TW200916600A - Hot filament diamond film deposition apparatus and method thereof - Google Patents

Hot filament diamond film deposition apparatus and method thereof Download PDF

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Publication number
TW200916600A
TW200916600A TW96137299A TW96137299A TW200916600A TW 200916600 A TW200916600 A TW 200916600A TW 96137299 A TW96137299 A TW 96137299A TW 96137299 A TW96137299 A TW 96137299A TW 200916600 A TW200916600 A TW 200916600A
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TW
Taiwan
Prior art keywords
workpiece
filament
diamond film
film deposition
temperature
Prior art date
Application number
TW96137299A
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English (en)
Chinese (zh)
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TWI353391B (enExample
Inventor
Jin-Yu Wu
Jiun-Han Wang
Ding-Guei Tsai
Ming-Ruei Tsai
Chi-Feng Ai
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Atomic Energy Council
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Priority to TW96137299A priority Critical patent/TW200916600A/zh
Publication of TW200916600A publication Critical patent/TW200916600A/zh
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Publication of TWI353391B publication Critical patent/TWI353391B/zh

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  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW96137299A 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof TW200916600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

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TW200916600A true TW200916600A (en) 2009-04-16
TWI353391B TWI353391B (enExample) 2011-12-01

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TW96137299A TW200916600A (en) 2007-10-04 2007-10-04 Hot filament diamond film deposition apparatus and method thereof

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TW (1) TW200916600A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111501022A (zh) * 2020-06-20 2020-08-07 西南石油大学 一种多组热丝反应设备
EP3828305A4 (en) * 2018-09-10 2022-05-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) HOT FILAMENT CVD DEVICE

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495746B (zh) * 2013-11-13 2015-08-11 Mingdao University 沉積系統

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3828305A4 (en) * 2018-09-10 2022-05-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) HOT FILAMENT CVD DEVICE
CN111501022A (zh) * 2020-06-20 2020-08-07 西南石油大学 一种多组热丝反应设备

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