TWI346641B - - Google Patents

Info

Publication number
TWI346641B
TWI346641B TW097107102A TW97107102A TWI346641B TW I346641 B TWI346641 B TW I346641B TW 097107102 A TW097107102 A TW 097107102A TW 97107102 A TW97107102 A TW 97107102A TW I346641 B TWI346641 B TW I346641B
Authority
TW
Taiwan
Application number
TW097107102A
Other versions
TW200844021A (en
Inventor
Miyamoto Akira
Sado Daisuke
Okamoto Akira
Matsuo Hideki
Nishimori Yasuhiro
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200844021A publication Critical patent/TW200844021A/zh
Application granted granted Critical
Publication of TWI346641B publication Critical patent/TWI346641B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW097107102A 2007-03-02 2008-02-29 Conveying device TW200844021A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/054065 WO2008120294A1 (ja) 2007-03-02 2007-03-02 搬送装置

Publications (2)

Publication Number Publication Date
TW200844021A TW200844021A (en) 2008-11-16
TWI346641B true TWI346641B (zh) 2011-08-11

Family

ID=39807885

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097107102A TW200844021A (en) 2007-03-02 2008-02-29 Conveying device

Country Status (5)

Country Link
US (1) US8203101B2 (zh)
JP (1) JPWO2008120294A1 (zh)
CN (1) CN101627467B (zh)
TW (1) TW200844021A (zh)
WO (1) WO2008120294A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449594B (zh) * 2011-10-31 2014-08-21 Hon Hai Prec Ind Co Ltd 搬運裝置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158759A (ja) * 2008-12-08 2010-07-22 Daihen Corp ワーク搬送装置
JP2011061149A (ja) * 2009-09-14 2011-03-24 Tokyo Electron Ltd 共通搬送装置及びこれを用いた処理システム
CN102554937B (zh) * 2010-12-20 2015-06-24 理想能源设备(上海)有限公司 搬运机械手及搬运装置
JP5083701B2 (ja) * 2011-01-31 2012-11-28 アキム株式会社 部品搬送装置
JP5403021B2 (ja) * 2011-09-08 2014-01-29 株式会社安川電機 ロボット、ロボットの設置方法および製造装置
KR102578140B1 (ko) 2011-09-16 2023-09-14 퍼시몬 테크놀로지스 코포레이션 로봇 구동부 및 무선 데이터 커플링
JP5959221B2 (ja) 2011-11-16 2016-08-02 日本電産サンキョー株式会社 産業用ロボット
WO2013073378A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
WO2013073379A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
JP5609856B2 (ja) * 2011-12-20 2014-10-22 株式会社安川電機 搬送ロボット
JP5609896B2 (ja) * 2012-01-13 2014-10-22 株式会社安川電機 搬送システム
JP6099916B2 (ja) * 2012-09-25 2017-03-22 株式会社ダイヘン ワーク搬送ロボット
JP6190692B2 (ja) * 2013-10-22 2017-08-30 日本電産サンキョー株式会社 産業用ロボット
KR20240046638A (ko) 2014-01-21 2024-04-09 퍼시몬 테크놀로지스 코포레이션 기판 이송 진공 플랫폼
JP6276090B2 (ja) * 2014-03-31 2018-02-07 株式会社ダイヘン 搬送装置、搬送システム
CN104210844B (zh) * 2014-09-10 2016-11-02 深圳市华星光电技术有限公司 玻璃基板传递系统及其机械手
JP6625391B2 (ja) * 2015-10-15 2019-12-25 豊田鉄工株式会社 加熱炉へのワーク搬出入装置
JP7394554B2 (ja) * 2019-08-07 2023-12-08 東京エレクトロン株式会社 基板処理システム
JP7479229B2 (ja) * 2020-07-14 2024-05-08 東京エレクトロン株式会社 真空搬送装置および基板処理システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9010833D0 (en) * 1990-05-15 1990-07-04 Electrotech Research Limited Workpiece support
JPH0655482A (ja) * 1992-08-05 1994-03-01 Hitachi Ltd 宇宙用ロボット関節
JPH06204316A (ja) 1992-12-28 1994-07-22 Mitsubishi Electric Corp 耐熱ロボットハンド
JP3252737B2 (ja) * 1997-01-29 2002-02-04 トヨタ自動車株式会社 リフロー式はんだ付方法及びワーク搬送治具
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット
JP4276534B2 (ja) 2003-12-26 2009-06-10 株式会社ダイヘン 搬送ロボット
US7073834B2 (en) * 2004-06-25 2006-07-11 Applied Materials, Inc. Multiple section end effector assembly
JP2006116630A (ja) * 2004-10-20 2006-05-11 Kawada Kogyo Kk 移動ロボット
JP4912889B2 (ja) * 2004-12-10 2012-04-11 株式会社アルバック 搬送ロボット及び搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449594B (zh) * 2011-10-31 2014-08-21 Hon Hai Prec Ind Co Ltd 搬運裝置

Also Published As

Publication number Publication date
CN101627467B (zh) 2011-04-27
CN101627467A (zh) 2010-01-13
TW200844021A (en) 2008-11-16
JPWO2008120294A1 (ja) 2010-07-15
US20100068025A1 (en) 2010-03-18
WO2008120294A1 (ja) 2008-10-09
US8203101B2 (en) 2012-06-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees