohexane 201012851 diamine An aliphatic diamine such as 4,4,-arylene bis(cyclohexylamine), but is not limited to these, preferably a diaminophenol derivative, particularly a 3,3,-diamino group. -4,4--Phenyldiphenyl. The oxirane polyimine resin used in the present invention may be a solvent of dihydrochatty acid dihydrogen and a diphenyl fluorenylene unit having a diphenyl fluorenylene unit and optionally an oxy-free diamine in a solvent. The ruthenium imidization reaction is carried out under reflux conditions, and can also be obtained by a production method having the following steps (a) & (b). Step (a)

首先,使四羧酸二酐與具有二苯基亞矽基單位之矽聋 烧二胺於溶劑中在回流條件下進行醯亞胺化反應以獲得^ 有酸酐末端矽氧烷醯亞胺寡聚物之反應混合物。 為了獲得酸酐末端矽氧烷醯亞胺寡聚物,只要第丨$ 四幾酸二if的莫耳量多於石夕氧院二胺即可。其中,石夕氧海 二胺之使用量相對於所有四竣酸二針1莫耳,若過少貝" 難以維持接著性、可姑 撓生的傾向;若過多則有耐熱性降伯 的傾向,故較佳為…_9莫耳,更佳為0.3〜0.8莫耳。'First, the tetracarboxylic dianhydride and the fluorinated diamine having a diphenylarylene unit are subjected to hydrazylation under reflux conditions to obtain an acid anhydride terminal oxime oxime imine oligomerization. The reaction mixture of the materials. In order to obtain an anhydride terminal oxime oxime imine oligomer, as long as the amount of moles of the second valence acid di-if is more than that of the diarrhea diamine. Among them, the use amount of Shixi oxygen sea diamine is relative to all the four moles of tetradecanoic acid, and if it is too small, it is difficult to maintain the adhesion and tend to scratch; if too much, there is a tendency to heat resistance. Therefore, it is preferably ... _9 moles, more preferably 0.3 to 0.8 moles. '

^驟⑷中,細流條件下進行醯亞胺化反應之理由係 為了使用Dean-StarV八触您杜 咖刀離管等來除去醯亞胺化水。因此, 溶劑係使用在四㈣二奸與 此 化反應之溫度來進行回流之.、胺之間會進仃醯亞胺 離出來之溶劑。上述溶 兴弗了將水分 甘知一甲醚等甘醇二甲醚類、_ ^ — 劑、或r-丁内醋、r •戊内醋等;f院、…喃等趟系溶 又,只要不會損及發明效果知系溶劑、该等之混合物。 效果亦可併用f苯、二f苯、苯、 10 201012851 均三甲苯(mesitylene)等芳香族烴系溶劑、N_甲基_2_。比略烧 剩等醯胺系/谷劑。本步驟⑷中,從回流溫度等觀點來看, 較佳為甘醇二曱醚類與非極性溶劑之混合溶劑,其中較佳 可使用三甘醇二曱醚與選自笨、甲苯、二曱笨及三曱苯所 構成之群之至少一種之混合溶劑(w/wl/(〇丨〜1〇))。 步驟(a)中溶劑之使用量雖依溶劑或反應基質的種類而 異,但若過少則會引起單體分散不良或回流效率的降低; 而若過多則溶劑之氣化熱會變大使反應槽内之溫度變得難 ©以上升,故較佳係使用四缓酸二酐與石夕氧烧二胺之合計質 量為5〜60質量%的量。 酿亞胺化反應時之反應溫度雖依溶劑或反應基質的種 類或使用量而異’但若過低則醯亞胺化反應無法完成;而 若過高則可能會發生醯亞胺化反應以外之副反應,故較佳 為150〜220°C,更佳為160〜200°C。反應時間係將理論量之 酿亞胺化水除去所需要之時間,通常為〇.5〜12小時,較佳 為1〜8小時。 其中,於步驟(a)中進行醯亞胺化之際,亦可視需要添 加三乙胺等三級胺、芳香族系異啥琳、B比咬等驗性觸媒、 或苯甲酸、對羥基苯甲酸等酸觸媒。 步驟(b) 步驟(a)之反應結束後,於步驟(a)中所得之酸酐末端矽 氧烧酿亞胺募聚物的溶液中添加不含石夕氧烧之二胺,以使 不含矽氧烷之二胺與酸酐末端矽氧烷醯亞胺募聚物進行醯 亞胺化反應,藉此獲得矽氧烷聚醯亞胺樹脂。此情況時, 11 201012851 亦可視需要與不含石々备a __ 乳燒之一胺同時添加與前使用者相同 或相異之四羧酸二醉 、 。又,亦可視需要添加溶劑。因此可 調整聚醢亞胺固體忐八,A ^ 瓶成分濃度。溶劑可使用步驟(a)中可使用 者。尤其在以清漆形態使用矽氧烷聚醯亞胺樹脂的情況 時’為了防止塗佈時之吸濕所致之聚醯亞胺析出,可單獨 或混合使用吸濕性較低之溶劑即醚系溶劑、内酯系溶劑、 非極卜生☆劑等。尤其在本步驟⑻中較佳可使用三甘醇二甲 ^ C別名·二乙—醇二甲基趟)與γ _ 丁内醋之混合溶劑 (w/w=l/(〇.l 〜10)) 〇 為了確保用以獲得充分機械特性之保護層之分子量, 不含有矽氧烷之二胺的使用量與矽氧烷二胺合計之莫耳數 相對於總四羧酸二酐i莫耳,較佳為01〜0 9莫耳,更佳為 〇·3〜0.8莫耳的量。 其中,當步驟(b)中進行醯亞胺化時,與步驟(a)的情況 相同,亦可視需要添加三乙胺等三級胺、芳香族系異喹啉、 吡啶等鹼性觸媒、或苯甲酸、對羥基笨甲酸等酸觸媒。 關於步驟(b)中之醯亞胺化反應溫度,當於步驟(b)中使❹ 用具有極性基之酸二針或二胺成分時,因威森堡效應 (Weiseiberg effect)所生成之矽氧烷聚醯亞胺樹脂的黏度會 增大’且有時會發生繞於攪拌棒周圍之現象。為了避免所 生成之矽氧烷聚醯亞胺樹脂的黏度增大,較佳係使反應系 統中存在有水。於此情況,水的量若過少則黏度增加的危 險會提高;而若過多則聚醯亞胺的分子量有降低之虞,故 較佳係於反應混合物中存在有0.01〜Μ質量%比例之水。 12 201012851 步驟(b)中進行醯亞胺化時之反應溫度雖依溶劑或反應 基質之種類或使用量而異’但若過低則醯亞胺化反應無法 兀成’而若過高則可能會發生醯亞胺化反應以外之副反 應’故較佳為15〇〜22(TC,更佳為160〜200°C。反應時間通 常為0.5〜12小時,較佳為i〜8小時。藉此可以清漆狀態獲 知環狀一甲基矽氧烷寡聚物之含量少之矽氧烷聚醯亞胺樹 脂0 接著,針對感光性矽氧烷聚醯亞胺樹脂組成物中所使 ©用之交聯劑進行說明。交聯劑,如字面所述,其本身係經 由力熱而鬈。硬化形成二維交聯構造。因此,可將作為雜 質之環狀二甲基石夕氡烧募聚物鎖在三維構造中,抑制或防 止其滲出。 作為上述交聯劑,可舉出對石夕氧烧聚醯亞胺樹脂具有 相溶性之選自液狀環氧樹脂、苯并嚼嗓類、及可溶紛經樹 脂類所構成之群中之至少一種。尤其從防止環狀二甲基石夕 氧烧寡聚物之揮發、擴散之點來看,可同時併用液狀環氧 樹脂與本并σ惡嗓類,赤昧根田&gt; 類戈间時併用液狀環氧樹脂、苯并噁嗪 ,及可溶㈣樹脂類。此時,液狀環氧樹脂的聚合係在殘 存於石夕氧燒聚酿亞胺樹脂之胺基經加熱而成為陰離子聚合 =:=二:开°_之聚合,係經加熱使得㈣環 :,-後==rthylenium)陽離子_之氧鏘陰離 子’然後甲基_離子對苯環進行親核取 可溶㈣樹脂類的情況時,係藉由朌性經。來進 環進行脫水縮合聚合來進行。 土、,二U熱而對苯 13 201012851 作為上述液狀環氧樹脂及可溶紛搭樹脂類,為了對梦 氧烷聚醯亞胺樹脂具有良好之相溶性,較佳為1〜1 〇〇〇〇〇 mPa · s、更佳為uoooompa · s。此處黏度係於25艽以 B型黏度計所測得之値。另—方面,苯并料類通常在常溫 下為固體,但軟化點若過高則對矽氧烷聚酿亞胺樹脂之相 冷性會降低’因此較佳為軟化點約1 〇〇它以下者。 作為用作交聯劑之液狀環氧樹脂之較佳具體例,可舉 ^雙酴W環氧樹脂⑽卿、日本環氧樹贱份有限公 氧樹脂(例如卿28、日本環氧樹脂股份 〈A 5 &amp; % 式環氧樹脂(CellGxide 2021、DaicelIn the case of (4), the reason for the ruthenium imidization reaction under the trickle condition is to remove the hydrazide water by using a Dean-StarV eight-touch knife. Therefore, the solvent is used for refluxing at the temperature of the four (four) and the reaction, and the solvent is separated from the amine by the imide. The above-mentioned solvents are known as glyme, such as monomethyl ether, _^-agent, or r-butyrolactone, r-pentane vinegar, etc.; The solvent and the mixture are not damaged as long as the effects of the invention are not impaired. The effect is also to use an aromatic hydrocarbon solvent such as f benzene, dif benzene, benzene, 10 201012851 mesitylene, or N_methyl_2_. It is slightly more than the rest of the amide/valency. In the step (4), from the viewpoint of the reflux temperature and the like, a mixed solvent of a glycol diether ether and a non-polar solvent is preferable, and among them, triethylene glycol diterpene ether and a substance selected from the group consisting of stupid, toluene and diterpene are preferably used. A mixed solvent of at least one of a group consisting of stupid and triterpenic benzene (w/wl/(〇丨~1〇)). The amount of the solvent used in the step (a) varies depending on the type of the solvent or the reaction substrate, but if it is too small, the monomer may be poorly dispersed or the reflux efficiency may be lowered; and if too much, the heat of vaporization of the solvent may become large. Since the temperature inside is difficult to rise, it is preferable to use an amount of the total mass of the tetrasodium oxyhydride and the sulphuric acid diamine to be 5 to 60% by mass. The reaction temperature in the imidization reaction varies depending on the type of the solvent or the reaction substrate or the amount used. However, if the reaction temperature is too low, the ruthenium imidization reaction cannot be completed; if it is too high, the ruthenium reaction may occur. The side reaction is preferably 150 to 220 ° C, more preferably 160 to 200 ° C. The reaction time is a period of time required for removing the theoretical amount of the imidized water, and is usually from 5 to 12 hours, preferably from 1 to 8 hours. Wherein, in the step (a), when the imidization is carried out, a tertiary amine such as triethylamine, an aromatic isophthalocyanine, a B-biting test catalyst, or a benzoic acid or a para-hydroxy group may be added as needed. An acid catalyst such as benzoic acid. Step (b) After the end of the reaction of the step (a), the diamine-free diamine-free diamine is added to the solution of the anhydride-terminated oxy-oxyn imide polymer obtained in the step (a) so as to be free The dioxane diamine is reacted with the anhydride terminal oxirane quinone imine to carry out the oxime imidization reaction, thereby obtaining a decyl alkoxyimide resin. In this case, 11 201012851 can also be added to the same as the former user or the same as the former user without the addition of a sputum a __ milk to one of the amines. Further, a solvent may be added as needed. Therefore, it is possible to adjust the concentration of the polyethyleneimine solid 忐8, A ^ bottle. The solvent can be used in the step (a). In particular, when a decyloxypolyimide resin is used in the form of a varnish, 'the ether which is a solvent having a low hygroscopicity, which is a solvent having a low hygroscopicity, may be used singly or in combination to prevent precipitation of the polyimine by moisture absorption during coating. Solvent, lactone solvent, non-polar ☆ agent, etc. In particular, in this step (8), a mixed solvent of triethylene glycol dimethyl compound C dimethyl hydrazine dimethyl hydrazine and γ _ butyl vinegar can be preferably used (w/w=l/(〇.l 〜10) )) 〇 In order to ensure the molecular weight of the protective layer used to obtain sufficient mechanical properties, the amount of diamine containing no alkane and the molar amount of the total amount of oxime diamine relative to the total tetracarboxylic dianhydride i mole Preferably, it is 01 to 0 9 m, more preferably 〇·3 to 0.8 m. In the case of the imidization of the oxime in the step (b), as in the case of the step (a), an alkali catalyst such as a tertiary amine such as triethylamine, an aromatic isoquinoline or a pyridine may be added as needed. Or an acid catalyst such as benzoic acid or p-hydroxybenzoic acid. Regarding the temperature of the hydrazine imidation reaction in the step (b), when the bismuth or diamine component having a polar group is used in the step (b), the enthalpy generated by the Weiseiberg effect The viscosity of the oxyalkylene polyimide resin increases, and sometimes it occurs around the stirring rod. In order to avoid an increase in the viscosity of the produced oxirane polyimine resin, it is preferred to have water present in the reaction system. In this case, if the amount of water is too small, the risk of increasing the viscosity is increased. If the molecular weight of the polyimide is decreased, the molecular weight of the polyamidene is preferably 0.01 to Μ% by mass. . 12 201012851 The reaction temperature for the imidization in the step (b) varies depending on the type or amount of the solvent or the reaction substrate, but if it is too low, the imidization reaction cannot be formed, and if it is too high, it may be A side reaction other than the ruthenium imidization reaction may occur, so it is preferably 15 Torr to 22 (TC, more preferably 160 to 200 ° C. The reaction time is usually 0.5 to 12 hours, preferably 1 to 8 hours. In this varnish state, it is known that the content of the cyclic monomethyl alkane oligomer is less than that of the oxirane polyimide resin 0. Next, it is used for the photosensitive oxirane polyimine resin composition. The cross-linking agent is described. The cross-linking agent, as it is literally, is itself kneaded by heat and hardens to form a two-dimensional crosslinked structure. Therefore, the cyclic dimethyl gangue as an impurity can be gathered. The object is locked in a three-dimensional structure to inhibit or prevent it from oozing out. As the crosslinking agent, a liquid epoxy resin, a benzo oxime, or the like, which is compatible with the cerium oxide polyimine resin, may be mentioned. And at least one of the group consisting of soluble resins, especially from the prevention of cyclic dimethyl From the point of view of the volatilization and diffusion of the oxylate oligomers, the liquid epoxy resin and the sigma scorpion, the erythraea root field, and the liquid epoxy resin and benzo can be used together. Oxazine, and soluble (tetra) resin. At this time, the polymerization of the liquid epoxy resin is carried out by heating the amine group remaining in the sulphur oxide smelting imine resin to become an anionic polymerization =:= two: open °_ The polymerization is carried out by heating (4) ring:, - post == rthylenium) cation _ oxo anion ' and then methyl _ ion to benzene ring nucleophilic to obtain soluble (iv) resin, by 朌through. The reaction is carried out by subjecting the ring to dehydration condensation polymerization. Soil, two U heat and p-benzene 13 201012851 As the above liquid epoxy resin and soluble resin, in order to have good compatibility with the dream oxygenated polyimine resin, preferably 1~1 〇〇 〇〇〇mPa · s, more preferably uoooompa · s. The viscosity here is measured at 25 艽 with a B-type viscometer. On the other hand, the benzoate is usually a solid at normal temperature, but if the softening point is too high, the phase coldness of the decyl alkane resin decreases. Therefore, it is preferred that the softening point is about 1 〇〇 or less. By. As a preferable specific example of the liquid epoxy resin used as the crosslinking agent, it is possible to exemplify the double epoxy resin (10), the Japanese epoxy resin, and the public epoxy resin (for example, Qing 28, Japanese epoxy resin). <A 5 &amp; % epoxy resin (CellGxide 2021, Daicel

Chemical Industries Ltd)、搭, (JER604 a ^ - 5 裒軋丙基胺型環氧樹脂 (师6〇4、日本環氧樹脂股份有限 ^ 份有限公司等)等。其中 ,、曰本化藥股 可使用雙酚F型環〗谷易性之觀點來看,較佳 作L作雙紛Α型環氧樹脂。 下式⑴之雙盼S型笨并::惡 式(3)之雙盼Α型苯并嗯嗪(皆為小西化本并°惡嗪、 司製)。其I從取得容易性之觀 學卫業股份有限公 F型笨并噁嗪. .來看’較佳可使用雙酚 201012851Chemical Industries Ltd), 搭, (JER604 a ^ - 5 丙基 propyl amine epoxy resin (teacher 6 〇 4, Japan Epoxy Epoxy Co., Ltd., etc.), etc. From the viewpoint of the bisphenol F-type ring, it is preferable to use L as a double-type epoxy resin. The following formula (1) is a double-looking S type stupid:: a vicious type (3) Benzophenazine (all are small westernized and oxazine, system). Its I obtained from the viewpoint of the ease of the observation of the industry, the limited company F type stupid and oxazide. See 'better bisphenol can be used 201012851

❹ 又,作為用作交聯劑之可溶 例,可舉出:使用鹼今j 醛樹脂類之較佳具體 媒所得… 金屬之氫氧化物作為觸 媒所得之驗性可溶酚酿樹脂、使用氨作為觸媒所 ;谷祕樹脂樹脂、使用2價金屬鹽作為觸媒所得之高鄰位 (Hlgh-orth〇)可溶酚醛樹脂樹脂等。其中,從取得容易性之 觀點來看’較佳可使用驗性可溶紛醛樹脂。 本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物中 之交聯劑的含量,相對於矽氧烷聚醯亞胺樹脂1 00質量份 為1〜20質量份,較佳為1〜丨5質量份,更佳為1〜10質量份。 交聯劑之含量若低於此範圍則環狀二甲基矽氧烷募聚物之 15 201012851 揮發、擴散之抑制效果會不充分;若超過則會缺之可挽性, 膜有變硬之傾向,故不佳。 此外,同時併用液狀環氧樹脂與苯并嗓。秦類作為交聯 劑時,相對於液狀環氧樹脂丨f量份,苯㈣錢較佳係 使用0.5〜10 f量份之比例。此原因在於苯并嗯嗪類若過 少,則環狀二曱基石夕氧院募聚物之揮發 '擴散抑制效果會 不充分;而若過多則會缺乏可撓性,膜有變硬之傾向。此 外,同時併用液狀環氧樹脂 '笨并B惡嗔類及可溶㈣樹脂 類時,相對於液狀環氧樹脂丨f量份,苯并料類較佳係 使用0·5〜10質量份、可溶酚醛樹脂類較佳係使用〇·5〜ι〇質 量份之比例。此原、因在於可溶盼链樹脂類若過少,則環狀 ,甲基石夕氧烧寡聚物之揮發、擴散抑制效果會不充分;而 若過多則會缺乏可撓性,膜有變硬之傾向。 接著,針對感光性矽氧烷聚醯亞胺樹脂組成物中所使 用之光酸發生劑進行說明◎光酸發生劑具有以下特性,係 使用作為感光劑:當含有光酸發生劑之矽氧烷聚醯亞胺樹 脂組成物之薄膜曝光於紫外線等時,於薄膜中會分解而產 生酸’而賦予組成物可將薄膜鹼顯影之特性。 作為上述光酸發生劑,可舉出:重氮鹽、重氮醌磺酸 酿胺、重氮醌磺酸酯、重氮醌磺酸鹽、硝基苯甲基酯、鏽 鹽、鹵化物、鹵化異氰酸酯、鹵化三嗪、二芳基磺醢基重 氮甲烷、二颯等《其中,可較佳使用具有抑制未曝光部分 之水溶性之效果的鄰醌二疊氮化合物。作為鄰醌二疊氮化 合物之具體例,可舉出:1,2-苯醌-2-疊氮·4_磺酸酯或磺酸 201012851 醯胺、1,2-萘醌_2_二疊氮_5_ _ A生 巧酸酯或磺酸醯胺、1,2-萘醌-2- 一疊氮-4-項酸酯或確酸醯脸势 .Λ 等。該等可藉由例如1,2-苯醌 -2-疊氮·4_磺醯氯、込孓萘 . ” 2-—疊氮-5-磺醯氯、1,2-萘醌 -2_二疊氮-4-磺酿氣等之鄰酿_ .^ 眠—疊氮磺醯氯類與聚羥基化合 物或聚胺化合物在脫鹽酸觫投 ye 嗯1碼媒的存在下進行縮合反應而獲 得0 本發明所使用之感光性石々&amp; A w * 夕氧燒聚酿亞胺樹脂組成物中 之光酸發生劑之含量,相對於&amp; &amp; 〇 相對於矽氧烷聚醯亞胺樹脂1〇〇質 量份為5〜30質量份,較祛i c、 隹為5〜20質量份。光酸發生劑之 含量若低於此範圍則無法獲得充分之感度;而若超過此範 圍則樹脂組成物之耐熱性會有降低之傾向,故不佳。 本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物中 可視需要配合金屬減活劑、消泡劑、防鏽劑、有機溶劑等 習知之添加劑。 本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物可 藉由將矽氧烷聚醯亞胺樹脂、交聯劑、感光劑、其他添加 ®劑或溶劑以通常之方法均勻混合來製造。 本發明所使用之感光性矽氧烷聚醯亞胺樹脂組成物經 熱硬化而獲得之保護層(鍍敷保護層或焊料保護層等),係可 大幅抑制環狀二甲基矽氧烷募聚物之滲出,而與以往之石夕 氧烷聚醯亞胺樹脂不同。 本發明之印刷配線板,係於印刷配線板之銅或鋼合金 配線圖案之至少一部分之上形成有由上述感光性石夕氧燒I 醯亞胺樹脂組成物之熱硬化物之保護層,其特徵在於··麵ι 17 201012851 或銅合金配線圖案的表面係經過表面粗化處理。因此,於 銅或銅合金配線圖案的表面會形成保護層之錨固物之微少 凹凸,結果提升了保護層之密合性,並提升了耐鍍敷性。 或利用銅或鋼合金用之化學 此外,粗化之層級,從與顯 Ra(平均表面粗度)為50〜 作為上述表面粗化處理,可較佳列舉利用無機微粒子 之水性漿料之濕式喷砂處理 飯刻劑之所謂化學研磨處理 影性取得平衡之觀點來看 500nm。 ❿ 作為濕式喷砂處理所使用之水性裝料中分散之用 磨劑之無機微粒子,可列舉銘粒子、石夕粒子、錯粒子 月日粒子等。其中,從取得容易性之觀點 鋁粒子。 ,衩佳為使用 中之錢微粒子之平均粒徑’若過小則於水性槳料 为散,若過大則於銅或銅配線圖案的表面會難以把 成細微之凹凸,故較佳為卜⑼^、更佳為2〜 形 % 無:微粒子係使用作為水性漿料,: 為媒介以夕卜,亦可併用水混合性有機溶劑(甲 I :: 砂二可:水性漿料中配合習知之分散安定劑丙Further, as a soluble example used as a crosslinking agent, an organic phenolic resin obtained by using a hydroxide of a metal as a catalyst can be used as a preferred phenolic resin obtained by using a hydroxide of a metal as a catalyst. Ammonia is used as a catalyst; a cereal resin resin, a high ortho-group (phenolic resin) resin obtained by using a divalent metal salt as a catalyst, and the like. Among them, from the viewpoint of easiness of availability, it is preferred to use an insoluble aldehyde resin. The content of the crosslinking agent in the photosensitive oxirane polyimine resin composition used in the present invention is 1 to 20 parts by mass, preferably 1 part by weight based on 100 parts by mass of the decyl alkoxyimide resin. ~ 丨 5 parts by mass, more preferably 1 to 10 parts by mass. If the content of the cross-linking agent is less than this range, the inhibition effect of the volatilization and diffusion of the cyclic dimethyl methoxy alkane polymer 15 will not be sufficient; if it exceeds the lead, the film may be hardened. The tendency is not good. In addition, a liquid epoxy resin and benzopyrene are used in combination. When Qin is used as a crosslinking agent, it is preferable to use a ratio of 0.5 to 10 f parts relative to the amount of the liquid epoxy resin 丨f. The reason for this is that if there are too few benzoxazines, the volatilization of the cyclic bismuth-based oxy-enrichment polymer will be insufficient, and if it is too large, the flexibility will be lacking and the film tends to become hard. In addition, when the liquid epoxy resin 'stupid B and the soluble (iv) resin are used in combination, the benzo compound is preferably used in an amount of 0.5 to 10 by mass relative to the liquid epoxy resin 丨f. The fraction of the resole phenolic resin is preferably a ratio of 〇·5 to 〇 〇 by mass. The reason is that if the number of soluble chain-chain resins is too small, the effect of volatilization and diffusion inhibition of the methyl onium oxide oligomer is insufficient, and if it is too large, the flexibility is lacking, and the film is changed. Hard tendency. Next, the photoacid generator used in the photosensitive oxirane polyimine resin composition will be described. The photoacid generator has the following characteristics and is used as a sensitizer: when a photoacid generator is used. When the film of the polyimide composition is exposed to ultraviolet light or the like, it is decomposed in the film to generate an acid', and the composition is provided with the property of developing the film alkali. Examples of the photoacid generator include a diazonium salt, a diazonium sulfonate, a diazonium sulfonate, a diazonium sulfonate, a nitrobenzyl ester, a rust salt, a halide, and the like. Halogenated isocyanate, halogenated triazine, diarylsulfonyldiazomethane, diterpene, etc. " Among them, an ortho-quinonediazide compound having an effect of suppressing water solubility of an unexposed portion can be preferably used. Specific examples of the ortho-quinonediazide compound include 1,2-benzoquinone-2-azido-4-sulfonate or sulfonic acid 201012851 decylamine, 1,2-naphthoquinone-2_double stack Nitrogen _5_ _ A or acid amide, 1,2-naphthoquinone-2-azide-4-ester or acid 醯 face. Λ and so on. These may be, for example, 1,2-benzoquinone-2-azide·4_sulfonium chloride, anthracene naphthalene. ” 2-azido-5-sulfonyl chloride, 1,2-naphthoquinone-2_ The adduct of the diazide-4-sulfuric gas, etc. _.