TWI361738B - Device for switching over a laser beam and laser machining device - Google Patents

Device for switching over a laser beam and laser machining device Download PDF

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Publication number
TWI361738B
TWI361738B TW095104035A TW95104035A TWI361738B TW I361738 B TWI361738 B TW I361738B TW 095104035 A TW095104035 A TW 095104035A TW 95104035 A TW95104035 A TW 95104035A TW I361738 B TWI361738 B TW I361738B
Authority
TW
Taiwan
Prior art keywords
laser beam
output
laser
output laser
partial
Prior art date
Application number
TW095104035A
Other languages
English (en)
Chinese (zh)
Other versions
TW200700179A (en
Inventor
Ernst Affolter
Jean-Noel Fehr
Urban Georg Schnell
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of TW200700179A publication Critical patent/TW200700179A/zh
Application granted granted Critical
Publication of TWI361738B publication Critical patent/TWI361738B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lasers (AREA)
TW095104035A 2005-06-16 2006-02-07 Device for switching over a laser beam and laser machining device TWI361738B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027898A DE102005027898A1 (de) 2005-06-16 2005-06-16 Vorrichtung zum Umschalten eines Laserstrahls, Laserbearbeitungsvorrichtung

Publications (2)

Publication Number Publication Date
TW200700179A TW200700179A (en) 2007-01-01
TWI361738B true TWI361738B (en) 2012-04-11

Family

ID=37489672

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104035A TWI361738B (en) 2005-06-16 2006-02-07 Device for switching over a laser beam and laser machining device

Country Status (6)

Country Link
JP (1) JP4490933B2 (de)
KR (1) KR20060131606A (de)
CN (1) CN1881064B (de)
DE (1) DE102005027898A1 (de)
HK (1) HK1095638A1 (de)
TW (1) TWI361738B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007045454B4 (de) 2007-09-24 2013-04-25 Hellma Materials Gmbh & Co. Kg Pulsstretcher mit variablen Verzögerungsstrecken
KR100945134B1 (ko) 2008-02-29 2010-03-02 아이피지 포토닉스 코리아(주) 백업이 가능한 레이저 빔 스위치 장치
DE102012009547A1 (de) * 2012-05-12 2013-11-14 Hochschule Mittweida (Fh) Einrichtung zur schnellen Leistungsmodulation eines Laserstrahls
CN102932060B (zh) * 2012-10-08 2016-04-27 中国科学院西安光学精密机械研究所 一种高速光通信系统全光异或门实现方法
CN107052579A (zh) * 2017-03-29 2017-08-18 苏州镭缘激光科技有限公司 一种连续分时激光焊接装置
CN109131041A (zh) * 2017-06-19 2019-01-04 深圳市绎立锐光科技开发有限公司 一种车辆自适应照明装置及照明系统
JP6769424B2 (ja) * 2017-11-13 2020-10-14 株式会社安川電機 レーザ加工方法、コントローラおよびロボットシステム
US20220121082A1 (en) * 2019-03-06 2022-04-21 Orbotech Ltd. High-Speed Dynamic Beam Shaping
CN111843242A (zh) * 2020-08-24 2020-10-30 深圳市超越激光智能装备股份有限公司 双头激光切割机

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471300A (en) * 1994-04-12 1995-11-28 Northrop Grumman Corporation Apparatus and method for providing a feedback measurement in a laser system
JP2002250827A (ja) * 2001-02-26 2002-09-06 Furukawa Electric Co Ltd:The 光利得等化フィルター
JP2004271592A (ja) * 2003-03-05 2004-09-30 Toto Ltd マッハ・ツェンダー型光干渉計およびその作製方法

Also Published As

Publication number Publication date
HK1095638A1 (en) 2007-05-11
DE102005027898A1 (de) 2006-12-21
CN1881064B (zh) 2010-04-07
JP2006350292A (ja) 2006-12-28
CN1881064A (zh) 2006-12-20
TW200700179A (en) 2007-01-01
JP4490933B2 (ja) 2010-06-30
CN1881064C (de)
KR20060131606A (ko) 2006-12-20

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MM4A Annulment or lapse of patent due to non-payment of fees