TWI366327B - - Google Patents

Info

Publication number
TWI366327B
TWI366327B TW094111685A TW94111685A TWI366327B TW I366327 B TWI366327 B TW I366327B TW 094111685 A TW094111685 A TW 094111685A TW 94111685 A TW94111685 A TW 94111685A TW I366327 B TWI366327 B TW I366327B
Authority
TW
Taiwan
Application number
TW094111685A
Other versions
TW200608673A (en
Inventor
Kenichi Sadakane
Toru Shikayama
Tatsuo Abe
Akio Sakai
Shusaku Yoshida
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200608673A publication Critical patent/TW200608673A/zh
Application granted granted Critical
Publication of TWI366327B publication Critical patent/TWI366327B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/44—Protection against moisture or chemical attack; Windings specially adapted for operation in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/46—Fastening of windings on the stator or rotor structure
    • H02K3/47—Air-gap windings, i.e. iron-free windings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/22—Auxiliary parts of casings not covered by groups H02K5/06-H02K5/20, e.g. shaped to form connection boxes or terminal boxes
    • H02K5/225—Terminal boxes or connection arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/197—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
TW094111685A 2004-05-18 2005-04-13 Armature of canned linear motor and canned linear motor . TW200608673A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004148203 2004-05-18

Publications (2)

Publication Number Publication Date
TW200608673A TW200608673A (en) 2006-03-01
TWI366327B true TWI366327B (zh) 2012-06-11

Family

ID=35394473

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094111685A TW200608673A (en) 2004-05-18 2005-04-13 Armature of canned linear motor and canned linear motor .

Country Status (7)

Country Link
US (1) US7663270B2 (zh)
EP (2) EP1758231A4 (zh)
JP (1) JP4636019B2 (zh)
KR (1) KR100958484B1 (zh)
CN (1) CN1954477B (zh)
TW (1) TW200608673A (zh)
WO (1) WO2005112233A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9515530B2 (en) 2012-11-21 2016-12-06 Industrial Technology Research Institute Stator module and magnetic field generating structure thereof

