TWI359953B - - Google Patents

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Publication number
TWI359953B
TWI359953B TW097111868A TW97111868A TWI359953B TW I359953 B TWI359953 B TW I359953B TW 097111868 A TW097111868 A TW 097111868A TW 97111868 A TW97111868 A TW 97111868A TW I359953 B TWI359953 B TW I359953B
Authority
TW
Taiwan
Prior art keywords
measurement target
distance
state
displacement
speed
Prior art date
Application number
TW097111868A
Other languages
English (en)
Chinese (zh)
Other versions
TW200912354A (en
Inventor
Tatsuya Ueno
Original Assignee
Yamatake Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamatake Corp filed Critical Yamatake Corp
Publication of TW200912354A publication Critical patent/TW200912354A/zh
Application granted granted Critical
Publication of TWI359953B publication Critical patent/TWI359953B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
TW097111868A 2007-04-03 2008-04-01 Distance/speed meter and distance/speed measurement method TW200912354A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007097244 2007-04-03
JP2008054699A JP5530069B2 (ja) 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法

Publications (2)

Publication Number Publication Date
TW200912354A TW200912354A (en) 2009-03-16
TWI359953B true TWI359953B (enExample) 2012-03-11

Family

ID=40013611

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097111868A TW200912354A (en) 2007-04-03 2008-04-01 Distance/speed meter and distance/speed measurement method

Country Status (5)

Country Link
US (1) US7990521B2 (enExample)
JP (1) JP5530069B2 (enExample)
KR (1) KR100946264B1 (enExample)
CN (1) CN101281031B (enExample)
TW (1) TW200912354A (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5530070B2 (ja) * 2007-06-06 2014-06-25 アズビル株式会社 距離・速度計および距離・速度計測方法
EP2128560B1 (de) * 2008-05-28 2015-07-01 Leica Geosystems AG Interferometrisches Distanzmessverfahren mit spektral trennbarem Doppelchirp und ebensolche Vorrichtung
US8063348B1 (en) * 2009-06-02 2011-11-22 The United States Of America As Represented By The Secretary Of The Army Dual color retro-reflection sensing device
WO2011084136A2 (en) * 2009-12-17 2011-07-14 Tom Van Esch Method and device for measuring the speed of a movable member relative a fixed member
JP5639922B2 (ja) 2011-02-23 2014-12-10 アズビル株式会社 速度計測装置および方法
EP2887008A1 (en) * 2013-12-17 2015-06-24 Universitat Politècnica de Catalunya A method of measuring a change in an optical path using differential laser self-mixing interferometry and a differential laser self-mixing interferometry measuring system
WO2016030227A1 (en) * 2014-08-29 2016-03-03 Asml Netherlands B.V. Method for controlling a distance between two objects, inspection apparatus and method
WO2016115260A1 (en) * 2015-01-13 2016-07-21 DSCG Solutions, Inc. A multiple beam range measurement process
JP6018662B2 (ja) * 2015-03-31 2016-11-02 アズビル株式会社 計数装置、物理量センサ、計数方法および物理量計測方法
US20180283851A1 (en) * 2015-09-01 2018-10-04 The University Of Tokyo Motion detection device and three-dimensional shape measurement device using same
US20180224548A1 (en) * 2016-04-26 2018-08-09 Hitachi ,Ltd. Distance Measuring Apparatus, Distance Measuring Method, and Shape Measuring Apparatus
CN107655446B (zh) * 2017-10-30 2023-09-22 成都捷测科技有限公司 激光测量装置
CN108303705A (zh) * 2017-12-27 2018-07-20 西安理工大学 Nd:YAG固体激光器自混合速度传感器及其测速方法
US11157113B2 (en) 2018-04-13 2021-10-26 Apple Inc. Self-mixing interference based sensors for characterizing touch input
EP3581962A1 (de) 2018-06-11 2019-12-18 Hexagon Technology Center GmbH Dual-beam fmcw distanzmessverfahren mit kompensation eines geschwindigkeitsabhängigen distanzmessfehlers
US11112235B2 (en) * 2019-04-05 2021-09-07 Apple Inc. Handling obstructions and transmission element contamination for self-mixing particulate matter sensors
US11774342B2 (en) 2019-04-05 2023-10-03 Apple Inc. Particulate matter sensors based on split beam self-mixing interferometry sensors
US11692809B2 (en) 2019-09-18 2023-07-04 Apple Inc. Self-mixing interferometry-based absolute distance measurement with distance reference
FR3109627B1 (fr) * 2020-04-27 2022-10-14 Michelin & Cie Systeme de generation de signal representatif du profil d’une surface en mouvement par rapport au systeme
US11874110B2 (en) 2020-09-25 2024-01-16 Apple Inc. Self-mixing interferometry device configured for non-reciprocal sensing
JP7610459B2 (ja) * 2021-04-02 2025-01-08 株式会社デンソー 測距装置
CN115729362A (zh) * 2021-08-31 2023-03-03 华为技术有限公司 一种输入检测装置及相关输入设备
WO2023104370A1 (en) * 2021-12-08 2023-06-15 Ams International Ag Optoelectronic device, self-mixing interferometer and method for operating a self-mixing interferometer
US12376763B2 (en) 2022-06-29 2025-08-05 Apple Inc. Non-contact respiration sensing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885807B2 (ja) * 1988-10-21 1999-04-26 東京航空計器株式会社 距離検出装置
JP3774751B2 (ja) * 1994-03-08 2006-05-17 国立大学法人静岡大学 半導体レーザデジタル振動計測装置
JP2954871B2 (ja) * 1996-03-25 1999-09-27 株式会社先進材料利用ガスジェネレータ研究所 光ファイバセンサ
FR2761782B1 (fr) * 1997-04-02 1999-05-07 Commissariat Energie Atomique Velocimetre et telemetre laser utilisant une detection coherente
CN100380105C (zh) * 2001-09-21 2008-04-09 株式会社山武 物理量测定方法及其装置
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
JP5172077B2 (ja) * 2005-05-06 2013-03-27 アズビル株式会社 距離・速度計および距離・速度計測方法
EP1953567A3 (en) * 2007-01-25 2010-09-22 Yamatake Corporation Counting device, distance meter, counting method, and distance measuring method
JP5530070B2 (ja) * 2007-06-06 2014-06-25 アズビル株式会社 距離・速度計および距離・速度計測方法

Also Published As

Publication number Publication date
CN101281031B (zh) 2011-07-20
KR20080090317A (ko) 2008-10-08
TW200912354A (en) 2009-03-16
US20100321668A1 (en) 2010-12-23
KR100946264B1 (ko) 2010-03-09
JP5530069B2 (ja) 2014-06-25
JP2008275594A (ja) 2008-11-13
CN101281031A (zh) 2008-10-08
US7990521B2 (en) 2011-08-02

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