^ sleep- azide sulfonium chloride and a polyhydroxy compound or a polyamine compound are obtained by a condensation reaction in the presence of a dehydrochlorinated hydrazine 0 The content of the photoacid generator in the photosensitive sarcophagus &amp; A w* oxy-oxygenated imide resin composition used in the present invention is relative to &amp;&amp; amp relative to the decyl alkoxyimine The amount of the resin is 5 to 30 parts by mass, and is 5 to 20 parts by mass relative to 祛ic and 隹. If the content of the photoacid generator is less than the range, sufficient sensitivity cannot be obtained; and if it exceeds this range, the resin is not. The heat resistance of the composition tends to be lowered, which is not preferable. The photosensitive oxirane polyimine resin composition used in the present invention may optionally contain a metal deactivator, an antifoaming agent, a rust preventive agent, or an organic compound. A conventionally used additive such as a solvent. The photosensitive oxirane polyimine resin composition used in the present invention can be obtained by using a decyl oxyalkylene resin and a crosslinking agent. The sensitizer, other additive agent or solvent is uniformly mixed by a usual method. The photosensitive siloxane oxide polyimide composition used in the present invention is thermally cured to obtain a protective layer (plating protective layer or solder) The protective layer or the like is capable of greatly suppressing the bleed out of the cyclic dimethyl methoxy olefin condensate, and is different from the conventional oxime siloxane polyimide resin. The printed wiring board of the present invention is applied to a printed wiring board. A protective layer of a thermosetting material composed of the photosensitive Xanthoxynitrile imine resin composition is formed on at least a part of the copper or steel alloy wiring pattern, and is characterized in that: · face IA 17 201012851 or copper alloy wiring The surface of the pattern is subjected to surface roughening treatment. Therefore, the unevenness of the anchor layer of the protective layer is formed on the surface of the copper or copper alloy wiring pattern, and as a result, the adhesion of the protective layer is improved and the plating resistance is improved. Or the chemical used for copper or steel alloy. In addition, the roughening level, the apparent Ra (average surface roughness) is 50~. As the surface roughening treatment, water using inorganic fine particles is preferably used. From the viewpoint of balancing the so-called chemical polishing treatment of the wet blasting treatment of the slurry, 500 nm is obtained. 无机 The inorganic fine particles dispersed in the aqueous charge used in the wet blasting treatment can be used. Listed in the Ming particles, the Shixi particles, the wrong particles, the moon particles, etc. Among them, from the point of view of the ease of availability of aluminum particles, 衩佳 is the average particle size of the particles in use, if it is too small, it is scattered in the aqueous slurry. If it is too large, it will be difficult to form fine concavities on the surface of the copper or copper wiring pattern. Therefore, it is preferably (9)^, more preferably 2~%. No.: The microparticles are used as an aqueous slurry, as a medium. It can also be mixed with water and organic solvent (I I :: sand two: water-based slurry with a well-known dispersion stabilizer C

SO 圮度喷射至印刷配線板較佳。 作為較佳之化學研磨處理,可列 酸、過氧化氫、唑系&amp; _ # 刻劑(含有硫 如、 繡劑、芳香族系過氧化备八4 劑)者。於此,作為哇系防績劑,可列舉味嗤系::解抑制 唾系化合物、四唾系化合物等芳。物、三 作為方香族系過氧 18 201012851 化氫分解抑制劑,可列舉苯確酸類,例如可添加甲苯續酸、 苯酴磺酸等。此外,一般認為藉由上述化學研磨處理,唑 系防繞劑或芳香族系過氧化氦八s 喝取*化虱刀解抑制劑會於銅或銅合金 表面以化學性或物理性结人 &amp;、、·》«’而使其與有機物之保護層之 間之密合性更加以提升。 梳酸之蚀刻液(1公并彳φ + l A升)中之含量,若過少則蝕刻速度 慢;若過多則依舊無法獲得配合量所對應之效果,故較佳 為50〜3〇〇g。過氧化氫之㈣液中之含量若過少則餘刻 Ο 速度慢;若過多則難以約±1 ^ 勺勺姓刻,故較佳為每硫酸1 〇〇g為 10〜30質量%。 扣甲唧您處理中,較佳為一面將蝕刻液維持於室溫〜 抓’且一面對印刷配線板之銅或銅合金配線圖案面進行 喷射,或將印刷配線板浸潰於㈣後之㈣液中。 本發明之印刷配線板,可適用於所謂可挽性印刷配線 板、玻璃環氧配線板、積層印刷配線板等。 或銅合金圖案,亦可適用以往 作為銅 ❹之任意厚度者。 之丰加成法或增層法所形成 此外,印刷配線板之保護層的形成位置,係於銅或銅 σ金配線圖案之至少一部分之上方。於配線圖案露出之情 呆護層與配線圖案之交界’故得以輕易確認出 性的提升效果。此外,於配線圖案的整面 被保濩層覆蓋之情形,因無法假定該等之間可形 故難以確認耐蝕刻性的提升效果。 | 以上說明之本發明之印刷配線板,可藉由以下方式製 19 201012851 造。首先,將印刷配線板之銅或銅合金配線圖案的表面利 用上述方式進行表面粗化處理。接著,利用棒塗佈機、輕 塗佈機、缺角輪塗佈機(Comma coater)、或網板印刷機等將 本發明之感光性矽氧烷聚醯亞胺樹脂組成物塗佈於表面粗 化處理後之配線圖案上,以50〜1〇〇。(:乾燥成膜,然後將其 膜隔著光罩照射紫外線等之活性能量線使其曝光,再藉由 利用氫氧化鈉水溶液等之鹼顯影去除曝光部分使其圖案 化,之後藉由加熱至120〜25(TC之後烘進行熱硬化以形成 保護層,進而視需要可施行無電鍍鎳等之無電鍍,或施行❿ 電鍍來製造。 實施例 以下藉由實施例對本發明進行更具體的說明。 參考例1 (含有交聯劑之感光性矽氧烷聚醢亞胺樹脂組 成物) (1)石夕氧烧聚酿亞胺樹脂之製造 於具備Dean-Stark分離管(Dean-Stark Trap)之聚醯亞參 胺樹脂用合成裝置之反應容器投入862.65g(0.639mol)之二 胺基石夕氧烧(二胺基二苯基/二曱基石夕氧烷(胺當量 675g/mol) '商品名:χ·22-9409 '信越化學工業股份有限公 司製)' 363.6芭(1.〇1111〇1)之3,3’,4,4,-二苯颯四羧酸二酐 (Rikacid DSDA、新日本理化股份有限公司製,純度99 6%)、 547g之二甘醇二甲醚、200g之甲笨,並將混合物充分攪拌 2小時。其後,升溫至1851,並保持在該溫度2小時,一 20 201012851 邊以Dean-Stark分離管將水回收,一邊回流攪拌反應液。 將所得之反應混合物塗佈於氧化被膜已除去之矽晶圓 上’以100°C乾燥10分鐘再以FT-IR透過法進行末端官能 基之鑑定。因於1780cm·1附近出現醯亞胺羰基之吸收,並 於1860cm·1附近確認到環狀酸酐羰基伸縮振動之吸收,故 可確認生成酸酐末端矽氧烷募聚物。 將反應混合物放冷至80C,投入101.44g(0.361mol)之 3,3’ _二胺基-4,4,_二羥基二苯砜(BSDA、小西化學工業股 © 份有限公司製;純度99.7%),並於室溫攪拌12小時。攪拌 後升溫至1 85°C,並以該溫度加熱攪拌2小時。其後,冷卻 至室溫’而獲得含二苯基亞矽基單位之矽氧烷聚醯亞胺樹 脂之清漆。 (2)感光性矽氧烷聚醯亞胺樹脂組成物之調製 於石夕氧烧聚酿亞胺樹脂之清漆甲加入感光劑 (4NT-300、東洋合成工業股份有限公司)1〇phr、金屬減活劑 (防鏽劑)(CDA-l〇、ADEKA股份有限公司)0.3phr、作為交聯 ©劑之液狀環氧樹脂(jER807、曰本環氧樹脂股份有限公 司)0.5phr、苯并噁嗪(BF_BXZ、小西化學工業股份有限公 司)5Phr、可溶酚醛樹脂(BRL_274、昭和高分子股份有限公 司)2phr,於室溫下均勻地混合以獲得感光性矽氧烷聚醯亞 胺樹脂組成物。此處,phr之意思為當聚醯亞胺固體成分為 100質量份時之添加量(質量份)。 參考例2(不含交聯劑之感光性矽氧烷聚醯亞胺樹脂組 21 201012851 成物) 除了不使用作為交聯劑之液狀環氧樹脂(jER807、曰本 環氧樹脂股份有限公司)、笨并噁嗪(BF_Bxz '小西化學工 業股份有限公司)、可溶酚醛樹脂(BRL-274、昭和高分子股 份有限公司)以外,其餘以與參考例1相同的方式取得矽氧 烧聚醯亞胺樹脂’並進一步製得感光性石夕氧燒聚醯亞胺樹 脂組成物。 參考例3(經過濕式喷砂之物理性粗化處理後之配線板瘳 之製作) 於絕緣層厚25&quot;m及銅厚12#m之覆銅積層板(Upisel N、于部曰東化成股份有限公司)之銅表面,利用Mac〇h〇 c〇.,It is preferred that the SO twist is sprayed onto the printed wiring board. As a preferred chemical polishing treatment, there are a tracer acid, a hydrogen peroxide, an azole system, and an etchant (including a sulfur, an embroidering agent, or an aromatic peroxide preparation). Here, as the wow-based performance-prevention agent, a miso system is mentioned: an aryl group such as a salivary compound or a tetra-salt compound is inhibited. Compounds and threes are used as a peroxidation of the genus of the genus. 18 201012851 Hydrogen decomposition inhibitors include benzoic acids, for example, toluene acid, benzoquinone sulfonic acid, and the like. In addition, it is generally believed that by the above chemical polishing treatment, the azole-based anti-winding agent or the aromatic bismuth peroxide can be used to chemically or physically bind to the surface of the copper or copper alloy. ;,, · ««', and the adhesion between it and the protective layer of organic matter is further enhanced. If the content of the combing acid etching solution (1 彳 彳 φ + l A liter) is too small, the etching speed is slow; if too much, the effect corresponding to the compounding amount is still not obtained, so it is preferably 50 to 3 〇〇g. . If the content of the (4) liquid in the hydrogen peroxide is too small, the residual Ο is slow; if it is too large, it is difficult to be about ± 1 ^ scoop, so it is preferably 10 to 30% by mass per sulphuric acid. In the process of handling the button armor, it is preferable to maintain the etching solution at room temperature until the surface of the copper or copper alloy wiring pattern of the printed wiring board is sprayed, or the printed wiring board is immersed in (4). (4) In the liquid. The printed wiring board of the present invention can be applied to a so-called pullable printed wiring board, a glass epoxy wiring board, a laminated printed wiring board, or the like. Or a copper alloy pattern can also be applied to any thickness of the copper crucible. The formation of the protective layer of the printed wiring board is formed above at least a part of the copper or copper σ gold wiring pattern. When the wiring pattern is exposed, the boundary between the protective layer and the wiring pattern is made, so that the effect of improving the performance can be easily confirmed. Further, in the case where the entire surface of the wiring pattern is covered by the protective layer, it is impossible to confirm that the etching resistance is difficult to confirm. The printed wiring board of the present invention described above can be manufactured by the following method 19 201012851. First, the surface of the copper or copper alloy wiring pattern of the printed wiring board is subjected to surface roughening treatment in the above manner. Next, the photosensitive oxirane polyimine resin composition of the present invention is applied to the surface by a bar coater, a light coater, a comma coater, a screen printing machine or the like. On the wiring pattern after the roughening treatment, 50 to 1 〇〇 is used. (: drying the film, and then exposing the film to an active energy ray such as ultraviolet rays through a mask, and then removing the exposed portion by patterning with an alkali solution such as an aqueous solution of sodium hydroxide or the like, followed by heating to 120 to 25 (TC is then baked and thermally cured to form a protective layer, and may be subjected to electroless plating such as electroless nickel plating or electroplating, if necessary.) EXAMPLES Hereinafter, the present invention will be more specifically described by way of examples. Reference Example 1 (Photosensitive oxirane polyimine resin composition containing a crosslinking agent) (1) The production of a sulphur-oxygenated yoke resin was carried out with a Dean-Stark Trap. Polyethylene sulfoxide resin was charged with 862.65 g (0.639 mol) of diamine-based oxyn (diaminodiphenyl/diindolyl oxo-oxane (amine equivalent 675 g/mol)' in the reaction vessel of the synthesis apparatus. :χ·22-9409 'Shin-Etsu Chemical Industry Co., Ltd.'' 33.6' (1.〇1111〇1) 3,3',4,4,-diphenylfluorene tetracarboxylic dianhydride (Rikacid DSDA, new Made by Japan Physicochemical Co., Ltd., purity 99 6%), 547 g of diglyme, 200 g of the product was stupid, and the mixture was thoroughly stirred for 2 hours. Thereafter, the temperature was raised to 1851, and maintained at this temperature for 2 hours, at 20 201012851, the water was recovered by a Dean-Stark separation tube, and the reaction liquid was stirred under reflux. The reaction mixture was applied to a crucible wafer from which the oxide film had been removed. 'The sample was dried at 100 ° C for 10 minutes and then identified by the FT-IR transmission method. The absorption of the quinone imine carbonyl occurred near 1780 cm·1. The absorption of the cyclic anhydride carbonyl stretching vibration was confirmed in the vicinity of 1860 cm·1, so that it was confirmed that an acid anhydride terminal oxime condensate was formed. The reaction mixture was cooled to 80 C, and 101.44 g (0.361 mol) of 3, 3 was charged. '_Diamino-4,4,-dihydroxydiphenyl sulfone (BSDA, manufactured by Xiaoxi Chemical Industry Co., Ltd.; purity: 99.7%), and stirred at room temperature for 12 hours. After stirring, the temperature was raised to 1 85 °C. And heating and stirring at this temperature for 2 hours. Thereafter, it was cooled to room temperature' to obtain a varnish of a nonylphenylidene group-containing oxirane polyimine resin. (2) Photosensitive oxirane polyfluorene Preparation of imine resin composition in Shixi oxygen burning polyimine resin Lacquer A is added to the sensitizer (4NT-300, Toyo Synthetic Industrial Co., Ltd.) 1 phr, metal deactivator (rust inhibitor) (CDA-l〇, ADEKA Co., Ltd.) 0.3 phr, as a cross-linking agent Liquid epoxy resin (jER807, Sakamoto Epoxy Co., Ltd.) 0.5 phr, benzoxazine (BF_BXZ, Xiaoxi Chemical Industry Co., Ltd.) 5 Phr, resol phenolic resin (BRL_274, Showa Polymer Co., Ltd.) 2 phr was uniformly mixed at room temperature to obtain a photosensitive oxirane polyimine resin composition. Here, phr means the amount (parts by mass) added when the solid content of the polyimine is 100 parts by mass. Reference Example 2 (Photosensitive fluorinated polyoxyimide resin group 21 without cross-linking agent; 201012851 product) Except that liquid epoxy resin as a crosslinking agent was not used (jER807, Sakamoto Epoxy Co., Ltd.) In the same manner as in Reference Example 1, except for the pheno-oxazine (BF_Bxz 'Xiaoxi Chemical Industry Co., Ltd.) and the resol phenolic resin (BRL-274, Showa Polymer Co., Ltd.), the oxime-agglomeration was obtained in the same manner as in Reference Example 1. The imine resin' is further prepared to obtain a photosensitive sulphur oxide polyimine resin composition. Reference Example 3 (Production of wiring board after physical roughening treatment by wet blasting) Copper-clad laminate with insulating layer thickness 25 &quot;m and copper thickness 12#m (Upisel N, Yubu Toho Kasei Copper surface of the company, using Mac〇h〇c〇.,

Ltd之屬式喷砂系統(參照http://www.macoho.co.jp),藉由 以下條件(WB 1)進行表面粗化處理,以獲得經物理性粗化處 理後之配線板(平均表面粗度Ra : 73.95nm)。 (WB1條件) 研磨劑:鋁微粒子 〇 中心粒徑:6.7/z m 水性漿料中研磨劑濃度:14體積% 使用噴槍:寬幅型 處理速度:1.8m/分 投射距離:20mm 投射角度:90度 空氣壓力:0.15MPa 22 201012851 參考例4(經過濕式喷砂之物理性粗化處理後之配線板 之製作) 除了將空氣壓力設為〇.25MPa以外(WB2條件),其餘 藉由重覆參考例3的方式,以獲得經物理性粗化處理後之 配線板(平均表面粗度Ra: l〇〇.7nm)。 參考例5(經過化學性粗化處理之配線板之製作)The blasting system of Ltd. (refer to http://www.macoho.co.jp), the surface roughening treatment is carried out by the following conditions (WB 1) to obtain the wiring board after physical roughening (average Surface roughness Ra: 73.95 nm). (WB1 condition) Abrasive: Aluminum particle size Center particle size: 6.7/zm Abrasive concentration in aqueous slurry: 14% by volume Using spray gun: Wide processing speed: 1.8m/min Projection distance: 20mm Projection angle: 90 degrees Air pressure: 0.15 MPa 22 201012851 Reference Example 4 (Production of wiring board after physical roughening by wet blasting) Except that the air pressure is set to 〇.25 MPa (WB2 condition), the rest is repeated by reference. In the manner of Example 3, a wiring board after physical roughening treatment (average surface roughness Ra: l 〇〇. 7 nm) was obtained. Reference Example 5 (Production of wiring board subjected to chemical roughening treatment)

© 於絕緣層厚25私m及銅厚12以m之覆銅積層板(UpiseI N、宇部日東化成股份有限公司)之銅表面,首先以酸性洗 淨液(CB-7612、MEC股份有限公司)之1〇倍稀釋液(液溫25 °c )進行喷灑,再喷灑自來水,然後以蝕刻液(25 C )(BO7770VP、MEC股份有限公司)預浸泡,接著再以独刻 液(25 C )(BO7770VP、MEC股份有限公司)正式浸泡,然後 喷灌純水,再以氣刀(5(TC)去除水分,最後藉由鼓風機熱風 (80 C )乾燥’以獲得銅表面經過化學性粗化處理之配線板 〇 (蝕刻量··約0.5私m) 〇 參考例6(經過化學性粗化處理之配線板之製作) 於絕緣層厚25&quot;m及銅厚12心之覆銅積層板 N、宇部曰東化成股份有限公司)之銅表面,首先以軟姑刻 液(CPE-755、三菱瓦斯化學股份有限公司)之1〇倍稀釋液 (液溫30。〇進行浸泡。然後以純水洗淨,再以氣刀去除水 分,並藉由鼓風機熱風(5(rc)乾燥,以獲得銅表面經過化學 23 201012851 性粗化處理之配線板。 實施例1〜6以及比較例1〜3 依照表1所示之組合,利用棒塗佈機將參考例1或2 之感光性矽氧烧聚酿亞胺樹脂組成物塗佈於參考例3〜6之 配線板使其預乾燥後成為10 β τη,再以8(rc乾燥1〇分鐘。 對該樹脂組成物’隔著光罩照射紫外線(條件25〇〇mJ/ cm2) 進行曝光。曝光後,將基板浸潰於4(rc3質量%之氫氧化鈉 水溶液60秒,除去樹脂組成物膜的曝光部進行顯影。然後❹ 以30°C的水洗淨基板60秒,再於10質量%(室溫)之稀硫酸 水溶液酸洗淨ίο秒,進而以蒸餾水(室溫)清洗12〇秒。之 後,於氮環境氣氛下進行後烘(200t、6〇分),最後將樹脂 組成物膜熱硬化,以獲得具備保護層之配線板。 &lt; %狀一甲基石夕氧烧券聚物的滲出之抑制效果評價&gt; 從實施例以及比較例之配線板令存在樹脂組成物膜之 部位切取寬4mm、長50mm之尺寸之試樣,並於5〇ml/*❾ =流速之氦氣循環下26Gt加熱15分鐘,藉此將揮發性成 分自試樣中去除’並於他處將該揮發成分於-抓的環境收 集於Τ^η.ΤΑ收集管中。接著,將所收集之成份以既定條 件下氣化於氦氣流巾’再將其氣氣導入gC_ms裝置 (JAS100、JAI公司製),對環狀二甲基梦氧燒寡聚物的量進 行定量。所得之結果示於表i。 24 201012851 &lt;耐鑛敷性之評價&gt; 於實施例以及比較例之配線板所露出之銅表面進行鍍 金以形成鍍金膜(〇.〇3 μ爪厚)。或者,於銅表面露出之曝光 邻進行鍍鎳/鍍金以形成硬質鑛Ni(3 V m)/鍍金(〇 ν m 厚)。對所得之經電鍍處理且具備保護層之實施例以及比較 例之配線板中之電鍍區域周圍的保護層之變色情況以目視 方式進行評價。未變色之情形評價為良、有些許變色的 情形評價為不良(NG)。 表1 比較例 實施例 1 2 3 1 2 3 4 5 6 PSIP*1中有無交聯劊 無*3 有*4 無*3 有*4 有*4 有*4 有*4 有*4 有*4 PWB*2之表面粗化條件 習知*5 習知*5 WB1*6 WB1*6 WB1*6 WB2*7 WB2*7 CE*8 CE*8 軟質鍍Au 實施 實施 實施 實施 實施 實施 硬質鍍Ni/Au _ _ ____ 實施 實施 實施 耐鍍敷性評儅 NG NG G G G G G G G 狀二甲基矽氧烷寡聚物之淥, ϋ量(仁 g/cm2) 三倍體D3 0.27 0.06 0.31 0.08 0.08 0.05 0.08 0.05 0.04 四倍體D4 0.11 0.02 0.09 0.04 0.05 0.03 0.04 0.03 0.04 五倍體D5 0.03 0.01 0.03 0.01 0.01 0.01 0.01 0.01 0.01 六倍體D6 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 D3〜D6之總計 0.42 0.09 0.43 0.13 0.14 0.09 0.13 0.09 0.09 其他之矽氧烷 2.56 1.01 2.70 1.01 1.10 1.10 1.01 1.10 1.11 總矽氧烷 2.97 1.10 3.13 1.14 1.24 1.19 1.14 1.10 1.20 * 1 :感光性矽氧烷聚醯亞胺樹脂組成物 25 201012851 氺2 :配線板 * 3 :參考例2之矽氧烷聚醯亞胺樹脂組成物 * 4 :參考例1之矽氧烷聚醯亞胺樹脂組成物 * 5 :參考例6之經化學性研磨處理後之配線板 * 6 :參考例3之經濕式喷砂處理之物理性粗化處理後 之配線板 木7 :參考例4之經濕式喷砂處理之物理性粗化處理後 之配線板 * 8 :參考例5之經化學性粗化處理後之配線板 ❹ 從表1可明確得知,參考例3〜5之經表面粗化處理後 之配線板中’實施例1〜6之配線板(所具備的保護層係具有 由含有參考例1之交聯劑之特有的矽氧烷聚醯亞胺樹脂組 成物之熱硬化物所構成之三維交聯構造)可抑制環狀二甲基 石夕氧烧募聚物的滲出,且具有優異的耐鍍敷性。 另一方面,參考例6之習知之經化學研磨處理後之配 線板中’比較例1之配線板(所具備的保護層係使用不含交 聯劑之參考例2之感光性矽氧烷聚醯亞胺樹脂組成物而得)® 並未抑制環狀二甲基矽氧烷寡聚物的滲出,且亦具有耐鑛 敷陡的問題。參考例6之習知之經化學研磨處理後之配線 板中’比較例3之配線板(所具備的保護層係使用參考例1 感光〖生石夕氧烧聚醯亞胺樹脂組成物而得)並未抑制環狀二 甲基石夕氧烧寡聚物的滲出’此外依然有耐鍍敷性的問題。 才反地,相對於比較例1之情況,比較例2之配線板(所具 備的保°隻層係使用含有交聯劑之參考例1之感光性矽氧烷 26 201012851 聚醯亞胺樹脂組成物而得、 ^ A , )雖可抑制環狀二甲基矽氧俨寘取 物的滲出,且耐鍍敷性相較 疋募聚 衩比較例1已獲改善,作鱼 例3、進而實施例丨〜6相 仁與比較 比仍有耐鍍敷性的問題。 產業上之可利用性 具備有本發明之保蹲恳^ c 一― °層之印刷配線板中,因使用具有 一本基亞梦基單位之發氣户_ 氧坑一胺作為二胺成分,且進一步 於感光㈣氧Μ醢亞料職成物㈣成之薄膜等保護 層令形成有特定之熱硬化性交聯劑所致之三維構造,故可 防止甚至是抑制環狀二甲其 Τ基夕虱烧寡聚物的渗出,進而藉 由熱硬化而獲得良好之而+ # # u 、 役付民炸之耐鍍敷性。此外,印刷配線板之銅 或銅口金配線圖案因預先經過表面粗化處理,故可提升銅 或鋼合金配線圖案與保護層之間的密合性,亦可更加提升 保蔓層之耐鍍敷性。因此,可適用於連接可靠性之高印刷 配線板。 【圖式簡單說明】 ❹ 無 【主要元件符號說明】 無 27© The copper surface of the copper-clad laminate (UpiseI N, Ube Nitto Chemical Co., Ltd.) with a thickness of 25 m and a copper thickness of 12 m, first with an acidic cleaning solution (CB-7612, MEC Co., Ltd.) Spray 1 〇 dilution (liquid temperature 25 °c), spray tap water, and then pre-soak with etchant (25 C) (BO7770VP, MEC Co., Ltd.), then use the original solution (25 C (BO7770VP, MEC Co., Ltd.) formally soaked, then sprinkle pure water, then remove the water with an air knife (5 (TC), and finally dry by blower hot air (80 C) to obtain copper surface chemically roughened Wiring board 〇 (etching amount · about 0.5 private m) 〇 Reference Example 6 (Production of wiring board subjected to chemical roughening treatment) Copper-clad laminate N with insulating layer thickness 25 &quot;m and copper thickness 12 hearts The copper surface of Ube Mindong Chemical Co., Ltd. is firstly diluted with a 1 〇 dilution of CPE-755 (CPE-755, Mitsubishi Gas Chemical Co., Ltd.) (liquid temperature 30. 浸泡, then washed with pure water) Net, then remove the water with an air knife and dry it with a blower hot air (5 (rc) A wiring board having a copper surface subjected to chemical 23 201012851 roughening treatment. Examples 1 to 6 and Comparative Examples 1 to 3 According to the combination shown in Table 1, the photosensitive oxygen of Reference Example 1 or 2 was used by a bar coater. The fired polyimine resin composition was applied to the wiring board of Reference Examples 3 to 6 to be pre-dried to become 10 β τη, and then dried by 8 (rc for 1 minute. The resin composition was irradiated through a reticle) Ultraviolet light (condition: 25 〇〇mJ/cm2) was exposed. After the exposure, the substrate was immersed in 4 (rc 3 mass% sodium hydroxide aqueous solution for 60 seconds, and the exposed portion of the resin composition film was removed for development. Then, ❹ was 30°. The substrate of C was washed with water for 60 seconds, and then washed with a dilute sulfuric acid aqueous solution of 10% by mass (room temperature) for 0.25 hours, and further washed with distilled water (room temperature) for 12 seconds. Thereafter, post-baking was performed under a nitrogen atmosphere. (200t, 6〇), and finally, the resin composition film is thermally cured to obtain a wiring board having a protective layer. <Evaluation of the effect of suppressing the bleeding of the %-form monomethyl oxysulfide granules> The wiring board of the example and the comparative example is such that the film of the resin composition film is cut. a sample having a width of 4 mm and a length of 50 mm and heating at 26 Gt for 15 minutes under a helium circulation of 5 〇 ml / * ❾ = flow rate, thereby removing volatile components from the sample and volatilizing it elsewhere The ingredients were collected in a 抓 η ΤΑ ΤΑ collection tube. Then, the collected components were vaporized under a predetermined condition in a sputum air sling, and then the gas was introduced into a gC_ms device (JAS100, manufactured by JAI Corporation). The amount of the cyclic dimethyloxy oxymethylene oligomer was quantified. The results obtained are shown in Table i. 24 201012851 &lt;Evaluation of mineralization resistance&gt; The wiring boards of the examples and the comparative examples were exposed. The copper surface is gold plated to form a gold plated film (〇.〇3 μp thick). Alternatively, the exposure exposed on the copper surface is nickel-plated/gold plated to form a hard ore Ni(3 V m)/gold plating (〇 ν m thick). The discoloration of the protective layer around the plating region in the obtained electroplated and protected layer and the wiring board of the comparative example was visually evaluated. The case where the case of no discoloration was evaluated as good and slightly discolored was evaluated as poor (NG). Table 1 Comparative Example Example 1 2 3 1 2 3 4 5 6 PSIP*1 with or without cross-linking 刽 no*3 Yes*4 No*3 Yes*4 Yes*4 Yes*4 Yes*4 Yes*4 Yes*4 PWB*2 Surface Roughening Condition Conventional*5 Conventional*5 WB1*6 WB1*6 WB1*6 WB2*7 WB2*7 CE*8 CE*8 Soft Plating Au Implementation Implementation Implementation Implementation Hard Plating Ni/ Au _ _ ____ Implementation implementation of plating resistance evaluation NG NG GGGGGGG dimethyl methoxy olefin oligomer ϋ, ϋ quantity (len g / cm2) triploid D3 0.27 0.06 0.31 0.08 0.08 0.05 0.08 0.05 0.04 Tetraploid D4 0.11 0.02 0.09 0.04 0.05 0.03 0.04 0.03 0.04 Pentaploid D5 0.03 0.01 0.03 0.01 0.01 0.01 0.01 0.01 hexaploid D6 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 Total of D3~D6 0.42 0.09 0.43 0.13 0.14 0.09 0.13 0.09 0.09 Other alkane 2.56 1.01 2.70 1.01 1.10 1.10 1.01 1.10 1.11 Total alkane 2.97 1.10 3.13 1.14 1.24 1.19 1.14 1.10 1.20 * 1 : Photosensitive fluorinated polyaniline resin composition 25 201012851 氺2 : Wiring board* 3 : The oxirane polyimine resin composition of Reference Example 2 * 4 : The oxygen of Reference Example 1 Polyimine resin composition * 5 : wiring board after chemical polishing treatment of Reference Example 6 * 6 : Distribution board after physical roughening treatment by wet blasting of Reference Example 3 : Reference Example 4: The wiring board after the physical roughening treatment by the wet blasting treatment * 8 : The wiring board after the chemical roughening treatment of Reference Example 5 ❹ It is clear from Table 1 that Reference Examples 3 to 5 In the wiring board after surface roughening treatment, the wiring board of Examples 1 to 6 (the protective layer provided has a specific decyl oxymethylene imide resin composition containing the crosslinking agent of Reference Example 1). The three-dimensional crosslinked structure composed of the heat-cured material can suppress the bleeding of the cyclic dimethyl anthrax and the excellent plating resistance. On the other hand, in the conventionally known chemically polished wiring board of Reference Example 6, the wiring board of Comparative Example 1 (the protective layer provided was a photosensitive oxyalkylene polymerization of Reference Example 2 containing no crosslinking agent). The quinone imine resin composition does not inhibit the exudation of the cyclic dimethyl methoxy olefin oligomer, and also has the problem of steep mineralization resistance. Referring to the conventionally known chemically polished wiring board of the example 6, the wiring board of Comparative Example 3 (the protective layer provided is obtained by using the reference example 1 sensitizing the yttrium-oxygenated yttrium imide resin composition) The bleed out of the cyclic dimethyl anthracycline oligomer is not inhibited, and there is still a problem of plating resistance. In contrast, in the case of Comparative Example 1, the wiring board of Comparative Example 2 (the only layer provided was a photosensitive siloxane oxide containing the cross-linking agent of Reference Example 1). Obtaining, ^ A , ) can inhibit the exudation of the cyclic dimethyl anthracene, and the plating resistance is improved compared with the 疋 疋 衩 衩 衩 , , , , 衩 衩 衩For example, ~6 phase kernels have a problem with plating resistance. Industrial Applicability The printed wiring board having the protective layer of the present invention is used as a diamine component by using a gas generator having a base of a dream base unit. Further, the protective layer such as a film formed by the photosensitive (tetra) oxysulfide sub-material (4) forms a three-dimensional structure caused by a specific thermosetting cross-linking agent, thereby preventing or even suppressing the cyclic dimethyl methacrylate The bleed out of the smoldering oligomer is further improved by thermal hardening, and the plating resistance of the squid is improved. In addition, since the copper or copper gold wiring pattern of the printed wiring board is subjected to surface roughening treatment in advance, the adhesion between the copper or steel alloy wiring pattern and the protective layer can be improved, and the plating resistance of the protective layer can be further improved. Sex. Therefore, it can be applied to a printed wiring board with high reliability. [Simple description of the diagram] ❹ None [Main component symbol description] None 27

Claims (1)

201012851 七、申請專利範圍: 1 · 一種印刷配線板,係於印刷配線板之銅或銅合金配線 圖案之至少一部分之上形成有由感光性矽氧烷聚醯亞胺樹 脂組成物之熱硬化物所構成之保護層;該感光性矽氧垸聚 醯亞胺樹脂組成物係含有矽氧烷聚醯亞胺樹脂、交聯劑、 以及光酸發生劑;該矽氡烷聚醯亞胺樹脂係由四羧酸二 酐 '具有二苯基亞矽基單位之矽氧烷二胺、與不含矽氧垸 之一胺進行酿亞胺化而得者;其特徵在於:201012851 VII. Patent application scope: 1 . A printed wiring board formed on a copper or copper alloy wiring pattern of a printed wiring board, formed with a thermosetting substance composed of a photosensitive decyl oxymethylene imide resin. a protective layer; the photosensitive anthraquinone polyimine resin composition comprising a decyl alkoxyimine resin, a crosslinking agent, and a photoacid generator; the decane polyimine resin system It is obtained by the imidization of a tetracarboxylic dianhydride having a diphenylarylene unit of a nonoxyalkylene diamine and an amine containing no anthracene; characterized by: 作為交聯劑,係使用相對石夕氧烧聚醯亞胺樹脂1 〇〇質 量份為1〜20質量份之選自液狀環氧樹脂、苯并噁嗪類及 可溶酚醛樹脂類所構成之群中之至少一種; 作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂1〇〇質 量份為5〜3 0質量份之光酸發生劑,· 銅或銅合金配線圖案的表面係經過表面粗化處理。 2 ·如申請專利範圍第丨項之印刷配線板,其中交聯劑^ 液狀環氧樹脂及/或苯并対類;或液狀環氧樹脂、苯; 噁嗪類、以及可溶酚醛樹脂類。The crosslinking agent is one selected from the group consisting of liquid epoxy resins, benzoxazines, and resol phenol resins, in an amount of from 1 to 20 parts by mass based on 1 part by mass of the cerium oxide polyimine resin. At least one of the group; as the sensitizer, a photoacid generator having a mass fraction of 5 to 30 parts by mass relative to the oxime phthalimide resin, and a surface system of a copper or copper alloy wiring pattern; After surface roughening treatment. 2 · The printed wiring board according to the scope of the patent application, in which the crosslinking agent ^ liquid epoxy resin and / or benzopyrene; or liquid epoxy resin, benzene; oxazines, and resol phenolic resin class. 3. 如申請專利範圍第1項或第 兄乐Z項之印刷配線板,其1 液狀環氧樹脂的黏度為1〜1〇〇〇〇〇mPa . s。 4. 如申請專利範圍第1〜3 ..^ T饪項之印刷配線板, 其中s玄四羧酸二酐為3 3,4 4,_贫且也 1心),4,4 _ 一本基颯四羧酸二酐。 5. 如申請專利範圍第1〜4項中 甘士 a 任項之印刷配線板’ 中八有二本基亞矽基單位 _ 造: /乳況一胺具有式(1)之掮 28 (1) 2010128513. For the printed wiring board of Patent No. 1 or Brother Z, the viscosity of the liquid epoxy resin is 1~1〇〇〇〇〇mPa.s. 4. For the printed wiring board of the patent range 1~3 ..^ T, the s-tetracarboxylic dianhydride is 3 3, 4 4, _ lean and also 1 heart), 4, 4 _ one Based on tetracarboxylic dianhydride. 5. For example, in the printed wiring board of the Gans a term in the first to fourth patent applications, there are two bases in the base of the product. _ Made: / Milky one amine has the formula (1) 掮 28 (1 ) 201012851 Γ3 r?% ___sj-〇] I k I J CH3 U (式中,n為i〜3〇之整數,爪為丨〜2〇之整數)。 6.如申請專利範圍第卜5項中任一項之印刷配線板, 其中不含矽氧烷之二胺為二胺基酚衍生物。 Ο 7·如申請專利範圍第6項之印刷配線板,其中二胺基酚 衍生物為3,3’ -二胺基_4,4,_二羥基二苯基碾。 8.如申凊專利範圍第1〜7項中任一項之印刷配線板, 其中聚矽氧烷聚醯亞胺樹脂為四羧酸二酐、矽氡烧二胺、 不含矽氧烷之二胺之反應混合物在^(^〜丨丨質量%之水存 在下進行醯亞胺化所得者。 9·如申請專利範圍第1〜8項中任一項之印刷配線板, 其中光酸發生劑為鄰醌二疊氮化合物。 〇 10· —種用以製造申請專利範圍第1項之印刷配線板之 製造方法’係於印刷配線板之銅或銅合金配線圖案的表面 進行表面粗化處理; 於經表面粗化處理後之銅或銅合金配線圖案之至少一 部分之上形成有由感光性矽氧烷聚醯亞胺樹脂組成物經過 成膜、並進行曝光、顯影以圖案化、再藉由後烘而熱硬化 成為保護層;該感光性矽氧烷聚醯亞胺樹脂組成物係含有 發乳院聚酿亞胺樹脂、交聯劑、以及光酸發生劑;該石夕氧 燒聚醯亞胺樹脂係由四羧酸二酐、具有二苯基亞矽基單位 29Γ3 r?% ___sj-〇] I k I J CH3 U (where n is an integer of i~3〇, and the claw is an integer of 丨~2〇). 6. The printed wiring board according to any one of claims 5, wherein the diamine containing no alkane is a diaminophenol derivative. Ο 7. The printed wiring board of claim 6, wherein the diaminophenol derivative is 3,3'-diamino-4,4,dihydroxydiphenyl. 8. The printed wiring board according to any one of claims 1 to 7, wherein the polyoxyalkylene polyimine resin is tetracarboxylic dianhydride, terpene diamine, and no alkane. The reaction mixture of the diamine is obtained by the hydrazine imidation in the presence of 5% by mass of water. The printed wiring board according to any one of claims 1 to 8, wherein photoacid generation occurs. The agent is an ortho-quinone diazide compound. 〇10· A method for producing a printed wiring board according to item 1 of the patent application section is to perform surface roughening treatment on the surface of a copper or copper alloy wiring pattern of a printed wiring board. Forming a photosensitive decyl oxymethylene imide resin composition on at least a portion of the copper or copper alloy wiring pattern after surface roughening treatment, forming a film, exposing, developing, patterning, and borrowing Thermally hardened by post-baking to form a protective layer; the photosensitive oxirane polyimine resin composition contains a hair emulsion polyimine resin, a crosslinking agent, and a photoacid generator; The quinone imine resin is composed of tetracarboxylic dianhydride and diphenyl phenyl矽基单位 29 201012851 之石夕氧貌二胺、不含梦氧炫之二胺進行鏟亞胺化而得者; 其特徵在於: 作為交聯劑’係使用相對矽氧烷聚醯亞胺樹脂丨〇〇質 量份為1〜20質量份之選自液狀環氧樹脂、苯并噁嗪類及 可溶酚醛樹脂類所構成之群中之至少一種; θ作為感光劑,係使用相對矽氧烷聚醯亞胺樹脂1〇〇質 量份為5〜30質量份之光酸發生劑。201012851 The shovel-imidation of diamine and dioxane-free diamine is obtained by shovel imidization; it is characterized by: using as a cross-linking agent 1 part by weight to 20 parts by mass of at least one selected from the group consisting of liquid epoxy resins, benzoxazines, and resole phenolic resins; θ as a sensitizer, using a relative oxime group The amine resin is a photoacid generator in an amount of 5 to 30 parts by mass per part by mass. 處理專利範圍第1〇項之製造方法,其中表面粗化 處理為使用水性漿料之濕式噴砂處理。 12.如申請專利範圍第1〇 處理為使用蚀刻劑之化學研磨處理“方法,其中表面粗化 八、圖式: (無) 30The manufacturing method of the first aspect of the invention, wherein the surface roughening treatment is a wet blasting treatment using an aqueous slurry. 12. For example, the scope of patent application is treated as a chemical grinding treatment using an etchant, in which the surface is roughened. 8. Pattern: (none) 30
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