JP5530069B2 - 距離・速度計および距離・速度計測方法 - Google Patents

距離・速度計および距離・速度計測方法 Download PDF

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Publication number
JP5530069B2
JP5530069B2 JP2008054699A JP2008054699A JP5530069B2 JP 5530069 B2 JP5530069 B2 JP 5530069B2 JP 2008054699 A JP2008054699 A JP 2008054699A JP 2008054699 A JP2008054699 A JP 2008054699A JP 5530069 B2 JP5530069 B2 JP 5530069B2
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JP
Japan
Prior art keywords
distance
speed
measurement object
semiconductor laser
counting
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Expired - Fee Related
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JP2008054699A
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English (en)
Japanese (ja)
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JP2008275594A (ja
Inventor
達也 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
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Azbil Corp
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Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP2008054699A priority Critical patent/JP5530069B2/ja
Priority to EP08006551A priority patent/EP1978377A3/en
Priority to CN2008100963225A priority patent/CN101281031B/zh
Priority to TW097111868A priority patent/TW200912354A/zh
Priority to US12/080,550 priority patent/US7990521B2/en
Priority to KR1020080030735A priority patent/KR100946264B1/ko
Publication of JP2008275594A publication Critical patent/JP2008275594A/ja
Application granted granted Critical
Publication of JP5530069B2 publication Critical patent/JP5530069B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2008054699A 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法 Expired - Fee Related JP5530069B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2008054699A JP5530069B2 (ja) 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法
EP08006551A EP1978377A3 (en) 2007-04-03 2008-03-31 Distance/speed meter and distance/speed measuring method
CN2008100963225A CN101281031B (zh) 2007-04-03 2008-04-01 距离/速度计和距离/速度测量方法
TW097111868A TW200912354A (en) 2007-04-03 2008-04-01 Distance/speed meter and distance/speed measurement method
US12/080,550 US7990521B2 (en) 2007-04-03 2008-04-02 Distance/speed meter and distance/speed measuring method
KR1020080030735A KR100946264B1 (ko) 2007-04-03 2008-04-02 거리/속도계 및 거리/속도 계측방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007097244 2007-04-03
JP2007097244 2007-04-03
JP2008054699A JP5530069B2 (ja) 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法

Publications (2)

Publication Number Publication Date
JP2008275594A JP2008275594A (ja) 2008-11-13
JP5530069B2 true JP5530069B2 (ja) 2014-06-25

Family

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Family Applications (1)

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JP2008054699A Expired - Fee Related JP5530069B2 (ja) 2007-04-03 2008-03-05 距離・速度計および距離・速度計測方法

Country Status (5)

Country Link
US (1) US7990521B2 (enExample)
JP (1) JP5530069B2 (enExample)
KR (1) KR100946264B1 (enExample)
CN (1) CN101281031B (enExample)
TW (1) TW200912354A (enExample)

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* Cited by examiner, † Cited by third party
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JP5530070B2 (ja) * 2007-06-06 2014-06-25 アズビル株式会社 距離・速度計および距離・速度計測方法
EP2128560B1 (de) * 2008-05-28 2015-07-01 Leica Geosystems AG Interferometrisches Distanzmessverfahren mit spektral trennbarem Doppelchirp und ebensolche Vorrichtung
US8063348B1 (en) * 2009-06-02 2011-11-22 The United States Of America As Represented By The Secretary Of The Army Dual color retro-reflection sensing device
WO2011084136A2 (en) * 2009-12-17 2011-07-14 Tom Van Esch Method and device for measuring the speed of a movable member relative a fixed member
JP5639922B2 (ja) 2011-02-23 2014-12-10 アズビル株式会社 速度計測装置および方法
EP2887008A1 (en) * 2013-12-17 2015-06-24 Universitat Politècnica de Catalunya A method of measuring a change in an optical path using differential laser self-mixing interferometry and a differential laser self-mixing interferometry measuring system
WO2016030227A1 (en) * 2014-08-29 2016-03-03 Asml Netherlands B.V. Method for controlling a distance between two objects, inspection apparatus and method
WO2016115260A1 (en) * 2015-01-13 2016-07-21 DSCG Solutions, Inc. A multiple beam range measurement process
JP6018662B2 (ja) * 2015-03-31 2016-11-02 アズビル株式会社 計数装置、物理量センサ、計数方法および物理量計測方法
US20180283851A1 (en) * 2015-09-01 2018-10-04 The University Of Tokyo Motion detection device and three-dimensional shape measurement device using same
US20180224548A1 (en) * 2016-04-26 2018-08-09 Hitachi ,Ltd. Distance Measuring Apparatus, Distance Measuring Method, and Shape Measuring Apparatus
CN107655446B (zh) * 2017-10-30 2023-09-22 成都捷测科技有限公司 激光测量装置
CN108303705A (zh) * 2017-12-27 2018-07-20 西安理工大学 Nd:YAG固体激光器自混合速度传感器及其测速方法
US11157113B2 (en) 2018-04-13 2021-10-26 Apple Inc. Self-mixing interference based sensors for characterizing touch input
EP3581962A1 (de) 2018-06-11 2019-12-18 Hexagon Technology Center GmbH Dual-beam fmcw distanzmessverfahren mit kompensation eines geschwindigkeitsabhängigen distanzmessfehlers
US11112235B2 (en) * 2019-04-05 2021-09-07 Apple Inc. Handling obstructions and transmission element contamination for self-mixing particulate matter sensors
US11774342B2 (en) 2019-04-05 2023-10-03 Apple Inc. Particulate matter sensors based on split beam self-mixing interferometry sensors
US11692809B2 (en) 2019-09-18 2023-07-04 Apple Inc. Self-mixing interferometry-based absolute distance measurement with distance reference
FR3109627B1 (fr) * 2020-04-27 2022-10-14 Michelin & Cie Systeme de generation de signal representatif du profil d’une surface en mouvement par rapport au systeme
US11874110B2 (en) 2020-09-25 2024-01-16 Apple Inc. Self-mixing interferometry device configured for non-reciprocal sensing
JP7610459B2 (ja) * 2021-04-02 2025-01-08 株式会社デンソー 測距装置
CN115729362A (zh) * 2021-08-31 2023-03-03 华为技术有限公司 一种输入检测装置及相关输入设备
WO2023104370A1 (en) * 2021-12-08 2023-06-15 Ams International Ag Optoelectronic device, self-mixing interferometer and method for operating a self-mixing interferometer
US12376763B2 (en) 2022-06-29 2025-08-05 Apple Inc. Non-contact respiration sensing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885807B2 (ja) * 1988-10-21 1999-04-26 東京航空計器株式会社 距離検出装置
JP3774751B2 (ja) * 1994-03-08 2006-05-17 国立大学法人静岡大学 半導体レーザデジタル振動計測装置
JP2954871B2 (ja) * 1996-03-25 1999-09-27 株式会社先進材料利用ガスジェネレータ研究所 光ファイバセンサ
FR2761782B1 (fr) * 1997-04-02 1999-05-07 Commissariat Energie Atomique Velocimetre et telemetre laser utilisant une detection coherente
CN100380105C (zh) * 2001-09-21 2008-04-09 株式会社山武 物理量测定方法及其装置
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
JP5172077B2 (ja) * 2005-05-06 2013-03-27 アズビル株式会社 距離・速度計および距離・速度計測方法
EP1953567A3 (en) * 2007-01-25 2010-09-22 Yamatake Corporation Counting device, distance meter, counting method, and distance measuring method
JP5530070B2 (ja) * 2007-06-06 2014-06-25 アズビル株式会社 距離・速度計および距離・速度計測方法

Also Published As

Publication number Publication date
TWI359953B (enExample) 2012-03-11
CN101281031B (zh) 2011-07-20
KR20080090317A (ko) 2008-10-08
TW200912354A (en) 2009-03-16
US20100321668A1 (en) 2010-12-23
KR100946264B1 (ko) 2010-03-09
JP2008275594A (ja) 2008-11-13
CN101281031A (zh) 2008-10-08
US7990521B2 (en) 2011-08-02

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