TWI346641B - - Google Patents
Info
- Publication number
- TWI346641B TWI346641B TW097107102A TW97107102A TWI346641B TW I346641 B TWI346641 B TW I346641B TW 097107102 A TW097107102 A TW 097107102A TW 97107102 A TW97107102 A TW 97107102A TW I346641 B TWI346641 B TW I346641B
- Authority
- TW
- Taiwan
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/054065 WO2008120294A1 (ja) | 2007-03-02 | 2007-03-02 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200844021A TW200844021A (en) | 2008-11-16 |
TWI346641B true TWI346641B (zh) | 2011-08-11 |
Family
ID=39807885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097107102A TW200844021A (en) | 2007-03-02 | 2008-02-29 | Conveying device |
Country Status (5)
Country | Link |
---|---|
US (1) | US8203101B2 (zh) |
JP (1) | JPWO2008120294A1 (zh) |
CN (1) | CN101627467B (zh) |
TW (1) | TW200844021A (zh) |
WO (1) | WO2008120294A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI449594B (zh) * | 2011-10-31 | 2014-08-21 | Hon Hai Prec Ind Co Ltd | 搬運裝置 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010158759A (ja) * | 2008-12-08 | 2010-07-22 | Daihen Corp | ワーク搬送装置 |
JP2011061149A (ja) * | 2009-09-14 | 2011-03-24 | Tokyo Electron Ltd | 共通搬送装置及びこれを用いた処理システム |
CN102554937B (zh) * | 2010-12-20 | 2015-06-24 | 理想能源设备(上海)有限公司 | 搬运机械手及搬运装置 |
JP5083701B2 (ja) * | 2011-01-31 | 2012-11-28 | アキム株式会社 | 部品搬送装置 |
JP5403021B2 (ja) * | 2011-09-08 | 2014-01-29 | 株式会社安川電機 | ロボット、ロボットの設置方法および製造装置 |
KR101829397B1 (ko) | 2011-09-16 | 2018-02-19 | 퍼시몬 테크놀로지스 코포레이션 | 낮은 가변성을 가진 로봇 |
WO2013073378A1 (ja) * | 2011-11-16 | 2013-05-23 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP5959221B2 (ja) | 2011-11-16 | 2016-08-02 | 日本電産サンキョー株式会社 | 産業用ロボット |
WO2013073379A1 (ja) * | 2011-11-16 | 2013-05-23 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP5609856B2 (ja) * | 2011-12-20 | 2014-10-22 | 株式会社安川電機 | 搬送ロボット |
JP5609896B2 (ja) * | 2012-01-13 | 2014-10-22 | 株式会社安川電機 | 搬送システム |
JP6099916B2 (ja) * | 2012-09-25 | 2017-03-22 | 株式会社ダイヘン | ワーク搬送ロボット |
JP6190692B2 (ja) * | 2013-10-22 | 2017-08-30 | 日本電産サンキョー株式会社 | 産業用ロボット |
WO2015112538A1 (en) | 2014-01-21 | 2015-07-30 | Persimmon Technologies, Corp. | Substrate transport vacuum platform |
JP6276090B2 (ja) * | 2014-03-31 | 2018-02-07 | 株式会社ダイヘン | 搬送装置、搬送システム |
CN104210844B (zh) * | 2014-09-10 | 2016-11-02 | 深圳市华星光电技术有限公司 | 玻璃基板传递系统及其机械手 |
JP6625391B2 (ja) | 2015-10-15 | 2019-12-25 | 豊田鉄工株式会社 | 加熱炉へのワーク搬出入装置 |
JP7394554B2 (ja) * | 2019-08-07 | 2023-12-08 | 東京エレクトロン株式会社 | 基板処理システム |
JP7479229B2 (ja) * | 2020-07-14 | 2024-05-08 | 東京エレクトロン株式会社 | 真空搬送装置および基板処理システム |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9010833D0 (en) * | 1990-05-15 | 1990-07-04 | Electrotech Research Limited | Workpiece support |
JPH0655482A (ja) * | 1992-08-05 | 1994-03-01 | Hitachi Ltd | 宇宙用ロボット関節 |
JPH06204316A (ja) * | 1992-12-28 | 1994-07-22 | Mitsubishi Electric Corp | 耐熱ロボットハンド |
JP3252737B2 (ja) * | 1997-01-29 | 2002-02-04 | トヨタ自動車株式会社 | リフロー式はんだ付方法及びワーク搬送治具 |
JP4291709B2 (ja) | 2003-04-16 | 2009-07-08 | 株式会社ダイヘン | 直線移動機構およびこれを用いた搬送ロボット |
JP4276534B2 (ja) | 2003-12-26 | 2009-06-10 | 株式会社ダイヘン | 搬送ロボット |
US7073834B2 (en) * | 2004-06-25 | 2006-07-11 | Applied Materials, Inc. | Multiple section end effector assembly |
JP2006116630A (ja) * | 2004-10-20 | 2006-05-11 | Kawada Kogyo Kk | 移動ロボット |
TWI400767B (zh) | 2004-12-10 | 2013-07-01 | Ulvac Inc | 搬運機械手臂及搬運裝置 |
-
2007
- 2007-03-02 JP JP2009507287A patent/JPWO2008120294A1/ja active Pending
- 2007-03-02 US US12/529,471 patent/US8203101B2/en active Active
- 2007-03-02 CN CN200780051937XA patent/CN101627467B/zh not_active Expired - Fee Related
- 2007-03-02 WO PCT/JP2007/054065 patent/WO2008120294A1/ja active Application Filing
-
2008
- 2008-02-29 TW TW097107102A patent/TW200844021A/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI449594B (zh) * | 2011-10-31 | 2014-08-21 | Hon Hai Prec Ind Co Ltd | 搬運裝置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008120294A1 (ja) | 2010-07-15 |
WO2008120294A1 (ja) | 2008-10-09 |
US8203101B2 (en) | 2012-06-19 |
CN101627467A (zh) | 2010-01-13 |
TW200844021A (en) | 2008-11-16 |
CN101627467B (zh) | 2011-04-27 |
US20100068025A1 (en) | 2010-03-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BRPI0815738A2 (zh) | ||
TWI346641B (zh) | ||
BRPI0819772A2 (zh) | ||
CN300727522S (zh) | 电连接器 | |
CN300729637S (zh) | 闹钟(翅膀天使) | |
CN300726266S (zh) | 墙纸(25a) | |
CN300726136S (zh) | 花边(牡丹花) | |
CN300897299S (zh) | 广告板(0714) | |
CN300894573S (zh) | 型材(t8a11) | |
CN300726028S (zh) | 鞋底 | |
CN300726740S (zh) | 断线钳手柄 | |
CN300727541S (zh) | 玛瑙开关(单按钮ⅰ) | |
CN300726361S (zh) | 床(hd1005a) | |
CN300726513S (zh) | 西裤架(f21) | |
CN300841902S (zh) | 吊灯(md71708-12a) | |
CN300726993S (zh) | 植物栽培塑料容器(节水型组合式 八分之五右型) | |
CN300727238S (zh) | 温控器 | |
CN300727263S (zh) | 空心银锁 | |
CN300729513S (zh) | 气动元件内衬(003) | |
CN300727287S (zh) | 饰品(折叠元宝) | |
CN300831909S (zh) | 喷雾器体(wbs-16l-a) | |
CN300727459S (zh) | 电源适配器(1) | |
CN300820673S (zh) | 衣柜门板(kd-j) | |
CN300819214S (zh) | 标贴(20) | |
CN300729219S (zh) | 垃圾铲(b) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |