TWI341390B - - Google Patents

Info

Publication number
TWI341390B
TWI341390B TW096145716A TW96145716A TWI341390B TW I341390 B TWI341390 B TW I341390B TW 096145716 A TW096145716 A TW 096145716A TW 96145716 A TW96145716 A TW 96145716A TW I341390 B TWI341390 B TW I341390B
Authority
TW
Taiwan
Application number
TW096145716A
Other languages
Chinese (zh)
Other versions
TW200923373A (en
Original Assignee
King Yuan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW96145716A priority Critical patent/TW200923373A/zh
Priority to JP2008013614A priority patent/JP2009133806A/ja
Publication of TW200923373A publication Critical patent/TW200923373A/zh
Application granted granted Critical
Publication of TWI341390B publication Critical patent/TWI341390B/zh

Links

TW96145716A 2007-11-30 2007-11-30 Calibration equipment for probe card TW200923373A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW96145716A TW200923373A (en) 2007-11-30 2007-11-30 Calibration equipment for probe card
JP2008013614A JP2009133806A (ja) 2007-11-30 2008-01-24 プローブカード校正設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96145716A TW200923373A (en) 2007-11-30 2007-11-30 Calibration equipment for probe card

Publications (2)

Publication Number Publication Date
TW200923373A TW200923373A (en) 2009-06-01
TWI341390B true TWI341390B (ja) 2011-05-01

Family

ID=40865808

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96145716A TW200923373A (en) 2007-11-30 2007-11-30 Calibration equipment for probe card

Country Status (2)

Country Link
JP (1) JP2009133806A (ja)
TW (1) TW200923373A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI790144B (zh) * 2022-03-18 2023-01-11 漢民測試系統股份有限公司 針位校正片治具以及用於探針卡之探針校正裝置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100992930B1 (ko) 2009-08-11 2010-11-09 주식회사 코디에스 프로브 블록 검사 장치 및 검사 방법
KR102070659B1 (ko) * 2018-09-28 2020-03-02 명지대학교 산학협력단 나노소자 손상 방지용 프로브스테이션의 광학 현미경 및 이를 이용한 나노소자의 전기적 특성 측정 방법
CN114019334B (zh) * 2020-07-16 2024-09-20 京元电子股份有限公司 具有水平调整模块的测试设备
KR102686790B1 (ko) * 2021-07-19 2024-07-22 이강택 프로브 카드 매뉴얼 얼라인 장치
TWI847310B (zh) * 2022-10-19 2024-07-01 南韓商Ｔ１系統股份有限公司 探針卡銷插入裝置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194631A (ja) * 1987-10-06 1989-04-13 Canon Inc ウエハプローバ
JPH083061Y2 (ja) * 1989-06-02 1996-01-29 株式会社村田製作所 圧電振動子
JPH0340352A (ja) * 1989-07-05 1991-02-21 Seiko Instr Inc 複合走査型トンネル顕微鏡
JPH0384945A (ja) * 1989-08-28 1991-04-10 Tokyo Electron Ltd 位置合せ方法およびそれを用いた検査装置
JPH06124983A (ja) * 1992-10-09 1994-05-06 Mitsubishi Electric Corp 半導体ウエハテスト装置及び半導体ウエハテスト方法
JPH11111787A (ja) * 1997-10-03 1999-04-23 Eejingu Tesuta Kaihatsu Kyodo Kumiai ウエハ用検査装置
US6710798B1 (en) * 1999-03-09 2004-03-23 Applied Precision Llc Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
JP4211299B2 (ja) * 2002-06-18 2009-01-21 株式会社ニコン 顕微鏡
JP2005234306A (ja) * 2004-02-20 2005-09-02 Olympus Corp 顕微鏡観察装置
KR100990028B1 (ko) * 2005-10-18 2010-10-26 지에스아이 그룹 코포레이션 레이저 프로세싱 방법, 정렬 방법 및 레이저 프로세싱 시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI790144B (zh) * 2022-03-18 2023-01-11 漢民測試系統股份有限公司 針位校正片治具以及用於探針卡之探針校正裝置

Also Published As

Publication number Publication date
JP2009133806A (ja) 2009-06-18
TW200923373A (en) 2009-06-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees