TWI353391B - - Google Patents

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Publication number
TWI353391B
TWI353391B TW96137299A TW96137299A TWI353391B TW I353391 B TWI353391 B TW I353391B TW 96137299 A TW96137299 A TW 96137299A TW 96137299 A TW96137299 A TW 96137299A TW I353391 B TWI353391 B TW I353391B
Authority
TW
Taiwan
Prior art keywords
workpiece
filament
diamond film
stage
temperature
Prior art date
Application number
TW96137299A
Other languages
English (en)
Chinese (zh)
Other versions
TW200916600A (en
Original Assignee
Atomic Energy Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Council filed Critical Atomic Energy Council
Priority to TW96137299A priority Critical patent/TW200916600A/zh
Publication of TW200916600A publication Critical patent/TW200916600A/zh
Application granted granted Critical
Publication of TWI353391B publication Critical patent/TWI353391B/zh

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  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW96137299A 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof TW200916600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

Publications (2)

Publication Number Publication Date
TW200916600A TW200916600A (en) 2009-04-16
TWI353391B true TWI353391B (enExample) 2011-12-01

Family

ID=44726083

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

Country Status (1)

Country Link
TW (1) TW200916600A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495746B (zh) * 2013-11-13 2015-08-11 Mingdao University 沉積系統

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7061049B2 (ja) * 2018-09-10 2022-04-27 株式会社神戸製鋼所 熱フィラメントｃｖｄ装置
CN111501022A (zh) * 2020-06-20 2020-08-07 西南石油大学 一种多组热丝反应设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495746B (zh) * 2013-11-13 2015-08-11 Mingdao University 沉積系統

Also Published As

Publication number Publication date
TW200916600A (en) 2009-04-16

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