TWI354038B - - Google Patents

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Publication number
TWI354038B
TWI354038B TW96125824A TW96125824A TWI354038B TW I354038 B TWI354038 B TW I354038B TW 96125824 A TW96125824 A TW 96125824A TW 96125824 A TW96125824 A TW 96125824A TW I354038 B TWI354038 B TW I354038B
Authority
TW
Taiwan
Prior art keywords
gallium nitride
substrate
epitaxial
layer
based substrate
Prior art date
Application number
TW96125824A
Other languages
English (en)
Chinese (zh)
Other versions
TW200905024A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW96125824A priority Critical patent/TW200905024A/zh
Publication of TW200905024A publication Critical patent/TW200905024A/zh
Application granted granted Critical
Publication of TWI354038B publication Critical patent/TWI354038B/zh

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  • Crystals, And After-Treatments Of Crystals (AREA)
TW96125824A 2007-07-16 2007-07-16 Method for manufacturing gallium nitride-based substrate TW200905024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96125824A TW200905024A (en) 2007-07-16 2007-07-16 Method for manufacturing gallium nitride-based substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96125824A TW200905024A (en) 2007-07-16 2007-07-16 Method for manufacturing gallium nitride-based substrate

Publications (2)

Publication Number Publication Date
TW200905024A TW200905024A (en) 2009-02-01
TWI354038B true TWI354038B (ko) 2011-12-11

Family

ID=44722565

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96125824A TW200905024A (en) 2007-07-16 2007-07-16 Method for manufacturing gallium nitride-based substrate

Country Status (1)

Country Link
TW (1) TW200905024A (ko)

Also Published As

Publication number Publication date
TW200905024A (en) 2009-02-01

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