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006038563A1 (ja) * 2004-10-01 2006-04-13 Nikon Corporation リニアモータ、ステージ装置、及び露光装置
US7939973B2 (en) * 2005-04-12 2011-05-10 Kabushiki Kaisha Yaskawa Denki Canned linear motor armature and canned linear motor
JP4524803B2 (ja) * 2005-10-18 2010-08-18 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP4837993B2 (ja) * 2006-01-06 2011-12-14 住友重機械工業株式会社 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置
JP2007336765A (ja) * 2006-06-19 2007-12-27 Yaskawa Electric Corp 冷媒冷却リニアモータ電機子および冷媒冷却リニアモータ
JP5423392B2 (ja) * 2007-06-13 2014-02-19 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2010220396A (ja) * 2009-03-17 2010-09-30 Yaskawa Electric Corp キャンド・リニアモータ電機子およびキャンド・リニアモータ
DE102010004642B4 (de) * 2010-01-13 2012-09-27 Integrated Dynamics Engineering Gmbh Magnetaktor sowie Verfahren zu dessen Montage
KR101489031B1 (ko) * 2010-03-11 2015-02-04 가부시키가이샤 야스카와덴키 리니어 모터 및 테이블 이송 장치
US8829740B2 (en) 2010-05-27 2014-09-09 Rockwell Automation Technologies, Inc. Sealed linear motor system
DE102010064049A1 (de) * 2010-12-23 2012-06-28 Hamilton Bonaduz Ag Pipettiervorrichtung mit Linearmotor
CN102761189B (zh) * 2011-04-28 2014-12-17 上海微电子装备有限公司 具有导流装置的直线电机
US9281735B2 (en) * 2012-01-05 2016-03-08 Rensselaer Polytechnic Institute Flux-switching linear permanent magnet machine with yokeless translator
DE102012204916A1 (de) 2012-03-27 2013-10-02 Beckhoff Automation Gmbh Statorvorrichtung für einen Linearmotor und lineares Transportsystem
DE202012013152U1 (de) 2012-03-27 2015-02-11 Beckhoff Automation Gmbh Statorvorrichtung für einen Linearmotor und lineares Transportsystem
DE102012204917A1 (de) 2012-03-27 2013-10-02 Beckhoff Automation Gmbh Positionserfassungsvorrichtung und Verfahren zum Erfassen einer Position eines beweglichen Elements einer Antriebsvorrichtung
EP2733833B1 (de) * 2012-11-15 2017-07-19 Etel S. A.. Primärteil eines eisenlosen Linearmotors
NL2012535B1 (en) * 2014-03-31 2016-02-15 Tecnotion B V A primary part for a linear motor, a linear motor comprising the same, and method for manufacturing such primary part.
EP3093965B1 (de) 2015-05-12 2017-11-22 Etel S. A.. Kurzhubiger linearmotor
JP6734089B2 (ja) * 2016-03-28 2020-08-05 キヤノントッキ株式会社 真空用リニアモータの可動子
US9968002B2 (en) * 2016-09-23 2018-05-08 Hiwin Mikrosystems Corp. Heat-transfer mechanism of motor primary
WO2018064370A1 (en) * 2016-09-29 2018-04-05 Gabrys Christopher W Process for assembly of motor-generators
EP3567708B1 (de) * 2018-05-09 2022-03-09 Etel S.A. Sekundärteil für einen eisenlosen linearmotor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1938917A (en) * 1930-03-03 1933-12-12 Emil C Loetscher Insulating material and process for making the same
US5115556A (en) * 1981-03-18 1992-05-26 George Gavrilidis Method of manufacturing windings for electromagnetic machines
KR900002983B1 (en) * 1985-04-11 1990-05-03 Furukawa Electric Co Ltd Lead alloy foil for laminated tape
US4794284A (en) * 1987-03-26 1988-12-27 Georges Buon Linear D.C. motor with non-ferrous stator core
US5783877A (en) * 1996-04-12 1998-07-21 Anorad Corporation Linear motor with improved cooling
JP3478084B2 (ja) * 1997-10-14 2003-12-10 日立金属株式会社 リニアモータ
JP3698585B2 (ja) 1998-04-13 2005-09-21 株式会社Ｎｅｏｍａｘ リニアモータ
JP2001025227A (ja) * 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
JP2001037200A (ja) * 1999-07-19 2001-02-09 Canon Inc リニアモータ、ステージ装置、露光装置およびデバイス製造方法
JP3832556B2 (ja) * 2000-02-25 2006-10-11 株式会社安川電機 キャンド・リニアモータ
JP2002010618A (ja) * 2000-06-16 2002-01-11 Canon Inc リニアモータ、及びこれを有するステージ装置、露光装置
TWI245482B (en) * 2000-11-21 2005-12-11 Yaskawa Electric Corp Linear motor
JP4689058B2 (ja) * 2001-02-16 2011-05-25 キヤノン株式会社 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法
JP4110504B2 (ja) * 2001-03-13 2008-07-02 株式会社安川電機 真空用モータ
JP4706119B2 (ja) * 2001-04-20 2011-06-22 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP3539493B2 (ja) 2001-04-09 2004-07-07 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2003151819A (ja) * 2001-11-15 2003-05-23 Japan Aviation Electronics Industry Ltd 防水コイルおよび防水性絶縁層の形成方法
CN2544097Y (zh) * 2002-06-13 2003-04-09 胡理想 圆筒型直线电机驱动抽油机
US6979920B2 (en) * 2004-01-30 2005-12-27 Nikon Corporation Circulation housing for a mover
JP4558524B2 (ja) * 2005-01-27 2010-10-06 住友重機械工業株式会社 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9515530B2 (en) 2012-11-21 2016-12-06 Industrial Technology Research Institute Stator module and magnetic field generating structure thereof

Also Published As

Publication number Publication date
KR100958484B1 (ko) 2010-05-17
CN1954477B (zh) 2010-06-16
JPWO2005112233A1 (ja) 2008-03-27
CN1954477A (zh) 2007-04-25
WO2005112233A1 (ja) 2005-11-24
EP1758231A4 (en) 2010-11-10
KR20070012489A (ko) 2007-01-25
EP1758231A1 (en) 2007-02-28
US7663270B2 (en) 2010-02-16
US20070252444A1 (en) 2007-11-01
TW200608673A (en) 2006-03-01
JP4636019B2 (ja) 2011-02-23
EP2360818A2 (en) 2011-08-24

Similar Documents

Publication Publication Date Title
BE2024C508I2 (zh)
BE2022C549I2 (zh)
BE2024C511I2 (zh)
BE2020C513I2 (zh)
BE2020C517I2 (zh)
BE2019C540I2 (zh)
BE2019C548I2 (zh)
BE2018C045I2 (zh)
BE2014C071I2 (zh)
BE2014C064I2 (zh)
BE2014C063I2 (zh)
BE2019C535I2 (zh)
BE2014C010I2 (zh)
BE2014C014I2 (zh)
BE2013C071I2 (zh)
BE2013C021I2 (zh)
BE2012C025I2 (zh)
TWI366327B (zh)
BR122015024347A2 (zh)
BRPI0508002A (zh)
BE2015C012I2 (zh)
BE2015C033I2 (zh)
BE2015C011I2 (zh)
BE2014C002I2 (zh)
BE2012C019I2 (zh)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees