TWI371331B - Method and device of laser processing and control device of processing - Google Patents
Method and device of laser processing and control device of processingInfo
- Publication number
- TWI371331B TWI371331B TW098121335A TW98121335A TWI371331B TW I371331 B TWI371331 B TW I371331B TW 098121335 A TW098121335 A TW 098121335A TW 98121335 A TW98121335 A TW 98121335A TW I371331 B TWI371331 B TW I371331B
- Authority
- TW
- Taiwan
- Prior art keywords
- processing
- control device
- laser processing
- laser
- control
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2009/058197 WO2010122667A1 (en) | 2009-04-24 | 2009-04-24 | Laser processing method, laser processing system and processing controller |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201038348A TW201038348A (en) | 2010-11-01 |
TWI371331B true TWI371331B (en) | 2012-09-01 |
Family
ID=43010802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098121335A TWI371331B (en) | 2009-04-24 | 2009-06-25 | Method and device of laser processing and control device of processing |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5236071B2 (en) |
KR (1) | KR101270287B1 (en) |
CN (1) | CN102341212B (en) |
TW (1) | TWI371331B (en) |
WO (1) | WO2010122667A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140092402A (en) * | 2011-11-16 | 2014-07-23 | 어플라이드 머티어리얼스, 인코포레이티드 | Laser scribing systems, apparatus, and methods |
TW201431634A (en) * | 2013-02-01 | 2014-08-16 | Pard Hardware Ind Co Ltd | Tool labeling method |
JP6647888B2 (en) * | 2016-01-29 | 2020-02-14 | ビアメカニクス株式会社 | Laser processing method and laser processing apparatus |
JP6499616B2 (en) * | 2016-06-10 | 2019-04-10 | ファナック株式会社 | Program creation device with function to optimize machining order |
JP6783165B2 (en) * | 2017-02-28 | 2020-11-11 | ビアメカニクス株式会社 | Laser processing equipment and laser processing method |
CN107127463A (en) * | 2017-05-27 | 2017-09-05 | 东莞市盛雄激光设备有限公司 | A kind of HDI circuit borings machine |
CN110919168A (en) * | 2018-08-31 | 2020-03-27 | 大族激光科技产业集团股份有限公司 | Laser processing system and laser processing method |
KR102125030B1 (en) * | 2018-12-07 | 2020-06-19 | 주식회사 이오테크닉스 | Apparatus for laser marking and method of laser marking using the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4271969B2 (en) * | 2003-03-18 | 2009-06-03 | 住友重機械工業株式会社 | Method and apparatus for dividing data between multiple axes of laser beam machine |
US20060000811A1 (en) * | 2004-06-30 | 2006-01-05 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical element changer for versatile use in laser manufacturing |
JP2007237242A (en) * | 2006-03-09 | 2007-09-20 | Hitachi Via Mechanics Ltd | Laser beam machining apparatus |
JP4787091B2 (en) * | 2006-06-27 | 2011-10-05 | 株式会社ディスコ | Via hole processing method |
-
2009
- 2009-04-24 KR KR1020117016698A patent/KR101270287B1/en not_active IP Right Cessation
- 2009-04-24 JP JP2011510136A patent/JP5236071B2/en active Active
- 2009-04-24 WO PCT/JP2009/058197 patent/WO2010122667A1/en active Application Filing
- 2009-04-24 CN CN200980157832.1A patent/CN102341212B/en active Active
- 2009-06-25 TW TW098121335A patent/TWI371331B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN102341212B (en) | 2014-07-09 |
JPWO2010122667A1 (en) | 2012-10-22 |
JP5236071B2 (en) | 2013-07-17 |
CN102341212A (en) | 2012-02-01 |
WO2010122667A1 (en) | 2010-10-28 |
KR20110106381A (en) | 2011-09-28 |
TW201038348A (en) | 2010-11-01 |
KR101270287B1 (en) | 2013-05-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |